| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/24/2007 | US7208094 Methods of bridging lateral nanowires and device using same |
| 04/24/2007 | US7208076 Substrate processing apparatus and method |
| 04/24/2007 | US7208074 Substrate processing apparatus and substrate plating apparatus |
| 04/24/2007 | US7208069 Device for etching semiconductors with a large surface area |
| 04/24/2007 | US7208067 Method and system for monitoring RF impedance to determine conditions of a wafer on an electrostatic chuck |
| 04/24/2007 | US7208066 Substrate processing apparatus and substrate processing method |
| 04/24/2007 | US7208065 Structure for measuring the etching speed |
| 04/24/2007 | US7208058 SOI substrate and manufacturing method thereof |
| 04/24/2007 | US7208049 Process solutions containing surfactants used as post-chemical mechanical planarization treatment |
| 04/24/2007 | US7208047 Apparatus and method for thermally isolating a heat chamber |
| 04/24/2007 | US7208046 Spray coating apparatus and fixtures |
| 04/24/2007 | US7208043 Silicon semiconductor substrate and preparation thereof |
| 04/24/2007 | US7208021 Fabrication of close-spaced MEMS devices by method of precise adhesion regulation |
| 04/24/2007 | US7207878 Conductive polishing article for electrochemical mechanical polishing |
| 04/24/2007 | US7207864 Polishing apparatus |
| 04/24/2007 | US7207862 Polishing apparatus and method for detecting foreign matter on polishing surface |
| 04/24/2007 | US7207777 Methods of handling wind turbine blades and mounting said blades on a wind turbine, system and gripping unit for handling a wind turbine blade |
| 04/24/2007 | US7207766 Load lock chamber for large area substrate processing system |
| 04/24/2007 | US7207763 Semiconductor manufacturing system and wafer holder for semiconductor manufacturing system |
| 04/24/2007 | US7207720 Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method |
| 04/24/2007 | US7207706 Light emitting diode having diffraction grating and planar light source device using the same |
| 04/24/2007 | US7207442 Die storage tray having machined grooves and vacuum channels |
| 04/24/2007 | US7207367 Method and apparatus for joining adhesive tape |
| 04/24/2007 | US7207340 Method and system for removal of gas and plasma processing apparatus |
| 04/24/2007 | US7207339 Method for cleaning a plasma enhanced CVD chamber |
| 04/24/2007 | US7207096 Method of manufacturing high performance copper inductors with bond pads |
| 04/19/2007 | WO2007044934A2 Methods for characterizing semiconductor material using optical metrology |
| 04/19/2007 | WO2007044896A1 Self-aligned trench filling for narrow gap isolation regions |
| 04/19/2007 | WO2007044542A2 Method of reducing edge height at the overlap of a layer deposited on a stepped substrate |
| 04/19/2007 | WO2007044530A2 Methods and apparatus for epitaxial film formation |
| 04/19/2007 | WO2007044447A2 Composition and method for selectively etching gate spacer oxide material |
| 04/19/2007 | WO2007044446A1 Oxidizing aqueous cleaner for the removal of post-etch residues |
| 04/19/2007 | WO2007044324A2 Structure and method for forming asymmetrical overlap capacitance in field effect transistors |
| 04/19/2007 | WO2007044190A2 Semiconductor device having nano-pillars and method therefor |
| 04/19/2007 | WO2007044168A1 Methods and apparatus for fabricating conductive features on glass substrates used in liquid crystal displays |
| 04/19/2007 | WO2007044145A2 Method and apparatus for the low temperature deposition of doped silicon nitride films |
| 04/19/2007 | WO2007043987A2 Nano-molding process |
| 04/19/2007 | WO2007043764A1 Atmospheric pressure plasma shower unit, and equipment and method for manufacturing semiconductor package using the same |
| 04/19/2007 | WO2007043755A1 Rapid freezing/vacuum drying method and apparatus of a semiconductor wafer |
| 04/19/2007 | WO2007043709A1 Method and apparatus for manufacturing semiconductor device |
| 04/19/2007 | WO2007043654A1 Chip pickup apparatus, chip pickup method, chip peeling apparatus and chip peeling method |
| 04/19/2007 | WO2007043646A1 Apparatus and method for processing semiconductor |
| 04/19/2007 | WO2007043645A1 Process for production of devices |
| 04/19/2007 | WO2007043644A1 Semiconductor digital circuit, fifo buffer circuit, and data transferring method |
| 04/19/2007 | WO2007043634A1 Method for manufacturing multilayer wiring |
| 04/19/2007 | WO2007043562A1 Interconnector, solar battery string using such interconnector, method for manufacturing such solar battery string and solar battery module using such solar battery string |
| 04/19/2007 | WO2007043556A1 Material for forming film overlying photoresist |
| 04/19/2007 | WO2007043535A1 Optical characteristic measuring method, exposure method, device manufacturing method, inspecting apparatus and measuring method |
| 04/19/2007 | WO2007043528A1 Plasma processing apparatus, plasma processing method and tray |
| 04/19/2007 | WO2007043519A1 Wafer heating apparatus having electrostatic attraction function |
| 04/19/2007 | WO2007043517A1 Polishing solution for cmp and method of polishing |
| 04/19/2007 | WO2007043491A1 Semiconductor storage device and method for manufacturing same |
| 04/19/2007 | WO2007043478A1 Substrate processing apparatus and substrate processing method |
| 04/19/2007 | WO2007043470A1 Transfer product, transfer product fabricating method, and transfer product arrangement position identifying method |
| 04/19/2007 | WO2007043419A1 Transistor element, display device and these manufacturing methods |
| 04/19/2007 | WO2007043414A1 Multilayer reflecting mirror, multilayer reflecting mirror manufacturing method, optical system, exposure apparatus and device manufacturing method |
| 04/19/2007 | WO2007043355A1 Method of mounting electronic components |
| 04/19/2007 | WO2007043340A1 Semiconductor device |
| 04/19/2007 | WO2007043320A1 Fluorescent x-ray analytical method |
| 04/19/2007 | WO2007043319A1 Semiconductor device |
| 04/19/2007 | WO2007043312A1 Method for metal silicate film formation and recording medium |
| 04/19/2007 | WO2007043285A1 Manufacturing method of semiconductor device |
| 04/19/2007 | WO2007043267A1 Apparatus and method for peeling sheet |
| 04/19/2007 | WO2007043254A1 Bonding apparatus |
| 04/19/2007 | WO2007043217A1 Pellicle storing container |
| 04/19/2007 | WO2007043215A1 HIGH-PURITY Ru ALLOY TARGET, PROCESS FOR PRODUCING THE SAME AND SPUTTERED FILM |
| 04/19/2007 | WO2007043207A1 Substrate storing apparatus |
| 04/19/2007 | WO2007043206A1 Semiconductor production apparatus and process |
| 04/19/2007 | WO2007043205A1 Irradiation unit, method of irradiation and semiconductor device |
| 04/19/2007 | WO2007043152A1 Semiconductor device and method for manufacturing same |
| 04/19/2007 | WO2007043128A1 Ferroelectric memory, method of manufacturing the same, and method of manufacturing semiconductor device |
| 04/19/2007 | WO2007043116A1 Semiconductor device and its fabrication method |
| 04/19/2007 | WO2007043100A1 Semiconductor device and its fabrication method |
| 04/19/2007 | WO2007043056A2 Novel integrated circuit support structures and the fabrication thereof |
| 04/19/2007 | WO2007042850A1 Insulated gate field-effet transistor having a dummy gate |
| 04/19/2007 | WO2007042797A1 Positive displacement pumping chamber |
| 04/19/2007 | WO2007042606A1 Measuring method, arrangement and software product |
| 04/19/2007 | WO2007042521A2 Production of self-organized pin-type nanostructures, and the rather extensive applications thereof |
| 04/19/2007 | WO2007042520A2 Self-organized pin-type nanostructures, and production thereof on silicon |
| 04/19/2007 | WO2007042071A1 Assembly comprising at least two components that are electrically conductively operatively connected, and method for producing the assembly |
| 04/19/2007 | WO2007042017A1 Process and device for the plasma treatment of objects |
| 04/19/2007 | WO2007027726A3 Conformal coverings for electronic devices |
| 04/19/2007 | WO2007027473A3 Technique for forming recessed strained drain/source in nmos and pmos transistors |
| 04/19/2007 | WO2007027473A2 Technique for forming recessed strained drain/source in nmos and pmos transistors |
| 04/19/2007 | WO2007024714A3 Process for modifying dielectric materials |
| 04/19/2007 | WO2007019081A3 Application of autonomic self healing composites to integrated circuit packaging |
| 04/19/2007 | WO2007017763A3 Method of production of a film |
| 04/19/2007 | WO2007017401A3 Method for integrating functional nanostructures into microelectric and nanoelectric circuits |
| 04/19/2007 | WO2007016196A3 Directed purge for contact free drying of wafers |
| 04/19/2007 | WO2007010315A3 Leadframe strip and mold apparatus for an electronic component and method of encapsulating an electronic component |
| 04/19/2007 | WO2007001296A3 Method for chemical vapor deposition in high aspect ratio spaces |
| 04/19/2007 | WO2006138235A3 Compositions and methods for selective removal of metal or metal alloy after metal silicide formation |
| 04/19/2007 | WO2006127586A3 Methods for forming arrays of small, closely spaced features |
| 04/19/2007 | WO2006123105A3 Semiconductor device and method of forming a semiconductor device |
| 04/19/2007 | WO2006118720A3 Semiconductor assembly including chip scale package and second substrate and having exposed substrate surfaces on upper and lower sides |
| 04/19/2007 | WO2006117196A3 Method for growing carbon nanotubes having a predetermined chirality |
| 04/19/2007 | WO2006081352A3 System for and method of planarizing the contact region of a via by use of a continuous inline vacuum deposition process |
| 04/19/2007 | WO2006052955A3 Method of manufacturing rfid devices using fluidic self assembly and a local |
| 04/19/2007 | WO2006044804A3 Multi chip leadframe package |
| 04/19/2007 | WO2006044320A3 Overlay measurement target |