Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2007
10/10/2007CN101053071A 等离子体处理方法 The plasma processing method
10/10/2007CN101053070A Low-k dielectric layer formed from aluminosilicate precursors
10/10/2007CN101053069A 抛光设备 Polishing Equipment
10/10/2007CN101053068A Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing
10/10/2007CN101053067A Mesoporous thin-membrane and process for producing the same
10/10/2007CN101053066A 等离子体处理方法和等离子体处理设备 The plasma processing method and a plasma processing apparatus
10/10/2007CN101053065A To processing laser doping with line focus laser beam to solid and to manufacture solar energy battery emitter electrode based on the said method
10/10/2007CN101053064A Method for developing strain layer
10/10/2007CN101053063A Apparatus and plasma ashing process for increasing photoresist removal rate
10/10/2007CN101053062A System for and method of active array temperature sensing and cooling
10/10/2007CN101053061A Flash lamp annealing apparatus
10/10/2007CN101053005A Active matrix substrate, display device, and pixel defect correcting method
10/10/2007CN101052923A Exposure apparatus, method for manufacturing exposure apparatus, and method for manufacturing microdevice
10/10/2007CN101052922A Exposure device, exposure method, and micro device manufacturing method
10/10/2007CN101052920A Tracing method and apparatus
10/10/2007CN101052919A Sulfonic-ester-containing composition for formation of antireflection film for lithography
10/10/2007CN101052918A Photosensitive composition, pattern forming material, photosensitive laminate, pattern forming apparatus and method of pattern formation
10/10/2007CN101052917A Photomask blank and photomask
10/10/2007CN101052742A Remote chamber methods for removing surface deposits
10/10/2007CN101052741A Raw material liquid for metal organic chemical vapor deposition and method of producing Hf-Si containing complex oxide film using the raw material liquid
10/10/2007CN101052615A Metal compound, thin film-forming material, and method for producing thin film
10/10/2007CN101052602A Placing table structure, method for manufacturing placing table structure and heat treatment apparatus
10/10/2007CN101052536A Methods of processing a substrate with minimal scalloping
10/10/2007CN101052264A Method for suppressing plasma unstable
10/10/2007CN101051676A Organic electroluminescence pixel, organic electroluminescence element and its producing method
10/10/2007CN101051655A Schottky part and semiconductor making process for making same
10/10/2007CN101051654A Semiconductor resistance and semiconductor making process for making same
10/10/2007CN101051652A Semiconductor device and a method of manufacturing the same
10/10/2007CN101051651A Abnormal juntion dual-pole transistor and its making method
10/10/2007CN101051650A Multiple step grating structure and its producing method
10/10/2007CN101051648A Organic lighting element color pixel array mode and its forming method
10/10/2007CN101051647A 有机发光显示装置及其测试方法 The organic light emitting display device and test methods
10/10/2007CN101051646A Phase change memory fabricated using self-aligned processing
10/10/2007CN101051644A Thin film transistor substrate and method of fabricating the same
10/10/2007CN101051642A Thin film transistor array base board and its repairing method
10/10/2007CN101051641A Semiconductor device and a method of manufacturing the same
10/10/2007CN101051640A Non-volatile internal memory structure and its operation method
10/10/2007CN101051639A Single gate pole non-volatile internal storage and its operation method
10/10/2007CN101051637A Semiconductor device and method of fabricating the same
10/10/2007CN101051635A Solid-state image pickup device and method for manufacturing thereof
10/10/2007CN101051634A Silicon lining bottom plane LED integrated chip and producing method
10/10/2007CN101051632A Interconnection structure and its making method
10/10/2007CN101051630A Semiconductor chip or device of vertical structure
10/10/2007CN101051629A Semiconductor package structure and its producing method
10/10/2007CN101051628A Micro link lug structure with stress buffer and its producing method
10/10/2007CN101051627A Semiconductor device and its making method
10/10/2007CN101051626A Semiconductor structure of display device and its producing method and pixel capacitance structure
10/10/2007CN101051625A Method for preparing capacitor structure of semiconductor storage
10/10/2007CN101051624A 互补式金属氧化物半导体元件及其形成方法 CMOS device and method of forming
10/10/2007CN101051623A Method for forming self-aligned contacts and local interconnects simultaneously
10/10/2007CN101051622A Method of forming dual damascene structure of no-etch stop layer
10/10/2007CN101051621A Method of manufacturing semiconductor device and semiconductor device
10/10/2007CN101051620A Method for producing semiconductor device and mask film for said method
10/10/2007CN101051619A Substrate check device and substrate check method
10/10/2007CN101051618A Method for fabricating a BGA device and BGA device
10/10/2007CN101051617A Lug process and wafer structure of protective detection welding pad
10/10/2007CN101051616A Quick flash memory card packaging method
10/10/2007CN101051615A Base plate with buried passive element and its producing method
10/10/2007CN101051614A Method for forming reinforced interconnects on a substrate
10/10/2007CN101051613A Power schottky device barrier method
10/10/2007CN101051612A Forming method for metal silicide blocking area and method for producing semiconductor device
10/10/2007CN101051611A Method for forming nickel silicide by plasma annealing
10/10/2007CN101051610A Method for producing semiconductor device
10/10/2007CN101051609A High voltage protective interlock for ion injector
10/10/2007CN101051608A Method for obtaining high quality InV film
10/10/2007CN101051607A Method for making super thin two-way trigger tube
10/10/2007CN101051606A Vertical plasma processing apparatus and method for semiconductor process
10/10/2007CN101051605A Ditching type capacitor and its producing method
10/10/2007CN101051604A Method and device of panel etching process
10/10/2007CN101051603A Method and device for panel etching process
10/10/2007CN101051602A Method and its device for panel etching process
10/10/2007CN101051601A Method for removing wafer needle shape flaw and method for producing capacitor
10/10/2007CN101051357A Intelligent filling head with vision, spot glueing and filling function
10/10/2007CN101051189A Lithographic processing cell and device manufacturing method
10/10/2007CN101051188A Lithographic apparatus and device manufacturing method
10/10/2007CN101051187A Wafer mint-mark method
10/10/2007CN101051158A Array substrate for liquid crystal display device and method of fabricating the same
10/10/2007CN101051086A Ion beam detection device and method, and ion beam irradiation device
10/10/2007CN101051065A Apparatus and method for testing a chip and methods of making the apparatus
10/10/2007CN101051056A Method of manufacturing mini probe guiding device and mini probe unit
10/10/2007CN101051028A Method detecting and displaying optical values obtained from disc-shaped object with optical mode
10/10/2007CN101050544A Light auxiliary MBE system, and method for developing ZnO monocrystal film
10/10/2007CN101050348A Etchant composition, composition for polishing, method for producing polishing composition and polishing method
10/10/2007CN101050066A Method for local bonding silicon / glass by laser
10/10/2007CN101049681A Method for controlling scoring abrasive surface of silicon chip
10/10/2007CN101049653A 激光加工装置 The laser processing apparatus
10/10/2007CN101049598A High-pressure wet cleaning method
10/10/2007CN101049597A Cleaning device and cleaning method
10/10/2007CN100342759C Method of generating extreme ultraviolet radiation
10/10/2007CN100342556C Method for preparing Nano thin film in level of semiconductor photovoltaic device
10/10/2007CN100342551C Semiconductor device and method for mfg. same
10/10/2007CN100342550C Structure of double-grid metal oxide semiconductor transistor and producig method thereof
10/10/2007CN100342549C Structure of partial SOI power apparatus and implementing method
10/10/2007CN100342548C Operatable grating contact of SOI
10/10/2007CN100342546C Charge-coupled device and its mfg. method
10/10/2007CN100342545C Trench DMOS device with improved drain contact
10/10/2007CN100342544C High voltage power MOSFET includes doped columns
10/10/2007CN100342543C Package apparatus capable of selecting optimized distance to pack optical sensing module
10/10/2007CN100342542C Solid camera element and its mfg. method
10/10/2007CN100342541C Semiconductor memory