Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2007
10/09/2007US7279372 Manufacturing method of semiconductor device
10/09/2007US7279371 Thin film transistor array panel and manufacturing method thereof
10/09/2007US7279370 Thin film transistor array substrate and method of fabricating the same
10/09/2007US7279369 Germanium on insulator fabrication via epitaxial germanium bonding
10/09/2007US7279368 Method of manufacturing a vertical junction field effect transistor having an epitaxial gate
10/09/2007US7279367 Method of manufacturing a thyristor semiconductor device
10/09/2007US7279366 Method for assembling semiconductor die packages with standard ball grid array footprint
10/09/2007US7279365 Method of manufacturing heat conductive substrate
10/09/2007US7279363 Vertically stacked semiconductor device
10/09/2007US7279362 Semiconductor wafer coat layers and methods therefor
10/09/2007US7279361 Method for making a semiconductor multi-package module having wire bond interconnect between stacked packages
10/09/2007US7279360 Semiconductor device and method of packaging the same
10/09/2007US7279359 High performance amine based no-flow underfill materials for flip chip applications
10/09/2007US7279358 Mounting method and mounting device
10/09/2007US7279357 Method for fabricating a chip-scale-packaging (CSP) having an inductor
10/09/2007US7279356 Depopulation of a ball grid array to allow via placement
10/09/2007US7279355 Method for fabricating a packaging device for semiconductor die and semiconductor device incorporating same
10/09/2007US7279354 Microlens of CMOS image sensor and method of manufacturing the same
10/09/2007US7279353 Passivation planarization
10/09/2007US7279351 Method of passivating semiconductor device
10/09/2007US7279350 White-light emitting devices and methods for manufacturing the same
10/09/2007US7279349 Semiconductor optical device and manufacturing method thereof
10/09/2007US7279348 Thin film transistor device and method of manufacturing the same
10/09/2007US7279347 Method for manufacturing a light-emitting structure of a light-emitting device (LED)
10/09/2007US7279345 Method of forming light emitting devices with improved light extraction efficiency
10/09/2007US7279344 Method of forming a nitride-based semiconductor
10/09/2007US7279343 De-packaging process for small outline transistor packages
10/09/2007US7279342 Ferroelectric memory
10/09/2007US7279341 Method for fabricating a flux concentrating system for use in a magnetoelectronics device
10/09/2007US7279259 Method for correcting pattern data and method for manufacturing semiconductor device using same
10/09/2007US7279257 Pattern forming method, method of manufacturing thin film transistor substrate, method of manufacturing liquid crystal display and exposure mask
10/09/2007US7279252 Substrate for the micro-lithography and process of manufacturing thereof
10/09/2007US7279231 Electroless plating structure
10/09/2007US7279223 Underfill composition and packaged solid state device
10/09/2007US7279119 Silica and silica-based slurry
10/09/2007US7279118 Copper-containing material is formed over a semiconductor; forming methylated silicon nitride barrier layer; nitriding
10/09/2007US7279116 Method for the wet treatment of disk-like objects
10/09/2007US7279115 Method to reduce stacking fault nucleation sites and reduce Vf drift in bipolar devices
10/09/2007US7279114 Method for stabilizing etching performance
10/09/2007US7279112 Method of manufacture of smart microfluidic medical device with universal coating
10/09/2007US7279109 Method for manufacturing a photonic device and a photonic device
10/09/2007US7279079 Plating apparatus, cartridge and copper dissolution tank for use in the plating apparatus, and plating method
10/09/2007US7279068 Temperature control assembly for use in etching processes
10/09/2007US7279067 Port structure in semiconductor processing system
10/09/2007US7279066 Apparatus for forming silicon oxide film
10/09/2007US7279061 Process for the production of improved metallized films
10/09/2007US7279049 Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
10/09/2007US7279048 Semiconductor manufacturing apparatus
10/09/2007US7279041 Atomic layer deposition methods and atomic layer deposition tools
10/09/2007US7278911 Conductive polishing article for electrochemical mechanical polishing
10/09/2007US7278907 Method of adhering polishing pads and jig for adhering the same
10/09/2007US7278831 Apparatus and method for control, pumping and abatement for vacuum process chambers
10/09/2007US7278817 Method for transferring and loading a reticle
10/09/2007US7278813 Automated processing system
10/09/2007US7278812 Conveyance system
10/09/2007US7278725 Layer forming method, layer forming apparatus, device, manufacturing method for device, and electronic apparatus
10/09/2007US7278715 Device with gates configured in loop structures
10/09/2007US7278587 Thermal treatment apparatus and thermal treatment method
10/09/2007US7278564 Method of mounting electronic component, structure for mounting electronic component, electronic component module, and electronic apparatus
10/09/2007US7278207 Method of making an electronic package
10/09/2007US7278203 Random-period chip transfer apparatus
10/09/2007US7278193 Device for coupling PCB sheet
10/09/2007CA2177244C Metal layer pattern forming method
10/04/2007WO2007112454A2 Apparatus and method for processing substrates using one or more vacuum transfer chamber units
10/04/2007WO2007112452A2 Technique for manufacturing photovoltaic modules
10/04/2007WO2007112435A2 Solid oxide fuel cell process and apparatus
10/04/2007WO2007112432A2 Epitaxy of silicon-carbon substitutional solid solutions by ultra-fast annealing of amorphous material
10/04/2007WO2007112261A2 Semiconductor device made by multiple anneal of stress inducing layer
10/04/2007WO2007112228A1 Structure and fabrication method of a selectively deposited capping layer on an epitaxially grown source drain
10/04/2007WO2007112181A2 Method of monitoring a semiconductor processing system using a wireless sensor network
10/04/2007WO2007112180A2 Semiconductor processing system with wireless sensor network monitoring system incorporated therewith
10/04/2007WO2007112171A2 Semiconductor device and method for forming the same
10/04/2007WO2007112153A2 Metal gate with zirconium
10/04/2007WO2007112149A2 Semiconductor structures formed by stepperless manufacturing
10/04/2007WO2007112058A2 Carbon precursors for use during silicon epitaxial firm formation
10/04/2007WO2007111893A2 Plasma etch and photoresist strip process with intervening chamber de-fluorination and wafer de-fluorination steps
10/04/2007WO2007111876A2 Determining ion beam parallelism using refraction method
10/04/2007WO2007111837A2 Plasma dielectric etch process including in-situ backside polymer removal for low-dielectric constant material
10/04/2007WO2007111830A2 Different transistor gate oxides in an integrated circuit
10/04/2007WO2007111781A2 Method of light enhanced atomic layer deposition
10/04/2007WO2007111780A2 METHOD OF PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF TaC AND TaCN FILMS HAVING GOOD ADHESION TO COPPER
10/04/2007WO2007111771A2 Method of forming field effect transistors and methods of forming integrated circuity comprising a transistor gate array and circuity peripheral to the gate array
10/04/2007WO2007111699A2 Plasma treatment of a semiconductor surface for enhanced nucleation of a metal-containing layer
10/04/2007WO2007111665A1 Method of straining a silicon island for mobility improvement
10/04/2007WO2007111518A1 Filling of nanoscale and microscale structures
10/04/2007WO2007111505A1 Method and device for shielding encapsulated electronic components during laser cutting
10/04/2007WO2007111469A1 Method of forming nanopattern and substrate having pattern formed using the method
10/04/2007WO2007111369A1 Substrate processing method, recording medium and substrate processing apparatus
10/04/2007WO2007111351A1 Semiconductor device manufacturing method
10/04/2007WO2007111348A1 Substrate treating apparatus
10/04/2007WO2007111337A1 Method for manufacturing compound semiconductor and apparatus for manufacturing compound semiconductor
10/04/2007WO2007111319A1 Magnetic random access memory and operation method thereof
10/04/2007WO2007111318A1 Magnetic random access memory and operation method thereof
10/04/2007WO2007111255A1 Group iii nitride semiconductor light-emitting device, method for manufacturing group iii nitride semiconductor light-emitting device, and lamp
10/04/2007WO2007111251A1 Surface processing apparatus
10/04/2007WO2007111248A1 Gold wire for semiconductor element connection
10/04/2007WO2007111215A1 Mold for pattern transfer
10/04/2007WO2007111191A1 Organic semiconductor thin film, organic thin film transistor and method for manufacturing same
10/04/2007WO2007111174A1 Plotting state adjusting method and device
10/04/2007WO2007111173A1 Plotting state adjusting method and device
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