Patents for G21K 5 - Irradiation devices (9,144) |
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06/25/2003 | EP1320857A2 Illumination system particularly for microlithography |
06/25/2003 | EP1320856A2 Illumination system particularly for microlithography |
06/25/2003 | EP1320855A2 Illumination system particularly for microlithography |
06/25/2003 | EP1320854A2 Illumination system particularly for microlithography |
06/25/2003 | EP1320853A2 Illumination system particularly for microlithography |
06/25/2003 | EP1316103A4 Large surface area x-ray tube shield structure |
06/25/2003 | CN1426541A 复合金刚石窗 Composite diamond window |
06/24/2003 | US6584173 X-ray examination device comprising a manually adjustable filter |
06/24/2003 | US6584168 X-ray projection exposure apparatus and a device manufacturing method |
06/24/2003 | US6583429 Method and apparatus for improved ion bunching in an ion implantation system |
06/24/2003 | US6583423 Article irradiation system with multiple beam paths |
06/19/2003 | WO2003050840A1 Device for generating x-rays having an integrated anode and bearing member |
06/19/2003 | WO2003050567A1 X-ray examination apparatus and method |
06/19/2003 | US20030112438 Dose radiometer |
06/19/2003 | US20030111619 Electron beam exposure apparatus and exposing method using an electron beam |
06/19/2003 | US20030111617 Wafer pedestal tilt mechanism |
06/18/2003 | EP1320152A2 Irradiation device and power transmission for such a device |
06/18/2003 | EP1319988A2 High luminosity source for EUV lithography |
06/18/2003 | CN1424925A Cone-beam computerized tomography with flat-panel image |
06/17/2003 | US6580781 Method of manufacturing a window transparent to electron rays, and window transparent to electron rays |
06/17/2003 | US6580084 Accelerator system |
06/12/2003 | WO2003049510A2 X-ray source assembly having enhanced output stability, and fluid stream analysis applications thereof |
06/12/2003 | WO2003049499A2 Ultraviolet radiation generation with flame and electrical discharge |
06/12/2003 | WO2003049138A2 Method and device for cooling and electrically insulating a high-voltage, heat-generating component such as an x-ray tube |
06/12/2003 | WO2003048806A1 Method to measure the entrance dose of a radiology apparatus |
06/12/2003 | WO2003048745A2 X-ray fluorescence analyser for analysing fluid streams using a semiconductor-type detector and focusing means |
06/12/2003 | CA2457337A1 Ultraviolet radiation generation with flame and electrical discharge |
06/11/2003 | EP1317944A1 Apparatus for the intraoperative radiation therapy for the linear acceleration of electrons |
06/11/2003 | EP1042754B1 X-ray examination apparatus having an adjustable x-ray filter |
06/10/2003 | US6578190 Process window based optical proximity correction of lithographic images |
06/10/2003 | US6577697 Field analysis of geological samples using delayed neutron activation analysis |
06/10/2003 | US6576913 Gas injector provided with a plurality of gas supply pipes each having a nozzle at one end for ejecting a gas and a housing in which the plurality of gas supply pipes are slidably accommodated |
06/10/2003 | US6576902 Correction method of scanning electron microscope |
06/10/2003 | US6575624 X-ray apparatus with non-contacting transmission of data or energy between mechanically connected components |
06/10/2003 | US6575084 System for, and method of, irradiating food products |
06/05/2003 | WO2003046609A2 System and method for irradiating a sample |
06/04/2003 | EP1316245A1 Electromagnetic radiation generation using a laser produced plasma |
06/04/2003 | EP1316103A1 Large surface area x-ray tube shield structure |
06/04/2003 | EP1315689A1 Synthesis of 17f labeled fluoroalkanes |
06/04/2003 | EP0895706B1 Method and apparatus for generating x-ray or euv radiation |
06/04/2003 | CN2554772Y Lifting ring forced landing devcie for lifting 60Co-gamma irradiation bomb |
06/04/2003 | CN1422414A Method for operating a radiation examination device |
06/03/2003 | US6573511 Electron beam irradiation system and electron beam irradiation method |
06/03/2003 | US6573508 Electron beam exposing method |
06/03/2003 | US6573014 Dividing patterns |
05/29/2003 | US20030099326 Oil expansion compensation method for integrated X-ray generator |
05/28/2003 | EP1314451A1 Device for effecting radiation therapy in an animal body |
05/28/2003 | EP0928431A4 Tapered capillary optics |
05/27/2003 | US6570962 X-ray tube envelope with integral corona shield |
05/27/2003 | US6570961 X-ray source bearing housing assembly |
05/27/2003 | US6570301 Dielectric barrier discharge lamp device with coupler for coolant fluid flow |
05/27/2003 | US6570168 Illumination system with a plurality of light sources |
05/27/2003 | US6570166 Operation method of ion source and ion beam irradiation apparatus |
05/23/2003 | CA2412082A1 Device for effecting radiation therapy in an animal body |
05/22/2003 | WO2003043388A2 Article irradiation system with multiple beam paths |
05/22/2003 | WO2003043026A2 Article irradiation system shielding |
05/22/2003 | WO2002041948A9 Device and method for adapting the size of an ion beam spot in the domain of tumor irradiation |
05/22/2003 | US20030095625 System and method for measuring beam quality and dosimetry using electronic portal imaging |
05/22/2003 | US20030095622 Illumination system particularly for microlithography |
05/22/2003 | US20030094909 Process and device for treatment by dielectric barrier discharge lamps |
05/22/2003 | US20030094582 Electron beam apparatus having a low loss beam path |
05/22/2003 | US20030094581 Article irradiation system with multiple beam paths |
05/22/2003 | US20030094578 Article irradiation system shielding |
05/21/2003 | EP1120086A4 Reduced-angle mammography device and variants |
05/21/2003 | CN1419462A Automated system for radiation treatment of a patient |
05/20/2003 | US6567492 Process and apparatus for production of F-18 fluoride |
05/20/2003 | US6566667 Plasma focus light source with improved pulse power system |
05/20/2003 | US6565927 Providing water between the surface of the substrate and the source for the optical energy and then irradiating the surface with the optical energy to modify the surface |
05/20/2003 | US6565633 Electron beam treatment apparatus of flue gas and boiler system with the same apparatus |
05/15/2003 | WO2003041090A1 Device for filtering an x-ray beam |
05/15/2003 | WO2003040829A2 Maskless printer using photoelectric conversion of a light beam array |
05/15/2003 | WO2003040713A1 Method for detecting an explosive in an object under investigation |
05/15/2003 | US20030089852 Apparatus and method for observing sample using electron beam |
05/15/2003 | US20030089851 Analytical method for electron microscopy |
05/14/2003 | EP1310978A1 High performance source for electron beam projection lithography |
05/14/2003 | EP1310298A1 Process and device for treatment by dielectric barrier discharge lamps |
05/13/2003 | US6563909 X-ray examination apparatus |
05/13/2003 | US6563898 Method and portable apparatus for the detection of substances by use of neutron irradiation |
05/13/2003 | US6563125 Charged-particle-beam microlithography apparatus and methods for preventing coulomb effects using the hollow-beam technique |
05/13/2003 | US6561966 Device for X-ray dosage control |
05/08/2003 | WO2003039213A2 3D STEREOSCOPIC X-ray SYSTEM WITH TWO DIFFERENT OBJECT TRAJECTORIES |
05/08/2003 | US20030086524 Illumination system particularly for microlithography |
05/08/2003 | US20030085364 High performance source for electron beam projection lithography |
05/07/2003 | EP1309234A2 Method and apparatus for elimination of high energy ions from EUV radiating device |
05/07/2003 | EP1308717A1 X-ray measuring and testing system |
05/07/2003 | EP1308185A2 System and method for measuring beam quality and dosimetry using electronic portal imaging |
05/07/2003 | EP1307766A1 Apparatus for imaging objects on the remote side of a barrier using radiation |
05/06/2003 | US6560313 Monochromatic X-ray source |
05/06/2003 | US6559460 Ultraviolet lamp system and methods |
05/02/2003 | EP1305984A1 Method and apparatus for generating x-ray or euv radiation |
05/02/2003 | EP1305813A1 Plasma focus light source with active and buffer gas control |
05/02/2003 | EP0962020A4 Method and apparatus for product x-radiation |
05/02/2003 | EP0904594B1 Monolithic anode adapted for inclusion in an actinic radiation source and method of manufacturing the same |
05/01/2003 | WO2003036654A1 Process for manufacturing multilayer systems |
05/01/2003 | US20030081730 X - ray generating apparatus |
05/01/2003 | US20030081729 X - ray generating apparatus |
05/01/2003 | US20030081728 X-ray generator |
05/01/2003 | US20030081727 X-ray generating apparatus |
05/01/2003 | US20030081720 3D stereoscopic X-ray system |
05/01/2003 | US20030080302 Method and apparatus for elimination of high energy ion from EUV radiating device |