Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2007
04/12/2007WO2006055929A3 Minimizing resist poisoning in the manufacture of semiconductor devices
04/12/2007WO2006055460A3 Post-etch treatment to remove residues
04/12/2007WO2006052958A3 Copper interconnect wiring and method of forming thereof
04/12/2007WO2006039677A3 Semiconductor doping using substrate tilting
04/12/2007WO2006022997A3 Method and system for substrate temperature profile control
04/12/2007WO2006007069A3 Method of forming a nanocluster charge storage device
04/12/2007WO2005119775A3 Semiconductor structure comprising a stress sensitive element and method of measuring a stress in a semiconductor structure
04/12/2007WO2005050171A3 Methods and compositions relating to single reactive center reagents
04/12/2007WO2004107406A3 Semiconductor electronic devices and methods
04/12/2007WO2004086458A3 Electronic device including a self-assembled monolayer, and a method of fabricating the same
04/12/2007US20070083021 Fluorocopolymer, method for its production and resist composition containing it
04/12/2007US20070082833 Low cost and low dishing slurry for polysilicon cmp
04/12/2007US20070082508 Methods for discretized processing and process sequence integration of regions of a substrate
04/12/2007US20070082507 Method and apparatus for the low temperature deposition of doped silicon nitride films
04/12/2007US20070082506 Multi-step annealing process
04/12/2007US20070082505 Method of forming an electrically insulating layer on a compound semiconductor
04/12/2007US20070082504 Pre-metal dielectric semiconductor structure and a method for depositing a pre-metal dielectric on a semiconductor structure
04/12/2007US20070082503 Method of fabricating a dielectric layer
04/12/2007US20070082502 Method for producing a dielectric layer on a carrier material and an integrated circuit comprising a capacitor incorporating a dielectric layer
04/12/2007US20070082501 Novel integrated circuit support structures and their fabrication
04/12/2007US20070082500 Ti, Ta, Hf, Zr and related metal silicon amides for ALD/CVD of metal-silicon nitrides, oxides or oxynitrides
04/12/2007US20070082499 Photoresist coating apparatus, medium, and method efficiently spraying photoresist
04/12/2007US20070082498 Method of cleaning a wafer
04/12/2007US20070082497 Composition for removing an insulation material and related methods
04/12/2007US20070082496 Resist film removing method
04/12/2007US20070082495 Semiconductor device having nano-pillars and method therefor
04/12/2007US20070082494 Method for forming silicide layer
04/12/2007US20070082493 Method of manufacturing semiconductor device
04/12/2007US20070082492 Semiconductor memory device and method of fabricating the same
04/12/2007US20070082491 Semiconductor device manufacturing method and chemical fluid used for manufacturing semiconductor device
04/12/2007US20070082490 Apparatus of chemical mechanical polishing and chemical mechanical polishing process
04/12/2007US20070082489 Method of fabricating openings and contact holes
04/12/2007US20070082488 Semiconductor device and manufacturing method thereof
04/12/2007US20070082487 Methods for discretized processing of regions of a substrate
04/12/2007US20070082486 Method for manufacturing nitride based single crystal substrate and method for manufacturing nitride based semiconductor device
04/12/2007US20070082485 Methods for discretized formation of masking and capping layers on a substrate
04/12/2007US20070082484 Methods of fabricating semiconductor device having slope at lower sides of interconnection hole with etch-stop layer
04/12/2007US20070082483 Method of etching carbon-containing layer and method of fabricating semiconductor device
04/12/2007US20070082482 Method for forming contact hole of semiconductor device
04/12/2007US20070082481 Method of forming dual damascene pattern
04/12/2007US20070082480 Ultra thin fet
04/12/2007US20070082479 Chemical mechanical polishing techniques for integrated circuit fabrication
04/12/2007US20070082478 Silicone polymer and organic polymer containing alloy and/or hybrid emulsion compositions
04/12/2007US20070082477 Integrated circuit fabricating techniques employing sacrificial liners
04/12/2007US20070082476 Method of manufacturing semiconductor device
04/12/2007US20070082475 Method for forming bonding pad and semiconductor device having the bonding pad formed thereby
04/12/2007US20070082474 Process for making a metal seed layer
04/12/2007US20070082473 Process for low resistance metal cap
04/12/2007US20070082472 Method of manufacturing contact hole
04/12/2007US20070082471 Method of fabricating semiconductor memory device having plurality of storage node electrodes
04/12/2007US20070082470 Gate technology for strained surface channel and strained buried channel MOSFET devices
04/12/2007US20070082469 Forming heaters for phase change memories
04/12/2007US20070082468 Atomic layer deposition methods
04/12/2007US20070082467 Method for manufacturing compound semiconductor substrate
04/12/2007US20070082466 High density plasma chemical vapor deposition apparatus, operating method thereof, and method of manufacturing semiconductor device
04/12/2007US20070082465 Method of fabricating GaN substrate
04/12/2007US20070082464 Apparatus for block assembly process
04/12/2007US20070082463 Semiconductor device with semiconductor chip and adhesive film and method for producing the same
04/12/2007US20070082462 Wafer having indicator for first die and method of attaching die of the wafer
04/12/2007US20070082461 Method of Forming a Recessed Structure Employing a Reverse Tone Process
04/12/2007US20070082460 Wafer processing method and wafer processing apparatus
04/12/2007US20070082459 Probes, methods of making probes and applications of probes
04/12/2007US20070082458 Semiconductor device and method of fabricating the same
04/12/2007US20070082457 Method For Filling Of Nanoscale Holes And Trenches And For Planarizing Of A Wafer Surface
04/12/2007US20070082456 Polishing composition and polishing method
04/12/2007US20070082455 Manufacturing method of semiconductor substrate
04/12/2007US20070082454 Microelectronic device and method of manufacturing a microelectronic device
04/12/2007US20070082453 Method for making a semiconductor structure using silicon germanium
04/12/2007US20070082452 Semiconductor device manufacturing method
04/12/2007US20070082451 Methods to fabricate mosfet devices using a selective deposition process
04/12/2007US20070082450 Semiconductor device and method of manufacturing such a semiconductor device
04/12/2007US20070082449 Method and apparatus for maintaining topographical uniformity of a semiconductor memory array
04/12/2007US20070082448 Semiconductor devices having transistors with vertical channels and method of fabricating the same
04/12/2007US20070082447 Apparatus and method for a non-volatile memory structure comprising a multi-layer silicon-rich, silicon nitride trapping layer
04/12/2007US20070082446 Methods for fabricating non-volatile memory cell array
04/12/2007US20070082445 Metal-gate cmos device and fabrication method of making same
04/12/2007US20070082444 Dynamic random access memory and menufacturing method thereof
04/12/2007US20070082443 Method for manufacturing liquid crystal display device
04/12/2007US20070082442 Recess gate transistor structure for use in semiconductor device and method thereof
04/12/2007US20070082441 Trench FET with Improved Body to Gate Alignment
04/12/2007US20070082440 Semiconductor device and manufacturing method thereof
04/12/2007US20070082439 Semiconductor device having a dual stress liner, method of manufacturing the semiconductor device and light exposure apparatus for forming the dual stress liner
04/12/2007US20070082438 Thin film transistor and method for fabrication of an electronic device
04/12/2007US20070082437 Methods for fabricating a semiconductor structure using a mandrel and semiconductor structures formed thereby
04/12/2007US20070082436 Method of fabricating reflection type liquid crystal display
04/12/2007US20070082435 Flat panel display and fabrication method thereof
04/12/2007US20070082434 Manufacturing of thin film transistor array panel
04/12/2007US20070082433 Thin film transistor
04/12/2007US20070082432 Variable exposure photolithography
04/12/2007US20070082431 Programmable fuse with silicon germanium
04/12/2007US20070082430 Semiconductor device and manufacturing method thereof
04/12/2007US20070082429 Semiconductor substrate for build-up packages
04/12/2007US20070082428 Semiconductor device protective structure and method for fabricating the same
04/12/2007US20070082427 Method for manufacturing a compound semiconductor device having an improved via hole
04/12/2007US20070082425 Using a center pole illumination scheme to improve symmetry for contact hole lithography
04/12/2007US20070082424 Fabricating method of a thin film transistor array
04/12/2007US20070082423 Method of fabricating CMOS image sensor
04/12/2007US20070082422 Method of fabricating suspended beam in a MEMS process
04/12/2007US20070082421 Miniature Silicon Condenser Microphone
04/12/2007US20070082420 Surface preparation for selective silicon fusion bonding