Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2007
02/06/2007US7172950 Method for manufacturing semiconductor chip
02/06/2007US7172949 Epitaxial semiconductor layer and method
02/06/2007US7172948 Method to avoid a laser marked area step height
02/06/2007US7172947 High dielectric constant transition metal oxide materials
02/06/2007US7172946 Methods for forming semiconductor devices including thermal processing
02/06/2007US7172945 Method of manufacturing thin film capacitor
02/06/2007US7172944 Method of fabricating a semiconductor device having an elevated source/drain
02/06/2007US7172943 Multiple-gate transistors formed on bulk substrates
02/06/2007US7172942 Method for manufacturing semiconductor elemental device
02/06/2007US7172941 Insulated gate type semiconductor device and method for fabricating the same
02/06/2007US7172940 Method of fabricating an embedded non-volatile memory device
02/06/2007US7172939 Method and structure for fabricating non volatile memory arrays
02/06/2007US7172938 Method of manufacturing a semiconductor memory device
02/06/2007US7172937 Method of manufacturing a non-volatile memory cell
02/06/2007US7172936 Method to selectively strain NMOS devices using a cap poly layer
02/06/2007US7172935 Method of forming multiple gate insulators on a strained semiconductor heterostructure
02/06/2007US7172934 Method of manufacturing a semiconductor device with a silicon-germanium gate electrode
02/06/2007US7172933 Recessed polysilicon gate structure for a strained silicon MOSFET device
02/06/2007US7172932 Thin film semiconductor device, polycrystalline semiconductor thin film production process and production apparatus
02/06/2007US7172931 Manufacturing method for semiconductor device
02/06/2007US7172930 Strained silicon-on-insulator by anodization of a buried p+ silicon germanium layer
02/06/2007US7172929 Semiconductor thin film and method of manufacturing the same and semiconductor device and method of manufacturing the same
02/06/2007US7172928 Method of fabricating a semiconductor device by doping impurity element into a semiconductor layer through a gate electrode
02/06/2007US7172927 Warpage control of array packaging
02/06/2007US7172926 Method for manufacturing an adhesive substrate with a die-cavity sidewall
02/06/2007US7172925 Method for manufacturing printed wiring board
02/06/2007US7172924 Semiconductor device having a semiconductor chip mounted on external terminals and fabrication method thereof
02/06/2007US7172923 Imaging device and manufacturing method for imaging device
02/06/2007US7172922 CMOS image sensor array with black pixel using negative-tone resist support layer
02/06/2007US7172920 Method of manufacturing an image device
02/06/2007US7172919 Method for fabricating a tuning fork gyroscope
02/06/2007US7172918 Infrared thermopile detector system for semiconductor process monitoring and control
02/06/2007US7172917 Method of making a nanogap for variable capacitive elements, and device having a nanogap
02/06/2007US7172916 Method and apparatus for vacuum-mounting a micro electro mechanical system on a substrate
02/06/2007US7172915 Optical-interference type display panel and method for making the same
02/06/2007US7172914 Method of making uniform oxide layer
02/06/2007US7172913 Thin film transistor array panel and manufacturing method thereof
02/06/2007US7172912 Pattern forming method and wiring pattern forming method, and electro-optic device and electronic equipment
02/06/2007US7172911 Deflectable microstructure and method of manufacturing the same through bonding of wafers
02/06/2007US7172910 Web fabrication of devices
02/06/2007US7172909 Light emitting diode having an adhesive layer and a reflective layer and manufacturing method thereof
02/06/2007US7172908 Magnetic memory cells and manufacturing methods
02/06/2007US7172896 Integrated portable biological detection system
02/06/2007US7172864 Contacting biomolecule in solution with permeation layer at a microlocation;concentrating by placing electrode at an opposite charge; reacting restriction enzyme, ligase, proteinase, glycosidase, DNA or RNA polymerase or a phosphorylase with biomolecule; diagnosis; molecular hybridization
02/06/2007US7172853 Method of manufacturing semiconductor integrated circuit devices
02/06/2007US7172849 Antireflective hardmask and uses thereof
02/06/2007US7172841 Arranged before a laser device through beam expander, homogenizer and mirror; vacuum or electrostatic chuck holds position; image of light beam having inverse peak pattern
02/06/2007US7172839 Preventing surface damage; coarse focused ion etching followed by gas assisted electron beam removal of thin film contaminated with gallium
02/06/2007US7172813 includes a thin layer of single crystal zinc oxide deposited on an self supporting substrate (crystalline, polycrystalline, and amorphous ) surface by a chemical deposition process
02/06/2007US7172792 Method for forming a high quality low temperature silicon nitride film
02/06/2007US7172789 Methods and apparatus for fluidic self assembly
02/06/2007US7172788 Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor device
02/06/2007US7172708 Process for the fabrication of thin-film device and thin-film device
02/06/2007US7172684 Performing extrusion via depositions through anodeless conformable contact masks that are initially pressed against substrates that are then progressively pulled away or separated as the depositions thicken; pattern of deposition may vary over the course of deposition by including relative motion
02/06/2007US7172675 Observation window of plasma processing apparatus and plasma processing apparatus using the same
02/06/2007US7172674 Device for liquid treatment of wafer-shaped articles
02/06/2007US7172673 Retaining substrate by a holder;holding a portion of sheet material by a peeler; repeatedly moving peeler, which holds the portion of sheet material, relatively to holder, which retains substrate, alternately in first and second opposite directions until sheet material is completely peeled off substrate
02/06/2007US7172663 Applying paste to substrate including particles dispersed in carrier liquid; vapor deposition; oxidation resistance; vaporization of aerosol drops; electronics, capacitors; noncracking, quality
02/06/2007US7172657 Cleaning method of treatment equipment and treatment equipment
02/06/2007US7172497 Fabrication of semiconductor interconnect structures
02/06/2007US7172491 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization
02/06/2007US7172429 Method of manufacturing semiconductor light emitting device
02/06/2007US7172383 Wafer transfer equipment and semiconductor device manufacturing apparatus using wafer transfer equipment
02/06/2007US7172184 Substrate carrier for electroplating solar cells
02/06/2007US7172130 Electronic device, rubber product, and methods for manufacturing the same
02/06/2007US7171975 Fabrication of ultra-shallow channels for microfluidic devices and systems
02/06/2007US7171973 Substrate processing apparatus
02/06/2007US7171919 Diamond film depositing apparatus using microwaves and plasma
02/06/2007US7171918 Focused ion beam deposition
02/06/2007CA2397219C Method for fabricating group iii nitride compound semiconductors and group iii nitride compound semiconductor devices
02/06/2007CA2179905C Improved isolation between diffusion lines in a memory array
02/01/2007WO2007014321A2 Split electrode gate trench power device
02/01/2007WO2007014320A2 Method and structure for fabricating multiple tile regions onto a plate using a controlled cleaving process
02/01/2007WO2007014294A2 Solutions integrated circuit integration of alternative active area materials
02/01/2007WO2007014289A2 Method of minimal wafer support on bevel edge of wafer
02/01/2007WO2007014267A2 Nanoparticle probes for capture, sorting and placement of targets
02/01/2007WO2007014118A2 Process for forming an electronic device including discontinuous storage elements
02/01/2007WO2007014115A1 Electronic device including discontinuous storage elements
02/01/2007WO2007014034A2 Programmable structure including nanocrystal storage elements in a trench
02/01/2007WO2007013924A1 Low resistance titanium nitride films
02/01/2007WO2007013871A2 Nanoparticle implantation
02/01/2007WO2007013854A1 Intelligent card and manufacturing thereof
02/01/2007WO2007013806A1 Method for passivating a substrate surface
02/01/2007WO2007013753A1 Semiconductor doping method using pulsed inductively coupled plasma and system therefor
02/01/2007WO2007013619A1 Sample holder, sample suction apparatus using such sample holder and sample processing method using such sample suction apparatus
02/01/2007WO2007013605A1 Substrate processing method and substrate processing apparatus
02/01/2007WO2007013580A1 Semiconductor device, semiconductor device fabrication method, semiconductor device fabrication method program and semiconductor fabrication device
02/01/2007WO2007013571A1 Manufacturing method of semiconductor device
02/01/2007WO2007013540A1 Mask blank fabrication method and exposure mask fabrication method
02/01/2007WO2007013464A1 Method for manufacturing semiconductor device
02/01/2007WO2007013445A1 Method for processing metal member and apparatus for processing metal member
02/01/2007WO2007013424A1 Vacuum processing apparatus, semiconductor device manufacturing method and semiconductor device manufacturing system
02/01/2007WO2007013405A1 Semiconductor device and method for controlling same
02/01/2007WO2007013386A1 Method for inspecting semiconductor device, semiconductor device, semiconductor integrated circuit, method and equipment for testing semiconductor integrated circuit
02/01/2007WO2007013377A1 Semiconductor element and electric device
02/01/2007WO2007013367A1 Semiconductor element and electric device
02/01/2007WO2007013365A1 Solder mounting structure, method for manufacturing such solder mounting structure and use of such solder mounting structure
02/01/2007WO2007013355A1 Substrate processing apparatus and method for manufacturing semiconductor device
02/01/2007WO2007013311A1 Cleaning liquid for lithography
02/01/2007WO2007013295A1 Magnetoresistive element and magnetic random access memory