| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 09/01/2009 | US7582527 Method for fabricating semiconductor device |
| 09/01/2009 | US7582526 Method for manufacturing semiconductor device |
| 09/01/2009 | US7582525 Method for fabricating capacitor of semiconductor memory device using amorphous carbon |
| 09/01/2009 | US7582524 Method for preparing a memory structure |
| 09/01/2009 | US7582523 Method of manufacturing semiconductor device including insulated-gate field-effect transistors |
| 09/01/2009 | US7582522 Method and device for CMOS image sensing with separate source formation |
| 09/01/2009 | US7582521 Dual metal gates for mugfet device |
| 09/01/2009 | US7582520 Method of fabricating complementary metal-oxide-semiconductor transistor and metal-oxide-semiconductor transistor |
| 09/01/2009 | US7582518 High electron mobility transistor semiconductor device and fabrication method thereof |
| 09/01/2009 | US7582516 CMOS devices with hybrid channel orientations, and methods for fabricating the same using faceted epitaxy |
| 09/01/2009 | US7582515 Multi-junction solar cells and methods and apparatuses for forming the same |
| 09/01/2009 | US7582514 Microelectromechanical systems encapsulation process with anti-stiction coating |
| 09/01/2009 | US7582513 Electronic device and method for producing electronic devices |
| 09/01/2009 | US7582512 Method of fabricating semiconductor device having conducting portion of upper and lower conductive layers on a peripheral surface of the semiconductor device |
| 09/01/2009 | US7582511 Method for wafer level chip scale packaging with passive components integrated into packaging structure |
| 09/01/2009 | US7582510 Electronic packaging materials for use with low-k dielectric-containing semiconductor devices |
| 09/01/2009 | US7582509 Micro-embossing fabrication of electronic devices |
| 09/01/2009 | US7582506 Precursor containing copper indium and gallium for selenide (sulfide) compound formation |
| 09/01/2009 | US7582505 Solid-state imaging device and method of manufacturing said solid-state imaging device |
| 09/01/2009 | US7582504 CMOS image sensor and method for manufacturing the same |
| 09/01/2009 | US7582503 Solid state image pickup device and method of producing solid state image pickup device |
| 09/01/2009 | US7582502 Method for manufacturing back side illumination image sensor |
| 09/01/2009 | US7582501 Thin film transistor panel and manufacturing method thereof |
| 09/01/2009 | US7582500 Reference pH sensor, preparation and application thereof |
| 09/01/2009 | US7582499 Photo sensor and a method for manufacturing thereof |
| 09/01/2009 | US7582498 Resonant cavity light emitting devices and associated method |
| 09/01/2009 | US7582497 Method of manufacturing micro-optic device |
| 09/01/2009 | US7582496 LED package using Si substrate and fabricating method thereof |
| 09/01/2009 | US7582495 Inkjet head, method for producing inkjet head, inkjet recorder and inkjet coater |
| 09/01/2009 | US7582493 Distinguishing between dopant and line width variation components |
| 09/01/2009 | US7582492 Method of doping impurities, and electronic element using the same |
| 09/01/2009 | US7582491 Method for diagnosing electrostatic chuck, vacuum processing apparatus, and storage medium |
| 09/01/2009 | US7582490 Controlled fabrication of gaps in electrically conducting structures |
| 09/01/2009 | US7582489 Method for manufacturing magnetic sensor apparatus |
| 09/01/2009 | US7582421 Methods for determination of single nucleic acid polymorphisms using a bioelectronic microchip |
| 09/01/2009 | US7582412 Multilayer photoresist systems |
| 09/01/2009 | US7582411 Antireflective film and exposure method |
| 09/01/2009 | US7582404 Photosensitive paste composition, PDP electrode manufactured using the composition, and PDP comprising the PDP electrode |
| 09/01/2009 | US7582397 Photomask, and method and apparatus for producing the same |
| 09/01/2009 | US7582394 Photomask and method for forming pattern |
| 09/01/2009 | US7582393 Charged-particle beam, X-ray, and extreme ultraviolet beam lithography masks |
| 09/01/2009 | US7582360 Microelectronic wafers having photosensitive antireflective polyester and photoresist multilayers used to form integrated circuits; relief images |
| 09/01/2009 | US7582333 Pattern forming method, pattern forming apparatus, method of manufacturing device, conductive film wiring, electro-optical device, and electronic apparatus |
| 09/01/2009 | US7582221 Wafer manufacturing method, polishing apparatus, and wafer |
| 09/01/2009 | US7582220 Photoresists; photomasks; protective coatings |
| 09/01/2009 | US7582186 Method and apparatus for an improved focus ring in a plasma processing system |
| 09/01/2009 | US7582185 Plasma-processing apparatus |
| 09/01/2009 | US7582184 Plasma processing member |
| 09/01/2009 | US7582183 Apparatus for detection of thin films during chemical/mechanical polishing planarization |
| 09/01/2009 | US7582182 Method and apparatus for measuring electron density of plasma and plasma processing apparatus |
| 09/01/2009 | US7582167 Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support |
| 09/01/2009 | US7582166 Holder for supporting wafers during semiconductor manufacture |
| 09/01/2009 | US7582163 Apparatus for processing surface of substrate |
| 09/01/2009 | US7582162 Semiconductor device and semiconductor device production system |
| 09/01/2009 | US7582134 first phase as a disperse metallic phase that is dispersed on a support of the second material phase selected from carbides, borides and nitrides, metal oxides, glass; ultrasonic transducers underlying and ultrasonically energizing a reservoir of liquid feed) which forms droplets of aerosol |
| 09/01/2009 | US7582127 chemical mechanical polishing formulation containing ferric nitrate, silica, poly[2-(methacryloyloxy)ethyl]trimethylammonium chloride or poly[2-(methacryloyloxy)ethyl]trimethylammonium bromide, malonic acid, water, hydrogen peroxide; pH of 1 to 4 |
| 09/01/2009 | US7581916 Sample introduction and transfer system and method |
| 09/01/2009 | US7581667 Tool head for attaching an electrical conductor on the contact surface of a substrate and method for implementing the attachment |
| 09/01/2009 | US7581550 Method of cleaning reaction chamber using substrate having catalyst layer thereon |
| 09/01/2009 | US7581511 Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes |
| 09/01/2009 | CA2601295C Method and apparatus for low energy electron enhanced etching and cleaning of substrates |
| 09/01/2009 | CA2373170C Method and apparatus for epitaxially growing a material on a substrate |
| 08/27/2009 | WO2009105635A2 Ceramic paddle |
| 08/27/2009 | WO2009105609A1 Integrated carrier for microfluidic device |
| 08/27/2009 | WO2009105599A1 Silver reflectors for semiconductor processing chambers |
| 08/27/2009 | WO2009105556A2 Dual-layer light-sensitive developer-soluble bottom anti-reflective coatings for 193-nm lithography |
| 08/27/2009 | WO2009105497A2 Apparatus and method for adjusting thermally induced movement of electro-mechanical assemblies |
| 08/27/2009 | WO2009105466A2 Reduced leakage current field-effect transistor having asymmetric doping and fabrication method therefor |
| 08/27/2009 | WO2009105434A2 Apparatus and methods for supplying fuel employed by abatement systems to effectively abate effluents |
| 08/27/2009 | WO2009105433A2 Methods and apparatus for heating reagents and effluents in abatement systems |
| 08/27/2009 | WO2009105423A1 Coating methods and apparatus for making a cigs solar cell |
| 08/27/2009 | WO2009105353A1 Hall-effect device with merged and/or non-merged complementary structure |
| 08/27/2009 | WO2009105347A2 Process sequence for formation of patterned hard mask film (rfp) without need for photoresist or dry etch |
| 08/27/2009 | WO2009105346A1 Method to fabricate gate electrodes |
| 08/27/2009 | WO2009105317A1 Devices including fin transistors robust to gate shorts and methods of making the same |
| 08/27/2009 | WO2009105315A1 Systems and devices including fin transistors and methods of using, making, and operating the same |
| 08/27/2009 | WO2009105151A1 Plasma immersion ion implantation process with reduced polysilicon gate loss and reduced particle deposition |
| 08/27/2009 | WO2009105120A1 Method and device for reducing crosstalk in back illuminated imagers |
| 08/27/2009 | WO2009105045A1 Patterning of nanostructures |
| 08/27/2009 | WO2009104919A2 Apparatus and method for processing substrate |
| 08/27/2009 | WO2009104918A2 Apparatus and method for processing substrate |
| 08/27/2009 | WO2009104917A2 Apparatus and method for processing substrate |
| 08/27/2009 | WO2009104910A2 Joining structure and a substrate-joining method using the same |
| 08/27/2009 | WO2009104899A2 Method of etching asymmetric wafer, solar cell including the asymmetrically etched wafer, and method of manufacturing the same |
| 08/27/2009 | WO2009104886A2 Laser-processing device |
| 08/27/2009 | WO2009104842A1 Wafer chucking apparatus for plasma process |
| 08/27/2009 | WO2009104841A1 Feedforward control of downstream register errors for electronic roll-to-roll printing system |
| 08/27/2009 | WO2009104803A1 Optical component for euvl and smoothing method thereof |
| 08/27/2009 | WO2009104789A1 Method for manufacturing variable resistance element |
| 08/27/2009 | WO2009104759A1 Semiconductor substrate, semiconductor element, light emitting element and electronic element |
| 08/27/2009 | WO2009104748A1 Water-repellant composition for substrate to be exposed, method of forming resist pattern, electronic device produced by the formation method, method of imparting water repellency to substrate to be exposed, water-repellant set for substrate to be exposed, and method of imparting water repellency with the same to substrate to be exposed |
| 08/27/2009 | WO2009104732A1 Gas supply device |
| 08/27/2009 | WO2009104727A1 Method for producing acrylate derivative, acrylate derivative, and intermediate thereof |
| 08/27/2009 | WO2009104726A1 (meth)acrylate derivative, intermediate thereof, and polymer compound |
| 08/27/2009 | WO2009104725A1 Device and method for diagnosing manufacturing facility |
| 08/27/2009 | WO2009104722A1 Acrylate ester derivatives and polymer compounds |
| 08/27/2009 | WO2009104717A1 Polymer compound |
| 08/27/2009 | WO2009104688A1 Non-volatile memory device and method of manufacturing same |
| 08/27/2009 | WO2009104680A1 Radiation-sensitive resin composition, cured product thereof, interlayer insulating film using the composition, and optical device |
| 08/27/2009 | WO2009104668A1 Wiring board and semiconductor device |