H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2006
11/14/2006	US7135732 Semiconductor device
11/14/2006	US7135731 Vertical DRAM and fabrication method thereof
11/14/2006	US7135729 Semiconductor memory device including multi-layer gate structure
11/14/2006	US7135728 Large-area nanoenabled macroelectronic substrates and uses therefor
11/14/2006	US7135726 Semiconductor memory and its production process
11/14/2006	US7135722 Wiring layout of semiconductor device and design method of the same
11/14/2006	US7135716 Gallium nitride-based semiconductor light-emitting device
11/14/2006	US7135715 Co-doping for fermi level control in semi-insulating Group III nitrides
11/14/2006	US7135714 Light emitting element, method of manufacturing the same, and semiconductor device having light emitting element
11/14/2006	US7135713 Light emitting diode and method for manufacturing the same
11/14/2006	US7135707 Semiconductor device having insulated gate electrode
11/14/2006	US7135705 High aperture LCD with insulating color filters overlapping bus lines on active substrate
11/14/2006	US7135702 Organic semiconductor structure, manufacturing method of the same, and organic semiconductor device
11/14/2006	US7135696 Phase change memory with damascene memory element
11/14/2006	US7135693 Method and apparatus for recycling gases used in a lithography tool
11/14/2006	US7135692 Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation
11/14/2006	US7135691 Reciprocating drive for scanning a workpiece through an ion beam
11/14/2006	US7135677 Beam guiding arrangement, imaging method, electron microscopy system and electron lithography system
11/14/2006	US7135659 Heat treatment method and heat treatment system
11/14/2006	US7135656 Apparatus and method for reducing stray light in substrate processing chambers
11/14/2006	US7135595 Photoresist composition
11/14/2006	US7135423 Methods for forming low resistivity, ultrashallow junctions with low damage
11/14/2006	US7135422 Methods of forming a multi-layered structure using an atomic layer deposition process and methods of forming a capacitor of an integrated circuit device
11/14/2006	US7135421 Atomic layer-deposited hafnium aluminum oxide
11/14/2006	US7135420 Semiconductor device and manufacturing method thereof
11/14/2006	US7135419 Line edge roughness reduction
11/14/2006	US7135418 Optimal operation of conformal silica deposition reactors
11/14/2006	US7135417 Method of forming a semiconductor device
11/14/2006	US7135416 Method of manufacturing semiconductor device
11/14/2006	US7135415 Insulated structure of a chip array component and fabrication method of the same
11/14/2006	US7135414 Method for producing multicrystalline silicon substrate for solar cells
11/14/2006	US7135413 Cleaning solution for removing damaged portion of ferroelectric layer and cleaning method using the same
11/14/2006	US7135412 Method to control a management system to control semiconductor manufacturing equipment
11/14/2006	US7135411 Method for etching mesa isolation in antimony-based compound semiconductor structures
11/14/2006	US7135410 Etch with ramping
11/14/2006	US7135409 Plasma etching method for semiconductor device
11/14/2006	US7135408 Metal barrier integrity via use of a novel two step PVD-ALD deposition procedure
11/14/2006	US7135407 Method of manufacturing a semiconductor device
11/14/2006	US7135406 Method for damascene formation using plug materials having varied etching rates
11/14/2006	US7135404 Method for applying metal features onto barrier layers using electrochemical deposition
11/14/2006	US7135403 Method for forming metal interconnection line in semiconductor device
11/14/2006	US7135402 Sealing pores of low-k dielectrics using CxHy
11/14/2006	US7135401 Methods of forming electrical connections for semiconductor constructions
11/14/2006	US7135400 Damascene process capable of avoiding via resist poisoning
11/14/2006	US7135399 Deposition method for wiring thin film
11/14/2006	US7135398 Reliable low-k interconnect structure with hybrid dielectric
11/14/2006	US7135397 Method and system for packaging ball grid arrays
11/14/2006	US7135396 Method of making a semiconductor structure
11/14/2006	US7135395 Bonding pad structure to minimize IMD cracking
11/14/2006	US7135394 Conductive layers and fabrication methods thereof
11/14/2006	US7135393 Semiconductor device manufacture method capable of supressing gate impurity penetration into channel
11/14/2006	US7135392 Thermal flux laser annealing for ion implantation of semiconductor P-N junctions
11/14/2006	US7135391 Polycrystalline SiGe junctions for advanced devices
11/14/2006	US7135390 Method of fabricating a semiconductor device incorporating crystallizing by laser irradiation
11/14/2006	US7135389 Irradiation method of laser beam
11/14/2006	US7135388 Method for fabricating single crystal silicon film
11/14/2006	US7135387 Method of manufacturing semiconductor element
11/14/2006	US7135386 Process for fabricating a semiconductor device
11/14/2006	US7135385 Semiconductor devices having a back surface protective coating
11/14/2006	US7135384 Semiconductor wafer dividing method and apparatus
11/14/2006	US7135383 Composite structure with high heat dissipation
11/14/2006	US7135382 In-wafer testing of integrated optical components in photonic integrated circuits (PICs)
11/14/2006	US7135381 Wet etching method of removing silicon from a substrate and method of forming trench isolation
11/14/2006	US7135380 Method for manufacturing semiconductor device
11/14/2006	US7135379 Isolation trench perimeter implant for threshold voltage control
11/14/2006	US7135378 Process for fabricating a semiconductor device having a plurality of encrusted semiconductor chips
11/14/2006	US7135376 Resistance dividing circuit and manufacturing method thereof
11/14/2006	US7135375 Varactors for CMOS and BiCMOS technologies
11/14/2006	US7135374 MOS transistor and fabrication method thereof
11/14/2006	US7135373 Reduction of channel hot carrier effects in transistor devices
11/14/2006	US7135372 Strained silicon device manufacturing method
11/14/2006	US7135371 Methods of fabricating semiconductor devices
11/14/2006	US7135370 Dielectric storage memory cell having high permittivity top dielectric and method therefor
11/14/2006	US7135369 Atomic layer deposited ZrAlxOy dielectric layers including Zr4AlO9
11/14/2006	US7135368 Semiconductor memory device with surface strap and method of fabricating the same
11/14/2006	US7135367 Manufacturing method of semiconductor device
11/14/2006	US7135366 Method for fabricating a lateral metal-insulator-metal capacitor
11/14/2006	US7135365 Method of manufacturing MOS transistors
11/14/2006	US7135364 Method of fabricating semiconductor integrated circuit
11/14/2006	US7135363 Semiconductor processing methods of forming integrated circuitry
11/14/2006	US7135362 Isolation layer for CMOS image sensor and fabrication method thereof
11/14/2006	US7135361 Method for fabricating transistor gate structures and gate dielectrics thereof
11/14/2006	US7135360 Liquid crystal display device and method of fabricating the same
11/14/2006	US7135359 Manufacturing methods for large area silicon carbide devices
11/14/2006	US7135358 Process for producing resin-sealed type electronic device
11/14/2006	US7135357 Process for making an organic electronic device having a roughened surface heat sink
11/14/2006	US7135356 Semiconductor device and method of producing a high contrast identification mark
11/14/2006	US7135355 Stencil mask design method and under bump metallurgy for C4 solder bump
11/14/2006	US7135354 Semiconductor device and method of manufacturing the same, semiconductor wafer, circuit board and electronic instrument
11/14/2006	US7135353 Apparatus for stacking semiconductor chips, method for manufacturing semiconductor package using the same and semiconductor package manufactured thereby
11/14/2006	US7135352 Method of fabricating a cover plate bonded over an encapsulated OLEDs
11/14/2006	US7135351 Method for controlling of thermal donor formation in high resistivity CZ silicon
11/14/2006	US7135350 Use of doped silicon dioxide in the fabrication of solar cells
11/14/2006	US7135349 Photodiode and method of fabricating the same
11/14/2006	US7135348 Semiconductor light emitting device and fabrication method thereof
11/14/2006	US7135347 Method for manufacturing nitride film including high-resistivity GaN layer and epitaxial substrate manufactured by the method
11/14/2006	US7135346 Structure for monitoring semiconductor polysilicon gate profile
11/14/2006	US7135345 Methods for processing semiconductor devices in a singulated form
11/14/2006	US7135344 Design-based monitoring
11/14/2006	US7135273 Pattern formation method

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