| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/23/2010 | US7666728 Manufacturing method of semiconductor device |
| 02/23/2010 | US7666727 Semiconductor device having a laterally modulated gate workfunction and method of fabrication |
| 02/23/2010 | US7666726 Semiconductor element, semiconductor device, and method of manufacturing the same |
| 02/23/2010 | US7666725 Manufacturing process of thin film transistor |
| 02/23/2010 | US7666723 Methods of forming wiring to transistor and related transistor |
| 02/23/2010 | US7666722 Manufacturing method of semiconductor device, and IC card, IC tag, RFID, transponder, bill, securities, passport, electronic apparatus, bag, and garment |
| 02/23/2010 | US7666721 SOI substrates and SOI devices, and methods for forming the same |
| 02/23/2010 | US7666720 Method and apparatus for improving integrated circuit device performance using hybrid crystal orientations |
| 02/23/2010 | US7666719 Peeling method |
| 02/23/2010 | US7666718 Wiring and manufacturing method thereof, semiconductor device comprising said wiring, and dry etching method |
| 02/23/2010 | US7666717 Non-volatile memory devices including fuse covered field regions |
| 02/23/2010 | US7666716 Fabrication method of semiconductor package |
| 02/23/2010 | US7666714 Assembly of thin die coreless package |
| 02/23/2010 | US7666713 Method for bonding heatsink and semiconductor device with heatsink |
| 02/23/2010 | US7666712 Design of BEOL patterns to reduce the stresses on structures below chip bondpads |
| 02/23/2010 | US7666711 Semiconductor device and method of forming double-sided through vias in saw streets |
| 02/23/2010 | US7666710 Method of manufacturing photo couplers |
| 02/23/2010 | US7666709 Semiconductor device and method of placing semiconductor die on a temporary carrier using fiducial patterns |
| 02/23/2010 | US7666708 Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices |
| 02/23/2010 | US7666706 Method for making a thin-film poly-crystalline silicon solar cell on an indium tin oxide-glass substrate at a low temperature |
| 02/23/2010 | US7666705 Image sensor and method of manufacturing the same |
| 02/23/2010 | US7666704 Solid-state image pickup element, method for manufacturing such solid-state image pickup element and optical waveguide forming device |
| 02/23/2010 | US7666703 Image sensor pixel having a lateral doping profile formed with indium doping |
| 02/23/2010 | US7666702 Method for fabricating a microstructure |
| 02/23/2010 | US7666700 Method for fabrication MEMS-resonator |
| 02/23/2010 | US7666699 Semiconductor strain gauge and the manufacturing method |
| 02/23/2010 | US7666698 Method for forming and sealing a cavity for an integrated MEMS device |
| 02/23/2010 | US7666697 Thin film transistor substrate and method of manufacturing the same |
| 02/23/2010 | US7666696 Process for controlling indium clustering in ingan leds using strain arrays |
| 02/23/2010 | US7666695 Array substrates of liquid crystal display and fabrication method thereof |
| 02/23/2010 | US7666693 Top-emitting nitride-based light emitting device and method of manufacturing the same |
| 02/23/2010 | US7666692 Semiconductor device, its manufacture method and electronic component unit |
| 02/23/2010 | US7666691 Organic semiconductor devices and organic electroluminescent devices produced by using wet process |
| 02/23/2010 | US7666690 System, apparatus and method of selective laser repair for metal bumps of semiconductor device stack |
| 02/23/2010 | US7666689 Method to remove circuit patterns from a wafer |
| 02/23/2010 | US7666688 Method of manufacturing a coil inductor |
| 02/23/2010 | US7666577 Mixture of photomasks; controlling incline of pattern; lithography; phase shifting; removal of mask by etching |
| 02/23/2010 | US7666554 Method and apparatus for performing model-based layout conversion for use with dipole illumination |
| 02/23/2010 | US7666553 positional accuracy assurance, dimensional accuracy assurance; halftone type phase shift mask; forming a fine pattern in a semiconductor device, a magnetic device |
| 02/23/2010 | US7666513 Adhesive of a silicon and silica composite for bonding together silicon parts |
| 02/23/2010 | US7666479 pressurization; cyclic flow |
| 02/23/2010 | US7666321 Method for decapsulating package |
| 02/23/2010 | US7666260 Vaporizer and semiconductor processing apparatus |
| 02/23/2010 | US7666069 Wafer holder and wafer conveyor equipped with the same |
| 02/23/2010 | US7666063 Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer |
| 02/23/2010 | US7666050 Method of manufacturing display device |
| 02/23/2010 | US7665983 Microcontact printing |
| 02/23/2010 | US7665947 Transfer chamber for flat display device manufacturing apparatus |
| 02/23/2010 | US7665946 Transfer chamber for flat display device manufacturing apparatus |
| 02/23/2010 | US7665916 Coater/developer and coating/developing method |
| 02/23/2010 | US7665783 Vacuum suction head, and vacuum suction device and table using the same |
| 02/23/2010 | US7665648 Fabrication method and structure of PCB assembly, and tool for assembly thereof |
| 02/23/2010 | US7665330 Heat treating glass comprising lithium oxide, alumina, silica, at temperature range of 650-750 degrees C. for 20-60 hours then further heat treating at temperature range of 700-800 degrees C. for 100-200 hours; provides glass-ceramics having super flat surface roughness and ultra low thermal expansion |
| 02/23/2010 | US7665205 Method of manufacturing a laminated leadframe |
| 02/23/2010 | CA2351123C Gan selective growth on sic substrates by ammonia-source mbe |
| 02/18/2010 | WO2010019968A2 Systems and methods for scanning a beam of charged particles |
| 02/18/2010 | WO2010019946A2 Anti-reflective surfaces and methods for making the same |
| 02/18/2010 | WO2010019876A1 Shallow trench isolation |
| 02/18/2010 | WO2010019794A1 Integration methods for carbon films in two-and three-dimensional memories and memories formed therefrom |
| 02/18/2010 | WO2010019789A1 Methods and apparatus for increasing memory density using diode layer sharing |
| 02/18/2010 | WO2010019700A2 Improved cleaving of substrates |
| 02/18/2010 | WO2010019699A2 Usj techniques with helium-treated substrates |
| 02/18/2010 | WO2010019500A1 Methods for forming copper interconnects for semiconductor devices |
| 02/18/2010 | WO2010019495A1 Changing effective work function using ion implantation during dual work function metal gate integration |
| 02/18/2010 | WO2010019430A2 Electrostatic chuck assembly |
| 02/18/2010 | WO2010019343A2 Methods of making capacitors, dram arrays and electronic systems |
| 02/18/2010 | WO2010019339A2 Method for an improved chemical mechanical polishing system |
| 02/18/2010 | WO2010019283A2 Method for measuring dopant concentration during plasma ion implantation |
| 02/18/2010 | WO2010019264A2 Chemical mechanical polisher having movable slurry dispensers and method |
| 02/18/2010 | WO2010019197A2 A composite showerhead electrode assembly for a plasma processing apparatus |
| 02/18/2010 | WO2010019196A2 Temperature controlled hot edge ring assembly |
| 02/18/2010 | WO2010019184A1 Patterning method to create a mask |
| 02/18/2010 | WO2010019008A2 Vapor deposition reactor |
| 02/18/2010 | WO2010019007A2 Vapor deposition reactor for forming thin film |
| 02/18/2010 | WO2010019003A2 Regular lithography method |
| 02/18/2010 | WO2010018963A2 Contactor for testing a semiconductor device |
| 02/18/2010 | WO2010018933A2 Method for manufacturing a high‑concentration n-type nitride semiconductor and nitride light‑emitting device based on same |
| 02/18/2010 | WO2010018875A1 Process for producing field effect transistor |
| 02/18/2010 | WO2010018864A1 Display device, cu alloy film for use in the display device, and cu alloy sputtering target |
| 02/18/2010 | WO2010018825A1 Light exposure device, maintenance method, and device manufacturing method |
| 02/18/2010 | WO2010018797A1 Plasma doping method and semiconductor device manufacturing method |
| 02/18/2010 | WO2010018786A1 Plasma control device |
| 02/18/2010 | WO2010018768A1 Metal recovery method, metal recovery apparatus, exhaust system, and film forming device using same |
| 02/18/2010 | WO2010018767A1 Semiconductor processing method and adhesive tape |
| 02/18/2010 | WO2010018739A1 Contact detecting device and contact detecting method |
| 02/18/2010 | WO2010018712A1 Conductive adhesive and led substrate using the same |
| 02/18/2010 | WO2010018654A1 Vertical heat treatment apparatus and heat treatment method |
| 02/18/2010 | WO2010018430A1 A hardmask process for forming a reverse tone image |
| 02/18/2010 | WO2010018204A1 Process for fabricating a semiconductor structure with a buried ground plane |
| 02/18/2010 | WO2010018125A1 Method and apparatus for thermally processing plastic discs, in particular mould wafers |
| 02/18/2010 | WO2010018070A1 Metal-gate high-k reference structure |
| 02/18/2010 | WO2010017987A1 Method for electron beam induced etching |
| 02/18/2010 | WO2010017963A1 Method for electron beam induced etching of layers contaminated with gallium |
| 02/18/2010 | WO2010017920A1 Method for electron beam induced deposition of conductive material |
| 02/18/2010 | WO2010017693A1 A polishing liquid for chemical-mechanical abrading |
| 02/18/2010 | WO2009142869A3 Methods of forming structures supported by semiconductor substrates |
| 02/18/2010 | WO2009140406A3 Crystal growth apparatus for solar cell manufacturing |
| 02/18/2010 | WO2009137604A3 Method of forming an electronic device using a separation-enhancing species |
| 02/18/2010 | WO2009137542A3 New method and loader apparatus for tem machine work chamber device |
| 02/18/2010 | WO2009137405A3 Plasma reactor electrostatic chuck having a coaxial rf feed and multizone ac heater power transmission through the coaxial feed |