| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/09/2009 | WO2009084823A1 Apparatus and method for processing substrate |
| 07/09/2009 | WO2009084768A1 Micro-probe unit and manufacturing method thereof |
| 07/09/2009 | WO2009084701A1 Semiconductor package and camera module |
| 07/09/2009 | WO2009084700A1 Semiconductor package including through-hole electrode and light-transmitting substrate |
| 07/09/2009 | WO2009084644A1 Exposure apparatus, exposure method, cleaning apparatus and device manufacturing method |
| 07/09/2009 | WO2009084630A1 Transfer robot diagnosis system |
| 07/09/2009 | WO2009084606A1 Member coated with aluminum nitride by thermal spraying and process for producing the same |
| 07/09/2009 | WO2009084584A1 Method for forming semiconductor thin film and method for manufacturing thin film semiconductor device |
| 07/09/2009 | WO2009084537A1 Process for producing thin film of a-igzo oxide |
| 07/09/2009 | WO2009084536A1 Semiconductor substrate bonding apparatus and semiconductor substrate bonding method |
| 07/09/2009 | WO2009084515A1 Resist treatment method |
| 07/09/2009 | WO2009084486A1 Plasma treatment apparatus, heating device for the plasma treatment apparatus, and plasma treatment method |
| 07/09/2009 | WO2009084466A1 Computer generated hologram and exposure apparatus |
| 07/09/2009 | WO2009084445A1 Dry etching method, magnetoresistive element, and method and apparatus for manufacturing the same |
| 07/09/2009 | WO2009084437A1 Vacuum processing device, vacuum processing method, and computer-readable storage medium |
| 07/09/2009 | WO2009084431A1 Semiconductor material, method for manufacturing semiconductor material, and semiconductor element |
| 07/09/2009 | WO2009084409A1 Computer generated hologram, generation method, and exposure apparatus |
| 07/09/2009 | WO2009084408A1 Film formation device and film formation method |
| 07/09/2009 | WO2009084406A1 Liquid treatment apparatus, liquid treatment method and storage medium |
| 07/09/2009 | WO2009084396A1 Delay monitor circuit and delay monitor method |
| 07/09/2009 | WO2009084376A1 Semiconductor device and process for producing the semiconductor device |
| 07/09/2009 | WO2009084333A1 Photosensitive insulating resin composition for forming resin electrode, method for forming resin convex body, and resin convex body |
| 07/09/2009 | WO2009084318A1 Highly pure lanthanum, sputtering target comprising highly pure lanthanum, and metal gate film mainly composed of highly pure lanthanum |
| 07/09/2009 | WO2009084312A1 Semiconductor device, substrate with single-crystal semiconductor thin film and methods for manufacturing same |
| 07/09/2009 | WO2009084311A1 Semiconductor device, substrate with single-crystal semiconductor thin film and methods for manufacturing same |
| 07/09/2009 | WO2009084309A1 Method for manufacturing semiconductor device and semiconductor device manufactured by the method |
| 07/09/2009 | WO2009084307A1 Thin film semiconductor device and field effect transistor |
| 07/09/2009 | WO2009084296A1 Optical member for euvl and surface treatment method thereof |
| 07/09/2009 | WO2009084287A1 Semiconductor device, and its manufacturing method |
| 07/09/2009 | WO2009084284A1 Insulating substrate for semiconductor device, semiconductor device, and method for manufacturing semiconductor device |
| 07/09/2009 | WO2009084279A1 Method for processing substrate, program, computer storage medium, and substrate processing system |
| 07/09/2009 | WO2009084244A1 Exposure apparatus, moving body driving system, pattern forming apparatus, exposure method and device manufacturing method |
| 07/09/2009 | WO2009084242A1 Semiconductor substrate and method for manufacturing semiconductor substrate |
| 07/09/2009 | WO2009084241A1 Semiconductor substrate, method for producing semiconductor substrate, and electronic device |
| 07/09/2009 | WO2009084240A1 Semiconductor substrate, method for producing semiconductor substrate, and electronic device |
| 07/09/2009 | WO2009084239A1 Semiconductor substrate, method for producing semiconductor substrate, and electronic device |
| 07/09/2009 | WO2009084238A1 Semiconductor substrate, method for manufacturing semiconductor substrate, and electronic device |
| 07/09/2009 | WO2009084206A1 Semiconductor memory device and method for manufacturing same |
| 07/09/2009 | WO2009084203A1 Moving body driving method and apparatus, exposure method and apparatus, pattern forming method and apparatus, and device manufacturing method |
| 07/09/2009 | WO2009084199A1 Exposure device, exposure method, and device manufacturing method |
| 07/09/2009 | WO2009084196A1 Moving body driving system, pattern forming apparatus, exposure apparatus, exposure method and device manufacturing method |
| 07/09/2009 | WO2009084194A1 Etching method for metal film and metal oxide film, and manufacturing method for semiconductor device |
| 07/09/2009 | WO2009084160A1 Plasma doping apparatus and method, and method for manufacturing semiconductor device |
| 07/09/2009 | WO2009084155A1 Bonding material, electronic component, and bonded structure |
| 07/09/2009 | WO2009084154A1 Susceptor for epitaxial growth |
| 07/09/2009 | WO2009084149A1 Semiconductor device and method for manufacturing the same |
| 07/09/2009 | WO2009084137A1 Semiconductor device and method for manufacturing the same |
| 07/09/2009 | WO2009084130A1 Semiconductor device manufacturing method |
| 07/09/2009 | WO2009084125A1 Semiconductor device manufacturing method and semiconductor device |
| 07/09/2009 | WO2009084100A1 Semiconductor device and its manufacturing method |
| 07/09/2009 | WO2009084092A1 Macro layout verifying device and method |
| 07/09/2009 | WO2009083882A2 Memory cell suitable for dram memory |
| 07/09/2009 | WO2009083582A1 Method for aligning and bonding elements and a device comprising aligned and bonded elements |
| 07/09/2009 | WO2009083438A1 Active-matrix display device including an organic thin-layer transistor |
| 07/09/2009 | WO2009082985A1 A system and process for processing the substrate in the chamber |
| 07/09/2009 | WO2009082983A1 System and process for conveying workpieces into a chamber |
| 07/09/2009 | WO2009082863A1 A method for forming micro-dots array in micro-channels |
| 07/09/2009 | WO2009082840A1 Method for forming a polysilicon film |
| 07/09/2009 | WO2009082812A1 Direct contact heat control of micro structures |
| 07/09/2009 | WO2009067641A3 R-plane sapphire method and apparatus |
| 07/09/2009 | WO2009061809A3 Single poly eeprom allowing continuous adjustment of its threshold voltage |
| 07/09/2009 | WO2009061714A3 Implantation of multiple species to address copper reliability |
| 07/09/2009 | WO2009058532A3 Methods for fabricating sub-resolution alignment marks on semiconductor structures and semiconductor structures including same |
| 07/09/2009 | WO2009055570A3 Semiconductor structure and method of manufacture |
| 07/09/2009 | WO2009055317A3 Process for removing ion-implanted photoresist |
| 07/09/2009 | WO2009051716A3 Reconfigurable connections for stacked semiconductor devices |
| 07/09/2009 | WO2009049050A3 Formation of nitrogen containing dielectric layers having an improved nitrogen distribution |
| 07/09/2009 | WO2009042679A3 Stiffener assembly for use with testing devices |
| 07/09/2009 | WO2009041713A3 Method for manufacturing an oxide semiconductor field-effect transistor |
| 07/09/2009 | WO2008147756A4 In-situ photoresist strip during plasma etching of active hard mask |
| 07/09/2009 | WO2008123004A3 Deposition of layers of porous materials, layers thus obtained and devices containing them. |
| 07/09/2009 | WO2008078185A8 Antireflective coating compositions |
| 07/09/2009 | WO2008060309A9 Tio2 nanostructures, membranes and films, and applications of same |
| 07/09/2009 | US20090177933 Decompressor/prpg for applying pseudo-random and deterministic test patterns |
| 07/09/2009 | US20090177432 Apparatus and method for real time measurement of substrate temperatures for use in semiconductor growth and wafer processing |
| 07/09/2009 | US20090177413 System For Monitoring Foreign Particles, Process Processing Apparatus And Method Of Electronic Commerce |
| 07/09/2009 | US20090177308 Server and program |
| 07/09/2009 | US20090176750 Specified ratio of penetration enhancers to solvents and emulsifiers; fluocinolone |
| 07/09/2009 | US20090176444 Wafer polishing method and apparatus |
| 07/09/2009 | US20090176430 Method of making white light source by violet-LED |
| 07/09/2009 | US20090176381 Method of manufacturing semiconductor device and substrate processing apparatus |
| 07/09/2009 | US20090176380 Plasma treatment method and plasma treatment device |
| 07/09/2009 | US20090176379 Semiconductor Processing Methods, And Methods For Forming Silicon Dioxide |
| 07/09/2009 | US20090176378 Manufacturing method of dual damascene structure |
| 07/09/2009 | US20090176377 Method of forming patterns of semiconductor device |
| 07/09/2009 | US20090176376 Method of fine patterning semiconductor device |
| 07/09/2009 | US20090176375 Method of Etching a High Aspect Ratio Contact |
| 07/09/2009 | US20090176374 Pattern forming method, semiconductor device manufacturing apparatus and storage medium |
| 07/09/2009 | US20090176373 Polishing agent for semiconductor integrated circuit device, polishing method, and method for manufacturing semiconductor integrated circuit device |
| 07/09/2009 | US20090176372 Chemical mechanical polishing slurry and semiconductor device manufacturing method |
| 07/09/2009 | US20090176371 Method For The Preferential Polishing Of Silicon Nitride Versus Silicon Oxide |
| 07/09/2009 | US20090176370 Single soi wafer accelerometer fabrication process |
| 07/09/2009 | US20090176369 Low-h plasma treatment with n2 anneal for electronic memory devices |
| 07/09/2009 | US20090176368 Manufacturing method for an integrated circuit structure comprising a selectively deposited oxide layer |
| 07/09/2009 | US20090176367 OPTIMIZED SiCN CAPPING LAYER |
| 07/09/2009 | US20090176366 Micropad formation for a semiconductor |
| 07/09/2009 | US20090176365 Contact formation |
| 07/09/2009 | US20090176364 Semiconductor device having a refractory metal containing film and method for manufacturing the same |
| 07/09/2009 | US20090176363 Etching composition for an under-bump metallurgy layer and method of forming a bump structure using the same |
| 07/09/2009 | US20090176362 Methods of forming interconnects in a semiconductor structure |