| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 11/21/2006 | US7139110 Micro-structure gap control technology and structure formed therefrom |
| 11/21/2006 | US7139083 Methods and systems for determining a composition and a thickness of a specimen |
| 11/21/2006 | US7139065 Stage base, stage apparatus, exposure apparatus and device manufacturing method |
| 11/21/2006 | US7139060 Method for mounting a driver IC chip and a FPC board/TCP/COF device using a single anisotropic conductive film |
| 11/21/2006 | US7139045 Thin film transistor array panel for a liquid crystal display and a method for manufacturing the same |
| 11/21/2006 | US7139043 Thin film transistor array panel |
| 11/21/2006 | US7138987 Protection circuit for input and output of liquid crystal display |
| 11/21/2006 | US7138851 Semiconductor integrated circuit apparatus |
| 11/21/2006 | US7138846 Field effect transistor switch circuit |
| 11/21/2006 | US7138832 Nanotube-based switching elements and logic circuits |
| 11/21/2006 | US7138817 Method and apparatus for testing defective portion of semiconductor device |
| 11/21/2006 | US7138814 Integrated circuit with controllable test access to internal analog signal pads of an area array |
| 11/21/2006 | US7138813 Probe station thermal chuck with shielding for capacitive current |
| 11/21/2006 | US7138805 Device and method for inspection |
| 11/21/2006 | US7138726 Protective interleaf for stacked wafer shipping |
| 11/21/2006 | US7138725 Semiconductor device |
| 11/21/2006 | US7138723 Deformable semiconductor device |
| 11/21/2006 | US7138721 Memory module |
| 11/21/2006 | US7138719 Trench interconnect structure and formation method |
| 11/21/2006 | US7138718 Multilevel interconnect structure with low-k dielectric |
| 11/21/2006 | US7138715 Interconnect, interconnect forming method, thin film transistor, and display device |
| 11/21/2006 | US7138706 Semiconductor device and method for manufacturing the same |
| 11/21/2006 | US7138704 Concealable chip leadframe unit structure |
| 11/21/2006 | US7138700 Semiconductor device with guard ring for preventing water from entering circuit region from outside |
| 11/21/2006 | US7138695 Image sensor module and method for fabricating the same |
| 11/21/2006 | US7138693 Barrier layers for microelectromechanical systems |
| 11/21/2006 | US7138692 Semiconductor device |
| 11/21/2006 | US7138691 Selective nitridation of gate oxides |
| 11/21/2006 | US7138690 Shielding structure for use in a metal-oxide-semiconductor device |
| 11/21/2006 | US7138689 Semiconductor device and manufacturing method thereof |
| 11/21/2006 | US7138688 Doping method and semiconductor device fabricated using the method |
| 11/21/2006 | US7138685 Vertical MOSFET SRAM cell |
| 11/21/2006 | US7138684 Semiconductor memory device including an SOI substrate |
| 11/21/2006 | US7138683 Self-aligned SOI with different crystal orientation using WAFER bonding and SIMOX processes |
| 11/21/2006 | US7138682 Organic thin-film transistor and method of manufacturing the same |
| 11/21/2006 | US7138679 Semiconductor memory device |
| 11/21/2006 | US7138678 Enhanced on-chip decoupling capacitors and method of making same |
| 11/21/2006 | US7138677 Capacitor arrangement with capacitors arranged one in the other |
| 11/21/2006 | US7138676 Semiconductor device and manufacturing the same having multiple trenches formed in plural element regions or trench groups |
| 11/21/2006 | US7138675 Semiconductor devices having storage nodes |
| 11/21/2006 | US7138674 Semiconductor memory device |
| 11/21/2006 | US7138672 Apparatus and method for making a tensile diaphragm with an insert |
| 11/21/2006 | US7138670 Semiconductor device for use in a solid state imaging device |
| 11/21/2006 | US7138669 Silicon germanium heterojunction bipolar transistor with carbon incorporation |
| 11/21/2006 | US7138668 Heterojunction diode with reduced leakage current |
| 11/21/2006 | US7138665 Light emitting element, method of manufacturing the same, and semiconductor device having light emitting element |
| 11/21/2006 | US7138664 Semiconductor device having a light emitting element |
| 11/21/2006 | US7138658 Semiconductor device and method of manufacturing the same |
| 11/21/2006 | US7138657 Semiconductor device having two insulating films provided over a substrate |
| 11/21/2006 | US7138655 Thin film transistor array panel including symmetrically aligned thin film transistors and manufacturing method thereof |
| 11/21/2006 | US7138654 Chemical-mechanical polishing proximity correction method and correction pattern thereof |
| 11/21/2006 | US7138653 Structures for stabilizing semiconductor devices relative to test substrates and methods for fabricating the stabilizers |
| 11/21/2006 | US7138651 Logic apparatus and logic circuit |
| 11/21/2006 | US7138650 Semiconductor substrate, field-effect transistor, and their manufacturing method of the same |
| 11/21/2006 | US7138649 Dual-channel CMOS transistors with differentially strained channels |
| 11/21/2006 | US7138608 Sealed line structure for use in process chamber |
| 11/21/2006 | US7138607 Determining method of thermal processing condition |
| 11/21/2006 | US7138606 Wafer processing method |
| 11/21/2006 | US7138550 Bridged carbocyclic compounds and methods of making and using same |
| 11/21/2006 | US7138364 Cleaning gas and etching gas |
| 11/21/2006 | US7138344 Method for minimizing slip line faults on a semiconductor wafer surface |
| 11/21/2006 | US7138343 Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber |
| 11/21/2006 | US7138342 Combined chemical cleaning and etching of parts made of aluminum or alloys by contacting with a solution of phosphoric acid, hydrogen fluoride, sulfamic acid, glycol ether, and water; periodically restoring etching rate by adding HF; adding sufficient sulfamic acid to prevent the formation of scale |
| 11/21/2006 | US7138341 Process for making a memory structure |
| 11/21/2006 | US7138340 Method for fabricating semiconductor device without damaging hard mask during contact formation process |
| 11/21/2006 | US7138339 Method of manufacturing semiconductor device including etching a conductive layer by using a gas including SiCl4 and NF3 |
| 11/21/2006 | US7138338 Method and composite hard mask for forming deep trenches in a semiconductor substrate |
| 11/21/2006 | US7138337 Methods of forming tungsten contacts by chemical vapor deposition |
| 11/21/2006 | US7138336 Plasma enhanced atomic layer deposition (PEALD) equipment and method of forming a conducting thin film using the same thereof |
| 11/21/2006 | US7138335 Method of forming electrode for flat display panel |
| 11/21/2006 | US7138334 Systems for forming insulative coatings for via holes in semiconductor devices |
| 11/21/2006 | US7138333 Process for sealing plasma-damaged, porous low-k materials |
| 11/21/2006 | US7138332 Method of forming silicon carbide films |
| 11/21/2006 | US7138331 Method for manufacturing nano-gap electrode device |
| 11/21/2006 | US7138330 High reliability multilayer circuit substrates and methods for their formation |
| 11/21/2006 | US7138329 Air gap for tungsten/aluminum plug applications |
| 11/21/2006 | US7138328 Packaged IC using insulated wire |
| 11/21/2006 | US7138327 Method of routing an electrical connection on a semiconductor device and structure therefor |
| 11/21/2006 | US7138326 Wafer integrated rigid support ring |
| 11/21/2006 | US7138325 Method of manufacturing a wafer |
| 11/21/2006 | US7138324 Method of inhibiting degradation of gate oxide film |
| 11/21/2006 | US7138323 Planarizing a semiconductor structure to form replacement metal gates |
| 11/21/2006 | US7138322 Semiconductor device and fabrication method therefor |
| 11/21/2006 | US7138321 Boost capacitor layout technique for an H-bridge integrated circuit motor controller to ensure matching characteristics with that of the low-side switching devices of the bridge |
| 11/21/2006 | US7138320 Advanced technique for forming a transistor having raised drain and source regions |
| 11/21/2006 | US7138319 Deep trench isolation of embedded DRAM for improved latch-up immunity |
| 11/21/2006 | US7138318 Method of fabricating body-tied SOI transistor having halo implant region underlying hammerhead portion of gate |
| 11/21/2006 | US7138317 Method of generating multiple oxides by plasma nitridation on oxide |
| 11/21/2006 | US7138316 Semiconductor channel on insulator structure |
| 11/21/2006 | US7138315 Low thermal resistance semiconductor device and method therefor |
| 11/21/2006 | US7138314 Method of manufacturing flash memory device |
| 11/21/2006 | US7138313 Method for creating a self-aligned SOI diode by removing a polysilicon gate during processing |
| 11/21/2006 | US7138312 Semiconductor device and method for fabricating the same |
| 11/21/2006 | US7138311 Semiconductor integrated circuit device and manufacture method therefore |
| 11/21/2006 | US7138310 Semiconductor devices having strained dual channel layers |
| 11/21/2006 | US7138309 Integration of biaxial tensile strained NMOS and uniaxial compressive strained PMOS on the same wafer |
| 11/21/2006 | US7138308 Replacement gate with TERA cap |
| 11/21/2006 | US7138307 Method to produce highly doped polysilicon thin films |
| 11/21/2006 | US7138306 Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device |
| 11/21/2006 | US7138305 Method and apparatus for improving stability of a 6T CMOS SRAM cell |