Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2009
09/08/2009US7585769 Parasitic particle suppression in growth of III-V nitride films using MOCVD and HVPE
09/08/2009US7585768 Combined copper plating method to improve gap fill
09/08/2009US7585767 Semiconductor device and method for fabricating the same
09/08/2009US7585766 Methods of manufacturing copper interconnect systems
09/08/2009US7585765 Formation of oxidation-resistant seed layer for interconnect applications
09/08/2009US7585764 VIA bottom contact and method of manufacturing same
09/08/2009US7585763 Methods of fabricating integrated circuit devices using anti-reflective coating as implant blocking layer
09/08/2009US7585762 Vapor deposition processes for tantalum carbide nitride materials
09/08/2009US7585761 Manufacturing method of semiconductor device
09/08/2009US7585760 Method for forming planarizing copper in a low-k dielectric
09/08/2009US7585759 Technique for efficiently patterning an underbump metallization layer using a dry etch process
09/08/2009US7585758 Interconnect layers without electromigration
09/08/2009US7585757 Semiconductor device and method of manufacturing the same
09/08/2009US7585756 Semiconductor device and method of manufacturing the same
09/08/2009US7585755 Method of fabricating non-volatile memory device
09/08/2009US7585754 Method of forming bonding pad opening
09/08/2009US7585753 Controlling diffusion in doped semiconductor regions
09/08/2009US7585752 Process for deposition of semiconductor films
09/08/2009US7585751 Wafer dividing method using laser beam with an annular spot
09/08/2009US7585750 Semiconductor package having through-hole via on saw streets formed with partial saw
09/08/2009US7585749 Methods of forming a layer of material on a substrate and structures formed therefrom
09/08/2009US7585748 Process for manufacturing a multilayer structure made from semiconducting materials
09/08/2009US7585747 Low temperature hermetic bonding at water level and method of bonding for micro display application
09/08/2009US7585746 Process integration scheme of SONOS technology
09/08/2009US7585745 Semiconductor device and a method of manufacturing the same
09/08/2009US7585744 Method of forming a seal for a semiconductor device
09/08/2009US7585743 Manufacturing method for a semiconductor substrate comprising at least a buried cavity and devices formed with this method
09/08/2009US7585742 Semiconductor device manufacturing method
09/08/2009US7585741 Methods of forming capacitors
09/08/2009US7585740 Fully silicided extrinsic base transistor
09/08/2009US7585739 Semiconductor device and method of fabricating the same
09/08/2009US7585738 Method of forming a fully silicided semiconductor device with independent gate and source/drain doping and related device
09/08/2009US7585737 Method of manufacturing double diffused drains in semiconductor devices
09/08/2009US7585736 Method of manufacturing semiconductor device with regard to film thickness of gate oxide film
09/08/2009US7585735 Asymmetric spacers and asymmetric source/drain extension layers
09/08/2009US7585734 Method of fabricating multi-gate transistor and multi-gate transistor fabricated thereby
09/08/2009US7585733 Method of manufacturing semiconductor device having multiple gate insulation films
09/08/2009US7585732 Insulated gate type semiconductor device and method for fabricating the same
09/08/2009US7585731 Semiconductor integrated circuit device and its manufacturing method
09/08/2009US7585730 Method of fabricating a non-volatile memory device
09/08/2009US7585729 Method of manufacturing a non-volatile memory device
09/08/2009US7585728 Methods of programming memory cells using manipulation of oxygen vacancies
09/08/2009US7585727 Method for fabricating semiconductor device having bulb-shaped recess gate
09/08/2009US7585726 Nonvolatile semiconductor memory devices and the fabrication process of them
09/08/2009US7585725 Use of dilute steam ambient for improvement of flash devices
09/08/2009US7585724 FLASH memory device and method of manufacture
09/08/2009US7585723 Method for fabricating capacitor
09/08/2009US7585721 Process and apparatus for fabricating nano-floating gate memories and memory made thereby
09/08/2009US7585720 Dual stress liner device and method
09/08/2009US7585719 Integrated circuit with multi-length output transistor segments
09/08/2009US7585718 Method of manufacturing a carbon nano-tube transistor
09/08/2009US7585717 Method of manufacturing semiconductor device, semiconductor device and electronic apparatus therefore
09/08/2009US7585716 High-k/metal gate MOSFET with reduced parasitic capacitance
09/08/2009US7585715 Semiconductor device and process for fabricating the same
09/08/2009US7585714 Method for manufacturing semiconductor device, semiconductor device, and laser irradiation apparatus
09/08/2009US7585713 Method for exposing photo-sensitive SAM film and method for manufacturing semiconductor device
09/08/2009US7585712 Methods of fabricating thin film transistor array substrate and forming metal layer of thin film transistor array substrate
09/08/2009US7585711 Semiconductor-on-insulator (SOI) strained active area transistor
09/08/2009US7585709 Display panels and fabrication methods thereof
09/08/2009US7585708 Method for manufacturing a thin-film transistor
09/08/2009US7585707 Low dark current image sensors with epitaxial SiC and/or carbonated channels for array transistors
09/08/2009US7585706 Method of fabricating a semiconductor device
09/08/2009US7585705 Method for preventing gate oxide damage of a trench MOSFET during wafer processing while adding an ESD protection module atop
09/08/2009US7585704 Method of producing highly strained PECVD silicon nitride thin films at low temperature
09/08/2009US7585703 Pixel control element selection transfer method, pixel control device mounting device used for pixel control element selection transfer method, wiring formation method after pixel control element transfer, and planar display substrate
09/08/2009US7585702 Structure and assembly procedure for low stress thin die flip chip packages designed for low-K Si and thin core substrate
09/08/2009US7585701 Carrier sheet with adhesive film and method for producing semiconductor devices using the carrier sheet with adhesive film
09/08/2009US7585700 Ball grid array package stack
09/08/2009US7585699 Semiconductor package board using a metal base
09/08/2009US7585698 Thin film transistor having oxide semiconductor layer and manufacturing method thereof
09/08/2009US7585697 Thin-film transistor, method of producing thin-film transistor, electronic circuit, display, and electronic device
09/08/2009US7585696 Image sensor and method for manufacturing the same
09/08/2009US7585695 Lightshield architecture for interline transfer image sensors
09/08/2009US7585694 Manufacturing method of solid-state imaging device
09/08/2009US7585693 Method of forming a microelectronic package using control of die and substrate differential expansions and microelectronic package formed according to the method
09/08/2009US7585692 Thin film layer, heating electrode, phase change memory including thin film layer and methods for forming the same
09/08/2009US7585691 Solid-state imaging device and method for producing the same
09/08/2009US7585690 Process for producing group III nitride compound semiconductor light emitting device, group III nitride compound semiconductor light emitting device and lamp
09/08/2009US7585689 Method for manufacturing semiconductor laser device and method for inspecting semiconductor laser bar
09/08/2009US7585688 Method for manufacturing semiconductor optical device
09/08/2009US7585687 Electron emitter device for data storage applications and method of manufacture
09/08/2009US7585686 Method and apparatus for processing a wafer
09/08/2009US7585685 Method of determining wafer voltage in a plasma reactor from applied bias voltage and current and a pair of constants
09/08/2009US7585684 Method and apparatus for detecting backside particles during wafer processing
09/08/2009US7585683 Methods of fabricating ferroelectric devices
09/08/2009US7585609 Bilayer film including an underlayer having vertical acid transport properties
09/08/2009US7585599 Photomask, and method and apparatus for producing the same
09/08/2009US7585549 Method of applying a pattern of particles to a substrate
09/08/2009US7585424 Pattern reversal process for self aligned imprint lithography and device
09/08/2009US7585418 Lithographic mask and manufacturing method thereof
09/08/2009US7585386 Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method
09/08/2009US7585385 Plasma processing apparatus, control method thereof and program for performing same
09/08/2009US7585384 Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor
09/08/2009US7585383 Vacuum processing apparatus
09/08/2009US7585370 Gas-purged vacuum valve
09/08/2009US7585334 Manufacturing method for molecular rulers
09/08/2009US7585204 Substrate polishing apparatus
09/08/2009US7585141 Load lock system for ion beam processing
09/08/2009US7584760 Substrate processing apparatus
09/08/2009US7584714 Method and system for improving coupling between a surface wave plasma source and a plasma space