| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/10/2007 | US7202160 Method of forming an insulating structure having an insulating interlayer and a capping layer and method of forming a metal wiring structure using the same |
| 04/10/2007 | US7202159 Diffusion barriers comprising a self-assembled monolayer |
| 04/10/2007 | US7202158 Method for fabricating a metal-insulator-metal capacitor |
| 04/10/2007 | US7202157 Method for forming metallic interconnects in semiconductor devices |
| 04/10/2007 | US7202156 Process for manufacturing a wiring substrate |
| 04/10/2007 | US7202155 Method for manufacturing wiring and method for manufacturing semiconductor device |
| 04/10/2007 | US7202154 Suspension for filling via holes in silicon and method for making the same |
| 04/10/2007 | US7202153 Method for forming, under a thin layer of a first material, portions of another material and/or empty areas |
| 04/10/2007 | US7202152 Semiconductor device with inductive component and method of making |
| 04/10/2007 | US7202151 Method for fabricating a semiconductor device having a metallic silicide layer |
| 04/10/2007 | US7202150 Semiconductor memory device and manufacturing method therefor |
| 04/10/2007 | US7202149 Semiconductor device and manufacturing method thereof |
| 04/10/2007 | US7202148 Method utilizing compensation features in semiconductor processing |
| 04/10/2007 | US7202147 Semiconductor device and method for fabricating the same |
| 04/10/2007 | US7202146 Process for producing doped semiconductor wafers from silicon, and the wafers produced thereby |
| 04/10/2007 | US7202145 Strained Si formed by anneal |
| 04/10/2007 | US7202144 Manufacturing method of semiconductor film and image display device |
| 04/10/2007 | US7202143 Low temperature production of large-grain polycrystalline semiconductors |
| 04/10/2007 | US7202142 Method for producing low defect density strained -Si channel MOSFETS |
| 04/10/2007 | US7202141 Method of separating layers of material |
| 04/10/2007 | US7202140 Method to fabricate Ge and Si devices together for performance enhancement |
| 04/10/2007 | US7202139 MOSFET device with a strained channel |
| 04/10/2007 | US7202138 Spin coating for maximum fill characteristic yielding a planarized thin film surface |
| 04/10/2007 | US7202137 Process for producing an integrated electronic circuit comprising superposed components and integrated electronic circuit thus obtained |
| 04/10/2007 | US7202136 Silicon germanium heterojunction bipolar transistor with carbon incorporation |
| 04/10/2007 | US7202134 Method of forming transistors with ultra-short gate feature |
| 04/10/2007 | US7202133 Structure and method to form source and drain regions over doped depletion regions |
| 04/10/2007 | US7202132 Protecting silicon germanium sidewall with silicon for strained silicon/silicon germanium MOSFETs |
| 04/10/2007 | US7202131 Method of fabricating semiconductor device |
| 04/10/2007 | US7202130 Spacer for a split gate flash memory cell and a memory cell employing the same |
| 04/10/2007 | US7202129 Source lines for NAND memory devices |
| 04/10/2007 | US7202128 Method of forming a memory device having improved erase speed |
| 04/10/2007 | US7202127 Methods of forming a plurality of capacitors |
| 04/10/2007 | US7202126 Semiconductor device and method of manufacturing same |
| 04/10/2007 | US7202125 Low-voltage, multiple thin-gate oxide and low-resistance gate electrode |
| 04/10/2007 | US7202124 Strained gettering layers for semiconductor processes |
| 04/10/2007 | US7202123 Mesa isolation technology for extremely thin silicon-on-insulator semiconductor devices |
| 04/10/2007 | US7202122 Cobalt silicidation process for substrates with a silicon—germanium layer |
| 04/10/2007 | US7202121 Methods for preserving strained semiconductor substrate layers during CMOS processing |
| 04/10/2007 | US7202120 Semiconductor integrated circuit device and fabrication process thereof |
| 04/10/2007 | US7202119 Method of manufacturing semiconductor device |
| 04/10/2007 | US7202118 Fully depleted SOI MOSFET arrangement with sunken source/drain regions |
| 04/10/2007 | US7202117 Method of making a planar double-gated transistor |
| 04/10/2007 | US7202116 Thin film transistor substrate for display device and fabricating method thereof |
| 04/10/2007 | US7202115 Thin film transistor, its manufacture method and display device |
| 04/10/2007 | US7202113 Wafer level bumpless method of making a flip chip mounted semiconductor device package |
| 04/10/2007 | US7202112 Micro lead frame packages and methods of manufacturing the same |
| 04/10/2007 | US7202111 Methods and apparatus for disposing a thermal interface material between a heat source and a heat dissipation device |
| 04/10/2007 | US7202110 Embedded flat film molding |
| 04/10/2007 | US7202109 Insulation and reinforcement of individual bonding wires in integrated circuit packages |
| 04/10/2007 | US7202108 Semiconductor wafer, semiconductor chip and method for manufacturing the same |
| 04/10/2007 | US7202107 Method for producing a semiconductor component with a plastic housing and carrier plate for performing the method |
| 04/10/2007 | US7202106 Multi-chip semiconductor connector and method |
| 04/10/2007 | US7202105 Multi-chip semiconductor connector assembly method |
| 04/10/2007 | US7202104 Co-sputter deposition of metal-doped chalcogenides |
| 04/10/2007 | US7202103 Overlapped color filter fabrication technique |
| 04/10/2007 | US7202102 Doped absorption for enhanced responsivity for high speed photodiodes |
| 04/10/2007 | US7202101 Multi-metal layer MEMS structure and process for making the same |
| 04/10/2007 | US7202100 Method of manufacturing a cloverleaf microgyroscope and cloverleaf microgyroscope |
| 04/10/2007 | US7202099 Method of fabricating a laser diode that includes thermally cleaning a deposition reactor using a gas mixture of arsine and hydrogen |
| 04/10/2007 | US7202098 Method and structure to reduce optical crosstalk in a solid state imager |
| 04/10/2007 | US7202097 Light polarizing film, a method of continuously fabricating same, and reflective optical film using same |
| 04/10/2007 | US7202096 Control TFT for OLED display |
| 04/10/2007 | US7202095 Method for measuring silicide proportion, method for measuring annealing temperature, method for fabricating semiconductor device and x-ray photo receiver |
| 04/10/2007 | US7202094 Process for locating, displaying, analyzing, and optionally monitoring potential transient defect sites in one or more integrated circuit chips of a semiconductor substrate |
| 04/10/2007 | US7202015 acid-decomposable resin in which an alicyclic structure showing no absorption in the 193 nm range is introduced into the main or side chain of a polymer |
| 04/10/2007 | US7202014 Stimulus-sensitive composition, compound and pattern formation method using the stimulation-sensitive composition |
| 04/10/2007 | US7202010 Suitable for lithography |
| 04/10/2007 | US7202007 Method of forming patterned films |
| 04/10/2007 | US7201969 has excellent adhesive properties and proper adhesive force in regard to a surface of a semiconductor wafer, which can prevent contamination and breakage of a wafer surface due to penetration of grinding water |
| 04/10/2007 | US7201943 Methods of forming atomic layers of a material on a substrate by sequentially introducing precursors of the material |
| 04/10/2007 | US7201936 Method of feedback control of sub-atmospheric chemical vapor deposition processes |
| 04/10/2007 | US7201852 Method for removing defects from silicon bodies by a selective etching process |
| 04/10/2007 | US7201851 Vacuum processing apparatus and substrate transfer method |
| 04/10/2007 | US7201829 Mask plate design |
| 04/10/2007 | US7201828 Planar plating apparatus |
| 04/10/2007 | US7201823 High throughput plasma treatment system |
| 04/10/2007 | US7201808 Method and apparatus for rotating a semiconductor substrate |
| 04/10/2007 | US7201807 Reacting a metal with one gas; forming oxides; decompsoition with second gas |
| 04/10/2007 | US7201803 Valve control system for atomic layer deposition chamber |
| 04/10/2007 | US7201800 Process for making silicon wafers with stabilized oxygen precipitate nucleation centers |
| 04/10/2007 | US7201786 Dust bin and filter for robotic vacuum cleaner |
| 04/10/2007 | US7201784 Surfactant slurry additives to improve erosion, dishing, and defects during chemical mechanical polishing of copper damascene with low k dielectrics |
| 04/10/2007 | US7201647 Subpad having robust, sealed edges |
| 04/10/2007 | US7201642 Process for producing improved membranes |
| 04/10/2007 | US7201640 Method of sucking water and water sucking device |
| 04/10/2007 | US7201636 Chemical mechanical polishing a substrate having a filler layer and a stop layer |
| 04/10/2007 | US7201632 In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging |
| 04/10/2007 | US7201551 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 04/10/2007 | US7201328 Semiconductor devices and manufacturing method therefor and electric commerce method and transponder reader |
| 04/10/2007 | US7201304 Electroconductive alloy of tin and lead; first fluxing agent reacting with oxide of metal to promote melting of metal at first temperature; second fluxing agent having higher melting temperature; resolidification; rosin or resin binder |
| 04/10/2007 | US7201280 Wafer boat for consolidation of porous thin layer |
| 04/10/2007 | US7201276 Front opening substrate container with bottom plate |
| 04/10/2007 | US7201174 Silicon oxyfluoride film is formed on a wafer using a plasma vapor deposition method; film remaining inside chamber is cleaned up using a gas containing nitrogen trifluoride |
| 04/10/2007 | US7201078 Transporting apparatus |
| 04/10/2007 | US7201022 Systems and methods for filling voids and improving properties of porous thin films |
| 04/10/2007 | US7201016 Refrigerant supply apparatus |
| 04/10/2007 | US7200930 Probe for semiconductor devices |
| 04/10/2007 | US7200924 Method of packaging electronic parts |
| 04/10/2007 | US7200920 Method for the implementation of electronic components in via-holes of a multi-layer multi-chip module |