H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2006
11/08/2006	EP1719171A1 Semiconductor structure
11/08/2006	EP1719170A1 Vertical eeprom nrom memory devices
11/08/2006	EP1719169A1 Manufacturing method of semiconductor device, and ic card, ic tag, rfid, transponder, bill, securities, passport, electronic apparatus, bag, and garment
11/08/2006	EP1719168A1 Methods of fabricating interconnects for semiconductor components
11/08/2006	EP1719167A2 Substrate support system for reduced autodoping and backside deposition
11/08/2006	EP1719166A1 Method of making a small substrate compatible for processing
11/08/2006	EP1719165A1 Semiconductor device
11/08/2006	EP1719164A1 Semiconductor device and method of manufacturing a semiconductor device
11/08/2006	EP1719163A1 Replacement gate flow facilitating high yield and incorporation of etch stop layers and/or stressed films
11/08/2006	EP1719162A2 Method of making a semiconductor device using treated photoresist
11/08/2006	EP1719161A1 Polishing apparatus and substrate processing apparatus
11/08/2006	EP1719160A2 Dry etching process for compound semiconductors
11/08/2006	EP1719159A2 Polymer via etching process
11/08/2006	EP1719158A1 Gate electrode dopant activation method for semiconductor manufacturing
11/08/2006	EP1719157A2 Device manufacturing method and substrate comprising radiation sensitive material
11/08/2006	EP1719156A1 Device for singulating and bonding semiconductor chips, and singulating and bonding method
11/08/2006	EP1719155A2 Semiconductor device and method using nanotube contacts
11/08/2006	EP1719154A2 Method and apparatus for making a mens scanner
11/08/2006	EP1719153A2 Purging of a wafer conveyance container
11/08/2006	EP1719012A2 Mems scanning system with improved performance
11/08/2006	EP1719011A2 Method and apparatus for scanning a beam of light
11/08/2006	EP1719010A2 High performance mems scanner
11/08/2006	EP1718909A1 Backside rapid thermal processing of patterned wafers
11/08/2006	EP1718787A2 Apparatus adapted for membrane mediated electropolishing
11/08/2006	EP1718562A2 Novel nanostructures and method for selective preparation
11/08/2006	EP1718420A1 Substrate processing apparatus and method
11/08/2006	EP1618601A4 Methods and apparatus for patterned deposition of nanostructure-containing materials by self-assembly and related articles
11/08/2006	EP1464077B1 Method for producing a capacitor
11/08/2006	EP1421610B1 Slurry composition for use in chemical mechanical polishing of metal wiring
11/08/2006	EP1299489B1 Cmp polishing composition for metal
11/08/2006	EP1279208B1 Monolithically integrated switching circuit for regulating the luminous power of a laser diode
11/08/2006	EP1203396B1 Method for etching a substrate using an inductively coupled plasma
11/08/2006	EP1186039B1 Security method and device for a chip stack with a multidimensional structure
11/08/2006	EP1101247B1 Method of producing an interconnect structure for an integrated circuit
11/08/2006	EP0796355A4 Apparatus for generating plasma by plasma-guided microwave power
11/08/2006	CN2836237Y Novel crystalline orientation alignment device for bonding
11/08/2006	CN1860619A Light emitting diode with porous sic substrate and method for fabricating
11/08/2006	CN1860609A Bistable resistance value acquisition device, manufacturing method thereof, metal oxide thin film, and manufacturing method thereof
11/08/2006	CN1860608A Semiconductor device and method for manufacturing semiconductor device
11/08/2006	CN1860605A Fabrication method
11/08/2006	CN1860604A Indirect bonding with disappearance of the bonding layer
11/08/2006	CN1860603A Process for manufacturing a multilayer structure made from semiconducting materials
11/08/2006	CN1860602A High performance strained cmos devices
11/08/2006	CN1860601A Technique for evaluating a fabrication of a semiconductor component and wafer
11/08/2006	CN1860600A Method and apparatus for monitoring a material processing system
11/08/2006	CN1860599A Fabrication of semiconductor drives
11/08/2006	CN1860598A Electrode pad on conductive semiconductor substrate
11/08/2006	CN1860597A 配线结构的形成方法以及半导体装置 The method of forming a wiring structure and a semiconductor device
11/08/2006	CN1860596A Method for producing material of electronic device
11/08/2006	CN1860595A Method of plasma etching low-k dielectric materials
11/08/2006	CN1860594A 等离子处理系统 Plasma processing system
11/08/2006	CN1860593A Method and device for flattening surface of solid
11/08/2006	CN1860592A Polishing composition and polishing method
11/08/2006	CN1860591A Precision polysilicon resistor process
11/08/2006	CN1860590A Method of room temperature covalent bonding
11/08/2006	CN1860589A A semiconductor device having a nickel/cobalt silicide region formed in a silicon region
11/08/2006	CN1860588A Method for depositing metal layers using sequential flow deposition
11/08/2006	CN1860587A Method of forming a metal layer using an intermittent precursor gas flow process
11/08/2006	CN1860586A Method for the production of a hard mask and hard mask arrangement
11/08/2006	CN1860585A Liquid immersion type lens system and projection aligner, device production method
11/08/2006	CN1860584A Eddy current system for in-situ profile measurement
11/08/2006	CN1860441A Efficient high performance data operation element for use in a reconfigurable logic environment
11/08/2006	CN1860440A System and method for using first-principles simulation in a semiconductor manufacturing process
11/08/2006	CN1860414A Positive photosensitive resin composition, method for forming pattern, and electronic component
11/08/2006	CN1860381A Ion beam measuring method and ion implanting apparatus
11/08/2006	CN1860252A Gas distribution showerhead
11/08/2006	CN1860251A Methods of forming a phosphorus doped silicon dioxide comprising layer, and methods of forming trench isolation in the fabrication of integrated circuitry
11/08/2006	CN1860250A Aluminum base target and process for producing the same
11/08/2006	CN1860198A Non-polymeric organic particles for chemical mechanical planarization
11/08/2006	CN1858923A Organic light emitting display and method of fabricating the same
11/08/2006	CN1858922A Method for preparing phase shift storage by silicon wet etching and keying process
11/08/2006	CN1858915A Thin film transistor and its forming method
11/08/2006	CN1858914A Cmos-bildsensoren und verfahren zum herstellen derselben
11/08/2006	CN1858913A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
11/08/2006	CN1858912A Image sensors for reducing flicker and methods of manufacturing the same
11/08/2006	CN1858911A Tft array panel, liquid crystal display including same, and method of manufacturing tft array panel
11/08/2006	CN1858910A Anti-fuse once-programmable nonvolatile memory unit and method for manufacture and programming thereof
11/08/2006	CN1858907A Semiconductor device and fabrication method thereof
11/08/2006	CN1858904A Oblique recess for interconnecting conductors in a semiconductor device
11/08/2006	CN1858903A Memory array and method for manufacture thereof
11/08/2006	CN1858901A Method of manufacturing a flash memory device
11/08/2006	CN1858900A Method of fabricating a transistor having a triple channel in a memory device
11/08/2006	CN1858899A Method of forming a semiconductor device and structure therefor
11/08/2006	CN1858898A Method for producing shallow trench isolation structure and semiconductor structure
11/08/2006	CN1858897A Luminous heat treatment device
11/08/2006	CN1858896A Pressure equalizing device for micro nano transfer printing
11/08/2006	CN1858895A Non-uniform ion implantation apparatus and method thereof
11/08/2006	CN1858665A Method and system for monitoring the processing tools in semiconductor production device
11/08/2006	CN1858657A Lithographic apparatus and device manufacturing method
11/08/2006	CN1858656A Lithographic apparatus and device manufacturing method
11/08/2006	CN1858655A Lithographic apparatus and device manufacturing method
11/08/2006	CN1858654A Substrate processing apparatus
11/08/2006	CN1858653A Air float support base for regulating air diaphragm two-way rigidity
11/08/2006	CN1858649A Developing method and device
11/08/2006	CN1858639A Liquid crystal display device and method for fabricating the same
11/08/2006	CN1858596A Chip general detector and its structure method
11/08/2006	CN1858130A Polishing liquid for tungsten plug in large scale integrated circuit multilayer wiring
11/08/2006	CN1857920A Pattern forming apparatus and method of manufacturing pattern forming apparatus
11/08/2006	CN1857794A Surface coating device and soaking paint method for chip elements
11/08/2006	CN1857793A Surface painting device and spraying paint method for chip elements

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