Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2007
03/27/2007US7197693 Connection verification apparatus for verifying interconnection between multiple logic blocks
03/27/2007US7197439 Method for modeling semiconductor device process
03/27/2007US7197437 Method, apparatus, and computer program for the Monte Carlo ion implantation simulation, and semiconductor device manufacturing method based on the simulation
03/27/2007US7197414 System and method for identifying a manufacturing tool causing a fault
03/27/2007US7197176 Mark position detecting apparatus and mark position detecting method
03/27/2007US7197108 Method of fabricating X-ray mask and method of fabricating semiconductor device using the X-ray mask
03/27/2007US7196955 Hardmasks for providing thermally assisted switching of magnetic memory elements
03/27/2007US7196936 Ballistic injection NROM flash memory
03/27/2007US7196935 Ballistic injection NROM flash memory
03/27/2007US7196932 Nonvolatile semiconductor memory having plural data storage portions for a bit line connected to memory cells
03/27/2007US7196898 Thin film capacitor, high-density packaging substrate incorporating thin film capacitor, and method for manufacturing thin-film capacitor
03/27/2007US7196896 Dechucking method and apparatus for workpieces in vacuum processors
03/27/2007US7196888 Method of fabricating semiconductor integrated circuit device having protection circuit
03/27/2007US7196841 Lighting system, particularly for use in extreme ultraviolet (EUV) lithography
03/27/2007US7196785 System for monitoring foreign particles, process processing apparatus and method of electronic commerce
03/27/2007US7196782 Methods and systems for determining a thin film characteristic and an electrical property of a specimen
03/27/2007US7196774 Lithography device
03/27/2007US7196773 Illumination optical system and exposure apparatus using the same
03/27/2007US7196772 Lithographic apparatus and device manufacturing method
03/27/2007US7196769 Exposure apparatus and device manufacturing method
03/27/2007US7196762 TFT active matrix liquid crystal display devices
03/27/2007US7196747 Flat panel display comprising semiconductor layer with heterogeous lines
03/27/2007US7196571 Semiconductor integrated circuit device
03/27/2007US7196546 Low-swing bus driver and receiver
03/27/2007US7196540 Impedance matching commonly and independently
03/27/2007US7196533 Control system and method of semiconductor inspection system
03/27/2007US7196531 Method of manufacturing a probe card
03/27/2007US7196530 Device testing contactor, method of producing the same, and device testing carrier
03/27/2007US7196507 Apparatus for testing substrates
03/27/2007US7196429 Method of reducing film stress on overlay mark
03/27/2007US7196423 Interconnect structure with dielectric barrier and fabrication method thereof
03/27/2007US7196422 Low-dielectric constant structure with a multilayer stack of thin films with pores
03/27/2007US7196419 Transport speed monitoring apparatus and semiconductor processing system utilizing the same
03/27/2007US7196418 Semiconductor device and stacked semiconductor device that can increase flexibility in designing a stacked semiconductor device
03/27/2007US7196417 Method of manufacturing a low expansion material and semiconductor device using the low expansion material
03/27/2007US7196416 Electronic device and method of manufacturing same
03/27/2007US7196413 Heat dissipation assembly and method for producing the same
03/27/2007US7196409 Semiconductor device, semiconductor body and method of manufacturing thereof
03/27/2007US7196408 Fan out type wafer level package structure and method of the same
03/27/2007US7196407 Semiconductor device having a multi-chip stacked structure and reduced thickness
03/27/2007US7196404 Motion detector and method of producing the same
03/27/2007US7196400 Semiconductor device with enhanced orientation ratio and method of manufacturing same
03/27/2007US7196399 Epitaxially grown nitride-based compound semiconductor crystal substrate structure with low dislocation density
03/27/2007US7196397 Termination design with multiple spiral trench rings
03/27/2007US7196396 Semiconductor device having STI without divot and its manufacture
03/27/2007US7196395 Semiconductor device and manufacturing method
03/27/2007US7196394 Method and apparatus for a deposited fill layer
03/27/2007US7196393 Semiconductor device including a high voltage transistor
03/27/2007US7196387 Memory cell with an asymmetrical area
03/27/2007US7196385 Microstructure comprising a surface which is functionalized through the localized deposit of a thin layer and production method thereof
03/27/2007US7196384 Semiconductor device and method for manufacturing thereof
03/27/2007US7196383 Thin film oxide interface
03/27/2007US7196382 Transistor, method for producing an integrated circuit and a method of producing a metal silicide layer
03/27/2007US7196381 Corner protection to reduce wrap around
03/27/2007US7196379 MOS capacitor device
03/27/2007US7196378 Electrostatic-protection dummy transistor structure
03/27/2007US7196377 MOS type semiconductor device having electrostatic discharge protection arrangement
03/27/2007US7196376 Trench-type power MOSFET with embedded region at the bottom of the gate and increased breakdown voltage
03/27/2007US7196375 High-voltage MOS transistor
03/27/2007US7196370 Nonvolatile semiconductor memory device having trench-type isolation region, and method of fabricating the same
03/27/2007US7196369 Plasma damage protection circuit for a semiconductor device
03/27/2007US7196368 Semiconductor memory arrangements with crown shaped capacitor arrangements trenched in interlayer dielectric film
03/27/2007US7196365 Solid-state imaging device, solid-state imaging apparatus and methods for manufacturing the same
03/27/2007US7196362 Field-effect transistor, semiconductor device including field-effect transistor, and method for manufacturing field-effect transistor and semiconductor device
03/27/2007US7196358 Light emitting diode module with high heat dissipation
03/27/2007US7196356 Submount and semiconductor device
03/27/2007US7196354 Wavelength-converting light-emitting devices
03/27/2007US7196346 Semiconductor memory device and method for fabricating the same
03/27/2007US7196312 Non-volatile solid state image pickup device and its drive
03/27/2007US7196211 A dialkylnitrogenhafnium material including 50-650 ppm of zirconium to produce by metal organic chemical vapor deposition/oxidation a barrier film of hafnium oxide on a semiconductor substrate; vaporization stability/higher film formation rate; excellent step coverage; dielectrics; optics; electrolytes
03/27/2007US7196021 HDP-CVD deposition process for filling high aspect ratio gaps
03/27/2007US7196020 Method for PECVD deposition of selected material films
03/27/2007US7196019 Method of removing spacers and fabricating MOS transistor
03/27/2007US7196018 Semiconductor etching paste and the use thereof for localized etching of semiconductor substrates
03/27/2007US7196017 Method for etching smooth sidewalls in III-V based compounds for electro-optical devices
03/27/2007US7196016 Fabrication process for preparing recording head sliders made from silicon substrates with SiO2 overcoats
03/27/2007US7196015 Pattern forming method and electric device fabricating method using the same
03/27/2007US7196014 System and method for plasma induced modification and improvement of critical dimension uniformity
03/27/2007US7196013 Capping layer for a semiconductor device and a method of fabrication
03/27/2007US7196012 Methods for planarization of dielectric layer around metal patterns for optical efficiency enhancement
03/27/2007US7196011 Apparatus and method for treating substrates
03/27/2007US7196010 Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same
03/27/2007US7196009 Lapping carrier, apparatus for lapping a wafer and method of fabricating a lapping carrier
03/27/2007US7196008 Aluminum oxide as liner or cover layer to spacers in memory device
03/27/2007US7196007 Systems and methods of forming refractory metal nitride layers using disilazanes
03/27/2007US7196006 Manufacturing method for microelectronic device
03/27/2007US7196005 Dual damascene process with dummy features
03/27/2007US7196004 Method and fabricating semiconductor device
03/27/2007US7196003 Method for manufacturing a semiconductor device suitable for the formation of a wiring layer
03/27/2007US7196002 Method of making dual damascene with via etch through
03/27/2007US7196001 Copper-containing C4 ball-limiting metallurgy stack for enhanced reliability of packaged structures and method of making same
03/27/2007US7196000 Method for manufacturing a wafer level chip scale package
03/27/2007US7195999 Metal-substituted transistor gates
03/27/2007US7195998 Compound semiconductor device and manufacturing method thereof
03/27/2007US7195996 Method of manufacturing silicon carbide semiconductor device
03/27/2007US7195995 Method of manufacturing a multilayered doped conductor for a contact in an integrated circuit device
03/27/2007US7195994 Method for production of deep p regions in silicon, and semiconductor components produced using the method
03/27/2007US7195993 Methods of fabricating gallium nitride semiconductor layers by lateral growth into trenches
03/27/2007US7195992 Method of uniform seeding to control grain and defect density of crystallized silicon for use in sub-micron thin film transistors
03/27/2007US7195991 Method for producing an electromagnetic radiation-emitting semiconductor chip and a corresponding electromagnetic radiation-emitting semiconductor chip
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