| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/08/2007 | US20070029612 Scalable high performance carbon nanotube field effect transistor |
| 02/08/2007 | US20070029611 Integrated circuit having a top side wafer contact and a method of manufacture therefor |
| 02/08/2007 | US20070029608 Offset spacers for CMOS transistors |
| 02/08/2007 | US20070029607 Dense arrays and charge storage devices |
| 02/08/2007 | US20070029603 Method of fabricating cell of nonvolatile memory device with floating gate |
| 02/08/2007 | US20070029602 Non-volatile memory device and fabricating method thereof |
| 02/08/2007 | US20070029601 SONOS memory cell having high-K dielectric |
| 02/08/2007 | US20070029598 Semiconductor device manufacturing method and semiconductor device |
| 02/08/2007 | US20070029596 Semiconductor device including transistor with composite gate structure and transistor with single gate structure, and method for manufacturing the same |
| 02/08/2007 | US20070029595 Semiconductor device and manufacturing method therefor |
| 02/08/2007 | US20070029590 Image sensor for reduced dark current |
| 02/08/2007 | US20070029587 Mos varactor with segmented gate doping |
| 02/08/2007 | US20070029578 Non-volatile semiconductor memory device and process of manufacturing the same |
| 02/08/2007 | US20070029575 Structure and method of measuring the capacitance |
| 02/08/2007 | US20070029572 LED having improved soldering structure, method for soldering the LED to PCB, and LED assembly manufactured by the method |
| 02/08/2007 | US20070029567 Element having microstructure and manufacturing method thereof |
| 02/08/2007 | US20070029553 Methods of fabricating strained semiconductor-on-insulator field-effect transistors and related devices |
| 02/08/2007 | US20070029551 Thin film transistor substrate using a horizontal electric field |
| 02/08/2007 | US20070029549 Providing current control over wafer borne semiconductor devices using overlayer patterns |
| 02/08/2007 | US20070029540 Semiconductor device |
| 02/08/2007 | US20070029367 Semiconductor device |
| 02/08/2007 | US20070029285 Polishing method |
| 02/08/2007 | US20070029284 Dry etching method, fabrication method for semiconductor device, and dry etching apparatus |
| 02/08/2007 | US20070029282 Method of processing a workpiece by controlling a set of plasma parameters through a set of chamber parameters using surfaces of constant value |
| 02/08/2007 | US20070029281 Gas for removing deposit and removal method using same |
| 02/08/2007 | US20070029169 Conveyor Belt Cleaner Scraper Blade With Sensor and Control System Therefor |
| 02/08/2007 | US20070029158 Ball transfer unit and ball table |
| 02/08/2007 | US20070029046 Methods and systems for increasing substrate temperature in plasma reactors |
| 02/08/2007 | US20070029045 System and Device For Thinning Wafers That Have Contact Bumps |
| 02/08/2007 | US20070028950 Liquid processing apparatus and method |
| 02/08/2007 | US20070028839 Method and apparatus for an improved deposition shield in a plasma processing system |
| 02/08/2007 | US20070028445 Fluxless bumping process |
| 02/08/2007 | US20070028444 Method of manufacturing electronic device including aligning first substrate, second substrate and mask, and transferring object from first substrate to second substrate, including irradiating object on first substrate with light through mask |
| 02/08/2007 | DE4412902B4 Verfahren zur plasmaunterstützten, chemischen Dampfabscheidung und Vakuumplasmakammer A method for plasma-enhanced, chemical vapor deposition and vacuum plasma chamber |
| 02/08/2007 | DE19953178B4 Millimeterband-Halbleiterschaltkreis Millimeter-band semiconductor circuit |
| 02/08/2007 | DE19927527B4 Verfahren zur naßchemischen Behandlung einer Halbleiterscheibe A method for the wet chemical treatment of a semiconductor wafer |
| 02/08/2007 | DE19712834B4 Schutzschaltung und Schaltung für eine Halbleiter-Auf-Isolator-Vorrichtung Protection circuit and circuit for a semiconductor-on-insulator device |
| 02/08/2007 | DE19545164B4 Optische Halbleitervorrichtung mit vergrabenem Wellenleiter und Herstellungsverfahren dafür Semiconductor optical device with a buried waveguide and production method thereof |
| 02/08/2007 | DE19517975B4 CMOS-Schaltungsplättchen mit Polysilizium-Feldringstruktur CMOS circuit die with polysilicon field ring structure |
| 02/08/2007 | DE112005000692T5 Substratverarbeitungssystem, Substratverarbeitungsverfahren, Aufzeichnungsmedium und Software Substrate processing system, substrate processing method, recording medium and Software |
| 02/08/2007 | DE112005000621T5 Bipolare elektrostatische Haltevorrichtung Bipolar electrostatic chuck |
| 02/08/2007 | DE112004002761T5 Eine nicht verbleite Halbleiterbaugruppe und ein Verfahren, um diese zusammenzusetzen To these compose a Unleaded semiconductor package and method |
| 02/08/2007 | DE10357409B4 Verfahren zur Herstellung eines Doppelheterostruktur-Bipolartransistors für hohe Betriebsspannungen A method for producing a double heterostructure bipolar transistor for high operating voltages |
| 02/08/2007 | DE10351100B4 Verfahren zur Herstellung eines vertikalen PNP-Transistors aus einem Halbleiterwerkstoff und vertikaler bipolarer PNP-Transitor A method for producing a vertical PNP transistor made of a semiconductor material and a vertical PNP bipolar transitor |
| 02/08/2007 | DE10347458B4 Verfahren zur Herstellung einer Halbleitervorrichtung und nach dem Verfahren hergestellte Halbleitervorrichtung A process for producing a semiconductor device produced by the method and semiconductor device |
| 02/08/2007 | DE10342547B4 Verfahren zum Herstellen einer integrierten Schaltungseinrichtung mit Durchkontaktierungselementen und Anschlusseinheiten A method of manufacturing an integrated circuit device with feedthrough terminal units and |
| 02/08/2007 | DE10330359B4 Verfahren zur Herstellung von InP-basierten Heterostruktur-Bipolartransistoren auf der Grundlage von III/V-Halbleitern A process for the production of InP-based heterostructure bipolar transistors on the basis of III / V semiconductors |
| 02/08/2007 | DE10324433B4 Verfahren zur Herstellung eines Substratkontakts für ein SOI-Halbleiterbauteil A method for producing a substrate contact on a SOI semiconductor component |
| 02/08/2007 | DE10246343B4 Verfahren zur Herstellung eines Halbleiterspeicherzellenfeldes A method for fabricating a semiconductor memory cell array |
| 02/08/2007 | DE10228344B4 Verfahren zur Herstellung von Mikrostrukturen sowie Anordnung von Mikrostrukturen A process for the fabrication of microstructures, and arrangement of microstructures |
| 02/08/2007 | DE10210841B4 Modul und Verfahren zur Herstellung von elektrischen Schaltungen und Modulen Module and process for manufacture of electrical circuitry and modules |
| 02/08/2007 | DE10203833B4 Verfahren und Vorrichtung zur Differenzdruckregelung an Epitaxiereaktoren Method and apparatus for differential pressure control at epitaxy reactors |
| 02/08/2007 | DE102006036296A1 Stencil mask for defining the irradiation region of charged particles on a substrate, comprises primary and secondary layers, and a number of holes |
| 02/08/2007 | DE102006035000A1 Sensorvorrichtung und Verfahren zu deren Fertigung Sensor device and methods for their production |
| 02/08/2007 | DE102006033450A1 Substrate for production of photomask, e.g. for integrated circuit production, has alignment markers formed from material of structured conductive layer and kept at specified potential by conductive connecting lines |
| 02/08/2007 | DE102006001665A1 Halbleiterschaltung und Verfahren zu deren Herstellung A semiconductor circuit and process for their preparation |
| 02/08/2007 | DE102005047105B3 Determining dopant content of doped amorphous semiconductor layer on carrier comprises use of spectral ellipsometry and reference Tauc curve |
| 02/08/2007 | DE102005045371A1 Halbleiterspeicher, die Herstellung davon und Verfahren zum Betreiben des Halbleiterspeichers A semiconductor memory, the preparation thereof and methods of operating the semiconductor memory |
| 02/08/2007 | DE102005038027A1 Verfahren zum Durchtrennen von spröden Flachmaterialien A method for separating brittle flat materials |
| 02/08/2007 | DE102005036669A1 Verfahren zur Behandlung von Halbleitersubstratoberflächen, die mittels intensiven Lichtimpulsen kurzzeitig aufgeschmolzen werden A method for treatment of semiconductor substrate surfaces, which are briefly melted by means of intense light pulses |
| 02/08/2007 | DE102005036561B3 Verfahren zur Herstellung einer Verbindungsstruktur A process for preparing a compound of structure |
| 02/08/2007 | DE102005036063A1 Silicon carbide semiconductor device manufacture involves etching silicon oxide film used as mask for implanting impurities for forming n-type source and drain regions of high concentration |
| 02/08/2007 | DE102005035740A1 Verfahren zur Herstellung einer isolierenden Barrierenschicht für eine Kupfermetallisierungsschicht A method for manufacturing an insulating barrier layer for a copper metallization |
| 02/08/2007 | DE102005035699A1 Semiconductor component with charge compensating structure has vertical drift zone surrounded by charge compensation trench having anisotropic material of alternating conductance |
| 02/08/2007 | DE102005035641A1 Herstellungsverfahren für eine Speicherzellenanordnung mit Folded-Bitline-Anordnung und entsprechende Speicherzellenanordnung mit Folded-Bitline-Anordnung Manufacturing method of a memory cell array having folded bit line arrangement and corresponding memory cell array having folded bit line arrangement |
| 02/08/2007 | DE102005035393A1 Bauelement mit einem oder mehreren Chips sowie Verfahren zur Herstellung eines solchen Device having one or more chips as well as methods for producing such |
| 02/08/2007 | DE102005034873A1 Anordnung eines elektrischen Bauelements und eines auf dem Bauelement auflaminierten Folienverbunds und Verfahren zur Herstellung der Anordnung Arrangement of an electrical component and a laminated composite film on the component and method of manufacturing the arrangement |
| 02/08/2007 | DE102005034387A1 Trench DRAM semiconductor memory has additional p-type anti-punch zone in semiconductor under neighboring strips of shallow trench isolation |
| 02/08/2007 | DE102005032076B3 Verfahren zum Herstellen eines Schaltungsmoduls A method of manufacturing a circuit module |
| 02/08/2007 | DE102005014749A1 Technik zur Herstellung eines Transistors mit einem erhöhten Drain- und Sourcegebiet mittels einer Drei-Schicht-Hartmaske für die Gatestrukturierung Technique for manufacturing a transistor with a raised drain and source regions by means of a three-layer hard mask for the gate structure |
| 02/08/2007 | DE102005014748B4 Technik zum elektrochemischen Abscheiden einer Legierung mit chemischer Ordnung Technology for the electrochemical deposition of an alloy with chemical ordering |
| 02/08/2007 | DE102005003000B4 Halbleiterprodukt mit einem Halbleitersubstrat und einer Teststruktur und Verfahren A semiconductor product comprising a semiconductor substrate and a test structure and method |
| 02/08/2007 | DE102005002550B4 Lift-Off-Verfahren Lift-off method |
| 02/08/2007 | DE102004057237B4 Verfahren zum Herstellen von Kontaktlöchern in einem Halbleiterkörper sowie Transistor mit vertikalem Aufbau A method for producing contact holes in a semiconductor body, as well transistor with a vertical structure |
| 02/08/2007 | DE102004050391B4 Verfahren zum Herstellen einer Schicht-Anordnung und Schicht-Anordnung A method for producing a layer arrangement and layer arrangement |
| 02/08/2007 | DE102004025925B4 Verfahren zum Ausbilden einer selbstausgerichteten Kontaktstruktur in einem Halbleiterbauelement unter Verwendung einer Opfermaskenschicht A method of forming a self-aligned contact structure in a semiconductor device by using a sacrificial mask layer |
| 02/08/2007 | DE10136682B4 Selektives Epitaxieverfahren für Halbleiterbauelemente Selective epitaxy for semiconductor devices |
| 02/08/2007 | DE10132024B4 Halbleiter-Bauteil und Verfahren zu dessen Herstellung Semiconductor device and process for its preparation |
| 02/08/2007 | DE10115491B4 Verfahren zum Prüfen eines vom Gehäuse befreiten Chips A method of testing a liberated from the housing chips |
| 02/07/2007 | EP1750311A2 Gallium nitride device substrate comprising a gallium nitride based buffer layer and method of manufacturing the same |
| 02/07/2007 | EP1750306A1 Electronic package having underfill standoff and method |
| 02/07/2007 | EP1750299A2 Methods and apparatus for transporting substrate carriers |
| 02/07/2007 | EP1750298A2 RF power transistor with impedance matched output electrode |
| 02/07/2007 | EP1750297A2 Method for surface treatment of semiconductor substrates, which are briefly melted by means of intensive light pulses |
| 02/07/2007 | EP1750296A2 Ion implantation mask and method for manufacturing the mask and a SiC semiconductor device using the mask |
| 02/07/2007 | EP1750172A1 Wavelength converting optical system, laser light source, exposure apparatus, mask examining apparatus, and macromolecular crystal lens machining device |
| 02/07/2007 | EP1750136A1 Sheet-like probe, method of producing the probe, and application of the probe |
| 02/07/2007 | EP1749900A1 Susceptor for vapor deposition apparatus |
| 02/07/2007 | EP1749766A2 Conveyor belt cleaner scraper blade with sensor and control system therefor |
| 02/07/2007 | EP1749613A1 Thermo compression bonding module with a thermode assembly and a bonding force feedback control device; thermo compression bonding apparatus comprising such module |
| 02/07/2007 | EP1749570A1 Method for oxidizing substance and oxidation apparatus therefor |
| 02/07/2007 | EP1749565A1 Method and apparatus for blending process materials |
| 02/07/2007 | EP1749317A1 Method for producing an area having reduced electrical conductivity within a semiconductor layer and optoelectronic semiconductor element |
| 02/07/2007 | EP1749313A2 Field effect transistor |
| 02/07/2007 | EP1749312A2 Decoupled complementary mask patterning transfer method |
| 02/07/2007 | EP1749311A1 Separately strained n-channel and p-channel transistors |
| 02/07/2007 | EP1749310A1 Substrate for electronic application comprising a flexible support and method for production thereof |
| 02/07/2007 | EP1749309A2 Technique and apparatus for depositing thin layers of semiconductors for solar cell fabricaton |
| 02/07/2007 | EP1749308A2 Vertical structure semiconductor devices |
| 02/07/2007 | EP1749117A2 Yield improvement in silicon-germanium epitaxial growth |