Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2007
10/16/2007US7282132 Film of zinc oxide electrochemically deposited from an aqueous solution is subjected to heat treatment at a temperature equal to or higher than 150 degrees C. and equal to or lower than 400 degrees C. in a nitrogen or inert gas atmosphere that contains oxygen, thereby obtaining a zinc oxide film
10/16/2007US7282131 Methods of electrochemically treating semiconductor substrates
10/16/2007US7282124 Device providing electrical contact to the surface of a semiconductor workpiece during processing
10/16/2007US7282122 For a physical vapor deposition tool; selecting criteria for a minimum accumulating rate of a number of wafers fabricated per unit of deposit time by a change in target life; data processing; computers
10/16/2007US7282121 Manufacturing method and apparatus of phase shift mask blank
10/16/2007US7282112 Method and apparatus for an improved baffle plate in a plasma processing system
10/16/2007US7282111 System and method for monitoring particles contamination in semiconductor manufacturing facilities
10/16/2007US7282104 Method of fixing a sealing object to a base object
10/16/2007US7282098 Processing-subject cleaning method and apparatus, and device manufacturing method and device
10/16/2007US7282097 Slit valve door seal
10/16/2007US7282096 Arrangement comprising a support body and a substrate holder which is driven in rotation and gas-supported thereon
10/16/2007US7281741 End-effectors for handling microelectronic workpieces
10/16/2007US7281491 Dielectric-coated electrode, plasma discharge treatment apparatus and method for forming thin film
10/16/2007US7281334 Mechanical scribing apparatus with controlling force of a scribing cutter
10/16/2007CA2352769C Method for precise molding and alignment of structures on a substrate using a stretchable mold
10/16/2007CA2287404C Method of planarizing the upper surface of a semiconductor wafer
10/16/2007CA2227011C Short channel fermi-threshold field effect transistors
10/11/2007WO2007115292A2 Method and structure for eliminating aluminum terminal pad material in semiconductor devices
10/11/2007WO2007115153A2 Adjustable cpap mask assembly
10/11/2007WO2007115111A2 Capturing and presenting text using auditory signals
10/11/2007WO2007115107A2 Apparatus, system, and method for remote media ownership management
10/11/2007WO2007114999A1 Trench isolation structure having an expanded portion thereof
10/11/2007WO2007114992A2 Liner tools and kit for cutting hair
10/11/2007WO2007114989A2 Methods for assessment of cardiovascular disease risk
10/11/2007WO2007114988A2 A method for video/audio recording using unrestricted pre-event/post-event buffering with multiple bit and frame rates buffer files
10/11/2007WO2007114980A2 System and method for communication utilizing time division duplexing
10/11/2007WO2007114927A1 Etched nanofin transistors
10/11/2007WO2007114870A2 Signal processing system and method
10/11/2007WO2007114814A1 Polymeric inhibitors for enhanced planarization
10/11/2007WO2007114790A1 Method of fabricating an interconnection for electrically connecting an electrical component to a substrate
10/11/2007WO2007114642A1 Hole inspection apparatus and hole inspection method using the same
10/11/2007WO2007114603A1 Photoresist coating apparatus having nozzle monitoring unit and method for suppling photoresist using the same
10/11/2007WO2007114503A1 Substrate fine processing method, substrate manufacturing method and light emitting element
10/11/2007WO2007114474A1 Liquid material vaporizer
10/11/2007WO2007114448A1 Device substrate washing method
10/11/2007WO2007114433A1 Method for processing chip of semiconductor wafer
10/11/2007WO2007114342A1 Method of manufacturing electronic part
10/11/2007WO2007114335A1 Substrate processing apparatus and substrate placing table
10/11/2007WO2007114331A1 Thin plate container
10/11/2007WO2007114328A1 Semiconductor storage device
10/11/2007WO2007114314A1 Method of forming minute metal bump
10/11/2007WO2007114293A1 Wafer storing cabinet and storage control method thereof
10/11/2007WO2007114254A1 Organic thin film transistor and method for manufacturing same
10/11/2007WO2007114253A1 Composition for under-resist film and under-resist film using same
10/11/2007WO2007114247A1 Plasma generating apparatus and plasma generating method
10/11/2007WO2007114156A1 Atomic layer growing apparatus
10/11/2007WO2007114155A1 Method and apparatus for growing plasma atomic layer
10/11/2007WO2007114140A1 Carbon nanotube electric field effect transistor and process for producing the same
10/11/2007WO2007114120A1 Ion implanter
10/11/2007WO2007114057A1 Semiconductor integrated circuit device, pdp driver and plasma display panel
10/11/2007WO2007114031A1 Laser irradiation device, laser irradiation method, and method for manufacturing modified object
10/11/2007WO2007114024A1 Projection optical system, aligner, and method for fabricating device
10/11/2007WO2007113968A1 Semiconductor integrated circuit testing method and information recording medium
10/11/2007WO2007113955A1 Mobile device, exposure device, exposure method, micro-motion body, and device manufacturing method
10/11/2007WO2007113918A1 Emergency stop device, electronic-component testing device with the same, and emergency stop method for electronic component testing device
10/11/2007WO2007113877A1 Apparatus and method to metalize supports for photovoltaic cells
10/11/2007WO2007113194A1 Method of producing multilayer structures having controlled properties
10/11/2007WO2007113139A1 Method for positioning components with which electrical contact can be made on a circuit carrier, and mounting system suitable for carrying out this method
10/11/2007WO2007113108A1 Improving control of localized air gap formation in an interconnect stack
10/11/2007WO2007113104A1 Novel pore-forming precursors composition and porous dielectric layers obtained there from
10/11/2007WO2007112833A1 Device and method for coating a micro- and/or nano-structured structural substrate and coated structural substrate
10/11/2007WO2007112768A1 Process for filling recessed features in a dielectric substrate
10/11/2007WO2007112625A1 Method for in-situ aberration measurement of optical imaging system in lithographic tools
10/11/2007WO2007082611B1 Apparatus and method for transferring a plurality of chips from a wafer to a substrate
10/11/2007WO2007075352A3 Rfid tag film embossing manufacturing techniques
10/11/2007WO2007072396A3 Sonos memory device with reduced short-channel effects
10/11/2007WO2007060640A3 Method of forming a self aligned copper capping layer
10/11/2007WO2007057357A3 Semiconductor devices having complementary multiple-gate transistors with different gate dielectrics and methods of manufacture thereof
10/11/2007WO2007056093A3 Replacement metal gate transistors with reduced gate oxide leakage
10/11/2007WO2007037980A3 System, apparatus, and method for increasing particle density and energy by creating a controlled plasma environment into a gaseous media
10/11/2007WO2007031928A3 Method of manufacturing semiconductor device with different metallic gates
10/11/2007WO2007007273A3 Ldmos transistor
10/11/2007WO2007001853A3 Method of forming stacked capacitor dram cells
10/11/2007WO2006138626A3 (AI,Ga,In)N AND ZnO DIRECT WAFER BONDED STRUCTURE FOR OPTOELECTRONIC APPLICATION AND ITS FABRICATION METHOD
10/11/2007WO2006125206A3 Method and apparatus for rfid device assembly
10/11/2007WO2006041580A9 3d interconnect with protruding contacts
10/11/2007WO2005117092A3 Stacked semiconductor package having adhesive/spacer structure and insulation
10/11/2007WO2005045886A3 Automated material handling system
10/11/2007WO2004083759A3 Apparatus and method of forming channels in a heat-exchanging device
10/11/2007US20070240089 Apparatus and method for correcting layout pattern data
10/11/2007US20070239309 Polishing apparatus and polishing method
10/11/2007US20070239307 Process and method for continuous, non lot-based integrated circuit manufacturing
10/11/2007US20070238399 Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
10/11/2007US20070238395 Substrate polishing apparatus and substrate polishing method
10/11/2007US20070238320 Devices and methods to improve carrier mobility
10/11/2007US20070238319 Mechanically actuated nanotube switches
10/11/2007US20070238318 Method of fabricating a semiconductor device
10/11/2007US20070238317 Polyhedral oligomeric silsesquioxane based imprint materials and imprint process using polyhedral oligomeric silsesquioxane based imprint materials
10/11/2007US20070238316 Method for manufacturing a semiconductor device having a nitrogen-containing gate insulating film
10/11/2007US20070238315 Method for forming a group iii nitride material on a silicon substrate
10/11/2007US20070238314 System and process for producing nanowire composites and electronic substrates therefrom
10/11/2007US20070238313 Method for replacing a nitrous oxide based oxidation process with a nitric oxide based oxidation process for substrate processing
10/11/2007US20070238312 Method of producing SIMOX wafer
10/11/2007US20070238311 Process for atomic layer deposition
10/11/2007US20070238310 Method for manufacturing a semiconductor device having a silicon oxynitride film
10/11/2007US20070238309 Method of reducing interconnect line to line capacitance by using a low k spacer
10/11/2007US20070238308 Simplified pitch doubling process flow
10/11/2007US20070238307 Processing apparatus and lid opening/closing mechanism
10/11/2007US20070238306 Method of forming dual damascene semiconductor device
10/11/2007US20070238305 Plasma dielectric etch process including ex-situ backside polymer removal for low-dielectric constant material
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