| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/02/2010 | US7672000 Position detecting method and apparatus |
| 03/02/2010 | US7671965 Lithographic projection apparatus, device manufacturing method and device manufactured thereby |
| 03/02/2010 | US7671963 Lithographic apparatus and device manufacturing method |
| 03/02/2010 | US7671931 Liquid crystal display device and method of fabricating the same |
| 03/02/2010 | US7671882 Semiconductor laser modulation driving apparatus and image forming apparatus |
| 03/02/2010 | US7671863 Method and graphic engine chip for drawing processing |
| 03/02/2010 | US7671827 Electro-optical device |
| 03/02/2010 | US7671609 Sheet-like probe, method of producing the probe, and application of the probe |
| 03/02/2010 | US7671471 Method for making a semiconductor device having a high-k dielectric layer and a metal gate electrode |
| 03/02/2010 | US7671470 Enhanced mechanical strength via contacts |
| 03/02/2010 | US7671467 Power semiconductor module |
| 03/02/2010 | US7671466 Semiconductor package having heat dissipating device with cooling fluid |
| 03/02/2010 | US7671464 Lighting device having a lighting unit with an optical semiconductor bare chip mounted on printed wiring board |
| 03/02/2010 | US7671461 Method and system for hermetically sealing packages for optics |
| 03/02/2010 | US7671457 Semiconductor package including top-surface terminals for mounting another semiconductor package |
| 03/02/2010 | US7671454 Tape carrier, semiconductor apparatus, and semiconductor module apparatus |
| 03/02/2010 | US7671453 Semiconductor device and method for producing the same |
| 03/02/2010 | US7671449 Structures and methods for an application of a flexible bridge |
| 03/02/2010 | US7671447 Bipolar transistor and method of manufacturing the same |
| 03/02/2010 | US7671441 Trench MOSFET with sidewall spacer gates |
| 03/02/2010 | US7671433 Spin transistor based on the spin-filter effect, and non-volatile memory using spin transistors |
| 03/02/2010 | US7671430 MEMS resonator and manufacturing method of the same |
| 03/02/2010 | US7671428 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 03/02/2010 | US7671425 Semiconductor device and method of manufacturing the same |
| 03/02/2010 | US7671421 CMOS structure and method for fabrication thereof using multiple crystallographic orientations and gate materials |
| 03/02/2010 | US7671418 Double layer stress for multiple gate transistors |
| 03/02/2010 | US7671414 Semiconductor on insulator apparatus |
| 03/02/2010 | US7671410 Design and fabrication of rugged FRED, power MOSFET or IGBT |
| 03/02/2010 | US7671406 Semiconductor device and method of fabricating the same |
| 03/02/2010 | US7671405 Deep bitline implant to avoid program disturb |
| 03/02/2010 | US7671404 Fabrication method and structure of semiconductor non-volatile memory device |
| 03/02/2010 | US7671394 Embedded trench capacitor having a high-k node dielectric and a metallic inner electrode |
| 03/02/2010 | US7671390 Semiconductor device and method for manufacture |
| 03/02/2010 | US7671388 Lateral junction field effect transistor and method of manufacturing the same |
| 03/02/2010 | US7671387 Lateral junction field effect transistor and method of manufacturing the same |
| 03/02/2010 | US7671384 Semiconductor integrated circuit device having improved punch-through resistance and production method thereof, semiconductor integrated circuit device including a low-voltage transistor and a high-voltage transistor |
| 03/02/2010 | US7671381 Semiconductor device and manufacturing the same |
| 03/02/2010 | US7671375 Nitride-based semiconductor device of reduced voltage drop, and method of fabrication |
| 03/02/2010 | US7671371 Semiconductor layer structure and method of making the same |
| 03/02/2010 | US7671369 Semiconductor display device |
| 03/02/2010 | US7671368 Capacitor and light emitting display using the same |
| 03/02/2010 | US7671295 Processing a memory link with a set of at least two laser pulses |
| 03/02/2010 | US7671002 A mixture of solvents with no corrosion of copper properties and a corrosion inhibitor; during the photolithographic process, removing photoresist remaining after forming copper line |
| 03/02/2010 | US7671001 alkaline compositions useful in the microelectronics industry for stripping or cleaning semiconductor wafer substrates by removing photoresist residues and other unwanted contaminants; compositions contain one or more bases and one or more metal corrosion inhibiting metal halides |
| 03/02/2010 | US7670966 Method of processing a semiconductor substrate by thermal activation of light elements |
| 03/02/2010 | US7670965 Production method for silicon wafers and silicon wafer |
| 03/02/2010 | US7670964 Apparatus and methods of forming a gas cluster ion beam using a low-pressure source |
| 03/02/2010 | US7670963 Single-wafer process for fabricating a nonvolatile charge trap memory device |
| 03/02/2010 | US7670962 Substrate having stiffener fabrication method |
| 03/02/2010 | US7670961 Reduction of cracking in low-k spin-on dielectric films |
| 03/02/2010 | US7670960 Substrate processing method |
| 03/02/2010 | US7670959 Memory device etch methods |
| 03/02/2010 | US7670958 Etching methods |
| 03/02/2010 | US7670957 Method for fabricating semiconductor device |
| 03/02/2010 | US7670956 Beam-induced etching |
| 03/02/2010 | US7670955 Semiconductor device and manufacturing method of the same |
| 03/02/2010 | US7670954 Method of manufacturing semiconductor device |
| 03/02/2010 | US7670953 Positive tone bi-layer method |
| 03/02/2010 | US7670952 Method of manufacturing metal silicide contacts |
| 03/02/2010 | US7670951 Grid array connection device and method |
| 03/02/2010 | US7670950 Copper metallization of through silicon via |
| 03/02/2010 | US7670949 Semiconductor device and method of manufacturing semiconductor device |
| 03/02/2010 | US7670948 Semiconductor device having diffusion barriers and a method of preventing diffusion of copper in a metal interconnection of a semiconductor device |
| 03/02/2010 | US7670947 Metal interconnect structure and process for forming same |
| 03/02/2010 | US7670946 Methods to eliminate contact plug sidewall slit |
| 03/02/2010 | US7670945 In situ deposition of a low κ dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application |
| 03/02/2010 | US7670944 Conformal lining layers for damascene metallization |
| 03/02/2010 | US7670943 Enhanced mechanical strength via contacts |
| 03/02/2010 | US7670942 Method of fabricating self-aligned contact pad using chemical mechanical polishing process |
| 03/02/2010 | US7670941 Method for production of semiconductor devices |
| 03/02/2010 | US7670940 Plating method, semiconductor device fabrication method and circuit board fabrication method |
| 03/02/2010 | US7670939 Semiconductor chip bump connection apparatus and method |
| 03/02/2010 | US7670938 Methods of forming contact openings |
| 03/02/2010 | US7670937 Method for producing doped regions in a substrate, and photovoltaic cell |
| 03/02/2010 | US7670936 Nitridation of gate oxide by laser processing |
| 03/02/2010 | US7670935 Manufacturing method of semiconductor device |
| 03/02/2010 | US7670934 Methods for fabricating MOS devices having epitaxially grown stress-inducing source and drain regions |
| 03/02/2010 | US7670933 method of nanowire-templated lateral epitaxial growth employs crystallographically aligned, substantially vertical Group III nitride nanowire arrays grown by metal-catalyzed metal-organic chemical vapor deposition as templates for lateral growth and coalescence of virtually crack-free films |
| 03/02/2010 | US7670931 Methods for fabricating semiconductor structures with backside stress layers |
| 03/02/2010 | US7670930 Method of detaching a thin film by melting precipitates |
| 03/02/2010 | US7670929 Method for direct bonding two semiconductor substrates |
| 03/02/2010 | US7670928 Ultra-thin oxide bonding for S1 to S1 dual orientation bonding |
| 03/02/2010 | US7670927 Double-sided integrated circuit chips |
| 03/02/2010 | US7670926 Method for forming shallow trench isolation utilizing two filling oxide layers |
| 03/02/2010 | US7670925 Semiconductor device, method of manufacturing same, and apparatus for designing same |
| 03/02/2010 | US7670924 Air gap integration scheme |
| 03/02/2010 | US7670923 Method of fabricating strain-silicon CMOS |
| 03/02/2010 | US7670922 Method of measuring alignment of measurement pattern |
| 03/02/2010 | US7670921 Structure and method for self aligned vertical plate capacitor |
| 03/02/2010 | US7670919 Integrated capacitors in package-level structures, processes of making same, and systems containing same |
| 03/02/2010 | US7670918 Semiconductor device having impurity-doped resistor element |
| 03/02/2010 | US7670917 Semiconductor device made by using a laser anneal to incorporate stress into a channel region |
| 03/02/2010 | US7670916 Semiconductor device doped with Sb, Ga, or Bi and method of manufacturing the same |
| 03/02/2010 | US7670915 Contact liner in integrated circuit technology |
| 03/02/2010 | US7670914 Methods for fabricating multiple finger transistors |
| 03/02/2010 | US7670913 Method for forming ultra-thin low leakage multiple gate devices using a masking layer over the semiconductor substrate |
| 03/02/2010 | US7670912 Methods of fabricating multichannel metal oxide semiconductor (MOS) transistors |
| 03/02/2010 | US7670911 Method for manufacturing vertical MOS transistor |
| 03/02/2010 | US7670910 Method of forming self-aligned inner gate recess channel transistor |
| 03/02/2010 | US7670908 Configuration of high-voltage semiconductor power device to achieve three dimensional charge coupling |