| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/06/2007 | US7173872 Method and apparatus for controlling a high voltage generator in a wafer burn-in test |
| 02/06/2007 | US7173861 Nonvolatile memory device for preventing bitline high voltage from discharge |
| 02/06/2007 | US7173857 Nonvolatile semiconductor memory device capable of uniformly inputting/outputting data |
| 02/06/2007 | US7173855 Current limiting antifuse programming path |
| 02/06/2007 | US7173853 Nonvolatile semiconductor memory |
| 02/06/2007 | US7173850 Nonvolatile semiconductor memory |
| 02/06/2007 | US7173807 Organic electrolytic solution contains a pyrrolidinium salt electrolyte, a chain carbonates, sulfolane and a fluorobenzene; electroconductivity, high withstanding voltage, excellent low-temperature characteristic |
| 02/06/2007 | US7173791 Ferroelectric device including a unit element having a topological outline in a C-shape or a S-shape |
| 02/06/2007 | US7173759 Monochromator mirror for the EUV-spectral range |
| 02/06/2007 | US7173716 Alignment apparatus, exposure apparatus using the same, and method of manufacturing devices |
| 02/06/2007 | US7173699 Spectroscopic scatterometer system |
| 02/06/2007 | US7173693 Method for inspecting defects and an apparatus of the same |
| 02/06/2007 | US7173687 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 02/06/2007 | US7173681 Two pixel electrodes interposing the signal line extending into without extending beyond the recess on the protection film caused by the contact hole |
| 02/06/2007 | US7173584 Transistor circuit, display panel and electronic apparatus |
| 02/06/2007 | US7173549 Semiconductor integrated circuit in which voltage down converter output can be observed as digital value and voltage down converter output voltage is adjustable |
| 02/06/2007 | US7173481 CMOS reference voltage circuit |
| 02/06/2007 | US7173476 Semiconductor integrated circuit device |
| 02/06/2007 | US7173449 Signal transmission system |
| 02/06/2007 | US7173445 Sensor for inspection instrument and inspection instrument |
| 02/06/2007 | US7173442 Integrated printed circuit board and test contactor for high speed semiconductor testing |
| 02/06/2007 | US7173378 Active matrix organic electroluminescent display device having organic thin-film transistor and method for manufacturing the display device |
| 02/06/2007 | US7173368 Flat panel display with thin film transistor (TFT) |
| 02/06/2007 | US7173363 System and method for moving an object employing piezo actuators |
| 02/06/2007 | US7173340 Daisy chaining of serial I/O interface on stacking devices |
| 02/06/2007 | US7173337 Semiconductor device manufactured by the damascene process having improved stress migration resistance |
| 02/06/2007 | US7173336 Hybrid integrated circuit device |
| 02/06/2007 | US7173332 Placement tool for wafer scale caps |
| 02/06/2007 | US7173331 Hermetic sealing cap and method of manufacturing the same |
| 02/06/2007 | US7173330 Multiple chip semiconductor package |
| 02/06/2007 | US7173327 Clock distribution networks and conductive lines in semiconductor integrated circuits |
| 02/06/2007 | US7173326 Semiconductor integrated device |
| 02/06/2007 | US7173323 Semiconductor device with a protective security coating comprising multiple alternating metal layers |
| 02/06/2007 | US7173321 Semiconductor package having multiple row of leads |
| 02/06/2007 | US7173319 Semiconductor device and method of manufacturing the same |
| 02/06/2007 | US7173318 On-chip inductors |
| 02/06/2007 | US7173316 Semiconductor device |
| 02/06/2007 | US7173314 Storage device having a probe and a storage cell with moveable parts |
| 02/06/2007 | US7173313 Semiconductor device with insulating layer having ion-coated nanoparticles |
| 02/06/2007 | US7173309 SOI single crystalline chip structure with multi-thickness silicon layer |
| 02/06/2007 | US7173308 Lateral short-channel DMOS, method for manufacturing same and semiconductor device |
| 02/06/2007 | US7173307 Semiconductor device and manufacturing method thereof |
| 02/06/2007 | US7173305 Self-aligned contact for silicon-on-insulator devices |
| 02/06/2007 | US7173304 Method of manufacturing devices comprising conductive nano-dots, and devices comprising same |
| 02/06/2007 | US7173303 FIN field effect transistor with self-aligned gate |
| 02/06/2007 | US7173302 Integrated circuit arrangement having capacitors and having planar transistors and fabrication method |
| 02/06/2007 | US7173301 Ferroelectric memory device with merged-top-plate structure and method for fabricating the same |
| 02/06/2007 | US7173300 Magnetoresistive element, method for making the same, and magnetic memory device incorporating the same |
| 02/06/2007 | US7173297 Solid-state imaging device |
| 02/06/2007 | US7173296 Reduced hydrogen sidewall spacer oxide |
| 02/06/2007 | US7173293 Semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formation |
| 02/06/2007 | US7173292 Field effect transistor |
| 02/06/2007 | US7173286 Semiconductor devices formed of III-nitride compounds, lithium-niobate-tantalate, and silicon carbide |
| 02/06/2007 | US7173285 Lithographic methods to reduce stacking fault nucleation sites |
| 02/06/2007 | US7173284 Silicon carbide semiconductor device and manufacturing method |
| 02/06/2007 | US7173283 Semiconductor device and method of manufacturing the same |
| 02/06/2007 | US7173282 Semiconductor device having a crystalline semiconductor film |
| 02/06/2007 | US7173281 Semiconductor device and method of fabricating the same |
| 02/06/2007 | US7173280 Electro-optical device and manufacturing method thereof |
| 02/06/2007 | US7173279 Semiconductor display device |
| 02/06/2007 | US7173276 Highly efficient organic light emitting device using substrate having nanosized hemispherical recesses and method for preparing the same |
| 02/06/2007 | US7173274 Incorporation of carbon in silicon/silicon germanium epitaxial layer to enhance yield for Si-Ge bipolar technology |
| 02/06/2007 | US7173268 Method of measuring pattern dimension and method of controlling semiconductor device process |
| 02/06/2007 | US7173261 Image noise removing method in FIB/SEM complex apparatus |
| 02/06/2007 | US7173260 Removing byproducts of physical and chemical reactions in an ion implanter |
| 02/06/2007 | US7173220 Heating device |
| 02/06/2007 | US7173219 Ceramic heaters |
| 02/06/2007 | US7173216 LED heat lamp arrays for CVD heating |
| 02/06/2007 | US7172996 Cleaning agent composition for a positive or a negative photoresist |
| 02/06/2007 | US7172981 Semiconductor integrated circuit device manufacturing method including static charge elimination |
| 02/06/2007 | US7172980 Process for fabricating an integrated electronic circuit that incorporates air gaps |
| 02/06/2007 | US7172979 Substrate processing apparatus and method |
| 02/06/2007 | US7172978 MEMS device polymer film deposition process |
| 02/06/2007 | US7172977 Method for non-destructive removal of cured epoxy from wafer backside |
| 02/06/2007 | US7172976 Extrusion-free wet cleaning process for copper-dual damascene structures |
| 02/06/2007 | US7172975 First treating with aqueous hydrofluoric acid solution, then with aqueous ozone solution, then with water or aqueous hydrochloric acid solution, forming a treatment sequence; cleaning wafers |
| 02/06/2007 | US7172974 Methods for forming fine pattern of semiconductor device |
| 02/06/2007 | US7172973 System and method for selectively modifying a wet etch rate in a large area |
| 02/06/2007 | US7172972 Semiconductor device manufacture method and etching system |
| 02/06/2007 | US7172971 Semiconductor device having a contact window including a lower with a wider to provide a lower contact resistance |
| 02/06/2007 | US7172970 Polish method for semiconductor device planarization |
| 02/06/2007 | US7172969 Method and system for etching a film stack |
| 02/06/2007 | US7172968 Ultra thin, single phase, diffusion barrier for metal conductors |
| 02/06/2007 | US7172967 Methods for forming cobalt layers including introducing vaporized cobalt precursors and methods for manufacturing semiconductor devices using the same |
| 02/06/2007 | US7172966 Method for fabricating metallic interconnects on electronic components |
| 02/06/2007 | US7172965 Method for manufacturing semiconductor device |
| 02/06/2007 | US7172964 Method of preventing photoresist poisoning of a low-dielectric-constant insulator |
| 02/06/2007 | US7172963 Manufacturing method of semiconductor integrated circuit device that includes chemically and mechanically polishing two conductive layers using two polishing pads that have different properties |
| 02/06/2007 | US7172962 Method of manufacturing a semiconductor device |
| 02/06/2007 | US7172961 Method of fabricating an interconnect structure having reduced internal stress |
| 02/06/2007 | US7172960 Multi-layer film stack for extinction of substrate reflections during patterning |
| 02/06/2007 | US7172959 Method for forming dual damascene interconnection in semiconductor device |
| 02/06/2007 | US7172958 High-frequency wiring structure and method for producing the same |
| 02/06/2007 | US7172957 Method of fabricating n-type semiconductor diamond, and semiconductor diamond |
| 02/06/2007 | US7172956 Substrate for semiconductor light-emitting element, semiconductor light-emitting element and semiconductor light-emitting element fabrication method |
| 02/06/2007 | US7172955 Silicon composition in CMOS gates |
| 02/06/2007 | US7172954 Implantation process in semiconductor fabrication |
| 02/06/2007 | US7172953 Methods of forming nanoscopic wire-based devices and arrays |
| 02/06/2007 | US7172952 Polysilicon crystallizing method, method of fabricating thin film transistor using the same, and method of fabricating liquid crystal display thereof |
| 02/06/2007 | US7172951 Apparatus for controlled fracture substrate singulation |