H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2006
11/07/2006	US7132305 Method of fabricating an in-plane switching liquid crystal display device
11/07/2006	US7132304 Field emission device, display adopting the same and method of manufacturing the same
11/07/2006	US7132303 Stacked semiconductor device assembly and method for forming
11/07/2006	US7132302 Method of increasing cell retention capacity of silicon nitride read-only-memory cell
11/07/2006	US7132301 Method and apparatus for reviewing voltage contrast defects in semiconductor wafers
11/07/2006	US7132300 Method for forming ferroelectric film and semiconductor device
11/07/2006	US7132299 Method of forming a magnetic random access memory structure
11/07/2006	US7132298 Fabrication of nano-object array
11/07/2006	US7132297 Multi-layer inductor formed in a semiconductor substrate and having a core of ferromagnetic material
11/07/2006	US7132293 Preventing electrolytic corrosion during etching of semiconductors
11/07/2006	US7132225 Methods of inspecting a lithography template
11/07/2006	US7132224 Pattern formation method
11/07/2006	US7132220 reaction product of an organohydrogenpolysiloxane, an alkenyl-organopolysiloxane and a diallyl bi- or bisphenol; curable by exposure to radiation having a wide range of wavelength; highly elastic, transparent, minute pattern
11/07/2006	US7132219 Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition
11/07/2006	US7132213 sensitizer and an alkali-soluble novolak containing hydroxyalkyl ether structural units that can be substituted with 1,2-naphthoquinonediazidesulfonyl groups; excellent resolution and good suppression of crack generation during plating
11/07/2006	US7132204 crystallization characteristics of a beam overlap area are enhanced; use for thin film transistor (TFT) arrays such as for liquid crystal displays
11/07/2006	US7132202 Multilayer; substrates, laser beams shield pattern of opaque metallic material, oxidation layer and protective coatings; crystallization amorphous silicon
11/07/2006	US7132201 Transparent in visible light, use as a mask in an etching process during fabrication of semiconductor devices by allowing a reading of the alignment mark in the visible light range
11/07/2006	US7132171 Irradiating an organosilicon compound
11/07/2006	US7132134 Staggered in-situ deposition and etching of a dielectric layer for HDP CVD
11/07/2006	US7132058 Tungsten polishing solution
11/07/2006	US7132056 Method of fabricating a fluid ejection device using a planarizing step
11/07/2006	US7132040 Matching unit for semiconductor plasma processing apparatus
11/07/2006	US7132035 Methods, apparatuses, and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes
11/07/2006	US7132034 Apparatus for etching a glass substrate
11/07/2006	US7132033 Method of forming a layered polishing pad
11/07/2006	US7132016 System for and method of manufacturing a large-area backplane by use of a small-area shadow mask
11/07/2006	US7131901 Polishing pad and fabricating method thereof
11/07/2006	US7131848 Helical microelectronic contact and method for fabricating same
11/07/2006	US7131847 Test apparatus having intermediate connection board for package
11/07/2006	US7131568 Methods for lead penetrating clamping system
11/07/2006	US7131525 Conveyor belt cleaner scraper blade with sensor and control system therefor
11/07/2006	US7131391 Plasma reaction chamber liner comprising ruthenium
11/07/2006	US7131248 Wafer shipper with orientation control
11/07/2006	US7131217 Apparatus and method for drying semiconductor wafers using IPA vapor drying method
11/07/2006	US7131209 Apparatus for measuring horizontal level of a wafer chuck
11/07/2006	US7131195 Method for forming metal contacts on a substrate
11/07/2006	US7131189 Continuous processing of thin-film batteries and like devices
11/07/2006	US7131176 Wafer support attachment for a semi-conductor wafer transport container
11/07/2006	CA2293642C Inorganic hydrogen compounds, separation methods, and fuel applications
11/02/2006	WO2006116770A2 Method of passivating chemical mechanical polishing compositions for copper film planarization processes
11/02/2006	WO2006116511A2 O-ringless tandem throttle valve for a plasma reactor chamber
11/02/2006	WO2006116506A1 Methods and apparatus for adjusting ion implant parameters for improved process control
11/02/2006	WO2006116466A1 Self-aligned sti sonos
11/02/2006	WO2006116432A2 Array source line in nand flash memory
11/02/2006	WO2006116411A2 System and method for depositing a material on a substrate
11/02/2006	WO2006116263A1 Methods and apparatus for cleaning and edge of a substrate
11/02/2006	WO2006116219A1 Superjunction device having oxide lined trenches and method for manufacturing a superjunction device having oxide lined trenches
11/02/2006	WO2006115968A2 Active interconnects and control points in integrated circuits
11/02/2006	WO2006115914A1 Ultra-thin hf-doped silicon oxynitride film for high performance cmos applications and method of manufacture
11/02/2006	WO2006115857A2 Substrate processing platform allowing processing in different ambients
11/02/2006	WO2006115812A2 Method and system for debugging using replicated logic and trigger logic
11/02/2006	WO2006115805A2 Xerogel films for the controlled release of pharmaceutically active molecules
11/02/2006	WO2006115760A1 Flexible display substrates
11/02/2006	WO2006115745A1 Cartesian robot cluster tool architecture
11/02/2006	WO2006115731A1 Electrostatic chuck for semiconductor workpieces
11/02/2006	WO2006115722A1 Method and apparatus with varying gate oxide thickness
11/02/2006	WO2006115649A2 Multi-chip module and method of manufacture
11/02/2006	WO2006115588A1 Semiconductor device and method for regional stress control
11/02/2006	WO2006115581A2 Composition and method for polishing a sapphire surface
11/02/2006	WO2006115530A1 Apparatus for depositing a multilayer coating on discrete sheets
11/02/2006	WO2006115483A2 Removable plastic corrosion protection on an elevator guide rail
11/02/2006	WO2006115466A1 Improved net block assembly
11/02/2006	WO2006115453A1 Controlled growth of a nanostructure on a substrate, and electron emission devices based on the same
11/02/2006	WO2006115406A1 Device for supporting a substrate, as well as a method for manufacturing such a device
11/02/2006	WO2006115366A1 Heater jacket for heat convection
11/02/2006	WO2006115292A1 Measuring apparatus, exposure apparatus and method, and device manufacturing method
11/02/2006	WO2006115277A1 Wafer transfer apparatus, polishing apparatus and wafer receiving method
11/02/2006	WO2006115275A1 Mram and method for writing in mram
11/02/2006	WO2006115268A1 Liquid for immersion exposure, method for purifying liquid for immersion exposure, and immersion exposure method
11/02/2006	WO2006115208A1 Memory device and semiconductor integrated circuit
11/02/2006	WO2006115186A1 Exposure method, exposure apparatus and device manufacturing method
11/02/2006	WO2006115167A1 Composition for forming template
11/02/2006	WO2006115157A1 Cassette conveyance system
11/02/2006	WO2006115148A1 Silicon carbide single-crystal wafer and process for producing the same
11/02/2006	WO2006115125A1 Semiconductor device and method for manufacturing same
11/02/2006	WO2006115077A1 Material for protective film formation and method of forming resist pattern therewith
11/02/2006	WO2006115075A1 Semiconductor integrated circuit
11/02/2006	WO2006115074A1 Composition comprising polymer having ethylene-dicarbonyl structure for use in forming anti-reflective coating for lithography
11/02/2006	WO2006115044A1 Composition for resist underlayer film formation for forming photocrosslinking cured resist underlayer film
11/02/2006	WO2006115039A1 Carrier for double side polishing apparatus, and double side polishing apparatus and double side polishing method using such carrier
11/02/2006	WO2006115017A1 Positive resist composition and method for forming resist pattern
11/02/2006	WO2006115013A1 Developer composition, process for producing the same, and method of forming resist pattern
11/02/2006	WO2006115010A1 Negative resist composition and method for forming resist pattern
11/02/2006	WO2006114999A1 Compound semiconductor device and method for fabricating compound semiconductor device
11/02/2006	WO2006114982A1 Drying device
11/02/2006	WO2006114981A1 Storage container
11/02/2006	WO2006114976A1 Plasma doping method and plasma processing equipment
11/02/2006	WO2006114958A1 Photocurable composition, article with fine pattern and method for producing same
11/02/2006	WO2006114957A1 Electronic component module
11/02/2006	WO2006114886A1 Method of mask forming and method of three-dimensional microfabrication
11/02/2006	WO2006114883A1 Semiconductor device
11/02/2006	WO2006114875A1 Semiconductor integrated circuit
11/02/2006	WO2006114854A1 Retainer ring for cmp device, method of manufacturing the same, and cmp device
11/02/2006	WO2006114825A1 Semiconductor device manufacturing method
11/02/2006	WO2006114595A1 Method of generating and using a plasma processing control program
11/02/2006	WO2006114535A1 Method of producing a multilayer electronic device that is free of parasitic interface resistances
11/02/2006	WO2006114416A1 Self-stabilizing cmp composition for metal layers
11/02/2006	WO2006114406A1 A package for beamlead semiconductor devices
11/02/2006	WO2006114376A1 Process for manufacturing a mos device with intercell ion implant

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