Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2009
07/21/2009US7563700 Method for improving self-aligned silicide extendibility with spacer recess using an aggregated spacer recess etch (ASRE) integration
07/21/2009US7563699 Semiconductor devices having line type active regions and methods of fabricating the same
07/21/2009US7563698 Method for manufacturing semiconductor device
07/21/2009US7563697 Method for producing SOI wafer
07/21/2009US7563696 Semiconductor device manufacturing apparatus and semiconductor device manufacturing method
07/21/2009US7563695 Method and system for high-speed precise laser trimming and scan lens for use therein
07/21/2009US7563694 Scribe based bond pads for integrated circuits
07/21/2009US7563693 Method for manufacturing semiconductor substrate and semiconductor substrate
07/21/2009US7563692 Microelectromechanical system pressure sensor and method for making and using
07/21/2009US7563691 Method for plasma enhanced bonding and bonded structures formed by plasma enhanced bonding
07/21/2009US7563690 Method for forming shallow trench isolation region
07/21/2009US7563689 Method for fabricating nonvolatile memory device
07/21/2009US7563688 Method for fabricating capacitor in semiconductor device
07/21/2009US7563687 Method of fabricating a capacitor by using a metallic deposit in an interconnection dielectric layer of an integrated circuit
07/21/2009US7563686 Method for forming a memory device with a recessed gate
07/21/2009US7563685 Bipolar-transistor and method for the production of a bipolar-transistor
07/21/2009US7563684 Process for manufacturing an array of cells including selection bipolar junction transistors
07/21/2009US7563683 Transistor and method of fabricating the same
07/21/2009US7563682 LDMOS transistor device, integrated circuit, and fabrication method thereof
07/21/2009US7563681 Double-gated non-volatile memory and methods for forming thereof
07/21/2009US7563680 Substrate having silicon germanium material and stressed silicon nitride layer
07/21/2009US7563679 Reduction of field edge thinning in peripheral devices
07/21/2009US7563678 Semiconductor device and method of manufacturing the same
07/21/2009US7563677 Recessed gate electrode and method of forming the same and semiconductor device having the recessed gate electrode and method of manufacturing the same
07/21/2009US7563675 Ladder poly etching back process for word line poly planarization
07/21/2009US7563674 Method of manufacturing NAND flash memory device
07/21/2009US7563673 Method of forming gate structure of semiconductor device
07/21/2009US7563672 Methods of fabricating integrated circuit devices including metal-insulator-metal capacitors
07/21/2009US7563671 Method for forming trench capacitor and memory cell
07/21/2009US7563670 Method for etching single-crystal semiconductor selective to amorphous/polycrystalline semiconductor and structure formed by same
07/21/2009US7563669 Integrated circuit with a trench capacitor structure and method of manufacture
07/21/2009US7563668 Semiconductor device and method of manufacturing same
07/21/2009US7563667 Method for fabricating semiconductor device
07/21/2009US7563666 Semiconductor structures including vertical diode structures and methods of making the same
07/21/2009US7563665 Semiconductor device and method for manufacturing semiconductor device
07/21/2009US7563664 Semiconductor memory device equipped with memory transistor and peripheral transistor and method of manufacturing the same
07/21/2009US7563663 Method of manufacturing semiconductor device with offset sidewall structure
07/21/2009US7563662 Processes for forming electronic devices including non-volatile memory
07/21/2009US7563661 Crystallization method for semiconductor film, manufacturing method for semiconductor device, and laser irradiation apparatus
07/21/2009US7563660 Silicon film, crystalline film and method for manufacturing the same
07/21/2009US7563659 Method of fabricating poly-crystalline silicon thin film and method of fabricating transistor using the same
07/21/2009US7563658 Method for manufacturing semiconductor device
07/21/2009US7563657 High performance FET devices and methods thereof
07/21/2009US7563656 Method of manufacturing display substrate having improved contact with pixel electrode
07/21/2009US7563655 Method of fabricating the liquid crystal display device
07/21/2009US7563654 Method of manufacturing semiconductor device for formation of pin transistor
07/21/2009US7563653 ESD protection for high voltage applications
07/21/2009US7563652 Method for encapsulating sensor chips
07/21/2009US7563651 Method of fabricating a substrate with a concave surface
07/21/2009US7563650 Circuit board and the manufacturing method
07/21/2009US7563649 Chip packaging with metal frame pin grid array
07/21/2009US7563648 Semiconductor device package and method for manufacturing same
07/21/2009US7563647 Integrated circuit package system with interconnect support
07/21/2009US7563646 Molded ceramic surface mount package
07/21/2009US7563645 Electronic package having a folded package substrate
07/21/2009US7563644 Optical device and method for fabricating the same
07/21/2009US7563643 Wafer processing apparatus
07/21/2009US7563642 Manufacturing method of a semiconductor device
07/21/2009US7563641 Laminated light-emitting diode display device and manufacturing method thereof
07/21/2009US7563640 Semiconductor device including semiconductor element surrounded by an insulating member and wiring structures on upper and lower surfaces of the semiconductor element and insulating member, and manufacturing method thereof
07/21/2009US7563639 Phase-changeable memory device and method of manufacturing the same
07/21/2009US7563637 Image sensor
07/21/2009US7563636 Method of forming a pixel sensor cell for collecting electrons and holes
07/21/2009US7563635 Electronic device and method of manufacturing the same
07/21/2009US7563634 Method for mounting semiconductor chips, and corresponding semiconductor chip system
07/21/2009US7563633 Microelectromechanical systems encapsulation process
07/21/2009US7563632 Methods for packaging and sealing an integrated circuit die
07/21/2009US7563631 Reduced barrier photodiode / gate device structure for high efficiency charge transfer and reduced lag and method of formation
07/21/2009US7563630 Method for fabricating a semiconductor laser device that includes growing current confinement layers and a mesa side surface
07/21/2009US7563629 Method of fabricating vertical structure LEDs
07/21/2009US7563628 Fabrication of optical waveguide devices
07/21/2009US7563627 Method of manufacturing thin film transistor array substrate
07/21/2009US7563626 Manufacturing method of complementary metal oxide silicon image sensor
07/21/2009US7563625 Method of making light-emitting diodes (LEDs) with improved light extraction by roughening
07/21/2009US7563562 Lithographic apparatus and device manufacturing method
07/21/2009US7563547 Photomask and method of manufacturing the same
07/21/2009US7563500 "nanotemplate" for selectively assembling nanoelements; modifying and transferring assembled nanoelements to a recipient substrate; layer of monomer polymerized on the surface of the nanosubstrate; mercaptoalkylphenyl-substituted styrene monomer
07/21/2009US7563487 laminating a porous film made of polytetrafluoroethylene with elasticity suitable for elastic recovery and used as a base film, adhering conductive metal by electroless plating at plural positions of the base film; use in the burn-in test of semiconductor devices
07/21/2009US7563481 Method and apparatus for processing polysilazane film
07/21/2009US7563382 Mask and method of fabricating the same, and method of machining material
07/21/2009US7563380 Providing a substrate, electrodes that reside within a target area; passing a gas mixture comprising a reducing gas through the target area; supplying an amount of energy toand/or electrodes to generate electrons; contacting substrate with negatively charged reducing gas to reduce metal oxides
07/21/2009US7563379 Dry etching method and photonic crystal device fabricated by use of the same
07/21/2009US7563343 Film lamination apparatus and method and a manufacturing method of a semiconductor apparatus
07/21/2009US7563328 Method and apparatus for gas injection system with minimum particulate contamination
07/21/2009US7563323 Substrate treating apparatus
07/21/2009US7563319 Manufacturing method of silicon wafer
07/21/2009US7563043 Coating/developing apparatus and substrate transfer method
07/21/2009US7562806 Apparatus for manufacturing electronic device, method of manufacturing electronic device, and program for manufacturing electronic device
07/21/2009US7562686 Method and system for 3D alignment in wafer scale integration
07/21/2009US7562663 High-pressure processing apparatus and high-pressure processing method
07/21/2009US7562662 Oxidizer of ammonium iodine oxide, potassium iodine oxide, lithium iodine oxide, calcium iodine oxide, barium iodine oxide, potassium iodine, or ammonium iodine, deionized water, a fluorine based deoxidizer, and a surface charge controlling agent; corrosion resistance
07/21/2009US7562638 Methods and arrangement for implementing highly efficient plasma traps
07/21/2009US7562564 Scanning probe microscope and sample observing method using this and semiconductor device production method
07/21/2009CA2450239C Hermetic feedthrough for an implantable device
07/21/2009CA2317538C Timing closure methodology
07/16/2009WO2009089552A2 Methods and apparatuses for large diameter wafer handling
07/16/2009WO2009089511A2 Compositions and methods containing fluorine substituted olefins
07/16/2009WO2009089499A2 Multibeam system
07/16/2009WO2009089311A2 Methods and apparatus for a wide conductance kit
07/16/2009WO2009089309A1 Integration scheme for extension of via opening depth