Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2009
07/08/2009CN100511642C Manufacturing method for semiconductor chips, and semiconductor chip
07/08/2009CN100511641C Method for manufacturing semiconductor device
07/08/2009CN100511640C Screw inductive element having multiplex conductor structure
07/08/2009CN100511639C 线路组件结构制造方法及其结构 Line assembly structure manufacturing method and structure
07/08/2009CN100511638C Etching residue removal method and semiconductor device fabrication method using this method
07/08/2009CN100511637C Semiconductor structure on an extremely rough substrate and a manufacturing method thereof
07/08/2009CN100511636C Method for manufacturing a structure comprising film of strain semiconductor material
07/08/2009CN100511635C Method for thinning wafer made of semiconductor material
07/08/2009CN100511634C Lift pin module of FPD manufacturing machine
07/08/2009CN100511633C Processing unit and aligning method
07/08/2009CN100511632C Semiconductor manufacturing device
07/08/2009CN100511631C Wafer storage container
07/08/2009CN100511630C Load port and load port control method
07/08/2009CN100511629C Processing system and operation method thereof
07/08/2009CN100511628C Control method of substrate processing apparatus
07/08/2009CN100511627C Feeding hole
07/08/2009CN100511626C Substrate processing device and method
07/08/2009CN100511625C Carrying device, electronic parts processing device and carrying method in the device
07/08/2009CN100511624C Device package and methods for the fabrication and testing thereof
07/08/2009CN100511623C Method for measuring semiconductor doping concentration
07/08/2009CN100511622C Method for emending output current by amending semiconductor pin test voltage
07/08/2009CN100511621C System and method for etching a mask
07/08/2009CN100511620C Equipment alarm and interlocking treatment method
07/08/2009CN100511619C Membrane processing method and processor
07/08/2009CN100511618C Metal particle dispersion composition and method using the same
07/08/2009CN100511617C Solid encapsulation structure and making method thereof
07/08/2009CN100511616C Component mounting apparatus and component mounting method
07/08/2009CN100511615C Component mounting apparatus and component mounting method
07/08/2009CN100511614C Package method for multi-chip stack and package structure thereof
07/08/2009CN100511613C Electronic device, semiconductor device using same, and method for manufacturing semiconductor device
07/08/2009CN100511612C Wire bonding apparatus and method thereof
07/08/2009CN100511611C Surface mounted semiconductor electronic parts and producing method
07/08/2009CN100511610C Method of resin-seal molding electronic component and apparatus thereof
07/08/2009CN100511609C Method of resin-seal molding electronic component and apparatus thereof
07/08/2009CN100511608C Metal mask plate
07/08/2009CN100511607C Thin film transistor and method of fabricating the same
07/08/2009CN100511606C Method for producing polycrystalline thin film transistor
07/08/2009CN100511605C Method for improved alignment tolerance in a bipolar transistor and related structure
07/08/2009CN100511604C Method for manufacturing semiconductor device
07/08/2009CN100511603C Method for structuring at least one layer and electric component with structures from said layer
07/08/2009CN100511602C Substrate processing apparatus
07/08/2009CN100511601C Method for forming aperture on low dielectric permittivity dielectric layer
07/08/2009CN100511600C Multiple frequency plasma etch reactor
07/08/2009CN100511599C Ashing apparatus, ashing method, and impurity doping apparatus
07/08/2009CN100511598C Method for machining a semiconductor wafer
07/08/2009CN100511597C Method for producing a semiconductor wafer with a profiled edge
07/08/2009CN100511596C Method for producing transistor T type nano grid using once electron beam exposure
07/08/2009CN100511595C Method for forming landing plug contacts in semiconductoe device
07/08/2009CN100511594C Hafnium-aluminum oxide dielectric films
07/08/2009CN100511593C Plasma doping method
07/08/2009CN100511592C Plasma doping method
07/08/2009CN100511591C Plasma doping method
07/08/2009CN100511590C Semiconductor manufacturing method and semiconductor laser device manufacturing method
07/08/2009CN100511589C Heat-proof wall, heater keeper tectosome, heating arrangement and substrate processing unit
07/08/2009CN100511588C Lead frame chip-level encapsulation method
07/08/2009CN100511587C Methods to fabricate MOSFET devices using selective deposition process
07/08/2009CN100511586C Exhaust device in substrate processing
07/08/2009CN100511585C Method for forming fine pattern
07/08/2009CN100511584C Method for manufacturing substrate with flatness layer
07/08/2009CN100511583C Plasma processing device
07/08/2009CN100511582C Apparatus for manufacturing flat-panel display
07/08/2009CN100511581C Apparatus to form a planarized Cu interconnect layer using electroless membrane deposition
07/08/2009CN100511580C Laser crystallization apparatus
07/08/2009CN100511579C Manufacturing method of semiconductor device
07/08/2009CN100511578C Die attach area cut-on-fly method and apparatus
07/08/2009CN100511577C Low-voltage single-layer polysilicon EEPROM memory cell
07/08/2009CN100511576C A chemical oxide removal system and method
07/08/2009CN100511575C Method for providing self-alignment contact in semiconductor device set
07/08/2009CN100511506C Ceramic electronic device and the production method thereof
07/08/2009CN100511490C Conductive materials with electrical stability for use in electronics devices
07/08/2009CN100511479C Nonvolatile semiconductor memory device and writing method thereto
07/08/2009CN100511477C Static random access memory device
07/08/2009CN100511375C 平板显示器 Flat panel displays
07/08/2009CN100511357C Apparatus and method for a fixed impedance transformation network for use in connection with a plasma chamber
07/08/2009CN100511074C Power element protection circuit and semiconductor device comprising same
07/08/2009CN100511055C Method for controlling operation of a processing system
07/08/2009CN100511054C Experiment management system and method
07/08/2009CN100510971C Coating forming agent for increasing fineness of pattern and fine pattern forming method using the same
07/08/2009CN100510969C System and method for controlling composition for lithography process in real-time using near-infrared spectrometer
07/08/2009CN100510966C Lithographic projector and substrate holder
07/08/2009CN100510965C Panel printing device and device manufacturing method
07/08/2009CN100510962C Photoetching device with aligning subsystem, manufacturng method for device with alignment and aligning structure
07/08/2009CN100510960C Positive resist composition and compound used therein
07/08/2009CN100510958C Pattern forming method
07/08/2009CN100510956C Phase-shift mask
07/08/2009CN100510922C Liquid crystal display device, method for manufacturing the same, and television receiver comprising the liquid crystal display device
07/08/2009CN100510853C Display device and manufacturing method thereof
07/08/2009CN100510200C Equipment for pulling crystal using direct pulling
07/08/2009CN100510168C Two-layer film for next generation damascene barrier application with good oxidation resistance
07/08/2009CN100509877C Unsaturated monomers, polymers, chemically amplified resist composition, and process of pattern formation
07/08/2009CN100509404C Method for mfg. piezoelectrics elements, piezoelectrics element and drop jet type recording head
07/08/2009CN100509289C Polishing head and polishing apparatus
07/08/2009CN100509288C Reflective resistant layer for polsihig pad window
07/08/2009CN100509287C Substrate holding device and polishing apparatus
07/08/2009CN100509250C Photo-thermal induced diffusion method
07/07/2009US7559044 Automatic design method of semiconductor integrated circuit, automatic design system of semiconductor integrated circuit, and semiconductor integrated circuit
07/07/2009US7558683 Method for inspecting defect and system therefor
07/07/2009US7558643 Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby
07/07/2009US7558045 Electrostatic chuck assembly with capacitive sense feature, and related operating method
07/07/2009US7557904 Wafer holding mechanism