| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 02/14/2002 | US20020017614 Energy filter |
| 02/14/2002 | DE10109193A1 Beschleuniger, medizinisches System und Verfahren zum Betreiben desselben Thereof accelerator, medical system and method for operating |
| 02/14/2002 | CA2416998A1 Apparatus for imaging objects on the remote side of a barrier using radiation |
| 02/07/2002 | WO2002011499A1 Method and apparatus for generating x-ray or euv radiation |
| 02/07/2002 | WO2001060236A3 Cone-beam computerized tomography with a flat-panel imager |
| 02/07/2002 | US20020016079 Enhanced etching/smoothing of dielectric surfaces |
| 02/07/2002 | US20020015475 A grid holding frame, which provides grid information to-ray image processing apparatus |
| 02/07/2002 | US20020015143 Multi-beam multi-column electron beam inspection system |
| 02/07/2002 | US20020014673 Method of making membrane integrated circuits |
| 02/07/2002 | US20020014598 Plasma focus light source with active and buffer gas control |
| 02/07/2002 | US20020014591 X-ray scintillator compositions for X-ray imaging applications |
| 02/07/2002 | US20020014588 Accelerator and medical system and operating method of the same |
| 02/07/2002 | US20020014587 Method and system for ion beam containment in an ion beam guide |
| 02/06/2002 | CN1334748A Electron beam multistage accelerator driven probe device |
| 02/05/2002 | USRE37537 Method and apparatus for altering material |
| 02/05/2002 | US6344655 Multicolumn charged-particle beam lithography system |
| 01/31/2002 | WO2002007817A2 Device for irradiating a tumor tissue |
| 01/31/2002 | US20020011565 Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system |
| 01/31/2002 | DE10031074A1 Vorrichtung zur Bestrahlung eines Tumorgewebes Apparatus for irradiating tumor tissue |
| 01/30/2002 | EP1176624A2 Method and system for microwave excitation of plasma in an ion beam guide |
| 01/30/2002 | EP1176623A2 Waveguide for microwave excitation of plasma in an ion beam guide |
| 01/30/2002 | EP1176432A2 X-ray scintillator compositions for X-ray imaging applications |
| 01/30/2002 | CN1333910A Electron accelerator having wide electron beam |
| 01/24/2002 | WO2002007484A2 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it |
| 01/24/2002 | US20020009176 X-ray exposure apparatus |
| 01/24/2002 | US20020009175 Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method, and semiconductor manufacturing factory |
| 01/24/2002 | US20020008213 Electron beam system for treating filamentary workpiece, and method of fabricating optical fibers |
| 01/24/2002 | US20020008209 Electron-beam sources exhibiting reduced spherical aberration, and microlithography apparatus comprising same |
| 01/24/2002 | US20020008200 Correction method of scanning electron microscope |
| 01/22/2002 | US6341157 Rotation anticathode-X ray generating equipment |
| 01/22/2002 | US6341155 Pulse detection system for X-ray tubes |
| 01/17/2002 | WO2002005602A1 Spallation device for producing neutrons |
| 01/17/2002 | US20020006185 Method and system for automatic positioning a radiology apparatus |
| 01/17/2002 | US20020006180 X-ray projection exposure apparatus and a device manufacturing method |
| 01/16/2002 | CN1331902A Method for treating target volume with particle beam and device implementing same |
| 01/10/2002 | US20020003858 Optical sample X-ray testing apparatus and method for testing optical sample with X-rays |
| 01/10/2002 | US20020003855 X-ray illumination optical system and x-ray reduction exposure apparatus |
| 01/09/2002 | EP1170982A1 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 01/09/2002 | EP1170755A1 Integral lens for high energy particle flow, method for producing such lenses and use thereof in analysis devices and devices for radiation therapy and lithography |
| 01/09/2002 | EP1169715A1 X-ray apparatus including a filter provided with filter elements having an adjustable absorption |
| 01/09/2002 | EP1169714A1 X-ray apparatus including a filter provided with filter elements having an adjustable absorption |
| 01/09/2002 | EP1169713A2 X-ray lens system |
| 01/09/2002 | EP1169611A1 Irradiating device |
| 01/03/2002 | WO2001048794A3 Enhanced etching/smoothing of dielectric surfaces |
| 01/03/2002 | US20020001363 X-ray sources that maintain production of rotationally symmetrical x-ray flux during use |
| 01/02/2002 | EP1166318A1 X-ray device and process for manufacture |
| 01/02/2002 | EP1166317A1 Method and apparatus for prolonging the life of an x-ray target |
| 01/02/2002 | EP1166280A1 Gantry with an ion-optical system |
| 01/02/2002 | EP1165182A1 Megavoltage computed tomography during radiotherapy |
| 12/27/2001 | WO2001042855A3 Lithography device which uses a source of radiation in the extreme ultraviolet range and multi-layered mirrors with a broad spectral band in this range |
| 12/27/2001 | US20010055364 High-intensity sources of short-wavelength electromagnetic radiation for microlithography and other uses |
| 12/27/2001 | US20010054700 Laser imaging apparatus |
| 12/27/2001 | US20010054686 Detector and method for cluster ion beam diagnostics |
| 12/26/2001 | CN1328695A Workpiece vibration damper |
| 12/25/2001 | US6333965 X-ray examination apparatus with a brightness control system |
| 12/25/2001 | US6333508 Illumination system for electron beam lithography tool |
| 12/20/2001 | WO2001038861A3 X-ray fluorescence apparatus |
| 12/20/2001 | US20010053196 Weight compensation apparatus, stage apparatus using the same, and exposure apparatus |
| 12/20/2001 | US20010052577 Electron beam irradiation apparatus, electron beam irradiation method, original disk, stamper, and recording medium |
| 12/20/2001 | US20010052321 Single-substrate-processing apparatus for semiconductor |
| 12/19/2001 | EP1164822A2 X-ray tube |
| 12/19/2001 | CN1327596A Integral lens for high energy particle flow, method for producing such lenses and use thereof |
| 12/18/2001 | US6331227 Enhanced etching/smoothing of dielectric surfaces |
| 12/13/2001 | WO2001095364A1 Electron beam generator and method of electron beam irradiation |
| 12/13/2001 | WO2001095362A1 Plasma focus light source with active and buffer gas control |
| 12/13/2001 | US20010050974 X-ray examination apparatus |
| 12/11/2001 | US6329769 Electron beam irradiation device |
| 12/06/2001 | WO2001042144A3 Device and method for treating water with ozone generated by water electrolysis |
| 12/06/2001 | US20010048084 Exposure apparatus, device manufacturing method, semiconductor manufacturing plant and method of maintaining exposure apparatus |
| 12/06/2001 | DE10025913A1 Tumor patient positioning device for heavy-ion therapy chamber has mechanism holding tumor of sitting patient in isocentre of heavy-ion beam |
| 12/05/2001 | EP1160824A2 Illumination system for charged-particle lithography apparatus |
| 12/05/2001 | EP1160799A1 Electron beam projection reaction device |
| 12/05/2001 | EP0795181B1 A method for monitoring absorbed dose in an electron beam |
| 12/04/2001 | US6327339 Industrial x-ray/electron beam source using an electron accelerator |
| 12/04/2001 | US6326601 Optical barrier |
| 11/29/2001 | WO2001091523A2 Extreme ultraviolet source based on colliding neutral beams |
| 11/29/2001 | WO2001089625A2 Device for positioning a tumour patient with a tumour in the head or neck region in a heavy-ion therapy chamber |
| 11/28/2001 | EP1158563A1 Particle beam system |
| 11/28/2001 | EP1157597A1 Method of generating euv radiation, method of manufacturing a device by means of said radiation, euv radiation source unit, and lithographic projection apparatus provided with such a radiation source unit |
| 11/28/2001 | EP1157596A1 Method of generating extremely short-wave radiation, method of manufacturing a device by means of said radiation, extremely short-wave radiation source unit and lithographic projection apparatus provided with such a radiation source unit |
| 11/28/2001 | EP1157595A1 Method of generating extremely short-wave radiation, method of manufacturing a device by means of said radiation, extremely short-wave radiation source unit and lithographic projection apparatus provided with such a radiation source unit |
| 11/28/2001 | CN1324105A Rare gas low pressure discharge lamp, method for mfg. same and application of gas discharge lamp |
| 11/28/2001 | CN1324093A Ion source operation method, and ion beam radiation device |
| 11/27/2001 | US6324256 Liquid sprays as the target for a laser-plasma extreme ultraviolet light source |
| 11/27/2001 | US6323601 Reflector for an ultraviolet lamp system |
| 11/27/2001 | US6323499 Electron beam exposure apparatus and method, and device manufacturing method |
| 11/27/2001 | US6322956 Thin film coater and coating method |
| 11/27/2001 | US6322490 Radioactive stent structures |
| 11/27/2001 | US6322249 System and method for automatic calibration of a multileaf collimator |
| 11/22/2001 | WO2000059576A9 Megavoltage computed tomography during radiotherapy |
| 11/22/2001 | US20010043670 X-ray apparatus including a filter provided with filter elements having an adjustable absorption |
| 11/22/2001 | US20010043663 Irradiating oxygen-18 gas by proten beam in chamber including component to which 18-fluoride adheres, proton beam converting portion of 18-oxygen into 18-fluoride, the converted 18-fluoride adhering to component, dissolving 18-fluoride |
| 11/22/2001 | US20010042841 Bulk material irradiation system and method |
| 11/21/2001 | EP1155419A1 "x-ray microscope having an x-ray source for soft x-rays |
| 11/15/2001 | WO2001037287B1 Rotatable cylinder dual beam modulator |
| 11/15/2001 | US20010040938 X-ray apparatus provided with a filter with a dynamically adjustable absorption |
| 11/15/2001 | US20010040223 Positron source, method of preparing the same, and automated system for supplying the same |
| 11/15/2001 | US20010040222 Electron beam processing device |
| 11/15/2001 | DE10023504A1 Edelgas-Niederdruck-Entladungslampe, Verfahren zum Herstellen einer Edelgas-Niederdruck-Entladungslampe Lampe sowie Verwendung einer Gasentladungslampe Noble-gas low-pressure discharge lamp, method of manufacturing a low-pressure rare gas discharge lamp bulb as well as the use of a gas discharge lamp |
| 11/14/2001 | EP1154461A1 Noble gas low-pressure discharge lamp, method of manufacturing a noble gas low-pressure discharge lamp and use of a gas discharge lamp |