Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2007
01/11/2007DE10352730B4 Halbleiterbauelement mit verspanntem aktiven Gebiet Semiconductor device strained active region
01/11/2007DE10231407B4 Bipolartransistor Bipolar transistor
01/11/2007DE102006029682A1 Production of a semiconductor structure with deep trench isolation and buried layer contact etches a trench and a shallower and narrower hole in a single crystal semiconductor layer
01/11/2007DE102006028141A1 Wafer testing method, involves positioning electrical contacts and mating contacts with respect to one another with assistance of optical detection of contact-making apparatus and unit under test
01/11/2007DE102006023257A1 Vorrichtung zum Heissproben von integrierten Halbleiterschaltkreisen auf Wafern An apparatus for hot samples of semiconductor integrated circuits on wafers
01/11/2007DE102005062965A1 Kondensator mit dielektrischer Nanokomposit-Schicht und Verfahren zur Herstellung desselben Of the same capacitor dielectric layer nanocomposite and processes for producing
01/11/2007DE102005037029A1 Verfahren zur Herstellung eines Halbleiterprodukts und Halbleiterprodukt A method of manufacturing a semiconductor product and semiconductor product
01/11/2007DE102005031658A1 Bleifreies Glas Lead-free glass
01/11/2007DE102005031602A1 Reaktor zur Durchführung eines Ätzverfahrens für einen Stapel von maskierten Wafern und Ätzverfahren Reactor for performing an etching process for a stack of wafers and etching unmasked
01/11/2007DE102005030638A1 Halbleiterschaltungsanordnung und Verfahren zu deren Herstellung A semiconductor circuit arrangement, and processes for their preparation
01/11/2007DE102005030586A1 Verfahren und System für eine fortschrittliche Prozesssteuerung unter Anwendung der Messunsicherheit als Steuerungseingang Method and system for advanced process control using the measurement uncertainty as a control input
01/11/2007DE102005030584A1 Technik zur Herstellung von Nickelsilizid durch Abscheiden von Nickel aus einem gasförmigen Vorstufenmaterial Technique for producing nickel silicide by depositing nickel from a gaseous precursor material
01/11/2007DE102005029784A1 Elektronikbaugruppe und Verfahren zur Herstellung einer Elektronikbaugruppe Electronic assembly and methods of manufacturing an electronics package
01/11/2007DE102005028427B3 Verfahren zur optischen Aufnahme und Inspektion eines Wafers im Rahmen der Randentlackung A method for optical recording and inspecting a wafer under the EBR
01/11/2007DE102005026301B3 Verfahren zum Herstellen eines Metall- Halbleiter-Kontakts bei Halbleiterbauelementen A method for producing a metal semiconductor contact for semiconductor components
01/11/2007DE102005025962A1 Inspection apparatus for wafer surface incorporates wafer rotator, wafer illuminator with laser light and light receiver with independent reception units
01/11/2007DE102004058765B4 Elektronisches Nanobauelement mit einer Tunnelstruktur und Verfahren zur Herstellung Nano electronic device having a tunnel structure and methods for preparing
01/11/2007DE102004056772B4 Laterale Halbleiterbauelemente mit hoher Spannungsfestigkeit und Verfahren zur Herstellung derselben Lateral semiconductor devices having high withstand voltage and process for producing same
01/11/2007DE102004053393B4 Verfahren zur Herstellung einer vertikal integrierten Kaskodenstruktur und vertikal integrierte Kaskodenstruktur A method for preparing a vertically integrated cascode structure and vertically integrated cascode
01/11/2007DE10100844B4 Abschirmungsschaltung und integrierte Schaltung, in der die Abschirmungsschaltung verwendet wird Shielding circuit and integrated circuit in which the shield circuit is used
01/10/2007EP1742294A2 A method and a device for manufacturing a roll of items
01/10/2007EP1742273A1 Method of forming gate insulating film, storage medium and computer program
01/10/2007EP1742271A1 Power field effect transistor and manufacturing method thereof
01/10/2007EP1742270A1 MOS transistor having a trench-gate and method of manufacturing the same
01/10/2007EP1742269A1 Semiconductor device and production method therefor
01/10/2007EP1742268A2 Radio architecture
01/10/2007EP1742267A2 Radio architecture
01/10/2007EP1742266A2 Semiconductor integrated circuit device, circuit design apparatus, and circuit design method
01/10/2007EP1742261A1 Provision of a self-aligned CuSiN barrier layer
01/10/2007EP1742260A2 Controlling lateral distribution of air gaps in interconnects
01/10/2007EP1742259A1 Semiconductor power device with multiple drain structure and corresponding manufacturing process
01/10/2007EP1742258A1 Semiconductor power device with multiple drain and corresponding manufacturing process
01/10/2007EP1742257A1 Method of manufacturing a semiconductor power device
01/10/2007EP1742256A1 Alkaline etchant for controlling surface roughness of semiconductor wafer
01/10/2007EP1742255A1 Sheet peeling apparatus and peeling method
01/10/2007EP1742254A1 Sucking apparatus
01/10/2007EP1742253A1 Laser processing method and semiconductor chip
01/10/2007EP1742252A1 Laser processing method and object to be processed
01/10/2007EP1742251A1 Process for manufacturing a thin-film transistor device
01/10/2007EP1742250A1 Power field effect transistor and manufacturing method thereof
01/10/2007EP1742249A1 Power field effect transistor and manufacturing method thereof
01/10/2007EP1742248A2 A vapor drying method and an apparatus
01/10/2007EP1742226A1 Method for realising an electric linkage in a semiconductor electronic device between a nanometric circuit architecture and standard electronic components
01/10/2007EP1742171A1 Method for manufacturing sheet provided with ic tag, apparatus for manufacturing sheet provided with ic tag, sheet provided with ic tag, method for fixing ic chip, apparatus for fixing ic chip, and ic tag
01/10/2007EP1741730A1 Resist protecting film forming material for immersion exposure process and resist pattern forming method using the protecting film
01/10/2007EP1741671A1 Method for realising an electric linkage in a semiconductor electronic device between a nanometric circuit architecture and standard electronic components
01/10/2007EP1741534A1 Method for forming vertical crack on brittle board and vertical crack forming apparatus
01/10/2007EP1741321A2 Atomic beam to protect a reticle
01/10/2007EP1741143A1 Backside thinning of image array devices
01/10/2007EP1741141A1 Fin field effect transistor arrangement and method for producing a fin field effect transistor arrangement
01/10/2007EP1741140A2 Super trench mosfet including buried source electrode and method of fabricating the same
01/10/2007EP1741136A2 Method for production of electronic and optoelectronic circuits
01/10/2007EP1741135A1 Chip module and method for production of a chip module
01/10/2007EP1741134A2 Stacked module systems and methods
01/10/2007EP1741133A1 Method for producing a planar spacer, an associated bipolar transistor and an associated bicmos circuit arrangement
01/10/2007EP1741132A1 Dual-metal cmos transistors with tunable gate electrode work function and method of making the same
01/10/2007EP1741131A2 Level realignment following an epitaxy step
01/10/2007EP1741130A1 Device and method for treating a substrate in the field of semiconductor technology, in addition to a system comprising a device for treating a substrate
01/10/2007EP1741129A2 Systems and methods for nanowire growth and manufacturing
01/10/2007EP1741128A2 Gas distribution system having fast gas switching capabilities
01/10/2007EP1741127A1 Planar avalanche photodiode
01/10/2007EP1741126A1 Simplified wafer alignment
01/10/2007EP1741110A2 Polymerase chain reaction using metallic glass-coated microwire
01/10/2007EP1740948A1 Partially oxidised macroporous silicon comprising discontinuous silicon walls
01/10/2007EP1740933A2 Apparatus and method for transverse characterization of materials
01/10/2007EP1658344B1 Microsystem component and method for gluing microcomponents to a substrate
01/10/2007EP1625372B1 Integrated resistor network for multi-functional use in constant current or constant voltage operation of a pressure sensor
01/10/2007EP1579458A4 Nonvolatile memory array using unified cell structure in divided-well allowing write operation with no disturb
01/10/2007EP1563116B1 Device for carrying out a surface treatment of substrates under vacuum
01/10/2007EP1535323B1 Method for treating a photovoltaic active layer and organic photovoltaic element
01/10/2007EP1440458B1 Method of semiconductor nanoparticle synthesis
01/10/2007EP1337838B1 Method and device for determining the properties of an integrated circuit
01/10/2007EP1332239A4 Deposition of thin films by laser ablation
01/10/2007EP1309989B1 Process for producing semiconductor article using graded expitaxial growth
01/10/2007EP1291910B1 Wafer chuck, exposure system, and method of manufacturing semiconductor device
01/10/2007EP1290718A4 Process perturbation to measured-modeled method for semiconductor device technology modeling
01/10/2007EP1194948B1 Handling system
01/10/2007EP1166350B1 Method for producing a dram structure with buried bit lines or trench capacitors
01/10/2007EP1159213A4 Integrated load port-conveyor transfer system
01/10/2007EP1157409A4 Combination cmp-etch method for forming a thin planar layer over the surface of a device
01/10/2007EP1144735A4 Method and apparatus for low energy electron enhanced etching and cleaning of substrates
01/10/2007EP1128932A4 Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization
01/10/2007EP1105919A4 A system and method for residue entrapment utilizing a polish and sacrificial fill for semiconductor fabrication
01/10/2007EP1040500A4 A plasma generating apparatus having an electrostatic shield
01/10/2007EP0976460B1 Spinning device and spinning method
01/10/2007EP0976141B1 Apparatus and method for controlling ion energy and plasma density in a plasma processing system
01/10/2007EP0964438B1 Dry etching method
01/10/2007CN2857032Y Circuit board tester
01/10/2007CN2856063Y Heater with oxide membrane substrate
01/10/2007CN2855641Y Structure for positioning chip protective ring
01/10/2007CN1894853A Level shift circuit, actuator apparatus using the same, and optical switch system
01/10/2007CN1894803A Semiconductor apparatus and method for manufacturing the same
01/10/2007CN1894802A Structuring method, and field effect transistors
01/10/2007CN1894800A A semiconductor device, an electronic device, and an electronic apparatus
01/10/2007CN1894798A Active matrix pixel device with photo sensor
01/10/2007CN1894797A Method for producing electronic chips consisting of thinned silicon
01/10/2007CN1894796A Process for fabricating thin film integrated circuit device, noncontact thin film integrated circuit device and its fabrication process, ID tag and coin having noncontact thin film integrated circuit
01/10/2007CN1894795A Laminated semiconductor substrate and process for producing the same
01/10/2007CN1894792A Helical microelectronic contact and method for fabricating same
01/10/2007CN1894789A Substrate treating apparatus