Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2014
09/02/2014US8822266 Integrated circuit micro-module
09/02/2014US8822265 Method for reducing forming voltage in resistive random access memory
09/02/2014US8822264 Semiconductor device and method for manufacturing the semiconductor device
09/02/2014US8822262 Fabricating solar cells with silicon nanoparticles
09/02/2014US8822258 Wafer level bonding method for fabricating wafer level camera lenses
09/02/2014US8822257 Thin silicon solar cell and method of manufacture
09/02/2014US8822256 Method for fabricating infrared sensors
09/02/2014US8822254 MEMS device and manufacturing method
09/02/2014US8822253 Semiconductor housing and method for the production of a semiconductor housing
09/02/2014US8822252 Internal electrical contact for enclosed MEMS devices
09/02/2014US8822251 Micro electro mechanical system, semiconductor device, and manufacturing method thereof
09/02/2014US8822250 Semiconductor light emitting device and method for manufacturing the same
09/02/2014US8822249 Light-emitting device and method of manufacturing the same
09/02/2014US8822248 Epitaxial growth of crystalline material
09/02/2014US8822246 Method for manufacturing a light-emitting element including a protective film for a charge injection layer
09/02/2014US8822245 Packaged semiconductor light emitting devices having multiple optical elements and methods of forming the same
09/02/2014US8822242 Methods for monitoring the amount of metal contamination in a process
09/02/2014US8822241 Method of manufacturing a semiconductor device
09/02/2014US8822240 Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device
09/02/2014US8822238 Apparatus and method for predetermined component placement to a target platform
09/02/2014US8822237 Hole first hardmask definition
09/02/2014US8822236 Hydrogen-blocking film for ferroelectric capacitors
09/02/2014US8822235 Electronic component with reactive barrier and hermetic passivation layer
09/02/2014US8822234 Method of fabricating a semiconductor device
09/02/2014US8822138 Composition for forming resist underlayer film for lithography including resin containing alicyclic ring and aromatic ring
09/02/2014US8822125 Composition for forming pattern and in-plane printing method using the same
09/02/2014US8822003 Component having an overlapping laser track; method for producing such a component
09/02/2014US8821961 MgO-based coating for electrically insulating semiconductive substrates and production method thereof
09/02/2014US8821959 Method for applying liquid material, device therefor, and program therefor
09/02/2014US8821821 Method for the purification of fluorine
09/02/2014US8821795 Combinatorial screening method and apparatus
09/02/2014US8821751 Chemical mechanical planarization composition and method with low corrosiveness
09/02/2014US8821750 Metal polishing slurry and polishing method
09/02/2014US8821742 Plasma etching method
09/02/2014US8821684 Substrate plasma processing apparatus and plasma processing method
09/02/2014US8821683 Substrate processing apparatus and method, and program and storage medium
09/02/2014US8821644 Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium
09/02/2014US8821641 Nozzle unit, and apparatus and method for treating substrate with the same
09/02/2014US8821635 Method for growing Si-Ge semiconductor materials and devices on substrates
09/02/2014US8821099 Load port module
09/02/2014US8821098 Load port
09/02/2014US8820809 Robot hand and robot
09/02/2014US8820335 Cleaning apparatus, substrate processing system, cleaning method, program and storage medium
09/02/2014US8820160 Method for producing a speed sensor element
09/02/2014US8819952 Control device for a parallel slider device, control method and measuring device using same
09/02/2014US8819930 Method for improving the adhesion between silver surfaces and resin materials
09/02/2014US8819929 Component mounting method
08/2014
08/28/2014WO2014131016A1 Method and system for gas flow mitigation of molecular contamination of optics
08/28/2014WO2014131002A1 Contact resistance reduction in finfets
08/28/2014WO2014130979A1 Defect reduction in a substrate treatment method
08/28/2014WO2014130959A1 Carrier-less silicon interposer
08/28/2014WO2014130934A1 Methods, devices, and systems related to forming semiconductor power devices with a handle substrate
08/28/2014WO2014130926A1 Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation
08/28/2014WO2014130895A1 Laser patterning multi-layer structures
08/28/2014WO2014130867A1 Generalized virtual inspector
08/28/2014WO2014130829A1 Systems for providing illumination in optical metrology
08/28/2014WO2014130802A1 Mix doping of a semi-insulating group iii nitride
08/28/2014WO2014130668A1 Catalytic atomic layer deposition of films comprising sioc
08/28/2014WO2014130353A1 Mass transfer tool manipulator assembly and micro pick up array mount with integrated displacement sensor
08/28/2014WO2014130230A1 Tunable gas delivery assembly with internal diffuser and angular injection
08/28/2014WO2014130185A1 Graphene heterostructure field effect transistors
08/28/2014WO2014130165A1 Semiconductor structure having silicon devices, column iii-nitride devices, and column iii-non-nitride or column ii-vi devices
08/28/2014WO2014130164A1 REO GATE DIELECTRIC FOR III-N DEVICE ON Si SUBSTRATE
08/28/2014WO2014130129A1 Finfets and fin isolation structures
08/28/2014WO2014130057A1 A tester with acceleration on memory and acceleration for automatic pattern generation within a fpga block
08/28/2014WO2014130056A1 A test architecture having multiple fpga based hardware accelerator blocks for testing multiple duts independently
08/28/2014WO2014129976A1 Semiconductor structure and method of fabricating the same
08/28/2014WO2014129708A1 Wafer processing apparatus and method
08/28/2014WO2014129669A1 Display device and electronic device
08/28/2014WO2014129519A1 Peeling method, semiconductor device, and peeling apparatus
08/28/2014WO2014128113A1 Method for forming metal silicide layers
08/28/2014WO2014127845A1 Deposition apparatus with gas supply and method for depositing material
08/28/2014WO2014127644A1 Barrier film and methods of making same
08/28/2014WO2014051740A3 Non-planar iii-v field effect transistors with conformal metal gate electrode & nitrogen doping of gate dielectric interface
08/28/2014WO2014049059A3 Component arrangement and method for producing electrical components
08/28/2014WO2013122986A8 Carbon dopant gas and co-flow for implant beam and source life performance improvement
08/28/2014US20140243250 Polishing slurry for cobalt removal
08/28/2014US20140242885 Polishing apparatus and polishing method
08/28/2014US20140242815 Method of manufacturing semiconductor device
08/28/2014US20140242814 Method for forming nitride film
08/28/2014US20140242813 Low K Precursors Providing Superior Integration Attributes
08/28/2014US20140242812 Method of forming dielectric films, new precursors and their use in semiconductor manufacturing
08/28/2014US20140242811 Atomic layer deposition method
08/28/2014US20140242810 Substrate processing apparatus and method of supplying and exhausting gas
08/28/2014US20140242809 Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
08/28/2014US20140242808 Semiconductor device manufacturing method and substrate processing system
08/28/2014US20140242807 Method for facilitating crack initiation during controlled substrate spalling
08/28/2014US20140242806 Metal Amide Deposition Precursors And Their Stabilization With An Inert Ampoule Liner
08/28/2014US20140242805 Laser-enhanced chemical etching of nanotips
08/28/2014US20140242804 Integrated Platform for Improved Wafer Manufacturing Quality
08/28/2014US20140242803 Dry Etching Agent and Dry Etching Method Using the Same
08/28/2014US20140242802 Semiconductor process
08/28/2014US20140242801 Multi-level autolimitating etching method
08/28/2014US20140242800 Methods of forming layer patterns of a semiconductor device
08/28/2014US20140242799 Pattern formation method and method for manufacturing semiconductor device
08/28/2014US20140242797 Semiconductor fabrication method using stop layer
08/28/2014US20140242796 Method of manufacturing semiconductor device
08/28/2014US20140242795 Volatile Imidazoles and Group 2 Imidazole Based Metal Precursors
08/28/2014US20140242794 Methods of Patterning Small Via Pitch Dimensions
08/28/2014US20140242793 Pattern forming method and method of manufacturing semiconductor device