Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2007
10/04/2007US20070231928 Substrate processing apparatus
10/04/2007US20070231927 Semiconductor device and manufacturing method thereof
10/04/2007US20070231716 Plasma etching chamber and method for manufacturing photomask using the same
10/04/2007US20070231714 Photomask making method and semiconductor device manufacturing method
10/04/2007US20070231708 monomer of acrylate ester copolymer has a function of an acid generator, attached with a sulfonium or iodonium salt acid generator, and generate acid sulfonate ions on exposure; improve line edge roughness, high resolution; production of semiconductor elements and liquid crystal display
10/04/2007US20070231540 Anisotropic wet etching of silicon
10/04/2007US20070231488 Method for Producing Virtual Ge Substrates for III/V-Integration on Si(001)
10/04/2007US20070231484 Method and apparatus for processing polysilazane film
10/04/2007US20070231251 Capacitor Film Forming Material
10/04/2007US20070231111 Vacuum transport device with movable guide rail
10/04/2007US20070231110 Method for handling and transferring a wafer case, and holding part used therefor
10/04/2007US20070231109 Apparatus and method for processing substrates using one or more vacuum transfer chamber units
10/04/2007US20070231108 Method and apparatus for transferring wafers
10/04/2007US20070230768 Method and apparatus for inspecting a substrate
10/04/2007US20070230238 Phase change memory fabricated using self-aligned processing
10/04/2007US20070230237 Phase change memory fabricated using self-aligned processing
10/04/2007US20070230234 Semiconductor memory device having a floating storage bulk region capable of holding/emitting excessive majority carriers
10/04/2007US20070229927 Method of recording an exposure pattern in a recording layer of a holographic mask, method of forming an exposure pattern in a photosensitive material film, method of manufacturing a semiconductor device and method of manufacturing an electro-optic device
10/04/2007US20070229845 Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method
10/04/2007US20070229815 Apparatus and Method for Inspecting Semiconductor Wafer
10/04/2007US20070229814 Pattern defect inspection method, photomask manufacturing method, and display device substrate manufacturing method
10/04/2007US20070229795 Immersion Lithography Fluids
10/04/2007US20070229791 Step Measuring Device and Apparatus, and Exposure Method and Apparatus
10/04/2007US20070229784 Immersion exposure technique
10/04/2007US20070229783 Immersion exposure technique
10/04/2007US20070229337 Charged particle beam apparatus, abnormality detecting method for da converter unit, charged particle beam writing method, and mask
10/04/2007US20070229143 Power Module
10/04/2007US20070229142 Gate driver output stage with bias circuit for high and wide operating voltage range
10/04/2007US20070229101 Inspection method and inspection apparatus
10/04/2007US20070228844 Alignment apparatus and exposure apparatus using the same
10/04/2007US20070228583 Methods of bridging lateral nanowires and device using same
10/04/2007US20070228576 Isolating chip-to-chip contact
10/04/2007US20070228575 Wiring material and wiring board using the same
10/04/2007US20070228574 Semiconductor device and a method of manufacturing the same
10/04/2007US20070228573 Semiconductor device having capacitor formed in multilayer wiring structure
10/04/2007US20070228569 Interconnects forming method and interconnects forming apparatus
10/04/2007US20070228568 Manufacturing Method of Semiconductor Device and Semiconductor Device Produced Therewith
10/04/2007US20070228566 Ball grid array package construction with raised solder ball pads
10/04/2007US20070228562 Electronic packaging using conductive interproser connector
10/04/2007US20070228561 Semiconductor device and manufacturing method thereof
10/04/2007US20070228560 Semiconductor device that improves electrical connection reliability
10/04/2007US20070228555 Semiconductor chip having fine pitch bumps and bumps thereon
10/04/2007US20070228548 Chip carrier substrate with a land grid array and external bond terminals
10/04/2007US20070228547 Integrated Circuit (IC) Carrier Assembly Incorporating An Integrated Circuit (IC) Retainer
10/04/2007US20070228543 Controlling Flip-Chip Techniques for Concurrent Ball Bonds in Semiconductor Devices
10/04/2007US20070228539 Method for detaching a semiconductor chip from a foil and device for mounting semiconductor chips
10/04/2007US20070228528 Semiconductor device and manufacturing method thereof
10/04/2007US20070228527 Substrate for electronic device and method for processing same
10/04/2007US20070228522 SOI substrate, silicon substrate therefor and it's manufacturing method
10/04/2007US20070228521 Gallium Nitride Substrate, and Gallium-Nitride-Substrate Testing and Manufacturing Methods
10/04/2007US20070228517 Sol-gel and mask patterning for thin-film capacitor fabrication, thin-film capacitors fabricated thereby, and systems containing same
10/04/2007US20070228510 SHALLOW TRENCH ISOLATION FILL BY LIQUID PHASE DEPOSITION OF SiO2
10/04/2007US20070228496 Vertical Semiconductor Devices and Methods of Manufacturing Such Devices
10/04/2007US20070228489 Semiconductor memory device for storing data as state of majority carriers accumulated in channel body and method of manufacturing the same
10/04/2007US20070228486 Semiconductor device
10/04/2007US20070228485 Semiconductor device
10/04/2007US20070228484 Structure and method of integrating compound and elemental semiconductors for high-performance cmos
10/04/2007US20070228479 Protection against charging damage in hybrid orientation transistors
10/04/2007US20070228478 Semiconductor device and method of manufacturing the same
10/04/2007US20070228473 ULTRA-THIN Si MOSFET DEVICE STRUCTURE AND METHOD OF MANUFACTURE
10/04/2007US20070228472 Silicon device on si: c-oi and sgoi and method of manufacture
10/04/2007US20070228469 Thin-film transistor formed on insulating substrate
10/04/2007US20070228458 Dual metal integration scheme based on full silicidation of the gate electrode
10/04/2007US20070228455 Semiconductor device and manufacturing method thereof
10/04/2007US20070228451 Scalable Electrically Eraseable And Programmable Memory (EEPROM) Cell Array
10/04/2007US20070228450 Flash memory device with enlarged control gate structure, and methods of making same
10/04/2007US20070228442 Thin Film Capacitor, Method for Forming Same, and Computer Readable Recording Medium
10/04/2007US20070228440 Structure and fabrication method for capacitors integratible with vertical replacement gate transistors
10/04/2007US20070228439 Large-Area Nanoenabled Macroelectronic Substrates and Uses Therefor
10/04/2007US20070228438 Technique to control tunneling currents in dram capacitors, cells, and devices
10/04/2007US20070228432 Semiconductor element, semiconductor storage device using the same, data writing method thereof, data reading method thereof, and manufacturing method of those
10/04/2007US20070228430 Devices and Methods of Preventing Plasma Charging Damage in Semiconductor Devices
10/04/2007US20070228425 Method and manufacturing low leakage MOSFETs and FinFETs
10/04/2007US20070228407 Group III Nitride Semiconductor Light Emitting Device
10/04/2007US20070228401 Semiconductor device
10/04/2007US20070228400 GaN crystal substrate
10/04/2007US20070228389 Thin film transistor array substrate and electronic ink display device
10/04/2007US20070228387 Uniform emission LED package
10/04/2007US20070228384 Single-crystal layer on a dielectric layer
10/04/2007US20070228383 3-dimensional integrated circuit architecture, structure and method for fabrication thereof
10/04/2007US20070228377 Semiconductor device comprising soi transistors and bulk transistors and a method of forming the same
10/04/2007US20070228376 Top-gate thin-film transistors using nanoparticles and method of manufacturing the same
10/04/2007US20070228374 Semiconductor device and method of fabricating the same
10/04/2007US20070228294 Charge Neutralizing Device
10/04/2007US20070228110 Method Of Wirebonding That Utilizes A Gas Flow Within A Capillary From Which A Wire Is Played Out
10/04/2007US20070228010 Systems and methods for removing/containing wafer edge defects post liner deposition
10/04/2007US20070228006 Plasma etching method
10/04/2007US20070227941 Receiver for Component Feed Plates and Component Feeder
10/04/2007US20070227765 Multilayer printed circuit board and multilayer printed circuit board manufacturing method
10/04/2007US20070227669 Method and apparatus for plasma processing
10/04/2007US20070227665 Plasma processing method and plasma processing apparatus
10/04/2007US20070227659 Plasma etching apparatus
10/04/2007US20070227658 Control device for controlling substrate processing apparatus and method therefor
10/04/2007US20070227657 Plasma processing apparatus
10/04/2007US20070227656 Apparatus and method for confined area planarization
10/04/2007US20070227655 Processing method for wafer and processing apparatus therefor
10/04/2007US20070227648 Sticking Apparatus and Sticking Method
10/04/2007US20070227567 Processing Liquid and Processing Method for Semiconductor Device, and Semiconductor Manufacturing Apparatus
10/04/2007US20070227566 Substrate processing apparatus and substrate processing method
10/04/2007US20070227554 Semiconductor processing with a remote plasma source for self-cleaning
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