Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2009
09/15/2009US7589008 Methods for forming interconnects in microelectronic workpieces and microelectronic workpieces formed using such methods
09/15/2009US7589007 MESFETs integrated with MOSFETs on common substrate and methods of forming the same
09/15/2009US7589006 Method for manufacturing semiconductor device
09/15/2009US7589005 Methods of forming semiconductor structures and systems for forming semiconductor structures
09/15/2009US7589004 Method for implantation of high dopant concentrations in wide band gap materials
09/15/2009US7589003 GeSn alloys and ordered phases with direct tunable bandgaps grown directly on silicon
09/15/2009US7589002 Oxidizing or nitriding the crystal/amorphous silicon film by plasma gas treating the substrate by applying a high frequency electric field to the oxidizing or nitriding gas atmosphere; controlling particle sizes to accuracy of 1-2 nm. high density; efficiency; cost efficiency; light-emitting elements
09/15/2009US7589001 Semiconductor base and its manufacturing method, and semiconductor crystal manufacturing method
09/15/2009US7589000 Fabrication method and fabrication apparatus of group III nitride crystal substance
09/15/2009US7588999 Method of forming a leaded molded array package
09/15/2009US7588998 Method for producing a semiconductor element
09/15/2009US7588997 Method of fabricating a thin film
09/15/2009US7588996 Oxide pattern forming method and patterning method of semiconductor device
09/15/2009US7588995 Method to create damage-free porous low-k dielectric films and structures resulting therefrom
09/15/2009US7588994 Methods for forming strained-semiconductor-on-insulator device structures by mechanically inducing strain
09/15/2009US7588993 Alignment for backside illumination sensor
09/15/2009US7588992 Integrated thin-film capacitor with etch-stop layer, process of making same, and packages containing same
09/15/2009US7588991 Method for fabricating embedded static random access memory
09/15/2009US7588990 Dynamic surface annealing of implanted dopants with low temperature HDPCVD process for depositing a high extinction coefficient optical absorber layer
09/15/2009US7588989 Dielectric multilayer structures of microelectronic devices and methods for fabricating the same
09/15/2009US7588988 Method of forming apparatus having oxide films formed using atomic layer deposition
09/15/2009US7588987 Semiconductor device and method for fabricating the same
09/15/2009US7588986 Method of manufacturing a semiconductor device
09/15/2009US7588985 Method for fabricating fin transistor
09/15/2009US7588984 Method to define a transistor gate of a DRAM and the transistor gate using same
09/15/2009US7588983 EEPROM cell and EEPROM device with high integration and low source resistance and method of manufacturing the same
09/15/2009US7588982 Methods of forming semiconductor constructions and flash memory cells
09/15/2009US7588981 Semiconductor device and manufacturing method thereof
09/15/2009US7588980 Methods of controlling morphology during epitaxial layer formation
09/15/2009US7588979 Method of manufacturing a semiconductor integrated circuit using a selective disposable spacer technique and semiconductor integrated circuit manufactured thereby
09/15/2009US7588978 Method for forming semiconductor device
09/15/2009US7588976 Display device, method of production of the same, and projection type display device
09/15/2009US7588975 Method of manufacturing pixel structure
09/15/2009US7588974 Program for controlling laser apparatus and recording medium for recording program for controlling laser apparatus and capable of being read out by computer
09/15/2009US7588973 Semiconductor device and method of manufacturing the same
09/15/2009US7588972 Thin film transistor, method of manufacturing the same, display apparatus having the same and method of manufacturing the display apparatus
09/15/2009US7588971 Method of fabricating vertical thin film transistor
09/15/2009US7588970 Semiconductor device and manufacturing method thereof
09/15/2009US7588969 Method for manufacturing semiconductor device, and semiconductor device
09/15/2009US7588968 Linked chip attach and underfill
09/15/2009US7588967 Curable silicone rubber composition and semiconductor device
09/15/2009US7588966 Chip mounting with flowable layer
09/15/2009US7588965 Stencil and method for depositing material onto a substrate
09/15/2009US7588963 Method of forming overhang support for a stacked semiconductor device
09/15/2009US7588962 Method of making semiconductor device
09/15/2009US7588961 Semiconductor device and manufacturing method thereof
09/15/2009US7588960 Nanotube device structure and methods of fabrication
09/15/2009US7588959 Organic field effect transistor and method for producing the same
09/15/2009US7588958 Schottky barrier diode and manufacturing method thereof
09/15/2009US7588957 CVD process gas flow, pumping and/or boosting
09/15/2009US7588956 CMOS image sensor and method of manufacturing the same
09/15/2009US7588955 Method for promoting light emission efficiency of LED using nanorods structure
09/15/2009US7588954 InGaAs/GaAs lasers on silicon produced by LEPECVD and MOCVD
09/15/2009US7588953 Method of fabricating porous aluminum oxide mold having sub-micron structure and methods of imprinting to make LEDS using the mold
09/15/2009US7588952 Method of fabricating vertical structure LEDs
09/15/2009US7588951 Method of packaging a semiconductor device and a prefabricated connector
09/15/2009US7588950 Test pattern for reliability measurement of copper interconnection line having moisture window and method for manufacturing the same
09/15/2009US7588949 Optical metrology model optimization based on goals
09/15/2009US7588948 Test structure for electrically verifying the depths of trench-etching in an SOI wafer, and associated working methods
09/15/2009US7588947 Method of evaluating semiconductor device and method of manufacturing semiconductor device
09/15/2009US7588946 Controlling system for gate formation of semiconductor devices
09/15/2009US7588945 Multi-state thermally assisted storage
09/15/2009US7588883 Etching polysilicon conductive layer and oxide dielectric layer using a patterned silicon nitride layer with high hydrogen concentration as a hard mask; removing the patterned silicon nitride layer using a low-temperature phosphoric acid solution without damaging layer structures
09/15/2009US7588882 Method for fabricating complex three-dimensional structures on the submicrometric scale by combined lithography of two resists
09/15/2009US7588881 Amorphous silicon thin film transistors and the storage capacities includes four photomask processes and a back exposure technique using only four photomask processes; storage capacitor has a top and bottom electrode made of transparent conductive material to increase aperture ratio; cost efficiency
09/15/2009US7588870 Dual layer workpiece masking and manufacturing process
09/15/2009US7588867 Reflection mask, use of the reflection mask and method for fabricating the reflection mask
09/15/2009US7588865 Photo mask and method for manufacturing patterns using the same
09/15/2009US7588815 Mask blank for charged particle beam exposure, method of forming mask blank and mask for charged particle beam exposure
09/15/2009US7588803 Exposing dielectric layer to first dose of electron beam radiation at first energy level and thereafter exposing dielectric layer to second dose of electron beam radiation at second energy level that is different from first energy level; improves uniformity of electron energy distributed throughout layer
09/15/2009US7588799 Metal film production apparatus
09/15/2009US7588736 Apparatus and method for generating a chemical precursor
09/15/2009US7588677 engaging a microelectronic substrate with a polishing surface of a polishing pad, electrically coupling a conductive material of the microelectronic substrate to a source of electrical potential, and oxidizing at least a portion of the conductive material by passing an electrical current
09/15/2009US7588674 Method and apparatus for maintaining parallelism of layers and/or achieving desired thicknesses of layers during the electrochemical fabrication of structures
09/15/2009US7588657 Pattern-free method of making line gratings
09/15/2009US7587989 Plasma processing method and apparatus
09/15/2009US7587941 Vibration piezoelectric acceleration sensor
09/15/2009CA2454963C Parallel, individually addressable probes for nanolithography
09/15/2009CA2345443C Approach for routing an integrated circuit
09/11/2009WO2009111741A1 Providing an electronically conductive wall structure adjacent a contact structure of an electronic device
09/11/2009WO2009111669A2 Maskless doping technique for solar cells
09/11/2009WO2009111668A2 Use of dopants with different diffusivities for solar cell manufacture
09/11/2009WO2009111666A2 Counterdoping for solar cells
09/11/2009WO2009111665A2 Use of chained implants in solar cells
09/11/2009WO2009111641A1 Stretchable and foldable electronic devices
09/11/2009WO2009111602A2 A method of handling and assembling silicon chips from thin wafers
09/11/2009WO2009111575A2 Substrates for silicon solar cells and methods of producing the same
09/11/2009WO2009111535A2 Method to improve uniformity of chemical mechanical polishing planarization
09/11/2009WO2009111487A1 Process of making a microtube and microfluidic devices formed therewith
09/11/2009WO2009111473A2 Method for curing a porous low dielectric constant dielectric film
09/11/2009WO2009111407A2 Multi-spot scanning system and method
09/11/2009WO2009111395A2 Method for depositing an amorphous carbon film with improved density and step coverage
09/11/2009WO2009111344A2 Method and apparatus for removing polymer from a substrate
09/11/2009WO2009111340A2 Flash lamp annealing crystallization for large area thin films
09/11/2009WO2009111326A2 Flash light annealing for thin films
09/11/2009WO2009111305A2 Silicon-germanium-carbon semiconductor structure
09/11/2009WO2009111225A1 Devices with cavity-defined gates and methods of making the same
09/11/2009WO2009111209A1 Method for fabricating a semiconductor device
09/11/2009WO2009111197A1 Method of forming a magnetic tunnel junction structure
09/11/2009WO2009111156A2 Advanced process sensing and control using near infrared spectral reflectometry
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