| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/10/2007 | US7200907 Method of manufacturing piezoelectric device |
| 04/05/2007 | WO2007038710A2 Intra-cavity gettering of nitrogen in sic crystal growth |
| 04/05/2007 | WO2007038635A1 Hydrogen treatment to improve photoresist adhesion and rework consistency |
| 04/05/2007 | WO2007038575A2 Process for integrating planar and non-planar cmos transistors on a bulk substrate and article made thereby |
| 04/05/2007 | WO2007038558A2 Shape memory device |
| 04/05/2007 | WO2007038514A2 Apparatus and method for substrate edge etching |
| 04/05/2007 | WO2007038427A2 Method and apparatus for electronic device manufacture using shadow masks |
| 04/05/2007 | WO2007038399A2 Metal cations for initiating chemical mechanical polishing |
| 04/05/2007 | WO2007038396A1 Method of flip chip mounting pressure sensor dies to substrates and pressure sensors formed thereby |
| 04/05/2007 | WO2007038263A2 Ozonation for elimination of bacteria for wet processing systems |
| 04/05/2007 | WO2007038256A2 Apparatus for the removal of a metal oxide from a substrate and methods therefor |
| 04/05/2007 | WO2007038199A1 Single camera three-point vision alignment system for a device handler |
| 04/05/2007 | WO2007038180A2 Hydrogen sensor |
| 04/05/2007 | WO2007038164A2 Methods for nanostructure doping |
| 04/05/2007 | WO2007038161A1 Methods for modulating the work functions of film layers |
| 04/05/2007 | WO2007038096A2 Discontinuous conveyor system |
| 04/05/2007 | WO2007038054A2 Apparatus for the removal of an edge polymer from a substrate and methods therefor |
| 04/05/2007 | WO2007038030A2 Apparatus for the removal of a fluorinated polymer from a substrate and methods therefor |
| 04/05/2007 | WO2007037976A2 Passivation structure for ferroelectric thin-film devices |
| 04/05/2007 | WO2007037934A1 Method for forming narrow structures in a semiconductor device |
| 04/05/2007 | WO2007037906A2 Methods for synthesis of metal nanowires |
| 04/05/2007 | WO2007037881A2 Semiconductor fabrication process including silicide stringer removal processing |
| 04/05/2007 | WO2007037847A1 Methods for fabrication of a stressed mos device |
| 04/05/2007 | WO2007037826A1 Substrate processing method and apparatus using a combustion flame |
| 04/05/2007 | WO2007037825A1 Method and apparatus for isolative substrate edge area processing |
| 04/05/2007 | WO2007037805A2 Film stack and method for fabricating the same |
| 04/05/2007 | WO2007037762A1 Fabrication of semiconductor devices for light emission |
| 04/05/2007 | WO2007037628A1 Photoresist stripper composition and method for manufacturing a semiconductor device using the same |
| 04/05/2007 | WO2007037564A1 Apparatus for manufacturing using laser |
| 04/05/2007 | WO2007037553A1 Process for producing substrate with metal wiring |
| 04/05/2007 | WO2007037504A1 Method for producing group 3-5 nitride semiconductor and method for manufacturing light-emitting device |
| 04/05/2007 | WO2007037397A1 Method and apparatus for transferring and receiving article by overhead hoist transport carrier |
| 04/05/2007 | WO2007037358A1 Organic el display and method for manufacturing same |
| 04/05/2007 | WO2007037343A1 Diode and photovoltaic element using carbon nanostructure |
| 04/05/2007 | WO2007037316A1 Sample-holding device, and sample-adsorbing apparatus and sample treatment method using the holding device |
| 04/05/2007 | WO2007037314A1 Signal measuring device |
| 04/05/2007 | WO2007037305A1 Substrate processing method |
| 04/05/2007 | WO2007037280A1 Positive resist composition and method for forming resist pattern |
| 04/05/2007 | WO2007037233A1 Substrate processing apparatus |
| 04/05/2007 | WO2007037221A1 Functional element package and process for producing the same |
| 04/05/2007 | WO2007037219A1 Laser dicing device and laser dicing method |
| 04/05/2007 | WO2007037165A1 Drawing data acquiring method and device, and drawing method and apparatus |
| 04/05/2007 | WO2007037161A1 Data recording method |
| 04/05/2007 | WO2007037106A1 Method for manufacturing integrated circuit device having three-dimensional multilayer structure |
| 04/05/2007 | WO2007037096A1 Method for manufacturing (110) silicon wafer |
| 04/05/2007 | WO2007037094A1 Method for manufacturing a semiconductor device with nitride and oxide layers |
| 04/05/2007 | WO2007037013A1 Semiconductor analyzer |
| 04/05/2007 | WO2007037012A1 Chamber matching method, semiconductor process assisting device, maintenance method, and maintenance assisting device |
| 04/05/2007 | WO2007037005A1 Work receiving device |
| 04/05/2007 | WO2007036998A1 Semiconductor device and its fabrication method |
| 04/05/2007 | WO2007036997A1 Liquid-material feeder and control method for liquid-material feeder |
| 04/05/2007 | WO2007036994A1 Semiconductor device, its fabrication method, and film fabrication method |
| 04/05/2007 | WO2007036991A1 Atmosphere controlled joining device, joining method, and electronic device |
| 04/05/2007 | WO2007036985A1 Control method, and control system |
| 04/05/2007 | WO2007036982A1 Composition for antireflection film formation, comprising product of reaction between isocyanuric acid compound and benzoic acid compound |
| 04/05/2007 | WO2007036898A2 Semiconductor device with improved contact pad and method for fabrication thereof |
| 04/05/2007 | WO2007036876A1 Double gate non-volatile memory device and method of manufacturing |
| 04/05/2007 | WO2007036874A1 Finfet-based non-volatile memory device |
| 04/05/2007 | WO2007036865A1 Composite host-seed substrate for growing an iii-v light-emitting device |
| 04/05/2007 | WO2007036793A2 Power mosfets and methods of making same |
| 04/05/2007 | WO2007036757A1 Wire-bonded semiconductor component and manufacturing method thereof |
| 04/05/2007 | WO2007036642A2 Method and device for extracting a silicon chip from a silicon wafer and for transporting the chip until it is mounted on an electronic device |
| 04/05/2007 | WO2007036631A1 Method for making a thin-film element |
| 04/05/2007 | WO2007036449A1 Method for accelerating etching of silicon |
| 04/05/2007 | WO2007036246A1 Method of simulating a post-exposure-bake (peb) process in a lithographic procedure |
| 04/05/2007 | WO2007036208A1 Method for connecting layers, corresponding component and organic light-emitting diode |
| 04/05/2007 | WO2007035983A1 Ion detector |
| 04/05/2007 | WO2007016514A3 Metal gate mosfet by full semiconductor metal alloy conversion |
| 04/05/2007 | WO2007008555A3 Workpiece support structures and apparatus for accessing same |
| 04/05/2007 | WO2007008555A2 Workpiece support structures and apparatus for accessing same |
| 04/05/2007 | WO2007005196A3 Scalable uniform thermal plate |
| 04/05/2007 | WO2007002547A3 Through-wafer vias and surface metallization for coupling thereto |
| 04/05/2007 | WO2007002215A3 Methods for forming a transistor and modulating channel stress |
| 04/05/2007 | WO2006133995A3 Monolithically integrated semiconductor assembly comprising a power component and method for producing a monolithically integrated semiconductor assembly |
| 04/05/2007 | WO2006130995A3 Fluorescent photopolymerizable resins and uses thereof |
| 04/05/2007 | WO2006127462A9 Method to increase the compressive stress of pecvd silicon nitride films |
| 04/05/2007 | WO2006127305A3 Method for changing threshold voltage of device in resist asher |
| 04/05/2007 | WO2006124174A3 High voltage silicon carbide mos-bipolar devices having bi-directional blocking capabilities and methods of fabricating the same |
| 04/05/2007 | WO2006107434A3 Cmos-based low esr capacitor and esd-protection device and method |
| 04/05/2007 | WO2006082568A3 Method of manufacturing a lateral semiconductor device |
| 04/05/2007 | WO2006073947A3 Apparatus for spatial and temporal control of temperature on a substrate |
| 04/05/2007 | WO2006060134A3 Restricted radiated heating assembly for high temperature processing |
| 04/05/2007 | WO2006047028A3 Packaged device and method of forming same |
| 04/05/2007 | WO2006038030A3 Equipment for wafer bonding |
| 04/05/2007 | WO2006029250A8 Process and fabrication methods for emitter wrap through back contact solar cells |
| 04/05/2007 | WO2006020265A3 Atomic layer deposition of tantalum-containing materials using the tantalum precursor taimata |
| 04/05/2007 | WO2005101466A3 Methods for fabricating isolated micro- and nano- structures using soft or imprint lithography |
| 04/05/2007 | WO2005085496A3 Ferroelectric thin film composites with improved top contact adhesion and devices containing the same |
| 04/05/2007 | WO2005069936A3 Use of radiation-hardened chalcogenide technology |
| 04/05/2007 | WO2005043596A3 Layered hard mask and dielectric materials and methods therefor |
| 04/05/2007 | US20070079261 Integrated circuit device and method for forming the same |
| 04/05/2007 | US20070078256 Prepolymers, prepolymer compositions, high-molecular-weight polymers with pore structure, and dielectric films |
| 04/05/2007 | US20070077871 Chemical mechanical polishing devices, pad conditioner assembly and polishing pad conditioning method thereof |
| 04/05/2007 | US20070077870 Pad conditioner, pad conditioning method, and polishing apparatus |
| 04/05/2007 | US20070077868 Cerium-based abrasive, abrasive slurry, and production of cerium-based abrasive |
| 04/05/2007 | US20070077867 Polishing pad and polishing apparatus |
| 04/05/2007 | US20070077862 System for Endpoint Detection with Polishing Pad |
| 04/05/2007 | US20070077782 Treatment of low dielectric constant films using a batch processing system |
| 04/05/2007 | US20070077781 Plural treatment step process for treating dielectric films |
| 04/05/2007 | US20070077780 Process to open carbon based hardmask |