| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/03/2007 | US7199043 Method of forming copper wiring in semiconductor device |
| 04/03/2007 | US7199042 Semiconductor device with multi-layered wiring arrangement including reinforcing patterns, and production method for manufacturing such semiconductor device |
| 04/03/2007 | US7199041 Methods for fabricating an interlayer dielectric layer of a semiconductor device |
| 04/03/2007 | US7199040 Barrier layer structure |
| 04/03/2007 | US7199039 Interconnect routing over semiconductor for editing through the back side of an integrated circuit |
| 04/03/2007 | US7199038 Method for fabricating semiconductor device |
| 04/03/2007 | US7199037 Microfeature devices and methods for manufacturing microfeature devices |
| 04/03/2007 | US7199036 Under-bump metallization layers and electroplated solder bumping technology for flip-chip |
| 04/03/2007 | US7199035 Interconnect junction providing reduced current crowding and method of manufacturing same |
| 04/03/2007 | US7199034 Flash memory device and method for fabricating the same |
| 04/03/2007 | US7199033 Pattern forming method, device, method of manufacture thereof, electro-optical apparatus, and electronic apparatus |
| 04/03/2007 | US7199032 Metal silicide induced lateral excessive encroachment reduction by silicon <110> channel stuffing |
| 04/03/2007 | US7199031 Semiconductor system having a pn transition and method for manufacturing a semiconductor system |
| 04/03/2007 | US7199030 Method of manufacturing semiconductor device |
| 04/03/2007 | US7199029 Selective deposition of ZnO nanostructures on a silicon substrate using a nickel catalyst and either patterned polysilicon or silicon surface modification |
| 04/03/2007 | US7199028 Method for manufacturing semiconductor device |
| 04/03/2007 | US7199027 Method of manufacturing a semiconductor film by plasma CVD using a noble gas and nitrogen |
| 04/03/2007 | US7199026 Semiconductor device, cutting equipment for cutting semiconductor device, and method for cutting the same |
| 04/03/2007 | US7199025 Fabrication and assembly structures and methods for memory devices |
| 04/03/2007 | US7199024 Method of manufacturing a semiconductor device |
| 04/03/2007 | US7199023 Atomic layer deposited HfSiON dielectric films wherein each precursor is independendently pulsed |
| 04/03/2007 | US7199022 Manufacturing method of semiconductor device |
| 04/03/2007 | US7199021 Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication |
| 04/03/2007 | US7199020 Nitridation of STI liner oxide for modulating inverse width effects in semiconductor devices |
| 04/03/2007 | US7199019 Method for forming tungsten contact plug |
| 04/03/2007 | US7199018 Plasma assisted pre-planarization process |
| 04/03/2007 | US7199017 Methods of forming semiconductor circuitry |
| 04/03/2007 | US7199016 Integrated circuit resistor |
| 04/03/2007 | US7199015 Rare earth-oxides, rare earth-nitrides, rare earth-phosphides and ternary alloys with silicon |
| 04/03/2007 | US7199014 Field effect transistor and method of manufacturing the same |
| 04/03/2007 | US7199013 Semiconductor device and method for fabricating the same |
| 04/03/2007 | US7199012 Method of forming a trench in a semiconductor device |
| 04/03/2007 | US7199011 Method to reduce transistor gate to source/drain overlap capacitance by incorporation of carbon |
| 04/03/2007 | US7199010 Method of maufacturing a trench-gate semiconductor device |
| 04/03/2007 | US7199009 Method for fabricating power mosfet |
| 04/03/2007 | US7199008 Microelectronic device having floating gate protective layer and method of manufacture therefor |
| 04/03/2007 | US7199007 Non-volatile memory device having a nitride barrier to reduce the fast erase effect |
| 04/03/2007 | US7199006 Planarization method of manufacturing a superjunction device |
| 04/03/2007 | US7199005 Methods of forming pluralities of capacitors |
| 04/03/2007 | US7199004 Method of forming capacitor of semiconductor device |
| 04/03/2007 | US7199003 Method of manufacturing capacitor of semiconductor device by simplifying process of forming dielectric layer and apparatus therefor |
| 04/03/2007 | US7199002 Process for fabrication of a ferroelectric capacitor |
| 04/03/2007 | US7199001 Method of forming MIM capacitor electrodes |
| 04/03/2007 | US7199000 Method for manufacturing semiconductor device |
| 04/03/2007 | US7198999 Flash memory device having a graded composition, high dielectric constant gate insulator |
| 04/03/2007 | US7198998 Method of manufacturing bipolar-complementary metal oxide semiconductor |
| 04/03/2007 | US7198997 Method for producing semiconductor substrate, method for producing field effect transistor, semiconductor substrate, and field effect transistor |
| 04/03/2007 | US7198996 Component built-in module and method for producing the same |
| 04/03/2007 | US7198995 Strained finFETs and method of manufacture |
| 04/03/2007 | US7198994 Semiconductor device and manufacturing method of semiconductor device |
| 04/03/2007 | US7198993 Method of fabricating a combined fully-depleted silicon-on-insulator (FD-SOI) and partially-depleted silicon-on-insulator (PD-SOI) devices |
| 04/03/2007 | US7198992 Method of manufacturing a semiconductor device comprising doping steps using gate electrodes and resists as masks |
| 04/03/2007 | US7198990 Method for making a FET channel |
| 04/03/2007 | US7198989 Method of producing a COF flexible printed wiring board |
| 04/03/2007 | US7198988 Method for eliminating backside metal peeling during die separation |
| 04/03/2007 | US7198987 Overmolded semiconductor package with an integrated EMI and RFI shield |
| 04/03/2007 | US7198986 Electronic parts built-in substrate and method of manufacturing the same |
| 04/03/2007 | US7198984 Semiconductor device and method of manufacture thereof, circuit board and electronic instrument |
| 04/03/2007 | US7198983 Solder ball excellent in micro-adhesion preventing properties and wetting properties and method for preventing the micro-adhesion of solder balls |
| 04/03/2007 | US7198982 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 04/03/2007 | US7198981 Vacuum sealed surface acoustic wave pressure sensor |
| 04/03/2007 | US7198979 Method for manufacturing a stack arrangement of a memory module |
| 04/03/2007 | US7198978 Method for fabricating semiconductor device and apparatus for fabricating the same |
| 04/03/2007 | US7198976 Solid-state imaging device and method for manufacturing the same |
| 04/03/2007 | US7198975 Semiconductor methods and structures |
| 04/03/2007 | US7198974 Micro-mechanically strained semiconductor film |
| 04/03/2007 | US7198973 Method for fabricating an interference display unit |
| 04/03/2007 | US7198972 Laser diode having an active layer containing N and operable in a 0.6 μm wavelength band |
| 04/03/2007 | US7198971 Nitride semiconductor thin film having fewer defects and method of growing the same |
| 04/03/2007 | US7198970 Technique for perfecting the active regions of wide bandgap semiconductor nitride devices |
| 04/03/2007 | US7198969 Semiconductor chip assemblies, methods of making same and components for same |
| 04/03/2007 | US7198968 Method of fabricating thin film transistor array substrate |
| 04/03/2007 | US7198967 Active matrix type semiconductor display device |
| 04/03/2007 | US7198966 Electron-emitting device, electron source, image-forming apparatus, and method for producing electron-emitting device and electron-emitting apparatus |
| 04/03/2007 | US7198965 Method for making a neo-layer comprising embedded discrete components |
| 04/03/2007 | US7198964 Method and apparatus for detecting faults using principal component analysis parameter groupings |
| 04/03/2007 | US7198963 Methodologies for efficient inspection of test structures using electron beam scanning and step and repeat systems |
| 04/03/2007 | US7198962 Semiconductor device and manufacturing method thereof including a probe test step and a burn-in test step |
| 04/03/2007 | US7198961 Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope |
| 04/03/2007 | US7198960 Method for fabricating ferroelectric capacitor |
| 04/03/2007 | US7198959 Process for fabrication of a ferrocapacitor |
| 04/03/2007 | US7198888 Water-soluble material, chemically amplified resist and pattern formation method using the same |
| 04/03/2007 | US7198887 Fine pattern photoresists for photolithography; protective coatings |
| 04/03/2007 | US7198886 Forming a masking material layer on a surface of a working film by coating with inorganic compound and volatile component; volatilizing; forming resist layer; patterning resist film, dry-etching |
| 04/03/2007 | US7198885 inkjet technique with lithographic technique, providing extremely high resolution, is used to fabricate transistor source and drain electrodes, parts of interconnections and circuit electrodes, enabling highly conductive materials to be used |
| 04/03/2007 | US7198873 Lithographic processing optimization based on hypersampled correlations |
| 04/03/2007 | US7198853 Adhesive sheet of cross-linked silicone, method of manufacturing thereof, and device |
| 04/03/2007 | US7198832 Method for edge sealing barrier films |
| 04/03/2007 | US7198823 Siloxane-based resin containing germanium and an interlayer insulating film for a semiconductor device using the same |
| 04/03/2007 | US7198816 dispersoid convects within the dispersion medium toward the edges of the dispersion to form narrow lines of the dispersoid without using photolithography |
| 04/03/2007 | US7198729 Slurry capable of reducing scratches on a region to be polished during Chemical Mechanical Polishing |
| 04/03/2007 | US7198727 Etching process for micromachining materials and devices fabricated thereby |
| 04/03/2007 | US7198705 Plating-rinse-plating process for fabricating copper interconnects |
| 04/03/2007 | US7198704 Methods of reducing interlayer discontinuities in electrochemically fabricated three-dimensional structures |
| 04/03/2007 | US7198694 Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems |
| 04/03/2007 | US7198671 Layered substrates for epitaxial processing, and device |
| 04/03/2007 | US7198670 Method of fabricating board having periodically poled region |
| 04/03/2007 | US7198662 Aqueous solution containing sulfonate compound |
| 04/03/2007 | US7198552 Polishing apparatus |
| 04/03/2007 | US7198448 Vacuum process system |