| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/17/2007 | US7205236 Semiconductor substrate polishing methods and equipment |
| 04/17/2007 | US7205235 Method for reducing corrosion of metal surfaces during semiconductor processing |
| 04/17/2007 | US7205234 Method of forming metal silicide |
| 04/17/2007 | US7205233 Method for forming CoWRe alloys by electroless deposition |
| 04/17/2007 | US7205232 Method of forming a self-aligned contact structure using a sacrificial mask layer |
| 04/17/2007 | US7205231 Method for in-situ uniformity optimization in a rapid thermal processing system |
| 04/17/2007 | US7205230 Process for manufacturing a wiring board having a via |
| 04/17/2007 | US7205229 Interconnect alloys and methods and apparatus using same |
| 04/17/2007 | US7205228 Selective metal encapsulation schemes |
| 04/17/2007 | US7205227 Methods of forming CMOS constructions |
| 04/17/2007 | US7205226 Sacrificial layer for protection during trench etch |
| 04/17/2007 | US7205225 Method of manufacturing a semiconductor device and semiconductor device obtained by using such a method |
| 04/17/2007 | US7205224 Very low dielectric constant plasma-enhanced CVD films |
| 04/17/2007 | US7205223 Method of forming an interconnect structure for a semiconductor device |
| 04/17/2007 | US7205222 Method of fabricating a semiconductor integrated circuit that includes patterning a semiconductor substrate with a first photomask that uses metal for blocking light and patterning the same substrate with a second photomask that uses organic resin for blocking light |
| 04/17/2007 | US7205221 Under bump metallization pad and solder bump connections |
| 04/17/2007 | US7205220 Gallium nitride based III-V group compound semiconductor device and method of producing the same |
| 04/17/2007 | US7205219 Methods of forming integrated circuits devices having pad contact plugs in the cell array and peripheral circuit regions of the integrated circuit substrate |
| 04/17/2007 | US7205218 Method including forming gate dielectrics having multiple lanthanide oxide layers |
| 04/17/2007 | US7205217 Method for forming trench gate dielectric layer |
| 04/17/2007 | US7205216 Modification of electrical properties for semiconductor wafers |
| 04/17/2007 | US7205215 Fabrication method of thin film transistor |
| 04/17/2007 | US7205214 Device transferring method |
| 04/17/2007 | US7205213 Device transferring method |
| 04/17/2007 | US7205212 Device transferring method |
| 04/17/2007 | US7205211 Method for handling semiconductor layers in such a way as to thin same |
| 04/17/2007 | US7205210 Semiconductor structure having strained semiconductor and method therefor |
| 04/17/2007 | US7205209 Fabrication of stacked dielectric layer for suppressing electrostatic charge buildup |
| 04/17/2007 | US7205208 Method of manufacturing a semiconductor device |
| 04/17/2007 | US7205207 High performance strained CMOS devices |
| 04/17/2007 | US7205206 Method of fabricating mobility enhanced CMOS devices |
| 04/17/2007 | US7205205 Ramp temperature techniques for improved mean wafer before clean |
| 04/17/2007 | US7205204 Semiconductor device and fabrication method for the same |
| 04/17/2007 | US7205203 Method of fabricating crystalline silicon and switching device using crystalline silicon |
| 04/17/2007 | US7205202 Semiconductor device and method for regional stress control |
| 04/17/2007 | US7205201 CMOS compatible process with different-voltage devices |
| 04/17/2007 | US7205199 Method of forming a recess channel trench pattern, and fabricating a recess channel transistor |
| 04/17/2007 | US7205198 Method of making a bi-directional read/program non-volatile floating gate memory cell |
| 04/17/2007 | US7205197 Method of fabricating a nonvolatile semiconductor memory |
| 04/17/2007 | US7205196 Manufacturing process and structure of integrated circuit |
| 04/17/2007 | US7205195 Method for fabricating NROM memory cells with trench transistors |
| 04/17/2007 | US7205194 Method of fabricating a flash memory cell |
| 04/17/2007 | US7205193 Semiconductor device and method for fabricating the same |
| 04/17/2007 | US7205192 Semiconductor memory device capable of preventing oxidation of plug and method for fabricating the same |
| 04/17/2007 | US7205191 Semiconductor integrated circuit and method of designing the same |
| 04/17/2007 | US7205190 Semiconductor device fabrication method |
| 04/17/2007 | US7205189 Method of manufacturing a dual bit flash memory |
| 04/17/2007 | US7205188 Method for producing high-speed vertical npn bipolar transistors and complementary MOS transistors on a chip |
| 04/17/2007 | US7205187 Micro-feature fill process and apparatus using hexachlorodisilane or other chlorine-containing silicon precursor |
| 04/17/2007 | US7205186 System and method for suppressing oxide formation |
| 04/17/2007 | US7205185 Self-aligned planar double-gate process by self-aligned oxidation |
| 04/17/2007 | US7205184 Method of crystallizing silicon film and method of manufacturing thin film transistor liquid crystal display |
| 04/17/2007 | US7205183 Methods of manufacturing thin film transistors using masks to protect the channel regions from impurities while doping a semiconductor layer to form source/drain regions |
| 04/17/2007 | US7205182 Method of manufacturing semiconductor device |
| 04/17/2007 | US7205180 Process of fabricating semiconductor packages using leadframes roughened with chemical etchant |
| 04/17/2007 | US7205179 Hydrogen diffusion hybrid port and method of making |
| 04/17/2007 | US7205178 Land grid array packaged device and method of forming same |
| 04/17/2007 | US7205177 Methods of bonding two semiconductor devices |
| 04/17/2007 | US7205176 Surface MEMS mirrors with oxide spacers |
| 04/17/2007 | US7205175 Method for encapsulating a chip and/or other article |
| 04/17/2007 | US7205174 Micromechanical actuator with multiple-plane comb electrodes and methods of making |
| 04/17/2007 | US7205173 Method of fabricating micro-electromechanical systems |
| 04/17/2007 | US7205172 Display device and method of manufacturing the same |
| 04/17/2007 | US7205171 Thin film transistor and manufacturing method thereof including a lightly doped channel |
| 04/17/2007 | US7205170 Method for the production of LED bodies |
| 04/17/2007 | US7205169 Driving circuit for AMOLED display and driving method thereof |
| 04/17/2007 | US7205168 Semiconductor light emitting device, its manufacturing method, integrated semiconductor light emitting apparatus, its manufacturing method, illuminating apparatus, and its manufacturing method |
| 04/17/2007 | US7205167 Method to detect photoresist residue on a semiconductor device |
| 04/17/2007 | US7205166 Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties |
| 04/17/2007 | US7205164 Methods for fabricating magnetic cell junctions and a structure resulting and/or used for such methods |
| 04/17/2007 | US7205163 Curvature anisotropy in magnetic bits for a magnetic random access memory |
| 04/17/2007 | US7205090 Interpolymer of an adamantyl (meth)acrylate, a tetrahydrofuranonyl (meth)acrylate, and a cyclohexyl or cyclopentyl (meth)acrylate and an acid generator; gives particularly excellent pattern shape and excellent line edge roughness |
| 04/17/2007 | US7205089 Cross-linking polymer for organic anti-reflective coating, organic anti-reflective coating composition comprising the same and method for forming photoresist pattern using the same |
| 04/17/2007 | US7205087 Solvents and photoresist compositions for 193 nm imaging |
| 04/17/2007 | US7205085 Composition having permitivity being radiation-sensitively changeable and method for forming permitivity pattern |
| 04/17/2007 | US7205078 Determining the backscattering intensity by using the reflection coefficient (rn), the transmission coefficient (tn), and the scatter distribution. |
| 04/17/2007 | US7205076 Shaping laser beams; surface with aperture and reflection layer; liquid crystal display |
| 04/17/2007 | US7205075 Method of forming a vertical memory device with a rectangular trench |
| 04/17/2007 | US7205074 Venting of pellicle cavity for a mask |
| 04/17/2007 | US7205056 First crystal layer having a Bi-based perovskite structure is intermittently formed in a surface direction of the ceramic film, and second crystal layer having a lower melting point composed of ABO-type oxides in which Bi is in an A-site and Si or Ge is in a B-site is between the first crystals |
| 04/17/2007 | US7205033 Method for forming polycrystalline silicon film of polycrystalline silicon TFT |
| 04/17/2007 | US7205030 polysiloxane, a pore-forming agent, an onium salt, and a solvent is applied onto a substrate, solvent evaporated, polysiloxane polymerized, pore forming agent evaporated |
| 04/17/2007 | US7205025 Apparatus and method for drying under reduced pressure, and coating film forming apparatus |
| 04/17/2007 | US7205019 Electroluminescence displaying; electrolytic cells; preferential doping at interface between electrode and light emitter using photoresists |
| 04/17/2007 | US7204999 Method of production of nanoparticle and nanoparticle produced by the method of production |
| 04/17/2007 | US7204960 Apparatus and method for calibration of a dispensing system |
| 04/17/2007 | US7204936 Containing roll-off reducing agent , used in polishing the substrate for precision parts |
| 04/17/2007 | US7204934 Forming a hard mask over the substrate and etching a trench in the substrate using the hard mask, and forming a dielectric layer over the hard mask and in the trench, where the dielectric layer lines the trench, conductive material is then applied over the dielectric layer, etching to planarize |
| 04/17/2007 | US7204924 Method and apparatus to deposit layers with uniform properties |
| 04/17/2007 | US7204921 Vacuum apparatus and vacuum processing method |
| 04/17/2007 | US7204917 Workpiece surface influencing device designs for electrochemical mechanical processing and method of using the same |
| 04/17/2007 | US7204916 Plating apparatus and plating method |
| 04/17/2007 | US7204912 Method and apparatus for an improved bellows shield in a plasma processing system |
| 04/17/2007 | US7204889 Using nitrogen laden isopropyl alcohol as dynamic barrier that wipes down surface during rinsing and drying; entraining water and contaminants |
| 04/17/2007 | US7204888 Lift pin assembly for substrate processing |
| 04/17/2007 | US7204887 Wafer holding, wafer support member, wafer boat and heat treatment furnace |
| 04/17/2007 | US7204886 Apparatus and method for hybrid chemical processing |
| 04/17/2007 | US7204881 Silicon wafer for epitaxial growth, an epitaxial wafer, and a method for producing it |
| 04/17/2007 | US7204865 Polishing composition |
| 04/17/2007 | US7204743 Integrated circuit interconnect fabrication systems |