Patents for G21K 5 - Irradiation devices (9,144)
02/2003
02/18/2003US6521891 Focusing method and system
02/13/2003WO2003013197A1 Method and apparatus for generating x-ray
02/13/2003WO2003012414A1 X-ray inspection using spatially and spectrally tailored beams
02/13/2003WO2003012353A1 Irradiation device comprising an air evacuation nozzle
02/13/2003WO2002082065A3 Computed tomography apparatus
02/13/2003US20030031938 Lithographic apparatus, device manufacturing methods, devices manufactured thereby, method of manufacturing a reflector, reflector manufactured thereby and phase shift mask
02/13/2003US20030030008 Charged particle beam control system and charge partical beam optical apparatus using the system
02/13/2003US20030030007 Charged particle beam control apparatus
02/13/2003CA2452815A1 Method and apparatus for generating x-rays
02/12/2003EP1282900A1 Beam scanning system for a heavy ion gantry
02/11/2003US6519318 Large surface area x-ray tube shield structure
02/11/2003US6519317 Dual fluid cooling system for high power x-ray tubes
02/11/2003CA2287207C Article irradiation system with an article transporting conveyor
02/06/2003WO2003009875A1 Systems for, and methods of, irradiating articles disposed in a container
02/06/2003US20030027186 Preferential deactivation of target substance; obtain sample, expose to electromagnetic radiation, monitor sample for the presence of impurities
01/2003
01/30/2003US20030021722 Conveying container passed light source
01/30/2003US20030021378 X-ray source bearing housing assembly
01/30/2003US20030019850 Surface modification process on metal dentures, products produced thereby, and the incorporated system thereof
01/29/2003EP1279717A1 Phosphor, radiation detector containing the same, and x-ray ct apparatus
01/29/2003EP1279321A1 Methods and systems for providing emission of incoherent radiation and uses therefor
01/29/2003CN1393205A X-ray checker
01/28/2003US6512237 Charged beam exposure method and charged beam exposure apparatus
01/28/2003US6511224 Heat removal from high power CT x-ray tubes using heat buffer and refrigeration techniques
01/23/2003WO2002048796A3 Projection system for euv lithography
01/23/2003US20030016790 X-ray inspection using spatially and spectrally tailored beams
01/23/2003US20030016789 X-ray source provided with a liquid metal target
01/23/2003US20030016780 Soft X-ray reduction projection exposure system, soft X-ray reduction projection exposure method and pattern formation method
01/22/2003EP1278089A2 Lithographic apparatus and device manufacturing method
01/22/2003EP1277376A2 Method for operating a radiation examination device
01/22/2003EP1277214A1 X-ray apparatus provided with a filter with a dynamically adjustable absorption
01/21/2003US6509573 Apparatus and method for controlling a radiation device
01/21/2003US6509127 Method of electron-beam exposure
01/16/2003US20030012341 Method and arrangement relating to x-ray detection
01/16/2003US20030012333 Illumination system, particularly for EUV lithography
01/16/2003US20030010934 Lens array for electron beam lithography tool
01/16/2003US20030010927 UV radiation device for treating fluids with a simplified radiation chamber
01/16/2003US20030010902 Optical system with a plurality of optical elements
01/15/2003EP1275995A2 Optical system with a plurality of optical elements
01/15/2003EP1275117A2 Product irradiator for optimizing dose uniformity in products
01/14/2003US6507641 X-ray-generation devices, X-ray microlithography apparatus comprising same, and microelectronic-device fabrication methods utilizing same
01/14/2003US6507640 X-ray beam position monitors
01/09/2003WO2003003433A1 Chamber sensor port, chamber, and electron beam processor
01/09/2003WO2003002000A1 Medical x-ray device and power module therefor
01/09/2003WO2002027408A3 Dynamic mask projection stereo micro lithography
01/09/2003US20030007601 Cone-beam computerized tomography with a flat-panel imager
01/09/2003US20030007599 Apparatus for X-ray analysis and apparatus for supplying X-rays
01/09/2003US20030007588 Photon irradiation; continuous water circulation
01/09/2003US20030006378 System for, and method of, irradiating articles to sterilize the articles
01/09/2003US20030006373 Observation apparatus and observation method using an electron beam
01/08/2003EP1274114A2 Observation apparatus and observation method using an electron beam
01/08/2003EP1273906A2 X-ray analysis apparatus with an X-ray generator
01/08/2003EP1272261A1 Cluster size measurement instrument and method for cluster ion beam diagnostic
01/08/2003CN1390435A Method for obtaining an extraeme ultraviolet radiation source, radiation source and use in lithography
01/08/2003CN1390360A Plasma focus light source with improved pulse power system
01/08/2003CN1389724A Apparatus for detecting X-ray impurities to simultaneously detect multiple X-rays with different energy
01/07/2003US6504900 Optical sample X-ray testing apparatus and method for testing optical sample with X-rays
01/07/2003US6504898 Product irradiator for optimizing dose uniformity in products
01/07/2003US6504896 X-ray illumination optical system and x-ray reduction exposure apparatus
01/07/2003US6504163 Electron beam irradiation process and an object irradiated with an electron beam
01/07/2003CA2091275C Method and apparatus for radiation therapy
01/03/2003WO2002058743A3 Fluid sterilization apparatus
01/03/2003WO2002058100A3 X-ray tube for ct applications
01/02/2003US20030002628 Method and system for generating an electron beam in x-ray generating devices
01/02/2003US20030001108 Particle beam processing apparatus and materials treatable using the apparatus
01/02/2003EP1271602A1 X-ray source having a liquid metal target
01/02/2003EP1269482A1 Method for incinerating transuranian chemical elements and nuclear reactor using same
01/02/2003EP0787308B1 Irradiation and/or counting chamber for neutron detection analysis
12/2002
12/31/2002US6501829 Grid holding frame, which provides grid information to X-ray image processing apparatus
12/31/2002US6501078 Ion extraction assembly
12/27/2002WO2002103749A1 Discharge lamp and ultraviolet irradiation system and operation method therefor
12/27/2002WO2002102459A1 Optically driven therapeutic radiation source
12/27/2002WO2002065482A3 Collector with an unused area for lighting systems having a wavelength of ≤ 193 nm
12/25/2002CN1387744A Nondestructive inspection apparatus
12/25/2002CN1387672A Particle beam processing apparatus
12/19/2002WO2002102122A1 Star pinch x-ray and extreme ultraviolet photon source
12/19/2002WO2002101758A1 Process and apparatus for production of f-18 fluoride
12/19/2002WO2002101757A2 Apparatus and method for generating 18f-fluoride by ion beams
12/19/2002US20020191747 Combined X-ray analysis apparatus
12/19/2002US20020191741 Method and device for X-ray exposure control
12/19/2002US20020191739 System for, and method of, irradiating articles particularly articles with variable dimensions
12/19/2002US20020190227 Discharge lamp, ultraviolet ray irradiation apparatus and method of using the apparatus
12/19/2002US20020190218 Method and apparatus for simultaneously depositing and observing materials on a target
12/19/2002DE10125770A1 Bestrahlungsvorrichtung Irradiation apparatus
12/19/2002CA2390973A1 Uv radiation device for treating fluids with a simplified radiation chamber
12/18/2002EP1265673A1 Automated system for radiation treatment of a patient
12/17/2002US6496564 X-ray tube having increased cooling capabilities
12/17/2002US6495842 Implantation of the radioactive 32P atoms
12/12/2002WO2002098471A1 System for, and method of, irradiating articles
12/12/2002WO2002098243A2 System for, and method of, irradiating food products
12/12/2002US20020188324 Method and system for improving the effectiveness of medical devices by adhering drugs to the surface thereof
12/12/2002US20020186815 Star pinch plasma source of photons or neutrons
12/12/2002US20020186812 X-ray fluorescence spectrometer
12/12/2002US20020186811 Illumination system with a grating element
12/12/2002US20020186805 Accelerated radioactivity reduction
12/12/2002US20020186357 Electron beam exposure apparatus, reduction projection system, and device manufacturing method
12/12/2002DE10122279A1 Röntgenanlage X-ray equipment
12/11/2002EP1265065A2 X-ray foreign material detecting apparatus simultaneously detecting a plurality of x-rays having different amounts of energy
12/11/2002CN1384525A 法拉第装置 Faraday device
12/10/2002US6493423 Method of generating extremely short-wave radiation, method of manufacturing a device by means of said radiation, extremely short-wave radiation source unit and lithographic projection apparatus provided with such a radiation source unit
12/10/2002US6492645 System for, and method of, irradiating articles to sterilize the articles
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