Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2014
03/12/2014CN102446763B MOS (Metal Oxide Semiconductor) transistor and manufacturing method thereof
03/12/2014CN102446755B Method for reducing particle defects after chemically mechanical polishing
03/12/2014CN102446733B Power device with high-voltage radio-frequency lateral diffusion structure and production method of power device
03/12/2014CN102437057B Method for reducing semiconductor device hot carrier injection damage
03/12/2014CN102437036B Gate etching method capable of enhancing performance of floating body dynamic random access memory unit
03/12/2014CN102437017B Method for preparing nano structure on surface of (111) silicon wafer
03/12/2014CN102436104B Pixel structure and method for manufacturing pixel structure
03/12/2014CN102428556B Integrated circuit device with deep trench isolation regions for all inter-well and intra-well isolation and with shared contact to junction between adjacent device diffusion regions and underlying floating well section
03/12/2014CN102427047B Wafer back cleaning device and wafer back cleaning method
03/12/2014CN102427041B Manufacturing method of schottky diode with high performance
03/12/2014CN102420179B Copper-interconnection production method for ultra-low dielectric constant film
03/12/2014CN102412184B Manufacture method of shallow trench isolation structure for adjusting stress of isolation oxide by ion implantation
03/12/2014CN102412175B Quartz boat
03/12/2014CN102412136B Chemical mechanical polishing apparatus for eliminating protuberance of metal surface and method thereof
03/12/2014CN102403264B Etching method for contact holes of metal grid MOS (metal oxide semiconductor) devices
03/12/2014CN102403243B Method for reducing UBM undercut in metal bump structures
03/12/2014CN102396056B Method for manufacturing semiconductor device
03/12/2014CN102394211B Control equipment of tungsten growth and method thereof
03/12/2014CN102388439B Modulated multi-frequency processing method
03/12/2014CN102386080B Method for forming metal gate
03/12/2014CN102385199B Liquid crystal display panel and production method thereof
03/12/2014CN102382613B Adhesive composition, circuit connecting material, connection structure of circuit member, and semiconductor device
03/12/2014CN102376715B Capacitance-free dynamic random access memory structure and preparation method thereof
03/12/2014CN102376552B Method for preventing grid electrode from damage in ion implantation process
03/12/2014CN102365750B Switchable junction with intrinsic diode
03/12/2014CN102362336B Semiconductor substrate, semiconductor device, and method of producing semiconductor substrate
03/12/2014CN102354684B Wiring structure forming method
03/12/2014CN102349159B Thin film transistor
03/12/2014CN102347269B Fuse structure and method for forming same
03/12/2014CN102344114B Preparation method for deep trench isolation channel
03/12/2014CN102344113B Method for etching device deep slot with metal sensitive interlayer
03/12/2014CN102342023B Semiconductor integrated circuit
03/12/2014CN102326229B Methods for depositing layers having reduced interfacial contamination
03/12/2014CN102315150B Movable ground ring for plasma processing chamber
03/12/2014CN102300809B Arrangement and method for measurement of temperature and of thickness growth of silicon rods in silicon deposition reactor
03/12/2014CN102290415B Semiconductor device and method of manufacturing same
03/12/2014CN102290327B Substrate processing apparatus
03/12/2014CN102275234B Automatic degumming method and device for multi-wire cutting of monocrystal/ polycrystalline silicon wafer
03/12/2014CN102270565B Substrate processing device
03/12/2014CN102265386B Method for cutting substrate and method for manufacturing electronic element
03/12/2014CN102265323B Display device
03/12/2014CN102263019B Method for manufacturing self-aligned trench power semiconductor structure
03/12/2014CN102254867B Flash memory manufacturing method
03/12/2014CN102243987B Substrate processing device and substrate processing system
03/12/2014CN102239552B RF device and method with trench under bond pad feature
03/12/2014CN102237412B 图像显示装置及其制造方法 An image display device and manufacturing method
03/12/2014CN102222636B Manufacturing method of shallow trench isolation
03/12/2014CN102203936B Semiconductor device and method for manufacturing same
03/12/2014CN102202994B 剥离装置 Peeling device
03/12/2014CN102201337B Method of polishing substrate comprising polysilicon and at least one of silicon oxide and silicon nitride
03/12/2014CN102187020B Indium phosphide substrate manufacturing method, epitaxial wafer manufacturing method, indium phosphide substrate, and epitaxial wafer
03/12/2014CN102171809B System and method for testing electrostatic chuck
03/12/2014CN102165579B 半导体器件 Semiconductor devices
03/12/2014CN102150267B Shared masks for X-lines and shared masks for Y-lines for fabrication of 3D memory arrays
03/12/2014CN102150254B Photonic milling using dynamic beam arrays
03/12/2014CN102148144B Method of manufacturing silicon carbide semiconductor device
03/12/2014CN102142392B Semiconductor device and manufacture method thereof
03/12/2014CN102138206B 半导体装置及其制造方法 Semiconductor device and manufacturing method
03/12/2014CN102130063B Semiconductor device and production method thereof
03/12/2014CN102122645B Integrated circuit structure, manufacturing method and using method thereof
03/12/2014CN102097475B Semiconductor device and method for fabricating semiconductor device
03/12/2014CN102097293B Cleaning machine table for semiconductor package products and cleaning process thereof
03/12/2014CN102096322B Lithographic pellicle
03/12/2014CN102057480B Dicing semiconductor wafer
03/12/2014CN102057479B Method and apparatus for UV curing with water vapor
03/12/2014CN102044498B Formation method for split gate storage device
03/12/2014CN102044469B 集成电路结构及其形成方法 Integrated circuit structure and method of forming
03/12/2014CN101964311B Method of forming integrated circuit and integrated circuit structure
03/12/2014CN101958255B Method for ultra thin wafer handling and processing and product of thin wafer handling and processing
03/12/2014CN101894791B Formation method of contact hole
03/12/2014CN101882578B Integral solid laser lift-off and cutting equipment
03/12/2014CN101853807B Method for dielectric material removal between conductive lines
03/12/2014CN101847600B Method for producing number of integrated semiconductor components
03/12/2014CN101842978B Power amplifier and power amplifier control method
03/12/2014CN101840931B High-voltage metal-dielectric-semiconductor device
03/12/2014CN101834203B Semiconductor device and method of manufacturing semiconductor device
03/12/2014CN101819941B Testing structure of integrity of semiconductor device gate oxide
03/12/2014CN101819918B Plasma processing apparatus
03/12/2014CN101802984B Methods for forming silicon oxide layer over substrate
03/12/2014CN101770986B Method for reducing gate leakage current and controlling threshold voltage shift and device
03/12/2014CN101770937B Resin cladding method and resin cladding device
03/12/2014CN101752316B Electronic device including trench and conductive structure therein and process of forming same
03/12/2014CN101740630B Semiconductor device and manufacturing method thereof
03/12/2014CN101740495B Method for manufacturing flexible semiconductor device
03/12/2014CN101740444B Conveying mechanism
03/12/2014CN101728247B Monocrystalline material with carrier life self-supporting thickness and method thereof
03/12/2014CN101714519B Method for manufacturing semiconductor device
03/12/2014CN101685264B Lighting optical device, exposure system and exposure method
03/12/2014CN101681830B Dry etching apparatus and dry etching method
03/12/2014CN101675138B CMP compositions containing soluble peroxometalate complex and methods of use thereof
03/12/2014CN101667558B Method of producing semiconductor device
03/12/2014CN101606240B CMOS device with dual-epi channels and self-aligned contacts
03/12/2014CN101599423B Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
03/12/2014CN101548133B Discharge lamp, cable for connection, light source device, and exposure device
03/12/2014CN101496144B Gas switching section including valves having different flow coefficients for gas distribution system
03/12/2014CN101443151B Eyespot exercitation method for thread welding and relevant semiconductor processing operation
03/12/2014CN101350334B Semiconductor assembly having housing
03/12/2014CN101254586B Polishing apparatus
03/11/2014US8670105 Immersion photolithography system and method using microchannel nozzles
03/11/2014US8670083 In-plane switching mode liquid crystal display device
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