| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/15/2009 | CN100514589C Wafer level packaging method and its structure |
| 07/15/2009 | CN100514588C Fabricating method for semiconductor device |
| 07/15/2009 | CN100514587C Fabricating method for semiconductor device |
| 07/15/2009 | CN100514586C Low cost, high volume lead frame production |
| 07/15/2009 | CN100514585C Wafer construction structure with the inductance and its construction method |
| 07/15/2009 | CN100514584C Manufacturing method for semiconductor device, semiconductor device, circuit substrate and apparatus |
| 07/15/2009 | CN100514583C Underlay embedded passive device |
| 07/15/2009 | CN100514582C Method of dry etching oxide semiconductor film |
| 07/15/2009 | CN100514581C Measuring alignment between a wafer chuck and polishing/plating receptacle |
| 07/15/2009 | CN100514580C Reversible leadless package and stack thereof |
| 07/15/2009 | CN100514579C Production of strain silicon transistor |
| 07/15/2009 | CN100514578C Methods of forming field effect transistors having recessed channel regions |
| 07/15/2009 | CN100514577C Thin germanium oxynitride gate dielectric for germanium-based devices |
| 07/15/2009 | CN100514576C Method of substrate treatment and substrate treating apparatus |
| 07/15/2009 | CN100514575C Method for forming dielectric film and device of forming film |
| 07/15/2009 | CN100514574C Method for forming film, method for manufacturing semiconductor device, semiconductor device and substrate treatment system |
| 07/15/2009 | CN100514573C Substrate processing method |
| 07/15/2009 | CN100514572C Substrate processing method and substrate processing apparatus |
| 07/15/2009 | CN100514571C Plasma etching system |
| 07/15/2009 | CN100514570C Plasma etching method |
| 07/15/2009 | CN100514569C Method for determining of performing plasma etching on wafer surface of terminals |
| 07/15/2009 | CN100514568C Semi-conductor silicon chip thinning production process |
| 07/15/2009 | CN100514567C Method of fabricating semiconductor device |
| 07/15/2009 | CN100514566C Pattern forming method, device, active matrix type substrate manufacture method |
| 07/15/2009 | CN100514565C Manufacturing method of semiconductor device |
| 07/15/2009 | CN100514564C Method of fabricating a gate structure of a field effect transistor having a metal-containing gate electrode |
| 07/15/2009 | CN100514563C Plasma doping method |
| 07/15/2009 | CN100514562C Making method for large-area 3C-SiC thin film of MEMS part |
| 07/15/2009 | CN100514561C Crystalline film and its manufacture method using laser |
| 07/15/2009 | CN100514560C Method of producing a plate-shaped structure, use of the method and plate-shaped structure thus produced |
| 07/15/2009 | CN100514559C Auxiliary laser crystallization method for making polysilicon |
| 07/15/2009 | CN100514558C Method of producing p-GaN low-resistance Ohm contact |
| 07/15/2009 | CN100514557C Intermediate transfer chamber, substrate processing system, and exhaust method for the intermediate transfer chamber |
| 07/15/2009 | CN100514556C Attaching device and method of fabricating organic light emitting device using the same |
| 07/15/2009 | CN100514555C Substrate processing apparatus |
| 07/15/2009 | CN100514554C Plasma processing apparatus and method |
| 07/15/2009 | CN100514553C Substrate processing apparatus |
| 07/15/2009 | CN100514552C Gas supply device, substrate processing apparatus and gas supply method |
| 07/15/2009 | CN100514551C Thermal processing apparatus |
| 07/15/2009 | CN100514550C Lid body opening/closing mechanism of vacuum processing chamber and method for opening/closing lid body |
| 07/15/2009 | CN100514549C Semiconductor device fabrication method |
| 07/15/2009 | CN100514548C Substrate processing system and substrate processing program |
| 07/15/2009 | CN100514547C Method of making a planar double-gated transistor |
| 07/15/2009 | CN100514546C Cluster tool process chamber having integrated high pressure and vacuum chambers |
| 07/15/2009 | CN100514545C Flash lamp annealing apparatus |
| 07/15/2009 | CN100514544C Methods for determining endpoint in a plasma processing system |
| 07/15/2009 | CN100514543C Substrate treater |
| 07/15/2009 | CN100514542C 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof |
| 07/15/2009 | CN100514541C Method and apparatus for monitoring parts in a material processing system |
| 07/15/2009 | CN100514531C Production method of electron source and image display |
| 07/15/2009 | CN100514191C Substrate processing system for performing exposure process in gas atmosphere |
| 07/15/2009 | CN100514190C System and method for analyzing defect availability of task based automative etching mask |
| 07/15/2009 | CN100514188C Composition for antireflection film formation |
| 07/15/2009 | CN100514184C Photomask |
| 07/15/2009 | CN100514138C Display device and method for making the same |
| 07/15/2009 | CN100514095C Polarizer, projection lens system, exposure device and exposure method |
| 07/15/2009 | CN100514081C System-on-chip (SOC) having built-in-self-test circuits and a self-test method of the SOC |
| 07/15/2009 | CN100513952C Capacitance sensing for substrate cooling |
| 07/15/2009 | CN100513636C Organometallic compounds |
| 07/15/2009 | CN100513635C Driving mechanism for vacuum process equipment |
| 07/15/2009 | CN100513632C Thin film forming device and thin film forming method |
| 07/15/2009 | CN100513629C Molecular beam source apparatus for film deposition and method for depositing film by molecular beam |
| 07/15/2009 | CN100513545C Microelectronic cleaning compositions containing ammonia-free fluoride salts |
| 07/15/2009 | CN100513544C Cleaning liquid composition for semiconductor substrate |
| 07/15/2009 | CN100513308C Method for manufacturing carbon fibers and use thereof |
| 07/15/2009 | CN100513276C Wafer storage container, storage device and method of storing wafer |
| 07/15/2009 | CN100513110C Wafer dividing method utilizing laser beam |
| 07/15/2009 | CN100513077C Planarization system and method using a carbonate containing fluid |
| 07/15/2009 | CN100513076C Polishing apparatus and polishing method |
| 07/15/2009 | CN100512877C Germ-free medicinal compositions |
| 07/14/2009 | US7562334 Method for manufacturing a photomask |
| 07/14/2009 | US7562256 Semiconductor memory device for build-in fault diagnosis |
| 07/14/2009 | US7561853 Radio frequency switch |
| 07/14/2009 | US7561390 Protection circuit in semiconductor circuit device comprising a plurality of chips |
| 07/14/2009 | US7561385 Magneto-resistive element in which a free layer includes ferromagnetic layers and a non-magnetic layer interposed therebetween |
| 07/14/2009 | US7561258 Wafer tilt detection apparatus and method |
| 07/14/2009 | US7561253 Method for a multiple exposure, microlithography projection exposure installation and a projection system |
| 07/14/2009 | US7561251 Lithographic apparatus and device manufacturing method |
| 07/14/2009 | US7561248 Immersion exposure technique |
| 07/14/2009 | US7561242 Contact structure |
| 07/14/2009 | US7561238 Liquid crystal display device and method of manufacturing the same |
| 07/14/2009 | US7561223 Device and method for protecting gate terminal and lead |
| 07/14/2009 | US7561221 Apparatuses and methods for forming assemblies |
| 07/14/2009 | US7561219 Fabrication method of a liquid crystal display device using small molecule organic semiconductor material |
| 07/14/2009 | US7561139 Active matrix type display device |
| 07/14/2009 | US7560975 Semiconductor device |
| 07/14/2009 | US7560946 Method of acceptance for semiconductor devices |
| 07/14/2009 | US7560941 Method and system for compensating thermally induced motion of probe cards |
| 07/14/2009 | US7560820 Integrated getter for vacuum or inert gas packaged LEDs |
| 07/14/2009 | US7560819 Semiconductor device and method of manufacture thereof, circuit board and electronic instrument |
| 07/14/2009 | US7560817 Interconnect including a pliable surface and use thereof |
| 07/14/2009 | US7560816 Small grain size, conformal aluminum interconnects and method for their formation |
| 07/14/2009 | US7560815 Device structures including ruthenium silicide diffusion barrier layers |
| 07/14/2009 | US7560814 Semiconductor device that improves electrical connection reliability |
| 07/14/2009 | US7560810 Semiconductor device, method of manufacturing the same, circuit board, and electronic instrument |
| 07/14/2009 | US7560803 Method for fabricating semiconductor device and apparatus for fabricating the same |
| 07/14/2009 | US7560802 Electrical connections in substrates |
| 07/14/2009 | US7560801 Rewiring substrate strip with several semiconductor component positions |
| 07/14/2009 | US7560799 Spacer patterned, high dielectric constant capacitor |
| 07/14/2009 | US7560793 Atomic layer deposition and conversion |