Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2014
02/27/2014WO2014030687A1 A resist stripping solution and a resist strip process
02/27/2014WO2014030670A1 Substrate for semiconductor light emitting elements, semiconductor light emitting element, method for producing substrate for semiconductor light emitting elements, and method for manufacturing semiconductor light emitting element
02/27/2014WO2014030645A1 Light-source device and data processing method
02/27/2014WO2014030640A1 Substrate cleaning device and substrate processing device
02/27/2014WO2014030616A1 Cleaning method and cleaning system for semiconductor substrates
02/27/2014WO2014030604A1 Semiconductor device
02/27/2014WO2014030589A1 Semiconductor device
02/27/2014WO2014030579A1 Composition for forming resist underlayer film, which contains novolac resin having polynuclear phenol
02/27/2014WO2014030570A1 Polishing composition, method for manufacturing polishing composition, and method for manufacturing polishing composition liquid concentrate
02/27/2014WO2014030536A1 Anisotropic conductive member
02/27/2014WO2014030520A1 Workpiece cutting method
02/27/2014WO2014030519A1 Workpiece cutting method
02/27/2014WO2014030518A1 Method for cutting object to be processed
02/27/2014WO2014030517A1 Workpiece cutting method
02/27/2014WO2014030516A1 Nitride semiconductor element substrate and method for production thereof, and red light-emitting semiconductor element and method for production thereof
02/27/2014WO2014030457A1 Semiconductor device and method for manufacturing semiconductor device
02/27/2014WO2014030453A1 Method for manufacturing silicon carbide semiconductor device
02/27/2014WO2014030450A1 Method for manufacturing semiconductor device
02/27/2014WO2014030432A1 Substrate transportation device and substrate processing system
02/27/2014WO2014030431A1 Laser illumination device
02/27/2014WO2014030421A1 Stocker provided with purging functionality, stocker unit, and method for supplying cleaning gas
02/27/2014WO2014030414A1 FILM FORMING APPARATUS, METHOD OF FORMING LOW-PERMITTIVITY FILM, SiCO FILM, AND DAMASCENE INTERCONNECT STRUCTURE
02/27/2014WO2014030393A1 Resistance changing element, and method for manufacturing resistance changing element
02/27/2014WO2014030389A1 Semiconductor structure provided with germanium-oxide-containing film on top of germanium layer, and manufacturing method therefor
02/27/2014WO2014030371A1 Semiconductor structure provided with aluminum-nitride-oxide film on top of germanium layer, and manufacturing method therefor
02/27/2014WO2014030355A1 Wiring board
02/27/2014WO2014030309A1 Wiring substrate
02/27/2014WO2014030239A1 Thin film transistor and method for producing same
02/27/2014WO2014030228A1 Semiconductor device, electronic hardware, and method for producing semiconductor device
02/27/2014WO2014030224A1 Plasma treatment device and plasma treatment method
02/27/2014WO2014030185A1 Pixel array substrate and radiation detection device including same
02/27/2014WO2014030040A1 Methods of forming semiconductor structures and devices including graphene, and related structures and devices
02/27/2014WO2014029930A1 Flip-chip hybridisation of two microelectronic components using a uv anneal
02/27/2014WO2014029784A1 Method and device for controllably revealing structures buried in objects such as wafers
02/27/2014WO2014029703A1 Device and method for making dimensional measurements on multilayer objects such as wafers
02/27/2014WO2014029417A1 Packing for microelectronic components
02/27/2014WO2014029223A1 Reverse-conducting and heterogeneous structure field effect transistor and method of fabricating same
02/27/2014WO2014029187A1 Method of manufacturing soi-based sige-hbt transistor
02/27/2014WO2014029186A1 Method of manufacturing soi-based sige-hbt transistor
02/27/2014WO2014029176A1 Clamp for reducing bending in package and method therefor
02/27/2014WO2014029151A1 Semiconductor structure and manufacturing method therefor
02/27/2014WO2014029150A1 Semiconductor structure and manufacturing method therefor
02/27/2014WO2014029149A1 Semiconductor device and manufacturing method therefor
02/27/2014WO2014029136A1 Semiconductor device manufacturing method
02/27/2014WO2014028964A1 A method of forming a contact for a photovoltaic cell
02/27/2014WO2013189873A9 Method for producing semiconductor thin films on foreign substrates
02/27/2014WO2013119737A3 Processing flexible glass with a carrier
02/27/2014US20140058552 Device and method for controlling supply voltage/frequency of process variation
02/27/2014US20140057461 Method for manufacturing silicon carbide semiconductor device
02/27/2014US20140057460 Methods of thermally processing a substrate
02/27/2014US20140057459 Plasma processing method and plasma processing system
02/27/2014US20140057458 Method for forming silicon oxide film of semiconductor device
02/27/2014US20140057457 Non-melt thin-wafer laser thermal annealing methods
02/27/2014US20140057456 Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
02/27/2014US20140057455 Method of improving oxide growth rate of selective oxidation processes
02/27/2014US20140057454 Methods and apparatus for plasma-based deposition
02/27/2014US20140057452 Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
02/27/2014US20140057451 Method of preventing charge accumulation in manufacture of semiconductor device
02/27/2014US20140057450 Wafer Bonding System and Method for Bonding and Debonding Thereof
02/27/2014US20140057449 Coating method of an alignment film
02/27/2014US20140057448 Substrate conveying roller, thin film manufacturing device, and thin film manufacturing method
02/27/2014US20140057447 Semiconductor processing with dc assisted rf power for improved control
02/27/2014US20140057446 Method of silicon etch for trench sidewall smoothing
02/27/2014US20140057445 Plasma processing apparatus and plasma processing method
02/27/2014US20140057443 Pattern forming method
02/27/2014US20140057442 Semiconductor device with silicon-containing hard mask and method for fabricating the same
02/27/2014US20140057441 Method for forming pattern and method for fabricating semiconductor device
02/27/2014US20140057440 Methods of forming a semiconductor device
02/27/2014US20140057439 Method of Forming Interlayer Dielectrics
02/27/2014US20140057438 Polishing method of non-oxide single-crystal substrate
02/27/2014US20140057437 Rinsing agent for lithography, method for forming a resist pattern, and method for producing a semiconductor device
02/27/2014US20140057436 Three photomask sidewall image transfer method
02/27/2014US20140057435 Methods of forming a metal cap layer on copper-based conductive structures on an integrated circuit device
02/27/2014US20140057434 Through silicon via process
02/27/2014US20140057433 Pixel capacitors
02/27/2014US20140057432 Semiconductor device including copper wiring and via wiring having length longer than width thereof and method of manufacturing the same
02/27/2014US20140057430 Semiconductor device, fabricating method thereof and semiconductor package including the semiconductor device
02/27/2014US20140057429 Method of Forming a Step Pattern Structure
02/27/2014US20140057428 Buffer layer for sintering
02/27/2014US20140057427 Method for manufacturing semiconductor device
02/27/2014US20140057426 Non-volatile memory structure employing high-k gate dielectric and metal gate
02/27/2014US20140057425 Gate tunable tunnel diode
02/27/2014US20140057423 Method for transferring inp film
02/27/2014US20140057422 Method Of Forming A Memory Cell By Reducing Diffusion Of Dopants Under A Gate
02/27/2014US20140057421 Semiconductor device production method
02/27/2014US20140057420 Process for producing a polycrystalline layer
02/27/2014US20140057419 Method for forming low temperature polysilicon thin film
02/27/2014US20140057418 Method for manufacturing a semiconductor device
02/27/2014US20140057417 Method for Producing an Optoelectronic Semiconductor Chip
02/27/2014US20140057416 Semiconductive micro- and nano-wire array manufacturing
02/27/2014US20140057415 Methods of forming a layer of silicon on a layer of silicon/germanium
02/27/2014US20140057414 Mask residue removal for substrate dicing by laser and plasma etch
02/27/2014US20140057413 Methods for fabricating devices on semiconductor substrates
02/27/2014US20140057412 Method for fusing a laser fuse and method for processing a wafer
02/27/2014US20140057411 Dicing before grinding after coating
02/27/2014US20140057410 Method of fabricating a packaging substrate
02/27/2014US20140057409 Isolation Structure Profile for Gap Filing
02/27/2014US20140057404 Method of manufacturing semiconductor device
02/27/2014US20140057403 Method for fabricating semiconductor device
02/27/2014US20140057402 Methods of Forming Memory Arrays and Semiconductor Constructions