Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2009
06/24/2009CN100504594C Method for producing semiconductor device using illuminating system including diffraction optical element
06/24/2009CN100504558C Active matrix substrate and display device
06/24/2009CN100504553C Thin film transistor array panel and liquid crystal display including the panel
06/24/2009CN100504224C Dust-free chamber
06/24/2009CN100503879C Support for microelectronic, microoptoelectronic or micromechanical devices
06/24/2009CN100503756C Coating compositions for use with an overcoated photoresist
06/24/2009CN100503169C Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
06/24/2009CN100503168C Polishing disk with end-point detection port
06/24/2009CN100503167C Composition for polishing
06/24/2009CN100503114C Methods and apparatus for electromechanically and/or electrochemically removing conductive material from a microelectronic substrate
06/23/2009USRE40790 Method for making electrical contact with an active area through sub-micron contact openings and a semiconductor device
06/23/2009USRE40774 Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device
06/23/2009US7552414 Layout design apparatus, layout design method, and computer product
06/23/2009US7552404 Semiconductor integrated device and apparatus for designing the same
06/23/2009US7551976 Industrial device receiving remote maintenance operation and outputting charge information
06/23/2009US7551767 Pattern inspection apparatus
06/23/2009US7551655 Laser irradiation apparatus, laser irradiation method and method for manufacturing semiconductor device
06/23/2009US7551511 NAND flash memory device and method of forming a well of a NAND flash memory device
06/23/2009US7551493 Data processing device
06/23/2009US7551419 Electroadhesion
06/23/2009US7551417 Thin film circuit substrate, piezoelectric speaker device, display device, and sound-generating display device
06/23/2009US7551362 Projection optical system and method for photolithography and exposure apparatus and method using same
06/23/2009US7551344 Methods for manufacturing displays
06/23/2009US7551329 Led chip mounting structure and image reader having same
06/23/2009US7551281 Position sensor
06/23/2009US7551264 Exposure apparatus
06/23/2009US7551216 CCD imaging device and driving method thereof
06/23/2009US7551019 Semiconductor integrated circuit and source voltage/substrate bias control circuit
06/23/2009US7550983 Membrane probing system with local contact scrub
06/23/2009US7550982 Semiconductor device test method for comparing a first area with a second area
06/23/2009US7550919 Organic electroluminescent device with reduced initial drive voltage and manufacturing method thereof
06/23/2009US7550859 System and method for hermetically sealing a package
06/23/2009US7550849 Conductive structures including titanium-tungsten base layers
06/23/2009US7550848 Semiconductor constructions comprising particle-containing materials
06/23/2009US7550847 Packaged microelectronic devices and methods for packaging microelectronic devices
06/23/2009US7550846 Conductive bump with a plurality of contact elements
06/23/2009US7550844 Semiconductor device and manufacturing method thereof
06/23/2009US7550843 Semiconductor device including a base member and a semiconductor constructing body directly fixed to thermosetting resin of the base member
06/23/2009US7550825 Interlayer dielectric and pre-applied die attach adhesive materials
06/23/2009US7550824 Low k interconnect dielectric using surface transformation
06/23/2009US7550823 Nonvolatile memory cell, array thereof, fabrication methods thereof and device comprising the same
06/23/2009US7550822 Dual-damascene metal wiring patterns for integrated circuit devices
06/23/2009US7550819 Metal thin-film resistance element on an insulation film
06/23/2009US7550818 Method of manufacture of a PCRAM memory cell
06/23/2009US7550816 Filled trench isolation structure
06/23/2009US7550815 Semiconductor device and method of producing the same
06/23/2009US7550811 Image pickup device and method of manufacturing the same
06/23/2009US7550809 Semiconductor integrated circuit device having deposited layer for gate insulation
06/23/2009US7550808 Fully siliciding regions to improve performance
06/23/2009US7550807 Semiconductor memory
06/23/2009US7550805 Stress-controlled dielectric integrated circuit
06/23/2009US7550802 Nonvolatile semiconductor memory device and manufacturing process of the same
06/23/2009US7550800 Method and apparatus transporting charges in semiconductor device and semiconductor memory device
06/23/2009US7550799 Semiconductor device and fabrication method of a semiconductor device
06/23/2009US7550796 Germanium semiconductor device and method of manufacturing the same
06/23/2009US7550794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
06/23/2009US7550791 Transistor and its method of manufacture
06/23/2009US7550790 D/A conversion circuit and semiconductor device
06/23/2009US7550786 Compound semiconductor epitaxial substrate
06/23/2009US7550784 Nitride-based transistors and methods of fabrication thereof using non-etched contact recesses
06/23/2009US7550781 Integrated III-nitride power devices
06/23/2009US7550780 Chamfered freestanding nitride semiconductor wafer and method of chamfering nitride semiconductor wafer
06/23/2009US7550776 Light generating semiconductor device and method of making the same
06/23/2009US7550765 Semiconductor device and fabrication method thereof
06/23/2009US7550764 Liquid crystal display device and method of fabricating the same
06/23/2009US7550758 Method for providing a nanoscale, high electron mobility transistor (HEMT) on insulator
06/23/2009US7550750 Method and apparatus for processing a micro sample
06/23/2009US7550694 Laser anneal apparatus
06/23/2009US7550398 Semiconductor device and method of fabricating the same
06/23/2009US7550397 Method of manufacturing a semiconductor device having a pre-metal dielectric liner
06/23/2009US7550396 Method for reducing resist poisoning during patterning of silicon nitride layers in a semiconductor device
06/23/2009US7550395 Control of photoelectrochemical (PEC) etching by modification of the local electrochemical potential of the semiconductor structure relative to the electrolyte
06/23/2009US7550394 Semiconductor device and fabrication process thereof
06/23/2009US7550393 Solid-state imaging device with reduced smear
06/23/2009US7550392 Semiconductor device and method of manufacturing the same
06/23/2009US7550391 Method for forming fine patterns of a semiconductor device using double patterning
06/23/2009US7550390 Method and apparatus for dielectric etching during integrated circuit fabrication
06/23/2009US7550389 Dual damascene method of forming a metal line of semiconductor device
06/23/2009US7550388 Polishing composition and polishing method
06/23/2009US7550387 Semiconductor wafer processing method
06/23/2009US7550386 Advanced seed layers for interconnects
06/23/2009US7550385 Amine-free deposition of metal-nitride films
06/23/2009US7550384 Semiconductor device and method for forming pattern in the same
06/23/2009US7550383 Methods of performing a photolithography process for forming asymmetric patterns and methods of forming a semiconductor device using the same
06/23/2009US7550382 Manufacturing method of semiconductor device, evaluation method of semiconductor device, and semiconductor device
06/23/2009US7550381 Contact clean by remote plasma and repair of silicide surface
06/23/2009US7550380 Electroless plating of metal caps for chalcogenide-based memory devices
06/23/2009US7550379 Alignment mark, use of a hard mask material, and method
06/23/2009US7550378 Method of manufacturing a semiconductor device having a cell area with a high device element density
06/23/2009US7550377 Method for fabricating single-damascene structure, dual damascene structure, and opening thereof
06/23/2009US7550376 Semiconductor device capable of suppressing current concentration in pad and its manufacture method
06/23/2009US7550375 Method for forming metal bumps
06/23/2009US7550374 Thin film electrode for forming ohmic contact in light emitting diodes and laser diodes using nickel-based solid solution for manufacturing high performance gallium nitride-based optical devices, and method for fabricating the same
06/23/2009US7550373 Method of forming a salicide layer for a semiconductor device
06/23/2009US7550372 Method of fabricating conductive lines with silicide layer
06/23/2009US7550371 Method of producing SIMOX wafer
06/23/2009US7550370 Method of forming thin SGOI wafers with high relaxation and low stacking fault defect density
06/23/2009US7550369 Method for fabricating low-defect-density changed orientation Si
06/23/2009US7550368 Group-III nitride semiconductor stack, method of manufacturing the same, and group-III nitride semiconductor device
06/23/2009US7550367 Method for separating semiconductor substrate