Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2009
06/24/2009CN100505273C Planar substrate with blended orientations and its forming method
06/24/2009CN100505267C Nonvolatile semiconductor memory device having coupled strap region and fabricating method thereof
06/24/2009CN100505265C Semiconductor device and method for manufacturing semiconductor device
06/24/2009CN100505254C Semiconductor device and its manufactureing method
06/24/2009CN100505240C Semiconductor device
06/24/2009CN100505221C Semiconductor structure of liquid crystal display and producing method thereof
06/24/2009CN100505220C Methods of forming flash memory device
06/24/2009CN100505219C Method for the manufacture of a non-volatile memory device and memory device thus obtained
06/24/2009CN100505218C Semiconductor structure and its manufacture method
06/24/2009CN100505217C Methods of forming dual gate of semiconductor device
06/24/2009CN100505216C Manufacturing method of IC and method for reducing corrosion of fuse structure
06/24/2009CN100505215C Method for fabricating semiconductor device
06/24/2009CN100505214C A canal step channel unit transistor and its manufacture method
06/24/2009CN100505213C Semiconductor device, power supply apparatus using the same, and electronic device
06/24/2009CN100505212C Standard cell, semiconductor integrated circuit device and layout design method for semiconductor integrated circuit device
06/24/2009CN100505211C Semiconductor chip and wafer production method
06/24/2009CN100505210C Method for fabricating storage node contact hole of semiconductor device
06/24/2009CN100505209C Method for increasing joining point strength between suspending film joining pin and substrate
06/24/2009CN100505208C Method of manufacturing a semiconductor device and semiconductor device obtained by means of said method
06/24/2009CN100505207C Multipurpose platform in substrate check-up device
06/24/2009CN100505206C Static cupule for vacuum processing device, vacuum processing device with the same, and its manufacturing method
06/24/2009CN100505205C Semiconductor wafer positioning method, and apparatus using the same
06/24/2009CN100505204C Orientation equipment
06/24/2009CN100505203C Silicon wafer high speed transport method and system capable of implementing multi-position processing
06/24/2009CN100505202C Transfer apparatus for target object
06/24/2009CN100505201C Tester for optical device
06/24/2009CN100505200C Chip for measuring Ohm contact deterioration failure of semicondutor device and its measuring method
06/24/2009CN100505199C Contactor block and apparatus for electrical connection
06/24/2009CN100505198C An automatic operation system of inner leading bonding device of semiconductor device
06/24/2009CN100505197C Method and system for injecting conductive material to multiple hollow cavity in non-rectangular mould
06/24/2009CN100505196C Chip electric connection structure and its manufacturing method
06/24/2009CN100505195C Method for forming solid conductive via hole of integrated circuit packaging base plate
06/24/2009CN100505194C Non adhesive tape adhesive crystal type integrated circuit packaging method
06/24/2009CN100505193C Organic electro-luminescence display device and method for fabricating the same
06/24/2009CN100505192C Method of making electronic device with welding seal and welding sealing apparatus
06/24/2009CN100505191C Method for manufacturing device having optical semiconductor element
06/24/2009CN100505190C Integrated circuit package and its forming mehtod
06/24/2009CN100505189C Method for handling electroplating lead layout of IC packaging base plate and electroplating lead structure
06/24/2009CN100505188C Method for forming FET
06/24/2009CN100505187C Self-forming metal silicide gate for CMOS devices
06/24/2009CN100505186C Process for preparing vertical thin-film transistor
06/24/2009CN100505185C Method of manufacturing a semiconductor device
06/24/2009CN100505184C Selective ion implantation pre-decrystallizatoin method for metal silicide production
06/24/2009CN100505183C Narrow-body damascene tri-gate FINFET having thinned body
06/24/2009CN100505182C Method for planarizing gate material to improve gate critical dimension in semiconductor devices
06/24/2009CN100505181C A phosphor adulterated and impurity absorption method
06/24/2009CN100505180C Method of improving the quality of defective semiconductor material
06/24/2009CN100505179C Manufacturing method of metal layer direct pattern of semiconductor element
06/24/2009CN100505178C Through substrate and interposer, and method for manufacturing through substrate
06/24/2009CN100505177C Method and system for etching a high-k dielectric material
06/24/2009CN100505176C Method and apparatus for detecting endpoint during plasma etching of thin films
06/24/2009CN100505175C Gas processing apparatus and film-forming apparatus
06/24/2009CN100505174C Apparatus and methods of cleaning substrates
06/24/2009CN100505173C Mechanochemical grinding process and method for increasing grinding end point accuracy
06/24/2009CN100505172C Polishing composition and its stock solution, and polishing method using same
06/24/2009CN100505171C 抛光垫 Polishing pad
06/24/2009CN100505170C Proximity head heating method and apparatus
06/24/2009CN100505169C Dielectric and composition and method for forming same
06/24/2009CN100505168C Uni-directional diffusion of metal silicide in semiconductor devices
06/24/2009CN100505167C Thermal treating apparatus
06/24/2009CN100505166C Method for manufactruing high quality GaN monocrystal thick film on heterogeneous substrate
06/24/2009CN100505165C A method for preparing the gallium nitride monocrystal substrate
06/24/2009CN100505164C Fabrication process of nitride semiconductor substrate and composite material substrate
06/24/2009CN100505163C Method of fabricating a silicon semiconductor substrate on strain insulator
06/24/2009CN100505162C Method for manufacturing wire of semiconductor component
06/24/2009CN100505161C Method for forming inductor in semiconductor device
06/24/2009CN100505160C Semiconductor structure and its making method
06/24/2009CN100505159C Method for minute graphic representation of metal with non-plane surface
06/24/2009CN100505158C Furnace body for controllablly heating blends at variable temperature
06/24/2009CN100505157C Substrate processing apparatus
06/24/2009CN100505156C Substrate processing apparatus and substrate processing method
06/24/2009CN100505155C Substrate cooling device
06/24/2009CN100505154C Substrate drying device and method, and substrate producing method
06/24/2009CN100505153C Protective tape cutting method and apparatus using the same
06/24/2009CN100505152C Method for forming micro pattern in semiconductor device
06/24/2009CN100505151C Method for extending use life of reaction cavity in plasma etching system
06/24/2009CN100505150C Stackable tray for integrated circuit chips
06/24/2009CN100505149C Method of thermal adherend release and apparatus for thermal adherend release
06/24/2009CN100505148C Method for realizing a hosting structure of nanometric elements
06/24/2009CN100505147C Pressure equalizing device for micro nano transfer printing
06/24/2009CN100505145C Tunable radiation source providing a vaccum ultroviolet wavelength planar illumination pattern for semiconductor wafers
06/24/2009CN100505140C Ion implanting apparatus and ion implanting method
06/24/2009CN100505126C Fusing circuit and display driving circuit
06/24/2009CN100505124C Film capacitor, built-in high-density assembled substrate thereof and method for making said film capacitor
06/24/2009CN100505093C Semiconductor device
06/24/2009CN100505085C Film magnet storage device of multi-storage unit shared access element
06/24/2009CN100504994C Electro-optical device and driving method therefore, electronic device and projection type display device
06/24/2009CN100504919C Integrated circuit, semiconductor device and ID chip
06/24/2009CN100504621C Thinner composition and method of removing photoresist using the same
06/24/2009CN100504620C Etching solution for forming bimetallic mosaic structure and base plate treatment method
06/24/2009CN100504610C Lithographic apparatus and device manufacturing method
06/24/2009CN100504609C Adaptive thermal control of lithographic chemical processes
06/24/2009CN100504608C Optimized calibration method of thermal deformation of a wafer in a lithographic process
06/24/2009CN100504607C Lithographic apparatus and device manufacturing method
06/24/2009CN100504606C Lithographic apparatus and device manufacturing method
06/24/2009CN100504605C Laser produced plasma radiation system with foil capturing
06/24/2009CN100504604C Mask and device manufacturing methods
06/24/2009CN100504603C Detecting assembly and photoetching projector, detection, calibration, determination and retaining method
06/24/2009CN100504599C Manufacture method of display element
06/24/2009CN100504598C High-resolution overlay alignment methods and systems for imprint lithography