| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/22/2009 | CN100517560C Gas injection device |
| 07/22/2009 | CN100517559C Making method for storage capacitor |
| 07/22/2009 | CN100517558C Method for washing fluoro-gum formed product for semiconductor producing device and formed product to be washed |
| 07/22/2009 | CN100517500C Magnetic random access memory devices including heat generating layers and related methods |
| 07/22/2009 | CN100517423C Panel display with thin film transistor |
| 07/22/2009 | CN100517422C Distributing structure, its manufacturing method and optical equipment |
| 07/22/2009 | CN100517074C Chuck system, lithographic apparatus using the same and device manufacturing method |
| 07/22/2009 | CN100517073C Independent controllable component array, lightscribing apparatus and device manufacturing method using the lightscribing apparatus |
| 07/22/2009 | CN100517072C Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 07/22/2009 | CN100517071C Lithographic apparatus and apparatus adjustment method |
| 07/22/2009 | CN100517070C Maskless lithography systems and methods utilizing spatial light modulator arrays |
| 07/22/2009 | CN100517068C Nanoimprint photoresist |
| 07/22/2009 | CN100517067C Organic anti-reflective coating composition and method for forming photoresist pattern using the same |
| 07/22/2009 | CN100517037C Semiconductor device |
| 07/22/2009 | CN100516984C Transfer apparatus |
| 07/22/2009 | CN100516826C Method for checking the quality of a wedge bond |
| 07/22/2009 | CN100516303C Removing liquid for tungsten metal and method for removing tungsten metal using such liquid |
| 07/22/2009 | CN100516289C Organometallic compounds |
| 07/22/2009 | CN100516159C 抛光组合物及抛光方法 Polishing composition and polishing method |
| 07/22/2009 | CN100516157C Aqueous dispersion body for chemical mechanical grinding |
| 07/22/2009 | CN100515928C Composition comprising an oxidizing and complexing compound |
| 07/22/2009 | CN100515922C Sensor having membrane and method for manufacturing the same |
| 07/22/2009 | CN100515671C Chemically mechanical polishing process and process for polishing copper layer oxide on base |
| 07/22/2009 | CA2647863A1 Mcm packages |
| 07/22/2009 | CA2615827A1 Method and apparatus for single-polarity charge sensing for semiconductor radiation detectors deposited by physical vapor deposition techniques |
| 07/21/2009 | US7565518 Semiconductor device and method of controlling the semiconductor device |
| 07/21/2009 | US7565219 Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby |
| 07/21/2009 | US7565002 Wafer surface observation apparatus |
| 07/21/2009 | US7564672 Transfer-ESC based on a wafer |
| 07/21/2009 | US7564553 Polarization evaluation mask, polarization evaluation method, and polarization determination device |
| 07/21/2009 | US7564534 Alignment system and method |
| 07/21/2009 | US7564512 Electro-optical device and method for manufacturing the same |
| 07/21/2009 | US7564511 Method of fabricating a circuit array substrate |
| 07/21/2009 | US7564496 Camera device, method of manufacturing a camera device, wafer scale package |
| 07/21/2009 | US7564265 Semiconductor device with its test time reduced and a test method therefor |
| 07/21/2009 | US7564238 Magnetic detection device connecting element and detection circuit and method of manufacturing the same |
| 07/21/2009 | US7564142 Electronic device and method of manufacturing the same, circuit board, and electronic instrument |
| 07/21/2009 | US7564139 Semiconductor device and method for manufacturing the same |
| 07/21/2009 | US7564137 Stackable integrated circuit structures and systems devices and methods related thereto |
| 07/21/2009 | US7564127 Memory module that is capable of controlling input/output in accordance with type of memory chip |
| 07/21/2009 | US7564120 Electrical passivation of silicon-containing surfaces using organic layers |
| 07/21/2009 | US7564119 Adhesive sheet for laser dicing and its manufacturing method |
| 07/21/2009 | US7564118 Chip and wafer integration process using vertical connections |
| 07/21/2009 | US7564116 Printed circuit board with embedded capacitors therein and manufacturing process thereof |
| 07/21/2009 | US7564114 Semiconductor devices and methods of manufacture thereof |
| 07/21/2009 | US7564113 Solid state imaging device |
| 07/21/2009 | US7564109 MRAM and method of manufacturing the same |
| 07/21/2009 | US7564108 Nitrogen treatment to improve high-k gate dielectrics |
| 07/21/2009 | US7564105 Quasi-plannar and FinFET-like transistors on bulk silicon |
| 07/21/2009 | US7564104 Low ohmic layout technique for MOS transistors |
| 07/21/2009 | US7564102 Semiconductor device and its manufacturing method |
| 07/21/2009 | US7564100 Silicon on sapphire wafer |
| 07/21/2009 | US7564097 Trench-gated MOSFET including schottky diode therein |
| 07/21/2009 | US7564094 Non-volatile memory devices and methods of manufacturing the same |
| 07/21/2009 | US7564093 Semiconductor device |
| 07/21/2009 | US7564092 Flash memory device having a split gate |
| 07/21/2009 | US7564089 Semiconductor device |
| 07/21/2009 | US7564087 Merged MOS-bipolar capacitor memory cell |
| 07/21/2009 | US7564082 Gettering using voids formed by surface transformation |
| 07/21/2009 | US7564073 CMOS and HCMOS semiconductor integrated circuit |
| 07/21/2009 | US7564062 Electrode for p-type SiC |
| 07/21/2009 | US7564059 Semiconductor device with tapered gates |
| 07/21/2009 | US7564057 Semiconductor device having an aluminum nitride film |
| 07/21/2009 | US7564056 Method for manufacturing a semiconductor device |
| 07/21/2009 | US7564055 Transistor including a deposited channel region having a doped portion |
| 07/21/2009 | US7564051 Thin-film transistor including organic semiconductor and inorganic particles, and manufacturing method therefor |
| 07/21/2009 | US7563990 Electronic product, a body and a method of manufacturing |
| 07/21/2009 | US7563987 Electronic parts packaging structure and method of manufacturing the same |
| 07/21/2009 | US7563732 Method and apparatus for forming polycrystalline layer using laser crystallization |
| 07/21/2009 | US7563731 Field effect transistor having a stressed dielectric layer based on an enhanced device topography |
| 07/21/2009 | US7563730 Hafnium lanthanide oxynitride films |
| 07/21/2009 | US7563729 Method of forming a dielectric film |
| 07/21/2009 | US7563728 Methods of modifying interlayer adhesion |
| 07/21/2009 | US7563727 codeposition of a porogenic silicon precursor dimethyldimethoxysilaneand and a precursor containing siloxyaluminum group bonded together by oxygen functional groups (e.g.di-sec-butoxyaluminoxytriethoxysilane), removing functional groups after codeposition; high strength |
| 07/21/2009 | US7563726 Semiconductor device with multiple gate dielectric layers and method for fabricating the same |
| 07/21/2009 | US7563725 Method of depositing materials on a non-planar surface |
| 07/21/2009 | US7563724 Method of producing semiconductor pressure sensor |
| 07/21/2009 | US7563723 Critical dimension control for integrated circuits |
| 07/21/2009 | US7563722 applying a layer of nano-sized fullerene particles onto the surface of the microcrystalline-Si substrate, bombarding the surface with plasma ions to etch the uncovered surface more than fulleren covered suface, resulting in a texturing of the surface of the Si substrate to increase light scattering |
| 07/21/2009 | US7563721 Method for fabricating semiconductor device capable of decreasing critical dimension in peripheral region |
| 07/21/2009 | US7563720 Boron doped shell for MEMS device |
| 07/21/2009 | US7563719 Dual damascene process |
| 07/21/2009 | US7563718 Method for forming tungsten layer of semiconductor device and method for forming tungsten wiring layer using the same |
| 07/21/2009 | US7563717 Method for fabricating a semiconductor device |
| 07/21/2009 | US7563716 Polishing method |
| 07/21/2009 | US7563715 Method of producing thin films |
| 07/21/2009 | US7563714 Low resistance and inductance backside through vias and methods of fabricating same |
| 07/21/2009 | US7563713 Semiconductor devices having plated contacts, and methods of manufacturing the same |
| 07/21/2009 | US7563712 Method of forming micro pattern in semiconductor device |
| 07/21/2009 | US7563711 Method of forming a carbon nanotube-based contact to semiconductor |
| 07/21/2009 | US7563710 Method of fabrication of interconnect structures |
| 07/21/2009 | US7563709 Pattern formation method and method for forming semiconductor device |
| 07/21/2009 | US7563708 Method for manufacturing semiconductor device |
| 07/21/2009 | US7563707 Laser process for reliable and low-resistance electrical contacts |
| 07/21/2009 | US7563706 Material for forming insulating film with low dielectric constant, low dielectric insulating film, method for forming low dielectric insulating film and semiconductor device |
| 07/21/2009 | US7563705 Manufacturing method of semiconductor device |
| 07/21/2009 | US7563704 Method of forming an interconnect including a dielectric cap having a tensile stress |
| 07/21/2009 | US7563703 Microelectronic interconnect device comprising localised conductive pins |
| 07/21/2009 | US7563702 Method for fabricating semiconductor device |
| 07/21/2009 | US7563701 Self-aligned contacts for transistors |