Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2007
04/24/2007US7208417 Apparatus and method for supplying chemicals
04/24/2007US7208416 Method of treating a structured surface
04/24/2007US7208415 Plasma treatment method for electromigration reduction
04/24/2007US7208414 Method for enhanced uni-directional diffusion of metal and subsequent silicide formation
04/24/2007US7208413 Formation of boride barrier layers using chemisorption techniques
04/24/2007US7208412 Method of forming metal oxide and semimetal oxide
04/24/2007US7208411 A transfer module, a supercritical processing module, a vacuum module, and a metal deposition module; electrodeposition of metals for semiconductors with a desorb step at nonexcessive temperatures, and a preclean method that uses a chelation compound and an acid or amine
04/24/2007US7208410 Methods relating to forming interconnects
04/24/2007US7208409 Integrated circuit metal silicide method
04/24/2007US7208408 Method for fabricating a dual damascene contact in an insulating film having density gradually varying in the thickness direction
04/24/2007US7208407 Flash memory cells with reduced distances between cell elements
04/24/2007US7208406 Method for forming gate in semiconductor device
04/24/2007US7208405 Insulating film forming method capable of enhancing adhesion of silicon carbide film, etc. and semiconductor device
04/24/2007US7208404 Method to reduce Rs pattern dependence effect
04/24/2007US7208403 Tile-based routing method of a multi-layer circuit board and related structure
04/24/2007US7208402 Method and apparatus for improved power routing
04/24/2007US7208401 Method for forming a thin film
04/24/2007US7208400 Method of manufacturing a semiconductor device including a dielectric film formed between first and second electrode layers
04/24/2007US7208399 Transistor with notched gate
04/24/2007US7208398 Metal-halogen physical vapor deposition for semiconductor device defect reduction
04/24/2007US7208397 Transistor having an asymmetric source/drain and halo implantation region and a method of forming the same
04/24/2007US7208396 Permanent adherence of the back end of a wafer to an electrical component or sub-assembly
04/24/2007US7208395 Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device
04/24/2007US7208394 Method of manufacturing a semiconductor device with a fluorine concentration
04/24/2007US7208393 Growth of planar reduced dislocation density m-plane gallium nitride by hydride vapor phase epitaxy
04/24/2007US7208392 Creation of an electrically conducting bonding between two semi-conductor elements
04/24/2007US7208391 Method of manufacturing a semiconductor integrated circuit device that includes forming an isolation trench around active regions and filling the trench with two insulating films
04/24/2007US7208390 Semiconductor device structure and method for forming
04/24/2007US7208389 Method of porogen removal from porous low-k films using UV radiation
04/24/2007US7208388 Thin film resistor head structure and method for reducing head resistivity variance
04/24/2007US7208387 Method for manufacturing compound semiconductor wafer and compound semiconductor device
04/24/2007US7208386 Drain extended MOS transistor with improved breakdown robustness
04/24/2007US7208385 LDMOS transistor with enhanced termination region for high breakdown voltage with on-resistance
04/24/2007US7208384 Transistors and manufacturing methods thereof
04/24/2007US7208383 Method of manufacturing a semiconductor component
04/24/2007US7208382 Semiconductor device with high conductivity region using shallow trench
04/24/2007US7208381 Doping mask and methods of manufacturing charge transfer image device and microelectronic device using the same
04/24/2007US7208380 Interface improvement by stress application during oxide growth through use of backside films
04/24/2007US7208379 Pitch multiplication process
04/24/2007US7208378 Semiconductor device having multiple gate oxide layers and method of manufacturing thereof
04/24/2007US7208377 Silicon oxidation method
04/24/2007US7208376 Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried floating gate and pointed channel region
04/24/2007US7208375 Semiconductor device
04/24/2007US7208374 Method for manufacturing a non-volatile memory device
04/24/2007US7208373 Method of forming a memory cell array and a memory cell array
04/24/2007US7208372 Non-volatile memory resistor cell with nanotip electrode
04/24/2007US7208371 Method of fabricating split gate flash memory device
04/24/2007US7208370 Method for fabricating a vertical transistor in a trench, and vertical transistor
04/24/2007US7208369 Dual poly layer and method of manufacture
04/24/2007US7208368 Methods of forming spaced conductive regions, and methods of forming capacitor constructions
04/24/2007US7208367 Methods of fabricating ferroelectric memory devices having expanded plate lines
04/24/2007US7208366 Bonding gate oxide with high-k additives
04/24/2007US7208365 Nonvolatile memory device and method of manufacturing the same
04/24/2007US7208364 Methods of fabricating high voltage devices
04/24/2007US7208363 Fabrication of local interconnect lines
04/24/2007US7208362 Transistor device containing carbon doped silicon in a recess next to MDD to create strain in channel
04/24/2007US7208361 Replacement gate process for making a semiconductor device that includes a metal gate electrode
04/24/2007US7208360 Semiconductor device and method of manufacturing the same
04/24/2007US7208359 Method of forming semiconductor integrated device
04/24/2007US7208358 Laser annealing method
04/24/2007US7208357 Template layer formation
04/24/2007US7208356 Method of manufacturing multiple-gate MOS transistor having an improved channel structure
04/24/2007US7208355 Semiconductor device and method for preparing the same
04/24/2007US7208354 Deposition of silicon germanium on silicon-on-insulator structures and bulk substrates
04/24/2007US7208353 Semiconductor device and manufacturing method thereof
04/24/2007US7208352 Method of fabricating a thin film transistor with multiple gates using metal induced lateral crystallization
04/24/2007US7208351 Electronic device and method of manufacture the same
04/24/2007US7208350 Method and device for producing layout patterns of a semiconductor device having an even wafer surface
04/24/2007US7208349 Package substrate manufactured using electrolytic leadless plating process, and method for manufacturing the same
04/24/2007US7208348 Methods of fabricating a via-in-pad with off-center geometry
04/24/2007US7208347 Connection technology for power semiconductors comprising a layer of electrically insulating material that follows the surface contours
04/24/2007US7208346 Methods of forming interposers on surfaces of dies of a wafer
04/24/2007US7208345 Method of manufacturing a semiconductor device comprising stacked chips and a corresponding semiconductor device
04/24/2007US7208344 Wafer level mounting frame for ball grid array packaging, and method of making and using the same
04/24/2007US7208343 Semiconductor chip, chip stack package and manufacturing method
04/24/2007US7208342 Package warpage control
04/24/2007US7208341 Method for manufacturing printed circuit board
04/24/2007US7208340 Semiconductor device manufacturing method
04/24/2007US7208339 Process for manufacturing a micromachined oscillating element, in particular a mirror for optical switches
04/24/2007US7208338 Method of manufacturing semiconductor light emitting device
04/24/2007US7208337 Method of forming light emitting devices including forming mesas and singulating
04/24/2007US7208336 White light emitting device and method of making same
04/24/2007US7208335 Castellated chip-scale packages and methods for fabricating the same
04/24/2007US7208334 Method of manufacturing semiconductor device, acid etching resistance material and copolymer
04/24/2007US7208333 Process for fabricating MEMS membrane with integral mirror/lens
04/24/2007US7208332 Methods for preserving strained semiconductor substrate layers during CMOS processing
04/24/2007US7208331 Methods and structures for critical dimension and profile measurement
04/24/2007US7208329 Connector
04/24/2007US7208328 Method and system for analyzing defects of an integrated circuit wafer
04/24/2007US7208326 Edge protection process for semiconductor device fabrication
04/24/2007US7208325 Refreshing wafers having low-k dielectric materials
04/24/2007US7208324 Liquid composition for forming ferroelectric thin film and process for producing ferroelectric thin film
04/24/2007US7208323 Method for forming magneto-resistive memory cells with shape anisotropy
04/24/2007US7208262 Yield and line width performance for liquid polymers and other materials
04/24/2007US7208261 Polymers, processes for polymer synthesis and photoresist compositions
04/24/2007US7208197 Bringing a copper precursor, in the vapor phase, into contact with a heated support, optionally in the presence of hydrogen, wherein the copper precursor is in the form of copper salt in a liquid organic solvent
04/24/2007US7208196 Oxidation of silicon nitride; overcoating metal substrate; high temperature superconductivity
04/24/2007US7208113 Sealing material tablet method of manufacturing the tablet and electronic component device
04/24/2007US7208105 Mixture of electroconductive particles and polymer
04/24/2007US7208095 Method for fabricating bottom electrodes of stacked capacitor memory cells and method for cleaning and drying a semiconductor wafer