Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2009
09/11/2009WO2009111109A1 Packaging an integrated circuit die using compression molding
09/11/2009WO2009111053A2 Buffer layer deposition for thin-film solar cells
09/11/2009WO2009111052A1 Heating for buffer layer deposition
09/11/2009WO2009111001A2 Silicon carbide polishing method utilizing water-soluble oxidizers
09/11/2009WO2009110980A2 Method for inspecting electrostatic chucks with kelvin probe analysis
09/11/2009WO2009110798A1 Process for adjusting the coefficient of friction and/or adhesion between surfaces of two solid objects
09/11/2009WO2009110749A2 Low impedance gold electrode, apparatus, method and electrolyte solution for fabricating the same
09/11/2009WO2009110729A1 Cmp slurry and a polishing method using the same
09/11/2009WO2009110623A1 Method of treating semiconductor element
09/11/2009WO2009110615A1 Device for designing semiconductor integrated circuit, method for designing semiconductor integrated circuit, and computer program for designing semiconductor integrated circuit
09/11/2009WO2009110611A1 Surface treatment apparatus
09/11/2009WO2009110608A1 Process for producing magnetoresistive element and apparatus for producing magnetoresistive element
09/11/2009WO2009110596A1 Uv nanoimprint method, resin replica mold and method for producing the same, magnetic recording medium and method for producing the same, and magnetic recording/reproducing apparatus
09/11/2009WO2009110582A1 Semiconductor surface treating agent composition and method for treating semiconductor surface using the semiconductor surface treating agent composition
09/11/2009WO2009110567A1 Plasma processing method
09/11/2009WO2009110552A1 Noncontact transfer apparatus
09/11/2009WO2009110549A1 Method and system for washing electronic component
09/11/2009WO2009110548A1 Method and system for washing electronic component
09/11/2009WO2009110539A1 Semiconductor light emitting element, method for manufacturing the semiconductor light emitting element and lamp using the semiconductor light emitting element
09/11/2009WO2009110537A1 Mram mixed system
09/11/2009WO2009110532A1 Semiconductor device
09/11/2009WO2009110530A1 Semiconductor device
09/11/2009WO2009110496A1 (meth)acrylate compound, curable composition using the same, composition for optical nanoimprint, cured product of the curable composition, and method for producing the cured product
09/11/2009WO2009110469A1 Method for manufacturing magnetic tunnel junction device and apparatus for manufacturing magnetic tunnel junction device
09/11/2009WO2009110458A1 Lead-free solder joint structure and solder ball
09/11/2009WO2009110449A1 Dipping solution for use in production of siliceous film and process for producing siliceous film using the dipping solution
09/11/2009WO2009110436A1 Nitride semiconductor crystal and manufacturing method thereof
09/11/2009WO2009110431A1 Compound material, method of producing the same and apparatus for producing the same
09/11/2009WO2009110426A1 Adhesive sheet
09/11/2009WO2009110414A1 Method for forming bump
09/11/2009WO2009110404A1 Rotating magnet sputtering apparatus
09/11/2009WO2009110388A1 Radiation-sensitive composition, polymer and monomer
09/11/2009WO2009110366A1 Plasma processing apparatus
09/11/2009WO2009110355A1 Mounting structure and method for manufacturing same
09/11/2009WO2009110330A1 Semiconductor device manufacturing method, semiconductor manufacturing apparatus and storage medium
09/11/2009WO2009110290A1 Semiconductor device
09/11/2009WO2009110254A1 Field effect transistor and method for manufacturing the same
09/11/2009WO2009110229A1 Silicon carbide semiconductor device and manufacturing method thereof
09/11/2009WO2009110226A1 High frequency antenna unit and plasma processing apparatus
09/11/2009WO2009110208A1 Semiconductor substrate, semiconductor substrate manufacturing method, and electronic device
09/11/2009WO2009110207A1 Semiconductor substrate, semiconductor substrate manufacturing method, and electronic device
09/11/2009WO2009110202A1 Moving device and exposure device
09/11/2009WO2009110180A1 Method for manufacturing template and polishing method wherein the template is used
09/11/2009WO2009110174A1 Method for manufacturing bonded wafer
09/11/2009WO2009110166A1 Resist material and pattern forming method using the same
09/11/2009WO2009110162A1 Process for production of nanostructures
09/11/2009WO2009110119A1 Ferromagnetic tunnel junction element and driving method of ferromagnetic tunnel junction element
09/11/2009WO2009110049A1 Semiconductor device and its manufacturing method
09/11/2009WO2009110048A1 Semiconductor devuce and manufacturing method thereof
09/11/2009WO2009110046A1 Method for processing work having photoresist layer
09/11/2009WO2009109939A1 Method for the synthesis of an array of metal nanowires capable of supporting localized plasmon resonances and photonic device comprising said array
09/11/2009WO2009109934A1 Void-free copper filling of recessed features using a smooth non-agglomerated copper seed layer
09/11/2009WO2009109932A1 Reverse engineering resistant read only memory
09/11/2009WO2009109896A1 Apparatus for the heat treatment of disc shaped substrates
09/11/2009WO2009109464A1 Coating apparatus with rotation module
09/11/2009WO2009109447A2 Chip discarder
09/11/2009WO2009109436A1 Method and device for removing a film from a plate-like support or a film
09/11/2009WO2009109186A2 Wafer box for the transport of solar cell wafers
09/11/2009WO2009109176A1 Method for fast macropore etching in n-type silicon
09/11/2009WO2009091214A3 Substrate-supporting device, and a substrate-processing device having the same
09/11/2009WO2009089245A3 Heated showerhead assembly
09/11/2009WO2009089122A9 Controlled deflection of large area semiconductor substrates for shipping & manufacturing containers
09/11/2009WO2009088910A3 Laser chalcogenide phase change device and method
09/11/2009WO2009088883A3 Low-defect-density crystalline structure and method for making same
09/11/2009WO2009088587A3 Methods of forming nanodots using spacer patterning techniques and structures formed thereby
09/11/2009WO2009085694A3 Protective layer for implant photoresist
09/11/2009WO2009085598A3 Photoresist double patterning
09/11/2009WO2009085597A3 Cd bias loading control with arc layer open
09/11/2009WO2009085533A3 Method and system for fabricating three-dimensional structures with sub-micron and micron features
09/11/2009WO2009084901A3 Method for controlling plasma density distribution in plasma chamber
09/11/2009WO2009077201A3 Method and device for treating silicon wafers
09/11/2009WO2009076510A3 Semiconductor structure and method of manufacture
09/11/2009WO2009076509A3 Semiconductor structure and method of manufacture
09/11/2009WO2009075544A3 A liner for semiconductor chamber
09/11/2009WO2009052434A3 Method and apparatus for wafer support
09/11/2009WO2009043018A3 Offset correction techniques for positioning substrates within a processing chamber
09/11/2009WO2009023348A3 Cmos compatible method of forming source/drain contacts for self-aligned nanotube devices
09/11/2009WO2008157108A3 Metal plugged substrates with no adhesive between metal and polyimide
09/11/2009WO2007092716A3 Laser-based method and system for processing a multi-material device having conductive links structures
09/11/2009CA2716630A1 Method of forming a magnetic tunnel junction structure
09/10/2009US20090228860 Photomask data processing method, photomask data processing system and manufacturing method
09/10/2009US20090228749 Method and apparatus for selectively compacting test responses
09/10/2009US20090228217 Defect inspection method
09/10/2009US20090228215 System and method for detecting particle generation source, and storage medium therefor
09/10/2009US20090227189 Polishing apparatus
09/10/2009US20090227121 Semiconductor device manufacturing method and semiconductor device manufacturing system
09/10/2009US20090227120 Method for forming photoresist layer
09/10/2009US20090227119 Method for curing a porous low dielectric constant dielectric film
09/10/2009US20090227118 Method for removing a pore-generating material from an uncured low-k dielectric film
09/10/2009US20090227117 Gate structure and method
09/10/2009US20090227116 Method for Manufacturing Non-Volatile Memory Device having Charge Trap Layer
09/10/2009US20090227115 Etching solution for substrate
09/10/2009US20090227114 Apparatus and method for etching the surface of a semiconductor substrate
09/10/2009US20090227113 Method for fabricating opening
09/10/2009US20090227112 Exposure mask manufacturing method, drawing apparatus, semiconductor device manufacturing method, and mask blanks product
09/10/2009US20090227111 Barrier film material and pattern formation method using the same
09/10/2009US20090227110 Method of Forming Mask Pattern
09/10/2009US20090227109 Method for forming periodic structure
09/10/2009US20090227108 Patterning method in semiconductor manufacturing process
09/10/2009US20090227107 Nanostructures Containing Metal Semiconductor Compounds