Patents for G21K 5 - Irradiation devices (9,144)
10/2003
10/23/2003US20030198319 Method and apparatus of modulating the filtering of radiation during radiographic imaging
10/23/2003US20030197131 Multi-beam hybrid solenoid lens electron beam system
10/22/2003EP1354325A2 Collector with an unused area for lighting systems having a wavelength inferior or equal of 193 nm
10/21/2003US6635890 Slit double gap buncher and method for improved ion bunching in an ion implantation system
10/21/2003US6635884 Method for directing an electron beam onto a target position on a substrate surface
10/21/2003US6635882 Gantry system and method for operating same
10/16/2003WO2003085707A1 Extreme ultraviolet light source
10/16/2003WO2003085418A2 Chemical analysis of test objects using neutrons that are generated by concentrically accelerated deuterium ions
10/16/2003WO2003052362A3 Dose radiometer
10/16/2003WO2003040829A3 Maskless printer using photoelectric conversion of a light beam array
10/16/2003WO2003034153A3 Lithographic apparatus and device manufacturing method
10/16/2003US20030194652 Charged-particle-beam microlithography apparatus and methods for exposing a segmented reticle
10/16/2003US20030194506 Reacting a solution of a chemical with the surface while irradiating with optical energy, especially that generated by a xenon flashlamp energized by current pulses.
10/16/2003US20030194482 Apparatus and method for processing a substrate
10/16/2003US20030194055 Laser plasma generation method and structure thereof
10/16/2003US20030194039 Isotope is used in nuclear medicine for diagnostic studies using Positron Emission Tomography (PET) body scanning
10/15/2003CN1448790A Lithographic apparatus and device manufacturing method
10/14/2003US6633048 High output extreme ultraviolet source
10/14/2003US6633034 Method and apparatus for imaging a specimen using low profile electron detector for charged particle beam imaging apparatus including electrostatic mirrors
10/09/2003WO2003069634A3 Method and device for controlling a beam extraction raster scan irradiation device for heavy ions or protons
10/09/2003US20030188681 Composite diamond window
10/08/2003EP1206714B1 Real time monitoring of electron beam radiation dose
10/08/2003EP1169611B1 Irradiating device
10/07/2003US6630675 X-ray scintillator compositions for X-ray imaging applications
10/02/2003WO2003081604A1 Mobile type particle accelerator system, and method of manufacturing radionuclide
10/02/2003WO2003081220A2 Computer tomograph with a detector following the movement of a pivotable x-ray source
10/02/2003WO2003080180A1 X-ray apparatus with field emission current control and method
10/02/2003WO2003080126A2 Method and system for electronic pasteurization
10/02/2003WO2003032351A3 Method and device for aligning a charged particle beam column
10/02/2003WO2002056952A3 Miniature x-ray device and method of its manufacture
10/02/2003US20030185344 X-ray tube and X-ray generator
10/02/2003US20030183787 EUV radiation source
10/02/2003US20030183779 Particle therapy system
10/02/2003US20030183743 Method for surface treating a die by electron beam irradiation and a die treated thereby
10/02/2003CA2479265A1 X-ray apparatus with field emission current control and method
10/01/2003EP1349008A1 Lithographic apparatus and device manufacturing method
10/01/2003EP1348465A1 Particle therapy system
10/01/2003EP1348220A1 X-ray examination apparatus
09/2003
09/30/2003US6628750 System for electron and x-ray irradiation of product
09/30/2003US6628747 System and method for dual-beam internal reflection tomography
09/30/2003US6627908 Radiation source assembly and connector press used in producing such assemblies
09/30/2003US6627905 Charged-particle-beam mask-based exposure apparatus employing a variable mask-illumination field and alignment and calibration methods therefor
09/30/2003US6627889 Apparatus and method for observing sample using electron beam
09/30/2003US6627866 Tungsten or titanium-tungsten intermetallic is patterned using photolithography; light shielding layer forms dark pixel
09/25/2003WO2003078986A1 Method and apparatus for inferring item position based on multiple data
09/25/2003WO2003078973A1 Apparatus and method for making and inspecting pre-fastened articles
09/25/2003WO2003077815A1 Apparatus and method for making and inspecting pre-fastened articles
09/25/2003WO2003077814A1 Infrared detection of composite article components
09/25/2003WO2003077813A1 Process for detection of marked components of a composite article using infrared blockers
09/25/2003WO2003030240A3 Etching method and apparatus
09/25/2003WO2002054115A3 A self-cleaning optic for extreme ultraviolet lithography
09/25/2003US20030179854 X-ray apparatus with field emission current stabilization and method of providing x-ray radiation therapy
09/25/2003US20030179850 X-ray fluorescence holography apparatus
09/25/2003US20030179843 Process control; spalling neutrons injected into core
09/25/2003US20030178582 System and method for electron beam irradiation
09/25/2003US20030178581 Electron beam irradiation apparatus and electron beam irradiating method
09/25/2003DE10163475C1 Verfahren und Vorrichtung zur Behandlung oder Umwandlung von gasförmigen Brennstoffen Method and device for the treatment or conversion of gaseous fuels
09/24/2003EP1347461A1 Device for x-ray lithography
09/24/2003EP1196201B1 System for, and method of, irradiating articles to sterilize the articles
09/23/2003US6625254 Window transparent to electron rays
09/23/2003US6624428 Process and device for treatment by dielectric barrier discharge lamps
09/23/2003US6624412 Energy filter
09/23/2003US6624081 Enhanced etching/smoothing of dielectric surfaces
09/23/2003US6623913 Eliminates electrostatic build up by absorption, on substrate, of gaseous ions generated by ionization of soft X-ray having large wavelength
09/18/2003WO2003075964A1 Portable radiant energy sterilizer
09/18/2003WO2003075764A1 Exposure control in scanning-based detection of ionizing radiation
09/18/2003WO2003016781A3 Surface plasmon enhanced illumination system
09/18/2003US20030174806 Exposure control in scanning-based detection of ionizing radiation
09/18/2003US20030174805 X-ray exposure method and semiconductor device manufactured using this X-ray exposure method as well as X-ray mask, X-ray exposure unit and resist material
09/18/2003CA2478080A1 Exposure control in scanning-based detection of ionizing radiation
09/18/2003CA2477678A1 Portable radiant energy sterilizer
09/16/2003US6621891 Method and arrangement relating to x-ray detection
09/16/2003US6621090 Electron-beam sources exhibiting reduced spherical aberration, and microlithography apparatus comprising same
09/16/2003US6621081 Method of pole tip sample preparation using FIB
09/16/2003US6619819 Lamp assembly
09/12/2003WO2003075098A2 Prevention of contamination of optical elements and cleaning said elements
09/12/2003WO2003075068A1 Lighting system comprising a nested collector for annularly illuminating an exit pupil
09/11/2003US20030171725 Method and apparatus for inferring item position based on multiple data
09/11/2003US20030169904 Apparatus and method for making and inspecting pre-fastened articles
09/11/2003US20030169845 X-ray monochromator and X-ray fluorescence spectrometer using the same
09/11/2003US20030169844 X-ray monochromator and x-ray fluorescence spectrometer using the same
09/11/2003US20030169843 Apparatus and method for detecting items in objects
09/11/2003US20030169433 Process for the detection of marked components of a composite article using infrared blockers
09/11/2003US20030169424 Infrared detection of composite article components
09/11/2003US20030168614 Apparatus and method for inspecting pre-fastened articles
09/11/2003US20030168011 Apparatus for treating the surface wit neutral particle beams
09/10/2003EP1342128A2 Projection system for euv lithography
09/10/2003EP0904594B9 Monolithic anode adapted for inclusion in an actinic radiation source and method of manufacturing the same
09/09/2003US6618467 Megavoltage computed tomography during radiotherapy
09/09/2003US6617598 Charged particle beam irradiation apparatus
09/09/2003US6617596 On-line measurement of absorbed electron beam dosage in irradiated product
09/09/2003US6617592 Charged particle beam system and chamber of charged particle beam system
09/09/2003US6617586 Beam delivery system
09/04/2003WO2003072148A1 Apparatus and process for irradiating product pallets
09/04/2003US20030164459 Device for positioning a tumour patient with a tumour in the head or neck region in a heavy-ion theraphy chamber
09/04/2003US20030164458 Beam scanning system for a heavy ion gantry
09/04/2003US20030164285 Portable, radiation-producing apparatus that can produce highly energetic electron beam radiation and X-rays from a low voltage power source., e.g., a battery; used to deactivate microbial contamination
09/03/2003EP1340512A1 Apparatus and process for irradiating product pallets
09/02/2003US6614876 System for X-ray irradiation
09/02/2003US6614038 Method for monitoring the irradiation control unit of an ion-beam therapy system
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