| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 02/08/2007 | WO2007015951A2 Semiconductor structures formed on substrates and methods of manufacturing the same |
| 02/08/2007 | WO2007015938A2 Method for patterning an underbump metallizattion layer using a dry etc process |
| 02/08/2007 | WO2007015930A1 Methods for fabricating a stressed mos device |
| 02/08/2007 | WO2007015903A2 High voltage non punch through igbt for switch mode power supplies |
| 02/08/2007 | WO2007015683A1 An integrated circuit package and a method for forming an integrated circuit package |
| 02/08/2007 | WO2007015628A1 Method for patterning coatings |
| 02/08/2007 | WO2007015507A1 Electronic circuit device and method for manufacturing same |
| 02/08/2007 | WO2007015506A1 Minute structure inspection device, inspection method, and inspection program |
| 02/08/2007 | WO2007015504A1 Plasma processing apparatus and gas permeable plate |
| 02/08/2007 | WO2007015500A1 Trench type misfet |
| 02/08/2007 | WO2007015474A1 Magnetic memory |
| 02/08/2007 | WO2007015442A1 Semiconductor integrated circuit |
| 02/08/2007 | WO2007015436A1 Metal-containing compound, process for producing the same, metal-containing thin film, and method of forming the same |
| 02/08/2007 | WO2007015435A1 Semiconductor device |
| 02/08/2007 | WO2007015433A1 Method for forming insulating film and insulating film |
| 02/08/2007 | WO2007015431A1 Diamond uv-ray sensor |
| 02/08/2007 | WO2007015404A1 PROCESS FOR PRODUCING AlN SEMICONDUCTOR AND APPARATUS FOR PRODUCING AlN SEMICONDUCTOR |
| 02/08/2007 | WO2007015388A1 Semiconductor device manufacturing method and semiconductor device manufacturing apparatus |
| 02/08/2007 | WO2007015385A1 Atmospheric pressure plasma processing system |
| 02/08/2007 | WO2007015372A1 Anisotropic conductive film and method for producing same |
| 02/08/2007 | WO2007015367A1 Process for producing junction structure |
| 02/08/2007 | WO2007015364A1 Method for manufacturing thin film transistor |
| 02/08/2007 | WO2007015358A1 Magnetic random access memory and operation method thereof |
| 02/08/2007 | WO2007015355A1 Mram |
| 02/08/2007 | WO2007015352A1 Resist composition and method of forming resist pattern |
| 02/08/2007 | WO2007015350A1 Method for manufacturing thin film transistor |
| 02/08/2007 | WO2007015314A1 Electric connection device |
| 02/08/2007 | WO2007015306A1 Charged particle beam plotting device and method |
| 02/08/2007 | WO2007015250A2 Method for production of nanoporous electrodes for photoelectrochemical applications |
| 02/08/2007 | WO2007015050A1 A method of processing substrates |
| 02/08/2007 | WO2007014880A1 Method for transferring and device for handling electronic components |
| 02/08/2007 | WO2007014662A1 Optical system for creating a line focus scanning system using such optical system and method for laser processing of a substrate |
| 02/08/2007 | WO2007014549A1 Process for producing a multilayer ceramic composite |
| 02/08/2007 | WO2007014493A1 Aging room used for the last assembling process of lcd panel modules |
| 02/08/2007 | WO2007014451A1 Method and system for vertically aligning tile images of an area of interest of an integrated circuit |
| 02/08/2007 | WO2006138126A3 Antistiction mems substrate and method of manufacture |
| 02/08/2007 | WO2006124201A3 Selective wet etching of oxides |
| 02/08/2007 | WO2006121600B1 Process and composition for conductive material removal by electrochemical mechanical polishing |
| 02/08/2007 | WO2006077216A3 Formation and treatment of a sige structure |
| 02/08/2007 | WO2006075725A3 Manufacturing method for semiconductor chips and semiconductor wafer |
| 02/08/2007 | WO2006071671A3 System for and method of forming via holes by multiple deposition events in a continuous inline shadow mask deposition process |
| 02/08/2007 | WO2006062952A3 Multiple angle of incidence spectroscopic scatterometer system |
| 02/08/2007 | WO2006052472A3 Microelectromechanical (mem) device including a spring release bridge and method of making the same |
| 02/08/2007 | US20070032676 Process for depositing low dielectric constant materials |
| 02/08/2007 | US20070032675 Forming a dielectric layer using a hydrocarbon-containing precursor |
| 02/08/2007 | US20070032182 Polishing pad and method of fabricating semiconductor substrate using the pad |
| 02/08/2007 | US20070032175 Polishing cloth, polishing cloth processing method, and substrate manufacturing method using same |
| 02/08/2007 | US20070032174 Polishing apparatus |
| 02/08/2007 | US20070032170 Polishing pad with built-in optical sensor |
| 02/08/2007 | US20070032097 Method and apparatus for processing semiconductor work pieces |
| 02/08/2007 | US20070032096 System and process for providing multiple beam sequential lateral solidification |
| 02/08/2007 | US20070032095 Copper conductor annealing process employing high speed optical annealing with a low temperature-deposited optical absorber layer |
| 02/08/2007 | US20070032094 Energy beam treatment to improve packaging reliability |
| 02/08/2007 | US20070032093 Structure and method of forming a semiconductor material wafer |
| 02/08/2007 | US20070032092 Method for manufacturing semiconductor device having trench |
| 02/08/2007 | US20070032091 Methods and devices for forming nanostructure monolayers and devices including such monolayers |
| 02/08/2007 | US20070032090 Plasma rapid thermal process apparatus in which supply part of radical source is improved |
| 02/08/2007 | US20070032089 Printable Semiconductor Structures and Related Methods of Making and Assembling |
| 02/08/2007 | US20070032088 Device and method for detecting foreign material on the surface of plasma processing apparatus |
| 02/08/2007 | US20070032087 Damage-free ashing process and system for post low-k etch |
| 02/08/2007 | US20070032086 Mehtod of manufacturing an electronic device |
| 02/08/2007 | US20070032085 Method for forming recesses |
| 02/08/2007 | US20070032084 Thin handle substrate method and structure for fabricating devices using one or more films provided by a layer transfer process |
| 02/08/2007 | US20070032083 Planarization method for manufacturing semiconductor device |
| 02/08/2007 | US20070032082 Semiconductor substrate process using an optically writable carbon-containing mask |
| 02/08/2007 | US20070032081 Edge ring assembly with dielectric spacer ring |
| 02/08/2007 | US20070032080 System and method for manufacturing flexible copper clad laminate film |
| 02/08/2007 | US20070032079 Method for thin film deposition using multi-tray film precursor evaporation system |
| 02/08/2007 | US20070032078 Suspension for filling via holes in silicon and method for making the same |
| 02/08/2007 | US20070032077 Method of manufacturing metal plug and contact |
| 02/08/2007 | US20070032076 Nanowire device and method of fabricating the same |
| 02/08/2007 | US20070032075 Deposition method for wiring thin film |
| 02/08/2007 | US20070032074 Method of fabricating semiconductor device |
| 02/08/2007 | US20070032073 Method of substrate processing and apparatus for substrate processing |
| 02/08/2007 | US20070032072 Nucleation layer deposition on semiconductor process equipment parts |
| 02/08/2007 | US20070032071 Methods of forming CoSi2, methods of forming field effect transistors, and methods of forming conductive contacts |
| 02/08/2007 | US20070032070 Semiconductor device and method for manufacturing same |
| 02/08/2007 | US20070032069 Selective metal deposition over dielectric layers |
| 02/08/2007 | US20070032068 Semiconductor device and method for fabricating the same |
| 02/08/2007 | US20070032067 Semiconductor device and method of manufacturing the same |
| 02/08/2007 | US20070032066 Semiconductor device and method of fabricating the same |
| 02/08/2007 | US20070032065 Alpha-particle-tolerant semiconductor die systems, devices, components and methods for optimizing clock rates and minimizing die size |
| 02/08/2007 | US20070032064 Use of an internal on-chip inductor for electrostatic discharge protection of circuits which use bond wire inductance as their load |
| 02/08/2007 | US20070032063 Efficient transistor structure |
| 02/08/2007 | US20070032062 Methods of Forming Dual-Damascene Metal Wiring Patterns for Integrated Circuit Devices and Wiring Patterns Formed Thereby |
| 02/08/2007 | US20070032061 Methods of forming through-wafer interconnects and structures resulting therefrom |
| 02/08/2007 | US20070032060 Method for forming conductive wiring and interconnects |
| 02/08/2007 | US20070032059 Method of manufacturing a semiconductor structure having a wafer through-contact and a corresponding semiconductor structure |
| 02/08/2007 | US20070032058 Method of fabricating interconnect |
| 02/08/2007 | US20070032057 Semiconductor device and method of fabricating the same |
| 02/08/2007 | US20070032056 Manufacturing method of semiconductor device |
| 02/08/2007 | US20070032055 Dry etchback of interconnect contacts |
| 02/08/2007 | US20070032054 Semiconductor substrate process using a low temperature deposited carbon-containing hard mask |
| 02/08/2007 | US20070032053 Method of producing silicon carbide semiconductor substrate, silicon carbide semiconductor substrate obtained thereby and silicon carbide semiconductor using the same |
| 02/08/2007 | US20070032052 Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices |
| 02/08/2007 | US20070032051 Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices |
| 02/08/2007 | US20070032050 Mask for sequential lateral solidification and method of manufacturing the same |
| 02/08/2007 | US20070032049 Process for manufacturing a semiconductor device |
| 02/08/2007 | US20070032048 Method for depositing thin film by controlling effective distance between showerhead and susceptor |
| 02/08/2007 | US20070032047 Thin dielectrical films containing silicon on a wafer target substrate by chemical vapor deposition; selectively supplying a purge gas, a first process gas of a silane, and a second process gas selected from a nitriding gas, an oxynitriding gas, and an oxidizing gas alternately |