Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2009
09/09/2009CN100539013C Ferroelectric memory device and manufacturing method thereof
09/09/2009CN100539012C Apparatus for manufacturing flat-panel display
09/09/2009CN100539011C Apparatus, anode and method for manufacturing integrated circuit
09/09/2009CN100539010C System and method for processing wafer surface material layer
09/09/2009CN100539009C Checkout and optimizing method for etch technological condition
09/09/2009CN100539008C Semiconductor package and method for forming the same
09/09/2009CN100539007C Laser induced thermal imaging apparatus and laser induced thermal imaging method
09/09/2009CN100539006C Laser induced thermal imaging apparatus and fabricating method of organic light emitting diode
09/09/2009CN100539005C Method for cleaning wafer surface after chemico-mechanical polishing
09/09/2009CN100539004C Method and device for treating substrates and corresponding nozzle unit
09/09/2009CN100539003C System for and method of active array temperature sensing and cooling
09/09/2009CN100539002C Substrate handling device for a charged particle beam system
09/09/2009CN100539001C Backside coating for mems wafer and its making process
09/09/2009CN100539000C Capacitive coupling plasma processing apparatus
09/09/2009CN100538999C Thin film transistor substrate with horizontal electric field and its manufacture
09/09/2009CN100538987C Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam
09/09/2009CN100538911C Semiconductor memory device
09/09/2009CN100538903C Nonvolatile semiconductor memory
09/09/2009CN100538899C Memory with discrete charge storage elements and programming method thereof
09/09/2009CN100538897C Algorithm dynamic reference programming
09/09/2009CN100538895C Storage device and manufacturing method thereof
09/09/2009CN100538887C Semiconductor device
09/09/2009CN100538875C Magnetoresistive element, magnetic memory cell, and magnetic memory device, and method for manufacturing the same
09/09/2009CN100538873C System and method of four-conductor mangnetic random access memory cell and decoding scheme
09/09/2009CN100538796C Transistor circuit, display panel and electronic apparatus
09/09/2009CN100538707C Macro-design technology for chip circuit connection arrangement with macro-scale
09/09/2009CN100538675C Hub, memory module, memory system and methods for reading and writing to the same
09/09/2009CN100538573C Gas distribution supply device and gas distribution supply method for supplying air to chamber by gas supply equipment with flow control device
09/09/2009CN100538531C Water-soluble resin composition and method of forming pattern therewith
09/09/2009CN100538525C Lithographic apparatus, device manufacturing method, and device manufactured thereby
09/09/2009CN100538522C Lithographic apparatus and integrated circuit manufacturing method
09/09/2009CN100538514C Device manufacturing method, lithographic apparatus, and robotics system and program
09/09/2009CN100538482C 薄膜图案形成装置及方法 Apparatus and method for forming a thin film pattern
09/09/2009CN100538480C Liquid crystal display device
09/09/2009CN100538479C Liquid crystal distributor
09/09/2009CN100538451C Liquid crystal display device with improved the printed circuit board error quantity
09/09/2009CN100537844C Method and apparatus for maintaining by-product volatility in deposition process
09/09/2009CN100537839C Methods of forming a phosphorus doped silicon dioxide comprising layer, and methods of forming trench isolation in the fabrication of integrated circuitry
09/09/2009CN100537479C Ceramic film and method of manufacturing the same, semiconductor device, and piezoelectric device
09/09/2009CN100537053C Mask blanks and method of producing the same
09/08/2009US7587696 Semiconductor device, layout method and apparatus and program
09/08/2009US7587300 Parts management system and method and parts management program and storage medium
09/08/2009US7586786 Nonvolatile semiconductor memory
09/08/2009US7586730 Electron bombardment heating apparatus and temperature controlling apparatus
09/08/2009US7586623 Optical metrology of single features
09/08/2009US7586608 Wafer-level testing of optical and optoelectronic chips
09/08/2009US7586594 Method for inspecting defect and apparatus for inspecting defect
09/08/2009US7586593 Inspection method and inspection apparatus
09/08/2009US7586577 Display, method of manufacturing display and apparatus for manufacturing display
09/08/2009US7586529 Solid-state imaging device
09/08/2009US7586478 Semiconductor device
09/08/2009US7586235 Matching circuit for megasonic transducer device
09/08/2009US7586218 Moving apparatus, exposure apparatus, and device manufacturing method
09/08/2009US7586202 Alignment sensing method for semiconductor device
09/08/2009US7586201 Wiring modeling technique
09/08/2009US7586196 Apparatus for an improved air gap interconnect structure
09/08/2009US7586194 Semiconductor device having exposed heat dissipating metal plate
09/08/2009US7586181 Semiconductor device and method for manufacturing
09/08/2009US7586180 Semiconductor packaging device comprising a semiconductor chip including a MOSFET
09/08/2009US7586175 Semiconductor wafer having embedded electroplating current paths to provide uniform plating over wafer surface
09/08/2009US7586166 Electronic and optoelectronic devices having nanoparticles configured by patterned ferroelectric material
09/08/2009US7586164 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods
09/08/2009US7586161 Edge structure with voltage breakdown in the linear region
09/08/2009US7586160 Method of manufacturing a semiconductor integrated circuit and semiconductor integrated circuit
09/08/2009US7586159 Semiconductor devices having different gate dielectrics and methods for manufacturing the same
09/08/2009US7586154 Method for fabricating a substrate with useful layer on high resistivity support
09/08/2009US7586148 Power semiconductor device having a voltage sustaining region that includes doped columns formed by terraced trenches
09/08/2009US7586147 Butted source contact and well strap
09/08/2009US7586144 Memory device with high dielectric constant gate dielectrics and metal floating gates
09/08/2009US7586141 High speed memory device with reduced resistance and leakage current
09/08/2009US7586139 Photo-sensor and pixel array with backside illumination and method of forming the photo-sensor
09/08/2009US7586134 Semiconductor device with element isolation structure
09/08/2009US7586133 Solid state imaging apparatus and driving method of solid state imaging apparatus
09/08/2009US7586123 Thin film transistor (TFT) array substrate and fabricating method thereof that protect the TFT and a pixel electrode without a protective film
09/08/2009US7586110 Techniques for detecting ion beam contamination in an ion implantation system and interlocking same
09/08/2009US7586100 Closed loop control and process optimization in plasma doping processes using a time of flight ion detector
09/08/2009US7586060 Protective sheet for laser processing and manufacturing method of laser processed parts
09/08/2009US7585793 Method for applying a high temperature heat treatment to a semiconductor wafer
09/08/2009US7585792 Relaxation of a strained layer using a molten layer
09/08/2009US7585791 Laser irradiation method, laser irradiation apparatus and method for manufacturing semiconductor device
09/08/2009US7585790 Method for forming semiconductor device
09/08/2009US7585789 chemical vapor depositing silica on a semiconductor substrate, by supplying tetraethoxysilane or tetramethoxysilane, and reacting with tetramethylammonium hydroxide, forming porous polysiloxane film; easy material design, low dielectric constant of film, pore diameter can be adjusted
09/08/2009US7585788 Rare earth element-doped oxide precursor with silicon nanocrystals
09/08/2009US7585787 Semiconductor memory device and method of manufacturing the same
09/08/2009US7585786 Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
09/08/2009US7585785 Sacrificial benzocyclobutene copolymers for making air gap semiconductor devices
09/08/2009US7585784 System and method for reducing etch sequencing induced downstream dielectric defects in high volume semiconducting manufacturing
09/08/2009US7585783 Drop discharge apparatus, method for forming pattern and method for manufacturing semiconductor device
09/08/2009US7585782 Methods of forming semiconductor constructions, and methods of selectively removing metal-containing materials relative to oxide
09/08/2009US7585781 Method of forming openings in an organic resin material
09/08/2009US7585780 Method for manufacturing semiconductor device
09/08/2009US7585779 Fabrication method of semiconductor device
09/08/2009US7585778 Method of etching an organic low-k dielectric material
09/08/2009US7585777 Photoresist strip method for low-k dielectrics
09/08/2009US7585776 Dry etching method of insulating film
09/08/2009US7585775 System and method for faceting a masking layer in a plasma etch to slope a feature edge
09/08/2009US7585774 Method for fabricating metal line of semiconductor device
09/08/2009US7585772 polishing the wafer surfaces with cubic boron nitride abrasive particles
09/08/2009US7585771 Method of manufacturing semiconductor device
09/08/2009US7585770 Method of growing carbon nanotubes and method of manufacturing field emission device having the same