| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/07/2009 | US7556982 Method to grow pure nanocrystalline diamond films at low temperatures and high deposition rates |
| 07/07/2009 | US7556981 Switches for shorting during MEMS etch release |
| 07/07/2009 | US7556980 Photodiode and phototransistor |
| 07/07/2009 | US7556979 Negative thermal expansion system (NTEs) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging |
| 07/07/2009 | US7556978 Piezoelectric MEMS switches and methods of making |
| 07/07/2009 | US7556977 Semiconductor manufacturing method and semiconductor laser device manufacturing method |
| 07/07/2009 | US7556976 Method of fabricating semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formation |
| 07/07/2009 | US7556975 Method for manufacturing backside-illuminated optical sensor |
| 07/07/2009 | US7556974 Optical semiconductor device with multiple quantum well structure |
| 07/07/2009 | US7556973 Manufacturing method for semiconductor device |
| 07/07/2009 | US7556972 Detection and characterization of SiCOH-based dielectric materials during device fabrication |
| 07/07/2009 | US7556971 Testing electromigration at multiple points of a single node |
| 07/07/2009 | US7556970 Method of repairing damaged film having low dielectric constant, semiconductor device fabricating system and storage medium |
| 07/07/2009 | US7556954 MOS transistor and manufacturing method thereof |
| 07/07/2009 | US7556916 Method for burying resist and method for manufacturing semiconductor device |
| 07/07/2009 | US7556908 Chemically amplified positive resist composition, (meth)acrylate derivative and a process for producing the same |
| 07/07/2009 | US7556899 System for controlling an overlay, method for controlling overlay, and method for manufacturing a semiconductor device |
| 07/07/2009 | US7556896 Inspection method and photomask |
| 07/07/2009 | US7556895 Prevents a drop in pattern alignment accuracy due to the internal stress of the membrane and able to align patterns including complementary patterns at a high accuracy; stencil mask having lattice-shaped struts which are connected to other struts or the silicon wafer around the membrane frame |
| 07/07/2009 | US7556893 reticle used to form alignment targets on a wafer; four fine alignment targets per stepper shot for compensating rotational error in the making of integrated circuits; saving time and reducing processing, increase precision |
| 07/07/2009 | US7556860 Laminate and method of forming the same, insulating film, and semiconductor device |
| 07/07/2009 | US7556843 Photosensitive resin composition |
| 07/07/2009 | US7556839 Method of manufacturing semiconductor device and apparatus for processing substrate |
| 07/07/2009 | US7556741 Method for producing a solar cell |
| 07/07/2009 | US7556740 Method for producing a solar cell |
| 07/07/2009 | US7556725 Sealing ring assembly and mounting method |
| 07/07/2009 | US7556712 Laser cleaning of backside of wafer for photolithographic processing |
| 07/07/2009 | US7556711 Semiconductor device manufacturing apparatus and operating method thereof |
| 07/07/2009 | US7556697 System and method for carrying out liquid and subsequent drying treatments on one or more wafers |
| 07/07/2009 | US7556688 Method for achieving low defect density AlGaN single crystal boules |
| 07/07/2009 | US7556190 Method and device for mounting electric component |
| 07/07/2009 | US7556189 Sol-gel process for forming copper-tin-silver solder to bond silicon wafer; reduction of copper, silver and tin precursors in presence of H2 to form a film over pad layer, then bonding silicon wafer |
| 07/07/2009 | US7555961 Test apparatus |
| 07/07/2009 | US7555938 Thermoelastic self-actuation in piezoresistive resonators |
| 07/07/2009 | US7555830 Broken die detect sensor |
| 07/07/2009 | CA2449632C Method of fabrication of electronic devices using microfluidic channels |
| 07/07/2009 | CA2277607C Method and apparatus for iteratively, selectively tuning the impedance of integrated semiconductor devices using a focussed heating source |
| 07/02/2009 | WO2009082763A2 Method and apparatus for controlling plasma uniformity |
| 07/02/2009 | WO2009082753A2 Asymmetrical rf drive for electrode of plasma chamber |
| 07/02/2009 | WO2009082539A1 Redundant temperature sensor for semiconductor processing chambers |
| 07/02/2009 | WO2009082516A2 Adhesive applications using alkali silicate glass for electronics |
| 07/02/2009 | WO2009082460A2 Enclosure for controlling the enviroment of optical crystals |
| 07/02/2009 | WO2009082431A2 Integrated circuit system with contact integration |
| 07/02/2009 | WO2009082109A2 Process monitoring apparatus and method |
| 07/02/2009 | WO2009081968A1 Metal oxide semiconductor manufacturing method and semiconductor element using the same |
| 07/02/2009 | WO2009081924A1 Device for eliminating slackness of shock-absorbing tape |
| 07/02/2009 | WO2009081903A1 System for processing subject to be processed and method for controlling the system |
| 07/02/2009 | WO2009081884A1 Etching agent, etching method and liquid for preparing etching agent |
| 07/02/2009 | WO2009081880A1 Sticking method and sticking device of sticking material |
| 07/02/2009 | WO2009081874A1 Film-like resin composition for encapsulation filling, method for manufacturing semiconductor package or semiconductor device using the same, and semiconductor device |
| 07/02/2009 | WO2009081867A1 Semiconductor device and method for manufacturing semiconductor devicedispositif à semi-conducteurrs et procédé de fabrication d'un dispositif à semi-conducteurs |
| 07/02/2009 | WO2009081862A1 Metal oxide semiconductor, process for producing the metal oxide semiconductor, semiconductor element, and thin-film transistor |
| 07/02/2009 | WO2009081852A1 Protective agent |
| 07/02/2009 | WO2009081819A1 Information processing device, information processing method, and program |
| 07/02/2009 | WO2009081797A1 Material for formation of nickel-containing film, and method for production thereof |
| 07/02/2009 | WO2009081796A1 Electronic device and method for manufacturing electronic device |
| 07/02/2009 | WO2009081775A1 Thin-film transistor manufacturing method and thin-film transistor |
| 07/02/2009 | WO2009081773A1 Composition for formation of anti-reflective film, and pattern formation method using the composition |
| 07/02/2009 | WO2009081747A1 Dicing apparatus and dicing method |
| 07/02/2009 | WO2009081746A1 Dicing apparatus and dicing method |
| 07/02/2009 | WO2009081720A1 Method for manufacturing epitaxial silicon wafer |
| 07/02/2009 | WO2009081702A1 Scanning exposure apparatus and method for manufacturing semiconductor device |
| 07/02/2009 | WO2009081690A1 Apparatus and method for adhering sheet |
| 07/02/2009 | WO2009081687A1 Apparatus for growing nitride single crystal |
| 07/02/2009 | WO2009081677A1 Tin oxide-magnesium oxide sputtering target and transparent semiconductor film |
| 07/02/2009 | WO2009081648A1 Method for manufacturing element mounting substrate |
| 07/02/2009 | WO2009081633A1 Active matrix substrate, liquid-crystal display device having the substrate, and manufacturing method for the active matrix substrate |
| 07/02/2009 | WO2009081586A1 Imprinting device and imprinting method |
| 07/02/2009 | WO2009081584A1 Semiconductor device |
| 07/02/2009 | WO2009081524A1 Band-saw cutting apparatus, and cutting method |
| 07/02/2009 | WO2009081453A1 Thickened etching coating liquid, and method for selectively etching sunlight power generation element substrate for solar cell using the thickened etching coating liquid |
| 07/02/2009 | WO2009081345A1 Improved manufacturing method for planar independent-gate or gate-all-around transistors |
| 07/02/2009 | WO2009081289A1 Semiconductor storage device, operating and manufacturing thereof |
| 07/02/2009 | WO2009081243A1 Downhole tool |
| 07/02/2009 | WO2009081015A1 Method for localised hetero-epitaxy on a dielectric, in particular germanium on silicon oxide, and method and system for making a production base of a homogeneous or heterogeneous integrated circuit |
| 07/02/2009 | WO2009080652A1 A method and device for aligning components |
| 07/02/2009 | WO2009080615A2 Process for the production of microelectromechanical systems |
| 07/02/2009 | WO2009080471A1 Bonding device and method for producing electrically conductive connections |
| 07/02/2009 | WO2009080177A1 Method of manufacturing semiconductor substrate |
| 07/02/2009 | WO2009079982A2 Method for producing semiconductor chips and corresponding semiconductor chip |
| 07/02/2009 | WO2009079874A1 Methods and apparatus for cleaning semiconductor wafers |
| 07/02/2009 | WO2009079845A1 Staggered dual proess chambers using one single facet on a transfer module |
| 07/02/2009 | WO2009079777A1 Gallium arsenide semiconductor material incorporating bismuth and process for epitaxial growth |
| 07/02/2009 | WO2009064872A3 Particle beam assisted modifcation of thin film materials |
| 07/02/2009 | WO2009064871A3 Techniques for measuring and controlling ion beam angle and density uniformity |
| 07/02/2009 | WO2009064867A3 Particle beam assisted modification of thin film materials |
| 07/02/2009 | WO2009054936A3 Methods, structures and designs for self-aligning local interconnects used in integrated circuits |
| 07/02/2009 | WO2009053021A3 Method and device for coating a carrier for thin-film solar cells |
| 07/02/2009 | WO2009048234A3 Retainer ring of cmp machine |
| 07/02/2009 | US20090172609 Jitter amount estimating method, method for calculating correlation between amount of simultaneously operating signal noise and jitter amount, and recording medium |
| 07/02/2009 | US20090170346 Low temperature polysilicon oxide process for high-k dielectric/metal gate stack |
| 07/02/2009 | US20090170345 Method for manufacturing semiconductor device and substrate processing apparatus |
| 07/02/2009 | US20090170344 Method for forming dielectric films |
| 07/02/2009 | US20090170343 Method and apparatus for treating a semi-conductor substrate |
| 07/02/2009 | US20090170342 Dielectric nanostructure and method for its manufacture |
| 07/02/2009 | US20090170341 Process for forming dielectric films |
| 07/02/2009 | US20090170340 Method of forming dielectric films |
| 07/02/2009 | US20090170339 Reducing the creation of charge traps at gate dielectrics in mos transistors by performing a hydrogen treatment |
| 07/02/2009 | US20090170338 Substrate Treatment Device and Manufacturing Method of Semiconductor Device |
| 07/02/2009 | US20090170337 Device for Processing Substrate and Method of Manufacturing Semiconductor Device |