Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2007
10/10/2007CN100342540C Semiconductor device and method of manufacturing the same
10/10/2007CN100342539C Semiconductor device and mfg. method thereof
10/10/2007CN100342538C Semiconductor device, electronic apparatus and their manufacturing methods, electronic equipment
10/10/2007CN100342533C Semiconductor device and its manufacturing method
10/10/2007CN100342531C Composite scab structure and producing method thereof
10/10/2007CN100342528C Resin-sealed semiconductor device and method of manufacturing the device
10/10/2007CN100342526C Semiconductor sealing baseplate structure of electric padding metal protective layer and producing method thereof
10/10/2007CN100342525C Control circuit for organic electroluminescent diode and producing method thereof
10/10/2007CN100342524C Structure and method for local resistor element in integrated circuit technology
10/10/2007CN100342523C Three dimensional CMOS integrated circuits having device layers built on different crystal oriented wafers
10/10/2007CN100342522C Capcitor structure of integrated circuit and manfuacturing method thereof
10/10/2007CN100342521C Semiconductor multilayer interconnection forming method
10/10/2007CN100342520C Method for forming conductive material in opening and structure regarding same
10/10/2007CN100342519C Transport device and drive mechanism
10/10/2007CN100342518C Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus
10/10/2007CN100342517C Silicon wafer carrying robot with two-dimensional parallel driven
10/10/2007CN100342516C 晶片边缘检测器 Wafer edge detector
10/10/2007CN100342515C Method for eliminating voiding in plated solder
10/10/2007CN100342514C Capillary tube for lead-in bonding and method for lead bonding via capillary tube
10/10/2007CN100342513C Bumpless semiconductor device
10/10/2007CN100342512C Bonded structure using reacted borosilicate mixture
10/10/2007CN100342511C Underfill encapsulant for wafer packaging and method for its application
10/10/2007CN100342510C Submount and semiconductor device
10/10/2007CN100342509C Assembling method for contact image sensor and structure thereof
10/10/2007CN100342508C Improved memory package
10/10/2007CN100342507C Structures and methods for making strained mosfets
10/10/2007CN100342506C High operation voltage double spreading drain MOS device using twice ion injection
10/10/2007CN100342505C Method for fabricating a high voltage power MOSFET having a voltage sustaining region that includes doped columns formed by rapid diffusion
10/10/2007CN100342504C Heater module of rapid thermal processing apparatus
10/10/2007CN100342503C Annealed wafer and annealed wafer manufacturing method
10/10/2007CN100342502C Cleaning fluid providing apparatus for copper wiring chemical-mechanical polishing
10/10/2007CN100342501C Substrate processing apparatus and substrate processing method, high speed rotary valve, and cleaning method
10/10/2007CN100342500C Method for forming dielectric film
10/10/2007CN100342499C CMP process control method
10/10/2007CN100342498C Method and equipment for manufacturing semiconductor device
10/10/2007CN100342497C Method for forming nanowire wide polycrystalline silicon gate etching mask images
10/10/2007CN100342496C Method and apparatus for chemical vapor deposition capable of preventing contamination and enhancing film growth rate
10/10/2007CN100342495C Fabrication method for polycrystalline silicon thin film and apparatus using the same
10/10/2007CN100342494C Strained si based layer made by UHV-CVD, and devices therein
10/10/2007CN100342493C Method for manufacturing polysilicon of thin-film transistor
10/10/2007CN100342492C Preparation for silicon material on thick film insulative layers
10/10/2007CN100342491C Resist pattern forming method, semiconductor apparatus using said method, and exposure apparatus thereof
10/10/2007CN100342490C Correction system and method of correcting deflection distortion, method for manufacturing a semiconductor device
10/10/2007CN100342489C Evaluation metod of process residual, setting method and program of determination condition
10/10/2007CN100342488C Substrate processing system for performing exposure process in gas atmosphere
10/10/2007CN100342487C Reactor for processing a microelectric workpiece
10/10/2007CN100342486C Method for making thin film by transferring on base plate
10/10/2007CN100342485C Boiler tube productivity monitoring system and operating method thereof
10/10/2007CN100342484C Semiconductor device and mfg method thereof
10/10/2007CN100342463C Method and system for patterning of magnetic thin films using gaseous transformation
10/10/2007CN100342453C Ferroelectric memory circuit and method for its fabrication
10/10/2007CN100342451C 磁存储器 Magnetic memory
10/10/2007CN100342395C Method for manufacturing RFID labels
10/10/2007CN100342381C Integrated circuit design conforming method and component element, transaction method and product applied thereby
10/10/2007CN100342284C Mask supporting apparatus using vacuum and light exposing system, and method using the same
10/10/2007CN100342283C Process for producing an image using a first minimum bottom antireflective coating composition
10/10/2007CN100342282C Chemical enlarging positive corrosion resist composition
10/10/2007CN100342279C Substrate for a liquid crystal display device and fabricating method thereof
10/10/2007CN100342261C 曝光装置 Exposure device
10/10/2007CN100342065C Method of reducing crystal defect density
10/10/2007CN100342062C Electroplate device, electroplate method and method for manufacturing semiconductor device
10/10/2007CN100342057C Gas distribution showerhead
10/10/2007CN100341992C Semiconductor process residue removal composition and process
10/10/2007CN100341966C Polishing composition for semiconductor wafers
10/10/2007CN100341811C Method for adhering transparent articles and quartz glass plate prepared through adhesion and device using the same
10/10/2007CN100341712C Mold tool method of manufacturing a mold tool and storage medium formed by use of the mold tool
10/10/2007CN100341666C Polishing pad with optimized grooves and method of using same
10/10/2007CN100341665C Apparatus and method for preheating
10/10/2007CN100341631C Substrate processor
10/10/2007CN100341630C In-situ local heating using megasonic transducer resonator
10/09/2007US7281136 LSI design method and verification method
10/09/2007US7280933 Method and apparatus for forming a pattern, device and electronic apparatus
10/09/2007US7280884 Optimization method of deposition time and an optimization system of deposition time
10/09/2007US7280883 Substrate processing system managing apparatus information of substrate processing apparatus
10/09/2007US7280399 Semiconductor device
10/09/2007US7280395 Methods for neutralizing holes in tunnel oxides of floating-gate memory cells and devices
10/09/2007US7280394 Field effect devices having a drain controlled via a nanotube switching element
10/09/2007US7280329 Integrated circuit device having input/output electrostatic discharge protection cell equipped with electrostatic discharge protection element and power clamp
10/09/2007US7280328 Semiconductor integrated circuit device
10/09/2007US7280327 Mechanism for preventing ESD damage and LCD panel utilizing the same
10/09/2007US7280233 Method and apparatus for inspecting an edge exposure area of a wafer
10/09/2007US7280228 System and method of measurement, system and method of alignment, lithographic apparatus and method
10/09/2007US7280225 Stage apparatus and control method including first and second measurement systems for measuring a stage position and a switching unit for switching between the measurement systems
10/09/2007US7280199 System for detecting anomalies and/or features of a surface
10/09/2007US7280185 Stage system including fine-motion cable unit, exposure apparatus, and method of manufacturing device
10/09/2007US7280184 Assembly and adjusting method of optical system, exposure apparatus having the optical system
10/09/2007US7280182 Lithographic apparatus, device manufacturing method and computer program
10/09/2007US7279954 On-chip temperature detection device
10/09/2007US7279923 LSI inspection method and defect inspection data analysis apparatus
10/09/2007US7279794 Semiconductor device and electronic device, and methods for manufacturing thereof
10/09/2007US7279793 System and method for manufacturing semiconductor devices using an anti-reflective coating layer
10/09/2007US7279792 Semiconductor device and method of manufacturing same
10/09/2007US7279791 Semiconductor device and method of fabricating the same
10/09/2007US7279790 Semiconductor device and a manufacturing method thereof
10/09/2007US7279785 Stacked die package system
10/09/2007US7279781 Two-stage transfer molding device to encapsulate MMC module
10/09/2007US7279780 Quad flat no-lead (QFN) grid array package, method of making and memory module and computer system including same
10/09/2007US7279779 Substrate assembly for stressed systems
10/09/2007US7279777 Organic polymers, laminates, and capacitors
10/09/2007US7279776 Method of manufacturing semiconductor device and semiconductor device
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