Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2008
10/21/2008US7439094 Method of manufacturing a semiconductor package
10/21/2008US7439093 Method of making a MEMS device containing a cavity with isotropic etch followed by anisotropic etch
10/21/2008US7439092 Thin film splitting method
10/21/2008US7439091 Light-emitting diode and method for manufacturing the same
10/21/2008US7439090 Method for manufacturing a lower substrate of a liquid crystal display device
10/21/2008US7439089 Method of fabricating array substrate having color filter on thin film transistor structure
10/21/2008US7439088 Liquid crystal display device and fabricating method thereof
10/21/2008US7439087 Semiconductor device and manufacturing method thereof
10/21/2008US7439086 Method for manufacturing liquid crystal display device
10/21/2008US7439085 Method and apparatus for electroluminescence
10/21/2008US7439084 Predictions of leakage modes in integrated circuits
10/21/2008US7439083 Technique for compensating for substrate shrinkage during manufacture of an electronic assembly
10/21/2008US7439082 Conductive memory stack with non-uniform width
10/21/2008US7439081 Method for making integrated circuit chip utilizing oriented carbon nanotube conductive layers
10/21/2008US7439068 Plasma monitoring method, plasma processing method, method of manufacturing semiconductor device, and plasma processing system
10/21/2008US7439010 Resist pattern excellent in oxygen plasma resistance, resolution, storage stability; efficient manufacture of magnetic heads, semiconductor devices, and other electronics; polysilicate modified with phenolic-containing silanol compound
10/21/2008US7439005 Styrene derivative, styrene polymer, photosensitive resin composition, and method for forming pattern
10/21/2008US7438998 Wiring pattern (mask layout) in the form of a line including angled portions with a local difference in line width is divided into rectangular patterns each having a large area and node portions interconnecting the rectangular patterns; high correction accuracy
10/21/2008US7438996 Decreasing error of line width on coarse/dense pattern; adjusting numerical aperture and/or coherence factor
10/21/2008US7438995 Use of partially fluorinated polymers in applications requiring transparency in the ultraviolet and vacuum ultraviolet
10/21/2008US7438955 Titanium nitride thin film formation on metal substrate by chemical vapor deposition in a magnetized sheet plasma source
10/21/2008US7438872 Steam oxidation apparatus
10/21/2008US7438804 Coagulation treatment apparatus
10/21/2008US7438783 Plasma processing apparatus and plasma processing method
10/21/2008US7438780 Manufacturing method for base piece made to adhere to adhesive sheet, manufacturing method for semiconductor wafer and manufacturing method for semiconductor device
10/21/2008US7438776 Tape adhering method and tape adhering apparatus
10/21/2008US7438765 Adjustable shielding plate for adjusting an etching area of a semiconductor wafer and related apparatus and methods
10/21/2008US7438762 Manufacture method for ZnO based compound semiconductor crystal and ZnO based compound semiconductor substrate
10/21/2008US7438761 Apparatus for fabricating a III-V nitride film and a method for fabricating the same
10/21/2008US7438760 Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition
10/21/2008US7438632 Method and apparatus for cleaning a web-based chemical mechanical planarization system
10/21/2008US7438631 Surface-protecting sheet and semiconductor wafer lapping method
10/21/2008US7438627 Polishing state monitoring method
10/21/2008US7438286 Workpiece holding jig
10/21/2008US7437933 Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof
10/21/2008US7437834 Method of processing substrate and substrate processing apparatus
10/21/2008US7437818 Component mounting method
10/21/2008CA2265496C Acrylic sheet having uniform distribution of coloring and mineral filler before and after thermoforming
10/16/2008WO2008124711A1 Compositions, layers and films for optoelectronic devices, methods of production and uses thereof
10/16/2008WO2008124671A1 Robust esd cell
10/16/2008WO2008124555A1 Techniques for low-temperature ion implantation
10/16/2008WO2008124554A1 Techniques for forming shallow junctions
10/16/2008WO2008124477A1 Method and system for thermally processing a plurality of wafer-shaped objects
10/16/2008WO2008124461A1 Optimizing asic pinouts for high density interconnect (hdi)
10/16/2008WO2008124440A1 Method for synthesizing metal oxide nanocrystals
10/16/2008WO2008124421A1 An end effector of a robot for transporting substrates
10/16/2008WO2008124400A1 Methods for optimizing thin film formation with reactive gases
10/16/2008WO2008124350A1 Method and system for distributing gas for a bevel edge etcher
10/16/2008WO2008124269A1 Electronic device including a nonvolatile memory array and methods of using the same
10/16/2008WO2008124249A1 Plasma treatment of insulating material
10/16/2008WO2008124242A1 A void-free contact plug
10/16/2008WO2008124240A1 A first inter-layer dielectric stack for non-volatile memory
10/16/2008WO2008124180A1 Roll to roll nanoimprint lithography
10/16/2008WO2008124130A1 Method to form a pattern of functional material on a substrate using a mask material
10/16/2008WO2008124108A1 Substrate transport apparatus with multiple independently movable articulated arms
10/16/2008WO2008124045A1 Apparatus, method and computer program product for modifying a surface of a component
10/16/2008WO2008123961A1 Method of creating super-hydrophobic and-or super hydrophilic surgfaces on substrates, and articles created thereby
10/16/2008WO2008123945A1 Method for cleaning semiconductor wafer surfaces by applying periodic shear stress to the cleaning solution
10/16/2008WO2008123930A1 Method of depositing materials on a non-planar surface
10/16/2008WO2008123638A1 Needle of probe card and method of manufacturing the same
10/16/2008WO2008123605A1 Plasma process apparatus
10/16/2008WO2008123583A1 Photosensitive polyamic acid ester composition
10/16/2008WO2008123548A1 Flotox type eeprom
10/16/2008WO2008123545A1 ZnO THIN FILM
10/16/2008WO2008123544A1 Oxide thin film and oxide thin film device
10/16/2008WO2008123491A1 Semiconductor element using carrier multiplication caused by ionizing collision and method for manufacturing the semiconductor element
10/16/2008WO2008123481A1 Semiconductor device comprising circuit substrate with inspection connection pads and manufacturing method thereof
10/16/2008WO2008123459A1 Apparatus and method for inspecting edge of semiconductor wafer
10/16/2008WO2008123431A1 Plasma oxidation method, plasma processing apparatus and recording medium
10/16/2008WO2008123421A1 Ion implanting apparatus
10/16/2008WO2008123414A1 Connection structure for flip-chip semiconductor package, buildup layer material, sealing resin composition and circuit board
10/16/2008WO2008123411A1 Plasma generating apparatus and plasma film forming apparatus
10/16/2008WO2008123399A1 Three-dimensional structure semiconductor device
10/16/2008WO2008123386A1 Power module and inverter for vehicle
10/16/2008WO2008123373A1 Colloidal silica, and method for production thereof
10/16/2008WO2008123352A1 Semiconductor device
10/16/2008WO2008123321A1 Method for forming ferromagnetic body, transistor and method for manufacturing the transistor
10/16/2008WO2008123309A1 Gas supply method and gas supply device
10/16/2008WO2008123307A1 Information recorder/reproducer
10/16/2008WO2008123300A1 Plasma processing apparatus
10/16/2008WO2008123295A1 Plasma processing apparatus
10/16/2008WO2008123289A1 Silicon nitride film and nonvolatile semiconductor memory device
10/16/2008WO2008123288A1 Trap apparatus, exhaust system, and treating system using the same
10/16/2008WO2008123264A1 Semiconductor device and manufacturing method thereof
10/16/2008WO2008123244A1 Organic thin film transistor substrate, its manufacturing method, image display panel, and its manufacturing method
10/16/2008WO2008123242A1 Substrate for epitaxial growth and epitaxial growth process
10/16/2008WO2008123234A1 Active matrix substrate and method for producing the same
10/16/2008WO2008123233A1 Radiation-sensitive resin composition, active matrix substrate and method for producing the same
10/16/2008WO2008123224A1 Photosensitive resin composition
10/16/2008WO2008123213A1 Semiconductor device and semiconductor manufacturing method
10/16/2008WO2008123210A1 Photosensitive resin composition
10/16/2008WO2008123196A1 Light source
10/16/2008WO2008123190A1 Ink-jet ink
10/16/2008WO2008123186A1 Plasma electron temperature measuring method and device
10/16/2008WO2008123181A1 Silicon fine particle, method for producing the same, and solar cell using the same and method for manufacturing the solar cell
10/16/2008WO2008123156A1 Testing apparatus and electronic device
10/16/2008WO2008123142A1 Plasma processing apparatus
10/16/2008WO2008123141A1 Compound semiconductor laminate, process for producing the compound semiconductor laminate, and semiconductor device
10/16/2008WO2008123133A1 Placing table structure and processing apparatus using the same
10/16/2008WO2008123117A1 Soi substrate and method for manufacturing soi substrate