| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 05/08/2002 | DE10065995A1 UV module with in-built backup emitter for exposing liquids to UV rays has UV emitters fixed in UV-permeable quartz encased glass tubes with a space between the tubes and a casing for substances to pass for irradiation. |
| 05/07/2002 | US6385295 X-ray tube provided with a rare earth anode |
| 05/07/2002 | US6385292 Solid-state CT system and method |
| 05/02/2002 | WO2001089625A3 Device for positioning a tumour patient with a tumour in the head or neck region in a heavy-ion therapy chamber |
| 05/02/2002 | US20020051517 X-ray system |
| 05/02/2002 | US20020051516 X-ray examination device comprising a manually adjustable filter |
| 05/02/2002 | US20020050780 Rare-gas low-pressure discharge lamp, method of manufacturing a rare-gas low-pressure discharge lamp, and application of a gas discharge lamp |
| 05/02/2002 | US20020050577 Device and method for detecting the drive state of a turbo pump in a tendetron accelerator of an ion implantation device |
| 05/02/2002 | US20020050575 Ultraviolet lamp system and methods |
| 05/02/2002 | US20020050574 Process for the treatment of a fiber |
| 05/02/2002 | EP1202291A2 Illumination system with a grid unit |
| 05/02/2002 | EP1202117A1 Exposure method and exposure apparatus |
| 05/02/2002 | EP1202101A2 Variable illumination system |
| 05/02/2002 | EP1202100A2 Illumination system with reduced heat load |
| 05/02/2002 | EP1202045A1 Method for obtaining a picture of the internal structure of an object using x-ray radiation and device for the implementation thereof |
| 05/02/2002 | EP1200980A1 Adaptive gas cluster ion beam for smoothing surfaces |
| 05/02/2002 | EP1200175A1 Electron beam irradiation apparatus and method |
| 05/02/2002 | DE10053587A1 Beleuchtungssystem mit variabler Einstellung der Ausleuchtung Lighting system with variable adjustment of illumination |
| 04/25/2002 | WO2002034016A1 Heat removal from high power ct x-ray tubes using heat buffer and refrigeration techniques |
| 04/25/2002 | WO2002032641A1 Radiation hardening installation |
| 04/25/2002 | US20020048346 X-ray system |
| 04/25/2002 | US20020048345 Window transparent to electron rays |
| 04/25/2002 | US20020048344 Method of manufacturing a window transparent to electron rays, and window transparent to electron rays |
| 04/25/2002 | US20020048341 X-ray exposure apparatus and method, semiconductor manufacturing apparatus, and microstructure |
| 04/25/2002 | DE10051109C1 Hardening of coatings in an inert atmosphere using radiation, comprises using a tower construction with low parts entrance and exit, and a high irradiation source |
| 04/24/2002 | EP1198820A1 X-ray anode and method for the production thereof |
| 04/24/2002 | CN1346438A Method for obtaining a picture of the internal structure of an object usin x-ray radiation and device for the implementation thereof |
| 04/23/2002 | US6377659 X-ray tubes and x-ray systems having a thermal gradient device |
| 04/23/2002 | US6376136 Scanning a mask formed on sample with charged beams; pattern exposure; applying calibration voltage |
| 04/23/2002 | US6375790 Adaptive GCIB for smoothing surfaces |
| 04/18/2002 | WO2002031857A1 X-ray generating mechanism using electron field emission cathode |
| 04/18/2002 | WO2002031837A1 Radiotherapy apparatus and collimator set therefor |
| 04/18/2002 | WO2001051124A3 Linac neutron therapy and imaging |
| 04/18/2002 | US20020045297 Membrane 3D IC fabrication |
| 04/18/2002 | US20020045107 Reticle for creating resist-filled vias in a dual damascene process |
| 04/18/2002 | US20020044626 X-ray lens system |
| 04/18/2002 | DE10050811A1 Elektronenstrahltransparentes Fenster Electron transparent window |
| 04/18/2002 | DE10050810A1 Verfahren zur Herstellung eines elektronenstrahltransparenten Fensters sowie elektronenstrahltransparentes Fenster A process for producing an electron transparent window, and electron transparent window |
| 04/18/2002 | DE10047796A1 Configuration bar for UV immersion radiator consists of one piece of metal sheet cut out with all necessary fixings using laser tools |
| 04/18/2002 | CA2424826A1 X-ray generating mechanism using electron field emission cathode |
| 04/17/2002 | EP1197983A1 Electron transmissive window |
| 04/17/2002 | EP1197470A2 Method for the manufacture of windows transparent to electron beams and windows transparent to electron beams |
| 04/17/2002 | EP1196201A1 System for, and method of, irradiating articles to sterilize the articles |
| 04/16/2002 | US6373192 Dielectric barrier discharge lamp and irradiation device |
| 04/11/2002 | WO2001035438A9 Particle beam processing apparatus |
| 04/11/2002 | US20020040970 Electron spectroscopic analyzer using x-rays |
| 04/11/2002 | DE10049538A1 Röntgensystem X-ray system |
| 04/10/2002 | EP1195140A2 X-ray system |
| 04/10/2002 | EP1194944A1 Electron beam accelerator |
| 04/10/2002 | CN1343852A Reflector for ultraviolet lamp system |
| 04/04/2002 | WO2002027751A1 Large surface area x-ray tube shield structure |
| 04/04/2002 | WO2002027408A2 Dynamic mask projection stereo micro lithography |
| 04/04/2002 | WO2002027406A2 Illumination system particularly for microlithography |
| 04/04/2002 | WO2002027405A2 Illumination system particularly for microlithography |
| 04/04/2002 | WO2002027402A2 Illumination system particularly for microlithography |
| 04/04/2002 | WO2002027401A2 Illumination system particularly for microlithography |
| 04/04/2002 | WO2002027400A2 Illumination system particularly for microlithography |
| 04/04/2002 | US20020038853 Electron beam exposure apparatus |
| 04/04/2002 | US20020038852 Magnetic shielding method for charged particle beam microlithography apparatus |
| 04/03/2002 | EP0894263A4 Multiple station gamma ray absorption contraband detection system |
| 03/28/2002 | WO2002025671A1 X-ray examination device comprising a manually adjustable filter |
| 03/28/2002 | WO2001091523A3 Extreme ultraviolet source based on colliding neutral beams |
| 03/28/2002 | US20020037461 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 03/27/2002 | EP1191329A2 Electron spectroscopic analyzer using X-rays |
| 03/27/2002 | EP1191121A1 Radioactive medical implant and method of manufacturing |
| 03/27/2002 | EP1189537A1 Digital x-ray scanning apparatus |
| 03/27/2002 | EP0758522B1 Method and apparatus for measuring x-ray radiation |
| 03/26/2002 | CA2252415C Method and apparatus for controlling and optimizing output of an x-ray source |
| 03/25/2002 | CA2320557A1 Radioactive medical implant and method of manufacturing |
| 03/21/2002 | US20020033456 Charged-particle beam irradiator and therapy system employing the same |
| 03/21/2002 | US20020033446 Neutral beam processing apparatus and method |
| 03/20/2002 | EP1189242A2 X-ray exposure apparatus and method, semiconductor manufacturing apparatus and microstructure |
| 03/19/2002 | US6359966 X-ray diagnostic installation having an X-ray image converter with combined back light/dose measuring unit |
| 03/19/2002 | US6359964 X-ray analysis apparatus including a parabolic X-ray mirror and a crystal monochromator |
| 03/14/2002 | WO2002020434A1 Synthesis of 17f labeled fluoroalkanes |
| 03/14/2002 | WO2001027964A3 Electron impact ion source |
| 03/14/2002 | US20020030801 Electron beam aligner, outgassing collection method and gas analysis method |
| 03/14/2002 | US20020030164 Charged particle beam irradiation equipment |
| 03/14/2002 | US20020029746 Operation method of ion source and ion beam irradiation apparatus |
| 03/13/2002 | EP1186913A2 Reflector for an ultraviolet lamp system |
| 03/13/2002 | CN1340200A Electron beam projection reaction device |
| 03/12/2002 | US6356033 Light source using dielectric barrier discharge lamp, and power supply |
| 03/07/2002 | WO2002019781A1 Electromagnetic radiation generation using a laser produced plasma |
| 03/07/2002 | US20020028177 Synthesis of 17F labeled fluoroalkanes |
| 03/07/2002 | US20020027973 Method for operating a radiation examination device |
| 03/07/2002 | US20020027204 Electron beam exposure apparatus, device for shaping a beam of charged particles and method for manufacturing the device |
| 03/06/2002 | EP1183707A1 Apparatus and methods for secondary electron emission microscopy with dual beam |
| 03/06/2002 | EP0832491B1 Multiple-channel, total-reflection optic with controllable divergence |
| 02/27/2002 | EP1182912A1 Liquid sprays as the target for a laser-plasma extreme ultraviolet light source |
| 02/27/2002 | EP1181696A1 Article irradiation system having intermediate wall of radiation shielding material within loop of a conveyor system that transports the articles |
| 02/26/2002 | US6351515 High contrast ratio membrane mask |
| 02/26/2002 | US6351512 X-ray exposure apparatus |
| 02/21/2002 | US20020021784 X-ray device and deposition process for manufacture |
| 02/21/2002 | US20020021781 X-ray mask, and exposure method and apparatus using the same |
| 02/21/2002 | US20020021430 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 02/19/2002 | US6349129 System and method for defining radiation treatment intensity maps |
| 02/19/2002 | US6348689 Focused ion beam apparatus |
| 02/14/2002 | WO2002012923A1 Apparatus for imaging objects on the remote side of a barrier using radiation |
| 02/14/2002 | WO2002012871A1 X-ray measuring and testing system |
| 02/14/2002 | US20020018966 Thin film coating apparatus and method, and method for producing liquid crystal display device |