| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/29/2009 | CN100483230C Pixel structure |
| 04/29/2009 | CN100483221C Method and apparatus for forming alignment layer for liquid crystal display |
| 04/29/2009 | CN100483188C Silicon-base liquid crystal display device and its manufacturing and detection method |
| 04/29/2009 | CN100483180C Laser irradiation method, laser irradiation apparatus |
| 04/29/2009 | CN100483172C Projection optical system, explosure device and making process of equipment |
| 04/29/2009 | CN100483118C External view inspection method, master pattern used for the same, and external view inspection device having the master pattern |
| 04/29/2009 | CN100483115C Substrate holding device and substrate inspection device |
| 04/29/2009 | CN100483066C Detection device capable of automatic aligning detected material |
| 04/29/2009 | CN100482868C Method for making monocrystal silicon and wafer by controlling pulling-speed distribution and products thereof |
| 04/29/2009 | CN100482857C Systems and methods for epitaxially depositing films on semiconductor substrates |
| 04/29/2009 | CN100482851C Method of forming mask and mask |
| 04/29/2009 | CN100482607C Ultra low thermal expansion transparent glass ceramics |
| 04/29/2009 | CN100482555C Conveying appliance for plates |
| 04/29/2009 | CN100482419C Polishing pad and chemical and mechanical polishing method |
| 04/29/2009 | CN100482408C Attitude control device and precision machining apparatus comprising same |
| 04/29/2009 | CN100482358C Substrate processing system, coating apparatus, and coating method |
| 04/29/2009 | CN100482355C Liquid drop jetting apparatus using charged beam and method for manufacturing a pattern using the apparatus |
| 04/28/2009 | US7526748 Design pattern data preparing method, mask pattern data preparing method, mask manufacturing method, semiconductor device manufacturing method, and program recording medium |
| 04/28/2009 | US7526747 Inspection method and inspection system using charged particle beam |
| 04/28/2009 | US7526408 Measurement system and method and computer program for processing measurement data |
| 04/28/2009 | US7526352 Semiconductor production system |
| 04/28/2009 | US7526146 Electro-optical modulator and a method for manufacturing the same |
| 04/28/2009 | US7526119 Pattern inspection apparatus |
| 04/28/2009 | US7525871 Semiconductor integrated circuit |
| 04/28/2009 | US7525830 Nonvolatile ferroelectric perpendicular electrode cell, FeRAM having the cell and method for manufacturing the cell |
| 04/28/2009 | US7525804 Semiconductor device and method of manufacturing the same |
| 04/28/2009 | US7525787 Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same |
| 04/28/2009 | US7525778 Semiconductor integrated circuit having protection elements for preventing MOS transistors from plasma damage |
| 04/28/2009 | US7525673 Optimizing selected variables of an optical metrology system |
| 04/28/2009 | US7525659 System for detection of water defects |
| 04/28/2009 | US7525650 Substrate processing apparatus for performing photolithography |
| 04/28/2009 | US7525637 Assembly |
| 04/28/2009 | US7525634 Monitoring apparatus and method particularly useful in photolithographically |
| 04/28/2009 | US7525630 Method of manufacturing array substrate for liquid crystal display device |
| 04/28/2009 | US7525615 Integral-type liquid crystal panel with image sensor function and pixel electrode overlapping photoelectric conversion element |
| 04/28/2009 | US7525588 CMOS APS with stacked avalanche multiplication layer and low voltage readout electronics |
| 04/28/2009 | US7525330 Semiconductor device, card, system, and methods of initializing and checking the authenticity and the identity of the semiconductor device |
| 04/28/2009 | US7525200 Semiconductor chip and semiconductor device, and method for manufacturing semiconductor device |
| 04/28/2009 | US7525197 Barrier process/structure for transistor trench contact applications |
| 04/28/2009 | US7525196 Protection of seedlayer for electroplating |
| 04/28/2009 | US7525193 Semiconductor device and method of manufacturing the same |
| 04/28/2009 | US7525189 Semiconductor device, wiring board, and manufacturing method thereof |
| 04/28/2009 | US7525187 Apparatus and method for connecting components |
| 04/28/2009 | US7525184 Semiconductor device and its manufacturing method |
| 04/28/2009 | US7525179 Lead frame structure with aperture or groove for flip chip in a leaded molded package |
| 04/28/2009 | US7525176 Phase change memory cell design with adjusted seam location |
| 04/28/2009 | US7525167 Semiconductor device with simplified constitution |
| 04/28/2009 | US7525165 Light emitting device and manufacturing method thereof |
| 04/28/2009 | US7525164 Strained Si/SiGe/SOI islands and processes of making same |
| 04/28/2009 | US7525162 Orientation-optimized PFETS in CMOS devices employing dual stress liners |
| 04/28/2009 | US7525159 Turn-on-efficient bipolar structures for on-chip ESD protection |
| 04/28/2009 | US7525158 Semiconductor device having pixel electrode and peripheral circuit |
| 04/28/2009 | US7525156 Shallow trench isolation fill by liquid phase deposition of SiO2 |
| 04/28/2009 | US7525155 High voltage transistor structure for semiconductor device |
| 04/28/2009 | US7525154 Semiconductor substrate, manufacturing method therefor, and semiconductor device |
| 04/28/2009 | US7525150 High voltage double diffused drain MOS transistor with medium operation voltage |
| 04/28/2009 | US7525145 Semiconductor integrated circuit device and a method of manufacturing the same |
| 04/28/2009 | US7525139 Image sensor with a protection layer |
| 04/28/2009 | US7525137 TFT mask ROM and method for making same |
| 04/28/2009 | US7525132 Semiconductor integrated circuit wiring design method and semiconductor integrated circuit |
| 04/28/2009 | US7525120 Thin film transistor array substrate and method of fabricating the same |
| 04/28/2009 | US7525118 Test element group, method of manufacturing a test element group, method of testing a semiconductor device, and semiconductor device |
| 04/28/2009 | US7525103 Technique for improving uniformity of a ribbon beam |
| 04/28/2009 | US7524908 Copolymerized high polymer film and method of manufacturing the same |
| 04/28/2009 | US7524801 Process for removing contaminant from a surface and composition useful therefor |
| 04/28/2009 | US7524777 Method for manufacturing an isolation structure using an energy beam treatment |
| 04/28/2009 | US7524776 Surface-activation of semiconductor nanostructures for biological applications |
| 04/28/2009 | US7524775 Method for producing a dielectric layer for an electronic component |
| 04/28/2009 | US7524774 Manufacturing method of semiconductor device, semiconductor manufacturing apparatus, plasma nitridation method, computer recording medium, and program |
| 04/28/2009 | US7524773 Anti-reflective substrate and the manufacturing method thereof |
| 04/28/2009 | US7524772 Pattern formation method |
| 04/28/2009 | US7524771 Substrate processing method using alkaline solution and acid solution |
| 04/28/2009 | US7524770 Methods of forming image sensor microlens structures |
| 04/28/2009 | US7524769 Method and system for removing an oxide from a substrate |
| 04/28/2009 | US7524768 Method using monolayer etch masks in combination with printed masks |
| 04/28/2009 | US7524767 Method for manufacturing a micro-electro-mechanical structure |
| 04/28/2009 | US7524766 Method for manufacturing semiconductor device and substrate processing apparatus |
| 04/28/2009 | US7524765 Direct tailoring of the composition and density of ALD films |
| 04/28/2009 | US7524764 Method of forming film pattern, device, method of manufacturing the same, electro-optical apparatus, and electronic apparatus |
| 04/28/2009 | US7524763 Fabrication method of wafer level chip scale packages |
| 04/28/2009 | US7524762 Atomic layer deposition of tantalum-containing materials using the tantalum precursor TAIMATA |
| 04/28/2009 | US7524761 Method for manufacturing semiconductor device capable of reducing parasitic bit line capacitance |
| 04/28/2009 | US7524760 Semiconductor device and method for manufacturing the same |
| 04/28/2009 | US7524759 Post passivation interconnection schemes on top of IC chip |
| 04/28/2009 | US7524758 Interconnect structure and method for semiconductor device |
| 04/28/2009 | US7524757 Method for manufacturing multi-level transistor comprising forming selective epitaxial growth layer |
| 04/28/2009 | US7524756 Process of forming a semiconductor assembly having a contact structure and contact liner |
| 04/28/2009 | US7524755 Entire encapsulation of Cu interconnects using self-aligned CuSiN film |
| 04/28/2009 | US7524753 Semiconductor device having through electrode and method of manufacturing the same |
| 04/28/2009 | US7524752 Method of manufacturing semiconductor device |
| 04/28/2009 | US7524751 Method for forming contact hole in semiconductor device |
| 04/28/2009 | US7524750 Integrated process modulation (IPM) a novel solution for gapfill with HDP-CVD |
| 04/28/2009 | US7524749 Metallization method of semiconductor device |
| 04/28/2009 | US7524748 Method of interconnecting terminals and method of mounting semiconductor devices |
| 04/28/2009 | US7524747 Floating gate memory device and method of manufacturing the same |
| 04/28/2009 | US7524745 Method and device for doping, diffusion and oxidation of silicon wafers under reduced pressure |
| 04/28/2009 | US7524744 Method of producing SOI wafer and SOI wafer |
| 04/28/2009 | US7524743 Conformal doping apparatus and method |
| 04/28/2009 | US7524742 Structure of metal interconnect and fabrication method thereof |
| 04/28/2009 | US7524741 Method of forming a low temperature-grown buffer layer, a light emitting element and method of making same, and light emitting device |