Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2009
09/02/2009CN100536073C Pattern forming method and pattern forming system
09/02/2009CN100536072C Polymer or resist pattern, and metal film pattern, metal pattern and plastic mold using the same and preparation method thereof
09/02/2009CN100536071C Lighting optical device, exposure system, and exposure method
09/02/2009CN100536070C Vacuum processing device
09/02/2009CN100536069C Plasma processing device, plasma processing method and storage medium
09/02/2009CN100536068C Substrate processing method and substrate processing apparatus
09/02/2009CN100536067C Substrate treating apparatus
09/02/2009CN100536066C Substrate processing method, substrate processing system and substrate processing apparatus
09/02/2009CN100536065C High-precision quick level adjusting device
09/02/2009CN100536064C Method for the selective removal of an unsilicided metal
09/02/2009CN100536063C Method of rapid thermal annealing treatment to backside of patterned wafer and preparation method thereof
09/02/2009CN100535753C Immersion lithography system, and method of performing irradiation to semiconductor structure having a photoresistive layer
09/02/2009CN100535750C Polyamide acid-containing composition for forming antireflective film
09/02/2009CN100535745C Phase conflict resolution for photolithographic masks
09/02/2009CN100535744C Mask and manufacturing method of a semiconductor device and a thin film transistor array panel using the mask
09/02/2009CN100535727C Apparatus and method for fabricating bonded substrate
09/02/2009CN100534718C Double-sided polishing apparatus
09/01/2009US7584447 PLD architecture for flexible placement of IP function blocks
09/01/2009US7584012 Automatic defect review and classification system
09/01/2009US7584011 Method for optimizing an industrial product, system for optimizing an industrial product and method for manufacturing an industrial product
09/01/2009US7583871 Substrates for optical die structures
09/01/2009US7583862 Packaged microelectronic imagers and methods of packaging microelectronic imagers
09/01/2009US7583511 Semiconductor die package with internal bypass capacitors
09/01/2009US7583491 Electrostatic chuck to limit particle deposits thereon
09/01/2009US7583433 Multi mirror system for an illumination system
09/01/2009US7583284 Method for arranging print head chips
09/01/2009US7583250 Semiconductor device
09/01/2009US7582970 Carbon containing silicon oxide film having high ashing tolerance and adhesion
09/01/2009US7582956 Flip chip in leaded molded package and method of manufacture thereof
09/01/2009US7582955 Semiconductor device manufacturing method and manufacturing apparatus
09/01/2009US7582948 Integrated transistor, particularly for voltages and method for the production thereof
09/01/2009US7582944 Optical apparatus and optical module using the same
09/01/2009US7582942 Planar flux concentrator for MRAM devices
09/01/2009US7582936 Electro-static discharge protection circuit and method for fabricating the same
09/01/2009US7582935 Methods for manufacturing SOI substrate using wafer bonding and complementary high voltage bipolar transistor using the SOI substrate
09/01/2009US7582931 Recessed gate electrodes having covered layer interfaces and methods of forming the same
09/01/2009US7582930 Non-volatile memory and method for manufacturing non-volatile memory
09/01/2009US7582928 Nonvolatile semiconductor memory device and its manufacturing method
09/01/2009US7582926 Semiconductor storage device, its manufacturing method and operating method, and portable electronic apparatus
09/01/2009US7582921 Semiconductor device and method for patterning
09/01/2009US7582920 Apparatus comprising an avalanche photodiode
09/01/2009US7582918 Semiconductor device with enhanced breakdown voltage
09/01/2009US7582917 Monolithically integrated light-activated thyristor and method
09/01/2009US7582912 Diode having high brightness and method thereof
09/01/2009US7582909 Mounting and adhesive layer for semiconductor components
09/01/2009US7582901 Semiconductor device comprising metal insulator metal (MIM) capacitor
09/01/2009US7582897 Organic semiconductor composition, organic semiconductor element, and their manufacturing method
09/01/2009US7582895 Electrochemical device including a channel of an organic material, a gate electrode, and an electrolyte therebetween
09/01/2009US7582890 Magnetic tunnel junction structures having bended tips at both ends thereof, magnetic random access memory cells employing the same and photomasks used in formation thereof
09/01/2009US7582848 Energy-efficient, laser-based method and system for processing target material
09/01/2009US7582718 Multi-functional linear siloxane compound, a siloxane polymer prepared from the compound, and a process for forming a dielectric film by using the polymer
09/01/2009US7582585 Coating compositions
09/01/2009US7582575 Method for forming insulation film
09/01/2009US7582574 Diethylsilane as a silicon source in the deposition of metal silicate films
09/01/2009US7582573 Spin-on glass composition and method of forming silicon oxide layer in semiconductor manufacturing process using the same
09/01/2009US7582572 Method of manufacturing insulating film, method of manufacturing transistor, and method of manufacturing electronic device
09/01/2009US7582571 Substrate processing method and recording medium
09/01/2009US7582570 Compositions for removal of processing byproducts and method for using same
09/01/2009US7582569 Distributor and distributing method, plasma processing system and method, and process for fabricating LCD
09/01/2009US7582568 Method of forming a phase changeable structure
09/01/2009US7582567 Method for forming CMOS device with self-aligned contacts and region formed using salicide process
09/01/2009US7582566 Method for redirecting void diffusion away from vias in an integrated circuit design
09/01/2009US7582565 Method and apparatus for semiconductor wafer planarization
09/01/2009US7582564 Chelating agents, corrosion inhibitors, a suppresor, a solvent, a passivating polymer, and inorganic acid based electrolyte; minimal damage to the substrate during planarization; microelectronics
09/01/2009US7582563 Method for fabricating fully silicided gate
09/01/2009US7582562 Atomic layer deposition methods
09/01/2009US7582561 Method of selectively depositing materials on a substrate using a supercritical fluid
09/01/2009US7582560 Method for fabricating semiconductor device
09/01/2009US7582559 Method of manufacturing a semiconductor device having voids in a polysilicon layer
09/01/2009US7582558 Reducing corrosion in copper damascene processes
09/01/2009US7582557 Process for low resistance metal cap
09/01/2009US7582556 Circuitry component and method for forming the same
09/01/2009US7582555 CVD flowable gap fill
09/01/2009US7582554 Method for manufacturing semiconductor device
09/01/2009US7582553 Method of bonding flying leads
09/01/2009US7582552 Electronic apparatus with busbar assembly and electronic component mounted thereon by soldering
09/01/2009US7582551 Wiring substrate and wiring substrate manufacturing method
09/01/2009US7582550 Semiconductor memory device and manufacturing method thereof
09/01/2009US7582549 Atomic layer deposited barium strontium titanium oxide films
09/01/2009US7582548 Semiconductor device and manufacturing method thereof
09/01/2009US7582547 Method for junction formation in a semiconductor device and the semiconductor device made thereof
09/01/2009US7582546 Device with damaged breakdown layer
09/01/2009US7582545 Forming method for film pattern, device, electro-optical apparatus, electronic apparatus, and manufacturing method for active matrix substrate
09/01/2009US7582544 ALD film forming method
09/01/2009US7582543 Liquid-liquid interfacial synthetic method for nanosemiconductor luminous material
09/01/2009US7582542 Die attaching method
09/01/2009US7582541 Wafer laser processing method
09/01/2009US7582540 Method for manufacturing SOI wafer
09/01/2009US7582539 Methods of cleaning a semiconductor device and methods of manufacturing a semiconductor device using the same
09/01/2009US7582538 Method of overlay measurement for alignment of patterns in semiconductor manufacturing
09/01/2009US7582537 Zener diode and methods for fabricating and packaging same
09/01/2009US7582536 Electronic device with reduced interface charge between epitaxially grown layers and a method for making the same
09/01/2009US7582535 Method of forming MOS transistor having fully silicided metal gate electrode
09/01/2009US7582534 Chemical doping of nano-components
09/01/2009US7582533 LDMOS device and method for manufacturing the same
09/01/2009US7582532 Method for fabricating semiconductor device
09/01/2009US7582531 Method for producing a buried semiconductor layer
09/01/2009US7582530 Managing floating gate-to-floating gate spacing to support scalability
09/01/2009US7582529 Methods of fabricating non-volatile memory with integrated peripheral circuitry and pre-isolation memory cell formation
09/01/2009US7582528 Method of fabricating a flash memory device