| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/16/2009 | CN100541736C Method for processing substrate |
| 09/16/2009 | CN100541735C Stress reduction of SIOC low K films |
| 09/16/2009 | CN100541734C Plasma etching method |
| 09/16/2009 | CN100541733C Method for isolated etching for silicon chip shallow plow groove |
| 09/16/2009 | CN100541732C Gas distribution control system, polysilicon gate etching and silicon chip shallow groove isolation etching method |
| 09/16/2009 | CN100541731C Method and apparatus for process control in time division multiplexed (TDM) etch processes |
| 09/16/2009 | CN100541730C Semiconductor substrate surface chemical processing method and apparatus |
| 09/16/2009 | CN100541729C Plasma processing system for treating a substrate |
| 09/16/2009 | CN100541728C Apparatus and method for treating substrate |
| 09/16/2009 | CN100541727C Epitaxial wafer manufacturing method |
| 09/16/2009 | CN100541726C Corrosive agent and corrosion method for II-VI family semiconductor material dislocation display |
| 09/16/2009 | CN100541725C Method for producing dislocation-free strained crystalline films |
| 09/16/2009 | CN100541724C Method for manufacturing semiconductor device |
| 09/16/2009 | CN100541723C Double gate non-volatile memory device and method of manufacturing |
| 09/16/2009 | CN100541722C Laser irradiation method and laser irradiation apparatus |
| 09/16/2009 | CN100541721C Planar avalanche photodiode |
| 09/16/2009 | CN100541720C Plasma processing method |
| 09/16/2009 | CN100541719C Exposure method, exposure apparatus, and device manufacturing method |
| 09/16/2009 | CN100541718C Method of forming fine pattern of semiconductor device and method of forming contacts using the same |
| 09/16/2009 | CN100541717C Exposure method, exposure apparatus, and device manufacture method |
| 09/16/2009 | CN100541716C Method for machining nitride semiconductor substrate |
| 09/16/2009 | CN100541715C Device for applying semiconductor treatment to substrate to be processed |
| 09/16/2009 | CN100541714C Method of manufacturing semiconductor device and manufacturing device thereof |
| 09/16/2009 | CN100541713C Circulation system for high refractive index liquid, pattern forming device and pattern forming method thereof |
| 09/16/2009 | CN100541712C Handler for sorting packaged chips |
| 09/16/2009 | CN100541711C Substrate buffer device and method of buffering substrate, substrate processing apraratus |
| 09/16/2009 | CN100541710C Replacement method for treatment mechanism in treatment apparatus |
| 09/16/2009 | CN100541709C Substrate treatment apparatus and substrate treatment method |
| 09/16/2009 | CN100541708C Overlay alignment method and device using atomic force microscope |
| 09/16/2009 | CN100541707C Gas injection apparatus |
| 09/16/2009 | CN100541706C High power AlInGaN based multi-chip light emitting diode |
| 09/16/2009 | CN100541666C Nonvolatile semiconductor memory device |
| 09/16/2009 | CN100541652C Magnetic tunneling junction cell and magnetic random access memory |
| 09/16/2009 | CN100541506C Value information management system and method therefor |
| 09/16/2009 | CN100541458C Input/output interface of an integrated circuit device |
| 09/16/2009 | CN100541334C Lithographic apparatus having a gas flushing device |
| 09/16/2009 | CN100541332C Lithographic apparatus and methods for use thereof |
| 09/16/2009 | CN100541299C Apparatus and method for fabricating bonded substrate |
| 09/16/2009 | CN100541216C Pretreatment integrated circuit for integrated circuit testing |
| 09/16/2009 | CN100540734C Chemical vapor deposition equipment |
| 09/16/2009 | CN100540733C Method and apparatus for depositing materials with tunable characteristics |
| 09/16/2009 | CN100540318C Image-recording apparatus and method |
| 09/16/2009 | CN100540200C Capillary with contained inner chamfer |
| 09/15/2009 | US7590967 Structured ASIC with configurable die size and selectable embedded functions |
| 09/15/2009 | US7590966 Data path for high performance pattern generator |
| 09/15/2009 | US7590465 Method and apparatus for detecting abnormal characteristic values capable of suppressing detection of normal characteristic values |
| 09/15/2009 | US7590326 Optical integrated device manufacturing process and device manufactured by the process thereof |
| 09/15/2009 | US7590280 Position detection apparatus and exposure apparatus |
| 09/15/2009 | US7589993 Semiconductor memory device with memory cells operated by boosted voltage |
| 09/15/2009 | US7589950 Detachable electrostatic chuck having sealing assembly |
| 09/15/2009 | US7589823 Stage device, exposure apparatus, and method of manufacturing device |
| 09/15/2009 | US7589819 Method for the generation of variable pitch nested lines and/or contact holes using fixed size pixels for direct-write lithographic systems |
| 09/15/2009 | US7589818 Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatus |
| 09/15/2009 | US7589698 Display device, semiconductor device, and electronic device |
| 09/15/2009 | US7589541 Method and apparatus for inspecting solid-state image pick-up device |
| 09/15/2009 | US7589518 Wafer probe station having a skirting component |
| 09/15/2009 | US7589425 Method of manufacturing a semiconductor device having damascene structures with air gaps |
| 09/15/2009 | US7589423 Semiconductor device and a method of manufacturing the same and designing the same |
| 09/15/2009 | US7589417 Microelectronic assembly having thermoelectric elements to cool a die and a method of making the same |
| 09/15/2009 | US7589415 Semiconductor chip and semiconductor device using the same, and method of fabricating semiconductor chip |
| 09/15/2009 | US7589409 Stacked packages and microelectronic assemblies incorporating the same |
| 09/15/2009 | US7589404 Semiconductor device |
| 09/15/2009 | US7589391 Semiconductor device with STI and its manufacture |
| 09/15/2009 | US7589386 Semiconductor device and manufacturing method thereof |
| 09/15/2009 | US7589383 Thin film semiconductor device and method of manufacturing the same |
| 09/15/2009 | US7589382 Semiconductor device and method for manufacturing the same |
| 09/15/2009 | US7589381 Field effect transistor and manufacturing method thereof |
| 09/15/2009 | US7589379 Power semiconductor and method of fabrication |
| 09/15/2009 | US7589377 Gate structure with low resistance for high power semiconductor devices |
| 09/15/2009 | US7589371 Semiconductor device and fabrication method therefor |
| 09/15/2009 | US7589357 Semiconductor device and method of fabricating the same |
| 09/15/2009 | US7589349 CMOS image sensor with asymmetric well structure of source follower |
| 09/15/2009 | US7589345 Nitride-based compound semiconductor substrate and method for fabricating the same |
| 09/15/2009 | US7589335 Charged-particle beam pattern writing method and apparatus and software program for use therein |
| 09/15/2009 | US7589052 Slurry composition and method for chemical mechanical polishing of copper integrated with tungsten based barrier metals |
| 09/15/2009 | US7589033 Fabrication of wafer-level test module for testing image sensor chips |
| 09/15/2009 | US7589032 Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment |
| 09/15/2009 | US7589031 Method of avoiding haze formation on surfaces of silicon-containing PECVD-deposited thin films |
| 09/15/2009 | US7589030 Liquid crystal display device and fabricating method thereof |
| 09/15/2009 | US7589029 Atomic layer deposition and conversion |
| 09/15/2009 | US7589028 Hydroxyl bond removal and film densification method for oxide films using microwave post treatment |
| 09/15/2009 | US7589027 Method of manufacturing semiconductor device |
| 09/15/2009 | US7589026 Method for fabricating a fine pattern in a semiconductor device |
| 09/15/2009 | US7589025 Semiconductor processing |
| 09/15/2009 | US7589024 Process for producing semiconductor integrated circuit device |
| 09/15/2009 | US7589023 Method of manufacturing semiconductor wafer |
| 09/15/2009 | US7589022 Method of chemical mechanical polishing and method of fabricating semiconductor device using the same |
| 09/15/2009 | US7589021 Copper metal interconnection with a local barrier metal layer |
| 09/15/2009 | US7589020 Chemical vapor deposition using high gas flow rate of tetrakis(ethylmethylamino) titanium precursor vapor along with inert carrier gas at low process chamber pressure |
| 09/15/2009 | US7589019 Memory cell array and method of forming a memory cell array |
| 09/15/2009 | US7589018 Method of forming contact hole, method of manufacturing wiring board, method of manufacturing semiconductor device, and method of manufacturing electro-optical device |
| 09/15/2009 | US7589017 Methods for growing low-resistivity tungsten film |
| 09/15/2009 | US7589016 Method of depositing a sculptured copper seed layer |
| 09/15/2009 | US7589015 Fabrication of semiconductor devices using anti-reflective coatings |
| 09/15/2009 | US7589014 Semiconductor device having multiple wiring layers and method of producing the same |
| 09/15/2009 | US7589013 Electrode structure and method of manufacturing the same, phase-change memory device having the electrode structure and method of manufacturing the same |
| 09/15/2009 | US7589012 Method for fabricating semiconductor memory device |
| 09/15/2009 | US7589011 Semiconductor device and method of forming intermetal dielectric layer |
| 09/15/2009 | US7589010 Semiconductor devices with permanent polymer stencil and method for manufacturing the same |
| 09/15/2009 | US7589009 Method for fabricating a top conductive layer in a semiconductor die and related structure |