H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2006
11/14/2006	US7135272 Method for forming a photoresist pattern and method for forming a capacitor using the same
11/14/2006	US7135270 Resist polymer, resist composition and patterning process
11/14/2006	US7135259 Scatterometric method of monitoring hot plate temperature and facilitating critical dimension control
11/14/2006	US7135256 Forming a layer of a chemically amplified photoresist over a substrate;baking the photoresist, then forming a non-conductive, DUV transmissive, environmental barrier layer; shelf life of one week or greater
11/14/2006	US7135224 Adhesive tape
11/14/2006	US7135207 Introducing reactant containing a metal-organic compound into reaction chamber including a substrate; introducing reactant containing alcohol; generating metal oxide by a chemical reaction between reactants which is deposited as thin film
11/14/2006	US7135204 Method of manufacturing a wiring board
11/14/2006	US7135124 Method for thinning wafers that have contact bumps
11/14/2006	US7135123 Method and system for integrated circuit backside navigation
11/14/2006	US7135121 Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus
11/14/2006	US7135098 Copper interconnect seed layer treatment methods and apparatuses for treating the same
11/14/2006	US7135089 For generating uniform, low-electron-temperature plasma under a low pressure; comprises a gas supply device, an exhaust device, a high-frequency power source, an electrode, a dielectric, a multiple-vortex-type conductor and a second conductor
11/14/2006	US7135081 Adhesive tape applying method and apparatus
11/14/2006	US7135073 Method and system for semiconductor crystal production with temperature management
11/14/2006	US7135070 Monolithic stacked/layered crystal-structure-processed mechanical, and combined mechanical and electrical, devices and methods and systems for making
11/14/2006	US7135064 Dissolving polyalkoxysilane in alcohol, admixing solution with basic compound and water to hydrolyze polyalkoxysilane to give polysiloxane, replacing alcohol solvent with aprotic polar organic solvent to form coating solution
11/14/2006	US7134952 Polishing cloth
11/14/2006	US7134947 Chemical mechanical polishing system
11/14/2006	US7134943 Wafer processing method
11/14/2006	US7134942 Wafer processing method
11/14/2006	US7134941 Methods for residue removal and corrosion prevention in a post-metal etch process
11/14/2006	US7134933 Wafer thickness control during backside grind
11/14/2006	US7134879 Anisotropic conductive material body, display apparatus, method for producing the display apparatus, and conductive member
11/14/2006	US7134827 Reduced footprint tool for automated processing of microelectronic substrates
11/14/2006	US7134826 Substrate transfer apparatus, substrate processing apparatus and holding table
11/14/2006	US7134825 Device for handling substrates inside and outside a clean room
11/14/2006	US7134591 Method of and apparatus for testing a wire bond connection
11/14/2006	US7134589 Wire bonder with a downholder for pressing the fingers of a system carrier onto a heating plate
11/14/2006	US7134582 Substrate and method of separating components from a substrate
11/14/2006	US7134390 Method and stencil for extruding material on a substrate
11/14/2006	US7134311 Device and method for fabricating lead frame by press forming
11/14/2006	US7134222 Transfer apparatus
11/14/2006	US7134199 Fluxless bumping process
11/14/2006	US7134198 Method for manufacturing electric element built-in module with sealed electric element
11/14/2006	US7134197 Plastic lead frames utilizing reel-to-reel processing
11/14/2006	US7134196 Electronic device and manufacturing same
11/14/2006	US7134195 Method of production of multilayer circuit board with built-in semiconductor chip
11/14/2006	US7134179 Process of forming a capacitative audio transducer
11/09/2006	WO2006119380A2 Silicon wafer having through-wafer vias
11/09/2006	WO2006119319A1 Low overhead closed loop control system
11/09/2006	WO2006119023A1 Semiconductor structures having via structutes between planar frontside and backside surfaces and methods of fabricating the same
11/09/2006	WO2006118994A2 Multi-chip module and method of manufacture
11/09/2006	WO2006118851A2 Method of making scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s)
11/09/2006	WO2006118799A1 Methodology for deposition of doped seg for raised source/drain regions
11/09/2006	WO2006118787A1 A semiconductor device having a gate dielectric of different blocking characteristics
11/09/2006	WO2006118786A1 Technique for forming a contact insulation layer with enhanced stress transfer efficiency
11/09/2006	WO2006118673A2 Method of forming shallow trench isolation structures in the logic and memory areas
11/09/2006	WO2006118657A2 Schottky device and method of forming
11/09/2006	WO2006118652A2 Method for fabricating a mim capacitor high-k dielectric for increased capacitance density and related structure
11/09/2006	WO2006118466A1 A non-volatile memory device
11/09/2006	WO2006118454A1 Method and device for separating products with a controlled cut edge, and separated product
11/09/2006	WO2006118421A1 Method of fabricating bonding wire and apparatus for strengthening bonding wire
11/09/2006	WO2006118334A1 Curable silicone composition and cured product therefrom
11/09/2006	WO2006118312A1 Laser irradiation apparatus and laser irradiation method
11/09/2006	WO2006118271A1 Etching method, method for producing dielectric film of low dielectric constant, method for producing porous member, etching system and thin film forming equipment
11/09/2006	WO2006118258A1 Exposure method, exposure apparatus and device manufacturing method
11/09/2006	WO2006118215A1 Substrate treating device and semiconductor device manufacturing method
11/09/2006	WO2006118189A1 Exposure method, exposure apparatus, and device producing method
11/09/2006	WO2006118161A1 Substrate treating apparatus and electrode
11/09/2006	WO2006118152A1 Visual inspection apparatus, visual inspection method and periphery inspection unit attachable to visual inspection apparatus
11/09/2006	WO2006118108A1 Exposure method, exposure apparatus, method for manufacturing device, and film evaluation method
11/09/2006	WO2006118098A1 Semiconductor device and its manufacturing method, semiconductor manufacturing mask, and optical proximity processing method
11/09/2006	WO2006118066A1 Electronic device
11/09/2006	WO2006118042A1 Surface wave excitation plasma generator and surface wave excitation plasma processing system
11/09/2006	WO2006118033A1 Sheet-like underfill material and semiconductor device manufacturing method
11/09/2006	WO2006118019A1 Mounting method by image recognition
11/09/2006	WO2006118018A1 Flip chip mounting shift inspecting method and mounting apparatus
11/09/2006	WO2006118016A1 Bonding apparatus and bonding system provided with same
11/09/2006	WO2006117975A1 Solar cell manufacturing method and solar cell
11/09/2006	WO2006117954A1 Al-Ni-B ALLOY WIRING MATERIAL AND ELEMENT STRUCTURE USING THE SAME
11/09/2006	WO2006117953A1 Article for reducing metal contamination
11/09/2006	WO2006117912A1 Thin film capacitor and method for manufacturing same
11/09/2006	WO2006117909A1 Pattern thin film, method for manufacturing semiconductor element and circuit board, resist material, semiconductor element and circuit board
11/09/2006	WO2006117900A1 Process for producing semiconductor device and semiconductor device
11/09/2006	WO2006117871A1 Electrostatic chuck apparatus
11/09/2006	WO2006117854A1 Semiconductor device and method for manufacturing same
11/09/2006	WO2006117853A1 Semiconductor device, data read out method and semiconductor device manufacturing method
11/09/2006	WO2006117852A1 Semiconductor device and method for manufacturing same
11/09/2006	WO2006117851A1 Semiconducteur device and method for manufacturing same
11/09/2006	WO2006117840A1 Device and method for teaching work delivery position to robot
11/09/2006	WO2006117734A1 Method of manufacturing a semiconductor device and semiconductor device obtained by means of said method
11/09/2006	WO2006117712A1 Method of fabricating a bipolar transistor
11/09/2006	WO2006117621A1 Diamond transistor and method of manufacture thereof
11/09/2006	WO2006117238A1 Implantation process in semiconductor fabrication
11/09/2006	WO2006116902A1 A metal oxide semiconductor field effect transistor having isolation structure and methods of manufacturing the same
11/09/2006	WO2006093817A3 Substrate stiffness method and resulting devices
11/09/2006	WO2006083778A3 Selective plasma re-oxidation process using pulsed rf source power
11/09/2006	WO2006074312A3 Dual flat non-leaded semiconductor package
11/09/2006	WO2006070304A3 Soi device
11/09/2006	WO2006064282B1 A method of ion implantation to reduce transient enhanced diffusion
11/09/2006	WO2006063044A3 Method and device for wafer scale packaging of optical devices using a scribe and break process
11/09/2006	WO2006057706A3 Method for deposition of metal layers from metal carbonyl precursors
11/09/2006	WO2006056643A3 Method for manufacturing an electronics module
11/09/2006	WO2006039038A3 Method for forming a semiconductor device having a strained channel and a heterojunction source/drain
11/09/2006	WO2006029374A3 System and method for processing a wafer including stop-on-aluminum processing
11/09/2006	WO2006029250A3 Process and fabrication methods for emitter wrap through back contact solar cells
11/09/2006	WO2006026974A3 Dmos-transistor and corresponding production method
11/09/2006	WO2006018387A3 Gripper unit, mounting head, and method for fitting substrates with electrical components
11/09/2006	WO2006009783A3 Low dielectric constant zinc oxide
11/09/2006	WO2005122224A3 Improved dual damascene integration structures and method of forming improved dual damascene integration structures

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