Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2006
11/21/2006US7139110 Micro-structure gap control technology and structure formed therefrom
11/21/2006US7139083 Methods and systems for determining a composition and a thickness of a specimen
11/21/2006US7139065 Stage base, stage apparatus, exposure apparatus and device manufacturing method
11/21/2006US7139060 Method for mounting a driver IC chip and a FPC board/TCP/COF device using a single anisotropic conductive film
11/21/2006US7139045 Thin film transistor array panel for a liquid crystal display and a method for manufacturing the same
11/21/2006US7139043 Thin film transistor array panel
11/21/2006US7138987 Protection circuit for input and output of liquid crystal display
11/21/2006US7138851 Semiconductor integrated circuit apparatus
11/21/2006US7138846 Field effect transistor switch circuit
11/21/2006US7138832 Nanotube-based switching elements and logic circuits
11/21/2006US7138817 Method and apparatus for testing defective portion of semiconductor device
11/21/2006US7138814 Integrated circuit with controllable test access to internal analog signal pads of an area array
11/21/2006US7138813 Probe station thermal chuck with shielding for capacitive current
11/21/2006US7138805 Device and method for inspection
11/21/2006US7138726 Protective interleaf for stacked wafer shipping
11/21/2006US7138725 Semiconductor device
11/21/2006US7138723 Deformable semiconductor device
11/21/2006US7138721 Memory module
11/21/2006US7138719 Trench interconnect structure and formation method
11/21/2006US7138718 Multilevel interconnect structure with low-k dielectric
11/21/2006US7138715 Interconnect, interconnect forming method, thin film transistor, and display device
11/21/2006US7138706 Semiconductor device and method for manufacturing the same
11/21/2006US7138704 Concealable chip leadframe unit structure
11/21/2006US7138700 Semiconductor device with guard ring for preventing water from entering circuit region from outside
11/21/2006US7138695 Image sensor module and method for fabricating the same
11/21/2006US7138693 Barrier layers for microelectromechanical systems
11/21/2006US7138692 Semiconductor device
11/21/2006US7138691 Selective nitridation of gate oxides
11/21/2006US7138690 Shielding structure for use in a metal-oxide-semiconductor device
11/21/2006US7138689 Semiconductor device and manufacturing method thereof
11/21/2006US7138688 Doping method and semiconductor device fabricated using the method
11/21/2006US7138685 Vertical MOSFET SRAM cell
11/21/2006US7138684 Semiconductor memory device including an SOI substrate
11/21/2006US7138683 Self-aligned SOI with different crystal orientation using WAFER bonding and SIMOX processes
11/21/2006US7138682 Organic thin-film transistor and method of manufacturing the same
11/21/2006US7138679 Semiconductor memory device
11/21/2006US7138678 Enhanced on-chip decoupling capacitors and method of making same
11/21/2006US7138677 Capacitor arrangement with capacitors arranged one in the other
11/21/2006US7138676 Semiconductor device and manufacturing the same having multiple trenches formed in plural element regions or trench groups
11/21/2006US7138675 Semiconductor devices having storage nodes
11/21/2006US7138674 Semiconductor memory device
11/21/2006US7138672 Apparatus and method for making a tensile diaphragm with an insert
11/21/2006US7138670 Semiconductor device for use in a solid state imaging device
11/21/2006US7138669 Silicon germanium heterojunction bipolar transistor with carbon incorporation
11/21/2006US7138668 Heterojunction diode with reduced leakage current
11/21/2006US7138665 Light emitting element, method of manufacturing the same, and semiconductor device having light emitting element
11/21/2006US7138664 Semiconductor device having a light emitting element
11/21/2006US7138658 Semiconductor device and method of manufacturing the same
11/21/2006US7138657 Semiconductor device having two insulating films provided over a substrate
11/21/2006US7138655 Thin film transistor array panel including symmetrically aligned thin film transistors and manufacturing method thereof
11/21/2006US7138654 Chemical-mechanical polishing proximity correction method and correction pattern thereof
11/21/2006US7138653 Structures for stabilizing semiconductor devices relative to test substrates and methods for fabricating the stabilizers
11/21/2006US7138651 Logic apparatus and logic circuit
11/21/2006US7138650 Semiconductor substrate, field-effect transistor, and their manufacturing method of the same
11/21/2006US7138649 Dual-channel CMOS transistors with differentially strained channels
11/21/2006US7138608 Sealed line structure for use in process chamber
11/21/2006US7138607 Determining method of thermal processing condition
11/21/2006US7138606 Wafer processing method
11/21/2006US7138550 Bridged carbocyclic compounds and methods of making and using same
11/21/2006US7138364 Cleaning gas and etching gas
11/21/2006US7138344 Method for minimizing slip line faults on a semiconductor wafer surface
11/21/2006US7138343 Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber
11/21/2006US7138342 Combined chemical cleaning and etching of parts made of aluminum or alloys by contacting with a solution of phosphoric acid, hydrogen fluoride, sulfamic acid, glycol ether, and water; periodically restoring etching rate by adding HF; adding sufficient sulfamic acid to prevent the formation of scale
11/21/2006US7138341 Process for making a memory structure
11/21/2006US7138340 Method for fabricating semiconductor device without damaging hard mask during contact formation process
11/21/2006US7138339 Method of manufacturing semiconductor device including etching a conductive layer by using a gas including SiCl4 and NF3
11/21/2006US7138338 Method and composite hard mask for forming deep trenches in a semiconductor substrate
11/21/2006US7138337 Methods of forming tungsten contacts by chemical vapor deposition
11/21/2006US7138336 Plasma enhanced atomic layer deposition (PEALD) equipment and method of forming a conducting thin film using the same thereof
11/21/2006US7138335 Method of forming electrode for flat display panel
11/21/2006US7138334 Systems for forming insulative coatings for via holes in semiconductor devices
11/21/2006US7138333 Process for sealing plasma-damaged, porous low-k materials
11/21/2006US7138332 Method of forming silicon carbide films
11/21/2006US7138331 Method for manufacturing nano-gap electrode device
11/21/2006US7138330 High reliability multilayer circuit substrates and methods for their formation
11/21/2006US7138329 Air gap for tungsten/aluminum plug applications
11/21/2006US7138328 Packaged IC using insulated wire
11/21/2006US7138327 Method of routing an electrical connection on a semiconductor device and structure therefor
11/21/2006US7138326 Wafer integrated rigid support ring
11/21/2006US7138325 Method of manufacturing a wafer
11/21/2006US7138324 Method of inhibiting degradation of gate oxide film
11/21/2006US7138323 Planarizing a semiconductor structure to form replacement metal gates
11/21/2006US7138322 Semiconductor device and fabrication method therefor
11/21/2006US7138321 Boost capacitor layout technique for an H-bridge integrated circuit motor controller to ensure matching characteristics with that of the low-side switching devices of the bridge
11/21/2006US7138320 Advanced technique for forming a transistor having raised drain and source regions
11/21/2006US7138319 Deep trench isolation of embedded DRAM for improved latch-up immunity
11/21/2006US7138318 Method of fabricating body-tied SOI transistor having halo implant region underlying hammerhead portion of gate
11/21/2006US7138317 Method of generating multiple oxides by plasma nitridation on oxide
11/21/2006US7138316 Semiconductor channel on insulator structure
11/21/2006US7138315 Low thermal resistance semiconductor device and method therefor
11/21/2006US7138314 Method of manufacturing flash memory device
11/21/2006US7138313 Method for creating a self-aligned SOI diode by removing a polysilicon gate during processing
11/21/2006US7138312 Semiconductor device and method for fabricating the same
11/21/2006US7138311 Semiconductor integrated circuit device and manufacture method therefore
11/21/2006US7138310 Semiconductor devices having strained dual channel layers
11/21/2006US7138309 Integration of biaxial tensile strained NMOS and uniaxial compressive strained PMOS on the same wafer
11/21/2006US7138308 Replacement gate with TERA cap
11/21/2006US7138307 Method to produce highly doped polysilicon thin films
11/21/2006US7138306 Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
11/21/2006US7138305 Method and apparatus for improving stability of a 6T CMOS SRAM cell